Vacuum leakage detection device of annealing furnace

Abstract

The utility model relates to the technical field of annealing process, in particular to a vacuum leakage detection device of an annealing furnace. A vacuum leakage detection device of an annealing furnace comprises: an annealing furnace body; the gantry bracket is arranged on the periphery of the annealing furnace body; the linear module is arranged at the top of the portal frame; the sliding arm is arranged at the moving end of the linear module; the detection tube is composed of an adsorption tube shaped like a Chinese character'chang 'and a vertical tube, one end of the vertical tube penetrates through the sliding arm and is rotationally connected to the bottom of the sliding arm through a rotating shaft, the adsorption tube is fixed to the bottom of the vertical tube, and a plurality of adsorption holes are formed in the outer portion of the adsorption tube. The detection device has the beneficial effects that the detection device covers each part of the annealing furnace, including a turning part, and realizes multidirectional air extraction on the outer side of the annealing furnace so as to detect whether the extracted air contains gas leaked from the annealing furnace or not, so that the detection sensitivity is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing processes, and specifically to a vacuum leakage detection device for an annealing furnace. Background Art

[0002] During the use of a vacuum annealing furnace, vacuum leakage may occur, resulting in the outflow of inert gas inside the annealing furnace, reducing the vacuum degree, and thus affecting the stability of the annealing process and the product quality.

[0003] Traditional gas detection devices are usually fixed outside the annealing furnace. However, due to the large volume of the annealing furnace, there may be a problem that leaks in some areas are not detected in time, thereby affecting the sensitivity and efficiency of leakage detection. Summary of the Utility Model

[0004] Aiming at the technical problems existing in the prior art, the utility model provides a vacuum leakage detection device for an annealing furnace to solve the problems of poor sensitivity and efficiency of vacuum leakage detection for the annealing furnace.

[0005] The technical solution for the utility model to solve the above technical problems is as follows: A vacuum leakage detection device for an annealing furnace, comprising:

[0006] The annealing furnace body;

[0007] A gantry bracket, which is arranged outside the annealing furnace body;

[0008] A linear module, which is arranged on the top of the gantry;

[0009] A sliding arm, which is arranged on the moving end of the linear module;

[0010] A detection tube, which is composed of an adsorption tube in the shape of "Γ" and a vertical tube. One end of the vertical tube penetrates through the sliding arm and is rotatably connected to the bottom of the sliding arm through a rotating shaft. The adsorption tube is fixed at the bottom of the vertical tube, and a plurality of adsorption holes are formed on the outer side of the adsorption tube. Among them, the plurality of adsorption holes are distributed along the path of the adsorption tube;

[0011] A driving member, which is arranged on the sliding arm, and the driving end of the driving member is linked with the vertical tube to drive the vertical tube to rotate;

[0012] A negative pressure assembly, which is arranged on one side of the sliding arm. Among them, the output end of the negative pressure assembly is communicated with the inside of the vertical tube to provide negative pressure for the adsorption tube;

[0013] A detection assembly, which is arranged at the output end of the negative pressure assembly to detect the gas leaked when the annealing furnace leaks.

[0014] The beneficial effects of the utility model are:

[0015] 1) The detection device uses a gantry bracket and a linear module structure, enabling the adsorption tube in the shape of a factory character to extract air in a mobile manner on one side of the annealing furnace body. Additionally, when the adsorption tube is displaced to one end of the annealing furnace body, a driving member drives the adsorption tube to rotate, causing the adsorption tube to turn at one end of the annealing furnace body and then enabling the adsorption tube to extract air in a mobile manner on the other side of the annealing furnace body, covering all parts of the annealing furnace, including the turning points, achieving multi-directional air extraction outside the annealing furnace to detect whether the extracted air contains the gas leaked from the annealing furnace, thereby enhancing the detection sensitivity.

[0016] Based on the above technical solution, the present utility model can be further improved as follows.

[0017] Further, the driving member includes a servo motor, a first pulley, a transmission belt, and a second pulley. The servo motor is fixed on the sliding arm, and the output shaft of the servo motor penetrates through the sliding arm and extends to one side of the vertical pipe. The first pulley is sleeved outside the output shaft of the servo motor.

[0018] Further, the second pulley is sleeved outside the vertical pipe, and the transmission belt is sleeved on the outside of the first pulley and the outside of the second pulley.

