High-precision ice water machine for laboratory

Abstract

A high-precision water chiller for a laboratory comprises a water chiller body and a water tank type evaporator, the water tank type evaporator is composed of a shell, a heat exchange module and a filtering unit, the heat exchange module comprises a heat dissipation plate, a liquid supply header pipe and a liquid collection header pipe, the liquid supply header pipe is arranged at the inner top end of the shell, and a plurality of liquid outlets are formed in the bottom end of the liquid supply header pipe at equal intervals; heat dissipation plates are detachably installed on the multiple liquid outlets, each heat dissipation plate is composed of a separation pipe, a plate body, a snake-shaped bent pipe and a temperature sensor, the separation pipe is arranged at the top end of the plate body, separation grooves are formed in the left end and the right end of the separation pipe, through holes are formed in the bottom ends of the separation grooves, and the snake-shaped bent pipes are arranged in the grooves of the front plate. One end of the S-shaped bent pipe is arranged in the through hole of the left-end partition groove, the other end of the S-shaped bent pipe is arranged in the through hole of the right-end partition groove, and a plurality of temperature sensors are evenly arranged in the groove of the rear plate. By arranging the plurality of temperature sensors in the heat dissipation plate, the high temperature control precision can be realized so as to adapt to the process requirements.

Description

Technical Field

[0001] The utility model relates to the field of ice water machines, in particular to a high-precision ice water machine for laboratories. Background Art

[0002] A water chiller is a constant temperature system used for refrigeration in integrated circuit manufacturing and liquid crystal panel engineering manufacturing. It is mainly used to control the temperature of silicon wafer trays and reaction chambers in the processes of dry etching, chemical vapor deposition, chemical mechanical polishing, rapid thermal processing, and photolithography. With the continuous improvement of semiconductor manufacturing technology, process engineers have higher and higher requirements for temperature control accuracy; the current general accuracy requirement is ±0.1℃ to ±0.01℃.

[0003] At present, the Chinese patent with the authorization announcement number CN218722552U discloses a chiller cooling device, including a box, a partition is fixedly installed on the inner wall of the box, a water tank is fixedly installed on the bottom inner wall of the box, a conversion box is fixedly installed on the top of the partition, a condenser, a compressor and an evaporator are installed on the top of the conversion box, a water inlet pipe is installed on one side of the box, a filter box is installed on one end of the water inlet pipe, the filter box is connected to the condenser, the condenser is connected to the compressor, the compressor is connected to the evaporator, the evaporator is connected to the conversion box, the conversion box is connected to the water tank, a filter mechanism is arranged in the filter box, a heat dissipation mechanism is arranged on both sides of the box, a moving mechanism is arranged at the bottom of the box, and a first motor is fixedly installed on the top inner wall of the box. It has a simple structure, is easy to operate, can facilitate the sufficient cooling of the water source, can also filter the water source, and is convenient for carrying and moving the chiller.

[0004] The above-mentioned prior art solution has the following defects: although the device is easy to carry, the temperature control accuracy is low, and the cooling water temperature can only be maintained at a roughly preset temperature, and cannot be adjusted in real time. Utility Model Content

[0005] The purpose of the utility model is to provide a high-precision ice water machine for laboratory use to solve the problems existing in the above-mentioned prior art.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions:

[0007] A high-precision water chiller for laboratory use, comprising a water chiller body and a water tank evaporator, wherein the water outlet of the water chiller body is connected to the water inlet of the water tank evaporator, and the water outlet of the water tank evaporator is connected to the water inlet of the water chiller body;

[0008] The water tank type evaporator is composed of a shell, a heat exchange module and a filter unit;

[0009] The heat exchange module includes a heat sink, a liquid supply main pipe, a liquid collecting main pipe, a circulating liquid delivery main pipe and a circulating liquid return main pipe. The inner top of the shell is provided with a liquid supply main pipe, and the bottom of the liquid supply main pipe is provided with multiple liquid outlets at equal intervals. A heat sink is detachably mounted on each of the multiple liquid outlets. The right top of the heat sink is provided with a liquid outlet, and the left tops of the multiple heat sinks are provided with a circulating liquid delivery main pipe in parallel, and the right tops of the multiple heat sinks are provided with a circulating liquid return main pipe in parallel. The circulating liquid delivery main pipe and the circulating liquid return main pipe are both provided with multiple interfaces corresponding to the heat sinks one by one.