[0019] The beneficial effect of adopting the above further solution is that when the mobile end of the linear module drives the adsorption tube to displace from the side part A on one side of the annealing furnace body to the end part B at one end of the annealing furnace body, the output shaft rotates by driving the servo motor. The output shaft drives the first pulley to rotate 180°. Since the first pulley and the second pulley are linked by the transmission belt, the first pulley drives the second pulley to rotate. And the second pulley is sleeved outside the vertical pipe, thereby driving the vertical pipe and the adsorption tube to rotate 180°, causing the adsorption tube to turn along the end part B of the annealing furnace body and wind around the position of the side part C on the other side of the annealing furnace body, and then continue to extract air in a mobile manner until it displaces to the end part D at the other end of the annealing furnace body and turns again to wind back to the initial position of the side part A on one side of the annealing furnace body.

[0020] Further, the negative pressure assembly includes a negative pressure fan, an input pipe, and an output pipe. The negative pressure fan is fixed on one side of the sliding arm. One end of the output pipe is rotatably connected to the top of the vertical pipe through a rotating shaft, and the other end of the output pipe is connected to the output end of the negative pressure fan.

[0021] Further, one end of the output pipe is connected to the output end of the negative pressure fan.

[0022] Further, the detection component includes a gas sensor for detecting inert gas, and the gas sensor is disposed inside the output pipe.

[0023] The beneficial effect of adopting the above further scheme is that a negative pressure airflow is blown into the vertical pipe and the adsorption tube through the input pipe by a negative pressure fan, and the adsorption tube draws air around the annealing furnace body through the adsorption hole, and discharges the drawn air from the output pipe. Since the output pipe is equipped with a gas sensor for detecting inert gas, if the drawn air contains inert gas, it indicates that there is a vacuum leak in the annealing furnace, thereby realizing real-time monitoring and detection of whether the air around the annealing furnace contains inert gas, thereby timely discovering and solving the vacuum leakage problem, thereby improving the safety and reliability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0025] Figure 2 It is a schematic diagram of the overall structure of the utility model from another perspective;

[0026] Figure 3 It is a side view of the driving member of the utility model.

[0027] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0028] 100. Annealing furnace body, 200. Gantry bracket, 300. Linear module, 400. Sliding arm, 500. Detection tube, 501. Adsorption tube, 502. Vertical tube, 503. Adsorption hole, 600. Driving part, 601. Servo motor, 602. Pulley 1, 603. Transmission belt, 604. Pulley 2, 700. Negative pressure component, 701. Negative pressure fan, 702. Input pipe, 703. Output pipe, 800. Detection component. DETAILED DESCRIPTION

[0029] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0030] During the use of the vacuum annealing furnace, vacuum leakage may occur, causing the inert gas inside the annealing furnace to flow out, reducing the vacuum degree, thereby affecting the stability of the annealing process and product quality.

[0031] Traditional gas detection devices are usually fixed on the outside of the annealing furnace. However, due to the large size of the annealing furnace, leakage in some areas may not be detected in time, which in turn affects the sensitivity and efficiency of leakage detection. The utility model proposes a vacuum leakage detection device for an annealing furnace to solve the above problem.

[0032] The utility model provides the following preferred embodiments

[0033] like Figure 1 , Figure 2 and Figure 3 As shown in the figure, a vacuum leak detection device for an annealing furnace includes:

[0034] The annealing furnace body 100;

[0035] The gantry bracket 200, which is arranged outside the annealing furnace body 100;

[0036] The linear module 300, which is arranged on the top of the gantry;

[0037] The sliding arm 400, which is arranged on the moving end of the linear module 300;

[0038] The detection tube 500 is composed of an adsorption tube 501 in the shape of "Γ" and a vertical tube 502. One end of the vertical tube 502 penetrates through the sliding arm 400 and is rotatably connected to the bottom of the sliding arm 400 through a rotating shaft. The adsorption tube 501 is fixed to the bottom of the vertical tube 502. A plurality of adsorption holes 503 are formed on the outer part of the adsorption tube 501. Among them, the plurality of adsorption holes 503 are distributed along the path of the adsorption tube 501;

[0039] The driving member 600 is arranged on the sliding arm 400, and the driving end of the driving member 600 is linked with the vertical tube 502 to drive the vertical tube 502 to rotate;