[0010] The heat sink is composed of a partition tube, a front plate, a rear plate, a serpentine curved tube and a temperature sensor;

[0011] The left side of the separation tube is arranged on the interface of the circulating liquid supply main pipe, and the right side of the separation tube is arranged on the interface of the circulating liquid return main pipe. The left and right ends of the separation tube are both provided with separation grooves, the bottom end of the separation groove is provided with a through hole, and the middle position of the top end of the separation tube is provided with a liquid inlet, and the liquid inlet of the separation tube can be detachably installed on the liquid outlet of the liquid supply main pipe;

[0012] The front plate is fixedly connected to the separation tube, the front plate is fixed to the rear plate with bolts, the inner sides of the front plate and the rear plate are both provided with grooves, a serpentine curved tube is provided in the groove of the front plate, one end of the serpentine curved tube is provided in the through hole of the left end separation groove, and the other end of the serpentine curved tube is provided in the through hole of the right end separation groove, and a plurality of temperature sensors are evenly provided in the groove of the rear plate;

[0013] A plurality of spray devices are arranged on the inner side of the shell, a liquid collecting main pipe is arranged at the inner bottom end of the shell, one end of the liquid collecting main pipe is opened, and the other end of the liquid collecting main pipe is connected to the liquid inlet of the circulation pump;

[0014] The filter unit includes a drying filter, and the drying filter is arranged on a pipeline between a water tank type evaporator and a condenser.

[0015] By adopting the above technical solution, cooling water enters the water tank evaporator. Many heat sinks are arranged inside the evaporator. The cooling water undergoes heat exchange through the serpentine bends in the heat sinks. Multiple temperature sensors are evenly arranged in the heat sinks. The circulating liquid in the serpentine bends can fully contact the coolant injected in the middle position of the separator tube. Multiple evenly arranged temperature sensors can detect the average temperature inside the heat sink, thereby effectively improving the measurement accuracy. The power of the compressor and the condenser can change the operating power according to the temperature, thereby achieving the effect of controlling the temperature.

[0016] In a further embodiment, slide grooves are provided on the left and right sides of the front plate, buckles are provided on the left and right sides of the rear plate, and sealing strips are provided on the peripheries where the front plate and the rear plate are in contact.

[0017] By adopting the above technical solution, the structure of the slide groove and the buckle can help the front and rear plates to be quickly assembled. After assembly, the connection strength can be further improved by bolting, and the sealing strip on the periphery can prevent the coolant from flowing out from the front and rear plates and directly entering the circulation system of the circulating pump.

[0018] In a further embodiment, an air cooling device is provided at the top of the ice machine body, and the air cooling device is composed of a shell, a fan and a motor, and a plurality of the air cooling devices are provided.

[0019] By adopting the above technical solution, although the circulating fluid takes away the temperature through the coolant, the temperature is also transferred to the heat sink in the process. While the temperature of the heat sink is lowered by the spray device, the air cooling device blows air from top to bottom to further dissipate the heat of the heat sink.

[0020] In a further embodiment, a plurality of buckles are provided on the front plate, and the serpentine elbow is detachably mounted in the groove of the front plate through the buckles.

[0021] By adopting the above technical solution, the disassembly and maintenance of the serpentine elbow can be made more convenient.

[0022] In a further embodiment, a plurality of spray devices are evenly arranged on the inner side of the shell, and the spray devices are connected to the liquid outlet of the circulation pump through a liquid supply main pipe.

[0023] By adopting the above technical solution, the temperature of the heat sink can be reduced more quickly, and the temperature of the cooling water in the serpentine elbow can also be lowered.

[0024] In a further embodiment, the temperature sensor comprises PT100.

[0025] By adopting the above technical solution, PT100 has high measurement accuracy, small response delay, and can adapt to the temperature range that just covers the operating temperature range of the chiller, so it can effectively detect the temperature of the cooling water.

[0026] In summary, the utility model has the following beneficial effects:

[0027] 1. Through the setting of multiple temperature sensors, the temperature of the coolant in the heat sink cavity and the cooling water in the serpentine elbow can be accurately detected;

[0028] 2. Through the arrangement of the heat sink and the serpentine elbow, the serpentine elbow through which cooling water circulates can be completely immersed in the coolant, thereby effectively improving the heat dissipation speed;

[0029] 3. By setting the spray device on the inner side of the shell, the coolant can be sprayed from the outside of the heat sink, further accelerating the heat exchange speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 The schematic diagram of the structure used to reflect the whole in the utility model;

[0031] Figure 2 It is a schematic diagram of the structure inside the ice machine body in the utility model;

[0032] Figure 3 It is a schematic diagram of the structure inside the heat dissipation plate in the utility model.

[0033] In the figure, 1, chiller body; 2, water tank evaporator; 21, shell; 22, heat exchange module; 221, heat sink; 2211, partition tube; 2212, front plate; 2213, rear plate; 2214, serpentine elbow; 2215, temperature sensor; 222, liquid supply main pipe; 223, liquid collecting main pipe; 224, circulating liquid delivery main pipe; 225, circulating liquid return main pipe; 23, filter unit; 24, air cooling device; 25, spray device. DETAILED DESCRIPTION

[0034] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0035] The same parts are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached Figure 1 In the description of this specification, the words "bottom" and "top", "inside" and "outside" refer to directions toward or away from a particular component geometry, respectively. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this specification, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0036] Example:

[0037] like Figure 1-3As shown, a high-precision water chiller for laboratory use comprises a water chiller body 1 and a water tank evaporator 2, wherein the water outlet of the water chiller body 1 is communicated with the water inlet of the water tank evaporator 2, and the water outlet of the water tank evaporator 2 is communicated with the water inlet of the water chiller body 1, the water tank evaporator 2 is composed of a shell 21, a heat exchange module 22 and a filter unit 23, the heat exchange module 22 comprises a heat sink 221, a liquid supply main pipe 222, a liquid collecting main pipe 223, a circulating liquid supply main pipe 224 and a circulating liquid return main pipe 225, the heat sink 221 comprises a partition pipe 2211, a front plate 2212, and a rear plate 2213. , a serpentine elbow 2214 and a temperature sensor 2215, the left side of the separation tube 2211 is arranged on the interface of the circulating liquid supply main pipe 224, the right side of the separation tube 2211 is arranged on the interface of the circulating liquid return main pipe 225, the left and right ends of the separation tube 2211 are provided with separation grooves, the bottom end of the separation groove is provided with a through hole, the middle position of the top of the separation tube 2211 is provided with a liquid inlet, the liquid inlet of the separation tube 2211 is detachably installed on the liquid outlet of the liquid supply main pipe 222, the front plate 2212 is fixedly connected to the separation tube 2211, and the front plate 2212 The front plate 2212 and the rear plate 2213 are fixed with bolts, the inner sides of the front plate 2212 and the rear plate 2213 are both provided with grooves, a serpentine bend 2214 is provided in the groove of the front plate 2212, one end of the serpentine bend 2214 is provided in the through hole of the left end separation groove, and the other end of the serpentine bend 2214 is provided in the through hole of the right end separation groove, a plurality of temperature sensors 2215 are evenly provided in the groove of the rear plate 2213, slide grooves are provided on the left and right sides of the front plate 2212, buckles are provided on the left and right sides of the rear plate 2213, and the periphery of the front plate 2212 and the rear plate 2213 in contact Sealing strips are provided. The chiller body 1 realizes the heat exchange function through the water tank evaporator 2. The circulating liquid flows from the chiller to the water tank evaporator 2. The cooling water flows into the serpentine elbow 2214 in the cavity of the heat sink 221 through the partition tube 2211. The coolant is injected from the liquid inlet in the middle of the top of the partition tube 2211. The heat of the cooling water is taken away and returned to the chiller body 11. The setting of the serpentine elbow 2214 can speed up the heat dissipation. When there is a problem with the serpentine elbow 22142, the heat sink 221 can also be quickly disassembled and repaired. The sealing strip is used to ensure that the coolant of the heat sink 221 will not leak.