[0040] The negative pressure assembly 700 is arranged on one side of the sliding arm 400. Among them, the output end of the negative pressure assembly 700 is communicated with the inside of the vertical tube 502 to provide negative pressure for the adsorption tube 501;

[0041] The detection assembly 800 is arranged at the output end of the negative pressure assembly 700 to detect the gas leaked when the annealing furnace leaks;

[0042] With the gantry bracket 200 and linear module 300 structures of this detection device, the adsorption tube 501 in the shape of "Γ" can extract air in a mobile manner on one side of the annealing furnace body 100. In addition, when the adsorption tube 501 is displaced to one end of the annealing furnace body 100, the driving member 600 is used to drive the adsorption tube 501 to rotate, so that the adsorption tube 501 turns at one end of the annealing furnace body 100, and the adsorption tube 501 can extract air in a mobile manner on the other side of the annealing furnace body 100 again, covering all parts of the annealing furnace, including the turning points, realizing multi-directional air extraction on the outside of the annealing furnace to detect whether the extracted air contains the gas leaked from the annealing furnace, thereby enhancing the detection sensitivity.

[0043] In this embodiment, as Figure 1 、 Figure 2 and Figure 3As shown, the driving member 600 includes a servo motor 601, a pulley 1 602, a transmission belt 603, and a pulley 2 604. The servo motor 601 is fixed on the slide arm 400, and the output shaft of the servo motor 601 passes through the slide arm 400 and extends on one side of the vertical tube 502. The pulley 1 602 is sleeved on the outer side of the output shaft of the servo motor 601, the pulley 2 604 is sleeved on the outer side of the vertical tube 502, and the transmission belt 603 is sleeved on the outer side of the pulley 1 602 and the outer side of the pulley 2 604.

[0044] When the moving end of the linear module 300 drives the adsorption tube 501 to shift from one side of the annealing furnace body 100 to one end of the annealing furnace body 100, the output shaft is driven to rotate by the servo motor 601, and the output shaft drives the pulley 1 602 to rotate 180°. Since the pulley 1 602 and the pulley 2 604 are linked by the transmission belt 603, the pulley 1 602 drives the pulley 2 604 to rotate, and the pulley 2 604 is sleeved on the outside of the vertical tube 502, thereby driving the vertical tube 502 and the adsorption tube 501 to rotate 180°, so that the adsorption tube 501 turns along the end B of the annealing furnace body 100, and wraps around the other side C of the annealing furnace, and then continues to extract air in a mobile manner until it moves to the other end D of the annealing furnace body 100, and turns again and wraps around to the initial position of the side A of the annealing furnace body 100.

[0045] In this embodiment, Figure 1 , Figure 2 and Figure 3 As shown, the negative pressure assembly 700 includes a negative pressure fan 701, an input pipe 702, and an output pipe 703. The negative pressure fan 701 is fixed to one side of the sliding arm 400. One end of the output pipe 703 is rotatably connected to the top of the vertical pipe 502 through a rotating shaft, and the other end of the output pipe 703 is connected to the output end of the negative pressure fan 701. One end of the output pipe 703 is connected to the output end of the negative pressure fan 701. The detection assembly 800 includes a gas sensor for detecting inert gas, and the gas sensor is arranged inside the output pipe 703.

[0046] A negative pressure fan 701 is used to blow negative pressure air into the vertical pipe 502 and the adsorption tube 501 through the input pipe 702. The adsorption tube 501 draws air around the annealing furnace body 100 through the adsorption hole 503, and discharges the drawn air from the output pipe 703. Since the output pipe 703 is equipped with a gas sensor for detecting inert gas, if the drawn air contains inert gas (inert gas such as ammonia, and the gas sensor can be an ammonia sensor), it indicates that there is a vacuum leak in the annealing furnace, thereby achieving real-time monitoring and detection of whether the air around the annealing furnace contains inert gas, thereby timely discovering and solving the vacuum leakage problem, thereby improving the safety and reliability of the system.

[0047] The specific working process of the utility model is as follows:

[0048] (1) Inspection at the side A of the annealing furnace body 100

[0049] First, the initial position of the adsorption tube 501 is set between the end D and the side A, and the adsorption tube 501 is driven to move in the direction close to the end B by the movable end of the linear module 300. At the same time, the negative pressure fan 701 is started, and negative pressure airflow is blown into the vertical pipe 502 and the adsorption tube 501 through the input pipe 702. The adsorption tube 501 extracts air from the side A of the annealing furnace body 100 through the adsorption hole 503.