[0038] like Figure 1-3As shown, a liquid supply main pipe 222 is provided at the inner top end of the shell 21, and a plurality of liquid outlets are evenly spaced at the bottom end of the liquid supply main pipe 222, and a heat sink 221 is detachably mounted on the plurality of liquid outlets, and a liquid outlet is provided at the top end of the rear plate of the heat sink 221, and a circulating liquid supply main pipe 224 is provided in parallel at the left top end of the plurality of heat sinks 221, and a circulating liquid return main pipe 225 is provided in parallel at the right middle position of the plurality of heat sinks 221, and a plurality of interfaces corresponding to the heat sink 221 are provided on the circulating liquid supply main pipe 224 and the circulating liquid return main pipe 225, respectively, and a plurality of spray devices 25 are provided on the inner side of the shell 21, and a liquid collecting main pipe 223 is provided at the inner bottom end of the shell 21, and one end of the liquid collecting main pipe 223 is open, and the other end of the liquid collecting main pipe 223 is connected to the inlet of the circulating pump. The liquid port is connected, and the filtering unit 23 includes a drying filter, which is arranged on the pipeline between the water tank evaporator 2 and the condenser. The drying filter can filter various impurities in the circulating liquid, so as to effectively protect the condenser and various valve bodies, as well as various capillaries in the evaporator. Since the serpentine bend 2214 is long and fully in contact with the coolant, the temperature of the circulating water inside the serpentine bend 2214 is also consistent with the coolant. The temperature can be effectively calculated by using multiple temperature sensors 2215 evenly arranged in the heat sink 221. Then, by adjusting the power of the compressor and the evaporator, the circulating liquid can maintain an accurate temperature, thereby achieving the effect of improving the temperature control accuracy. The sensor used is PT100, which is sensitive, fast in response, long in service life and stable in operation.

[0039] Specific implementation process:

[0040] After the ice machine is turned on, the coolant pump starts to work. The coolant first enters the liquid inlet of the partition tube 2211 at the top of the heat sink 221 from the liquid outlet of the liquid supply main pipe 222, and then enters the accommodating groove in the heat sink 221 through the through hole in the middle of the partition tube 2211. In this process, the coolant is in full contact with the serpentine elbow 2214. Multiple temperature control sensors evenly arranged in the groove of the rear plate 2213 can obtain accurate circulating liquid temperature by measuring the coolant, and then flow into the shell through the liquid outlet at the top of the rear plate 2213 of the heat sink 221. At this time, the spray devices 25 at both ends of the inner side of the shell also start to operate to spray the coolant onto the heat sink On 221, the air cooling device 24 blows air from top to bottom continuously. At this time, the circulating pump pumps the circulating liquid to the evaporative water tank, and is input to the left end of the partition tube 2211 through the circulating liquid supply main pipe 224 arranged in parallel at the top left side of multiple heat sinks 221, and then enters the serpentine elbow 2214 through the through hole in the left end partition groove, and finally leaves the serpentine elbow 2214 from the through hole in the right end partition groove, and is re-input into the circulating liquid return main pipe 225. The cooling liquid that is constantly accumulated in the shell is pumped out of the chiller through the liquid collecting main pipe 223 arranged at the bottom of the shell, and after the temperature is reduced outside the chiller body 1, it is input into the liquid supply main pipe 222 again.

[0041] In the embodiments disclosed in the present invention, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the embodiments disclosed in the present invention can be understood according to specific circumstances.

[0042] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A high-precision water chiller for laboratory use, comprising a water chiller body (1) and a water tank evaporator (2), characterized in that: The water outlet of the water chiller body (1) is in communication with the water inlet of the water tank evaporator (2), and the water outlet of the water tank evaporator (2) is in communication with the water inlet of the water chiller body (1); The water tank type evaporator (2) is composed of a shell (21), a heat exchange module (22) and a filter unit (23); The heat exchange module (22) comprises a heat sink (221), a liquid supply main pipe (222), a liquid collecting main pipe (223), a circulating liquid delivery main pipe (224) and a circulating liquid return main pipe (225); the inner top end of the housing (21) is provided with a liquid supply main pipe (222); the bottom end of the liquid supply main pipe (222) is provided with a plurality of liquid outlets at equal intervals; the heat sink (221) is detachably mounted on each of the plurality of liquid outlets; the top end of the rear plate (2213) of the heat sink (221) is provided with a liquid outlet; the left top ends of the plurality of heat sinks (221) are provided with a circulating liquid delivery main pipe (224) in parallel; the right top ends of the plurality of heat sinks (221) are provided with a circulating liquid return main pipe (225) in parallel; the circulating liquid delivery main pipe (224) and the circulating liquid return main pipe (225) are both provided with a plurality of interfaces corresponding to the heat sinks (221) in a one-to-one manner; The heat sink (221) is composed of a partition tube (2211), a front plate (2212), a rear plate (2213), a serpentine curved tube (2214) and a temperature sensor (2215); The left side of the separation tube (2211) is arranged on the interface of the circulating liquid supply main pipe (224), and the right side of the separation tube (2211) is arranged on the interface of the circulating liquid return main pipe (225). The left and right ends of the separation tube (2211) are both provided with separation grooves, and the bottom end of the separation groove is provided with a through hole. The middle position of the top end of the separation tube (2211) is provided with a liquid inlet, and the liquid inlet of the separation tube (2211) can be detachably mounted on the liquid outlet of the liquid supply main pipe (222); The front plate (2212) is fixedly connected to the separation tube (2211), and the front plate (2212) is fixed to the rear plate (2213) by bolts. The inner sides of the front plate (2212) and the rear plate (2213) are both provided with grooves. A serpentine curved tube (2214) is provided in the groove of the front plate (2212). One end of the serpentine curved tube (2214) is provided in the through hole of the left end separation groove, and the other end of the serpentine curved tube (2214) is provided in the through hole of the right end separation groove. A plurality of temperature sensors (2215) are evenly provided in the groove of the rear plate (2213); A plurality of spray devices (25) are arranged on the inner side of the shell (21), and a liquid collecting main pipe (223) is arranged at the inner bottom end of the shell (21), one end of the liquid collecting main pipe (223) is open, and the other end of the liquid collecting main pipe (223) is connected to the liquid inlet of the circulation pump; The filter unit (23) comprises a drying filter, which is arranged on a pipeline between the water tank evaporator (2) and the condenser.

2. A high-precision ice machine for laboratory use according to claim 1, characterized in that: The left and right sides of the front plate (2212) are provided with sliding grooves, the left and right sides of the rear plate (2213) are provided with buckles, and the peripheries of the contact between the front plate (2212) and the rear plate (2213) are provided with sealing strips.

3. A high-precision ice water machine for laboratory use according to claim 1, characterized in that: An air cooling device (24) is provided at the top of the ice machine body (1); the air cooling device (24) is composed of a housing (21), a fan and a motor; and a plurality of the air cooling devices (24) are provided.

4. A high-precision ice machine for laboratory use according to claim 1, characterized in that: The front plate (2212) is provided with a plurality of buckles, and the serpentine curved pipe (2214) is detachably mounted in the groove of the front plate (2212) via the buckles.

5. A high-precision ice machine for laboratory use according to claim 1, characterized in that: A plurality of spray devices (25) are evenly arranged on the inner side of the shell (21), and the spray devices (25) are connected to the liquid outlet of the circulation pump through a liquid supply main pipe.

6. A high-precision ice water machine for laboratory use according to claim 1, characterized in that: The temperature sensor (2215) includes PT100.

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