[0050] (2) Inspection at the side B of the annealing furnace body 100

[0051] When the movement of the linear module 300 drives the adsorption tube 501 to move between the side A and the end B, the output shaft is driven to rotate by the servo motor 601, and the output shaft drives the pulley 1 602 to rotate 180°. Since the pulley 1 602 and the pulley 2 604 are linked by the transmission belt 603, the pulley 1 602 drives the pulley 2 604 to rotate, and the pulley 2 604 is sleeved on the outside of the vertical tube 502, thereby driving the vertical tube 502 and the adsorption tube 501 to rotate 180°. During the rotation of the adsorption tube 501, the side B of the annealing furnace body 100 can be detected.

[0052] (3) Inspection at the side C of the annealing furnace body 100

[0053] After the adsorption tube 501 turns along the end B of the annealing furnace body 100 and wraps around the other side C of the annealing furnace body 100, the moving end of the linear module 300 continues to drive the adsorption tube 501 along the direction close to the end D to extract air in a mobile manner until it moves to between the other end D and the side C of the annealing furnace body 100, and the side C of the annealing furnace body 100 is further detected during the movement.

[0054] (4) Inspection at the side D of the annealing furnace body 100

[0055] When the adsorption tube 501 moves to between the other end D and the side C of the annealing furnace body 100, at the same time, the servo motor 601 drives the adsorption tube 501 to rotate 180° again, turn and return to the initial position of the side A of one side of the annealing furnace body 100. In addition, during the process of this rotation and turning, the adsorption tube 501 can detect the side D of the annealing furnace body 100.

[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum leak detection device for an annealing furnace, characterized in that: Comprising: The annealing furnace body; A gantry bracket, which is arranged on the periphery of the annealing furnace body; A linear module, which is arranged on the top of the gantry; A sliding arm, which is arranged on the moving end of the linear module; A detection tube, which is composed of an adsorption tube in the shape of "Γ" and a vertical tube. One end of the vertical tube penetrates through the sliding arm and is rotatably connected to the bottom of the sliding arm through a rotating shaft. The adsorption tube is fixed at the bottom of the vertical tube, and a plurality of adsorption holes are arranged on the outer side of the adsorption tube. Among them, the plurality of adsorption holes are distributed along the path of the adsorption tube; A driving member, which is arranged on the sliding arm, and the driving end of the driving member is linked with the vertical tube for driving the vertical tube to rotate; A negative pressure assembly, which is arranged on one side of the sliding arm. Among them, the output end of the negative pressure assembly is communicated with the inside of the vertical tube for providing negative pressure for the adsorption tube; A detection assembly, which is arranged at the output end of the negative pressure assembly for detecting the gas leaked when the annealing furnace leaks; 2. The vacuum leakage detection device for an annealing furnace according to claim 1, characterized in that: The driving member includes a servo motor, a first pulley, a transmission belt, and a second pulley. The servo motor is fixed on the sliding arm, and the output shaft of the servo motor penetrates through the sliding arm and extends to one side of the vertical tube. The first pulley is sleeved on the outer side of the output shaft of the servo motor; 3. The vacuum leakage detection device for an annealing furnace according to claim 2, characterized in that: The second pulley is sleeved on the outer side of the vertical tube, and the transmission belt is sleeved on the outer side of the first pulley and the outer side of the second pulley; 4. The vacuum leakage detection device for an annealing furnace according to claim 1, characterized in that: The negative pressure assembly includes a negative pressure fan, an input pipe, and an output pipe. The negative pressure fan is fixed on one side of the sliding arm. One end of the output pipe is rotatably connected to the top end of the vertical tube through a rotating shaft, and the other end of the output pipe is connected to the output end of the negative pressure fan; 5. The vacuum leakage detection device for an annealing furnace according to claim 4, characterized in that: One end of the output pipe is connected to the output end of the negative pressure fan; 6. The vacuum leakage detection device for an annealing furnace according to claim 5, characterized in that: The detection assembly includes a gas sensor for detecting inert gas, and the gas sensor is arranged inside the output pipe.

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