Optical equipment precision measuring device

Abstract

The utility model provides an optical equipment precision measuring device, which comprises a base, a plurality of scanning balls and a support column, the scanning balls are arranged in a preset space range, the scanning balls are arranged in groups, the scanning balls in the same group are sequentially arranged along one of an edge line, a plane diagonal line and a body diagonal line of the preset space range, and the scanning balls in the same group are arranged along the scanning direction of the optical equipment. The groups of scanning balls do not shield each other, the support column is detachably arranged on the base, and the groups of scanning balls are arranged on the support column. The mechanical arm solves the problem that in the prior art, a mechanical arm is low in ceramic ball control efficiency.

Description

Technical Field

[0001] The utility model relates to the field of optical equipment, in particular to an optical equipment precision measuring device. Background Art

[0002] The sensors of common optical 3D measurement systems consist of several components, such as one or more imaging sensors (cameras) and one or more projection systems to project structures onto the surface of the object to be measured, or systems for illuminating any existing surface textures. Examples of such sensors are measurement systems based on fringe projection or speckle technology, and photogrammetry or scanning systems with area-based measurement capabilities. In manufacturing, in order to accept qualified equipment, ceramic balls are generally scanned by the equipment, and the difference between the scanned ceramic ball spacing and the calibrated ball spacing standard value is used as an indicator to measure whether the equipment is qualified.

[0003] At present, most manufacturers of 3D measurement equipment use the best working distance within the scanning range of the equipment, that is, the spacing of a ceramic ball, to accept the equipment. When higher accuracy requirements are placed on the equipment, the spatial position measurement standard in the ICS17.040.01 (length and angle measurement) VDI / VDE (Association of German Engineers / German Electrical Association) guide can be used to measure the spacing of ceramic balls at seven spatial positions within the scanning range, and obtain the difference between the scanning ball spacing and the actual ball spacing. The traditional measurement method uses a robotic arm to fix the ceramic ball. The robotic arm controls the ceramic ball to move to seven spatial positions within the scanning range of the equipment. The equipment scans them separately. When the robotic arm controls the movement of the ceramic ball, it takes time to wait. Seven positions need to be scanned seven times, which has low overall efficiency. After moving to the predetermined position, the robotic arm stops waiting for the equipment to scan. The slight jitter of the robotic arm motor will affect the accuracy of the scanned data. Utility Model Content

[0004] The main purpose of the utility model is to provide an optical equipment precision measuring device to solve the problem of low efficiency of mechanical arm controlling ceramic balls in the prior art.

[0005] In order to achieve the above-mentioned purpose, the utility model provides an optical equipment precision measuring device, including a base, a plurality of scanning balls, and a support. The scanning balls are arranged in a predetermined space range, and the scanning balls are arranged in groups. The scanning balls in the same group are arranged in sequence along one of the edge line, the face diagonal line, and the body diagonal line of the predetermined space range. Along the scanning direction of the optical device, the scanning balls in each group do not block each other. The support is detachably arranged on the base, and the scanning balls in groups are arranged on the support.

[0006] Furthermore, there is one base, and all scanning balls are arranged on the one base; or the scanning balls form multiple groups, there are multiple bases, and at least two groups of scanning balls are arranged on different bases.

[0007] Furthermore, the base has a mounting position, and the pillar is arranged at the mounting position. When there are multiple bases, the shapes, quantities and positions of the mounting positions on different bases are all the same.

[0008] Furthermore, the mounting position includes a mounting groove, the bottom of the pillar has a mounting protrusion, both the mounting protrusion and the mounting groove have a mounting hole, the mounting protrusion is arranged in the mounting groove, and the pillar and the base are connected by fasteners inserted into the mounting hole.

[0009] Further, the predetermined spatial range has a front side and a rear side facing the optical device, the front side is closer to the optical device than the rear side, the predetermined spatial range also has an upper top surface and a lower bottom surface, as well as a left side and a right side, the scanning ball includes a plurality of first scanning balls, a plurality of second scanning balls, a plurality of third scanning balls, a plurality of fourth scanning balls, a plurality of fifth scanning balls, a plurality of sixth scanning balls, and a plurality of seventh scanning balls, the first scanning ball is located at the edge line of the front side and the left side and is arranged in sequence along the edge line of the front side and the left side, the second scanning ball is located at the front side and is arranged in sequence along the diagonal line of the front side The third scanning ball is located at the rear side surface and arranged in sequence along the diagonal line of the rear side surface, and the arrangement direction of the second scanning ball is not parallel to the arrangement direction of the third scanning ball. The fourth scanning ball is located at the right side surface and arranged in sequence along the diagonal line of the right side surface. The fifth scanning ball is located at the edge line of the rear side surface and the lower bottom surface and arranged in sequence along the edge line of the rear side surface and the lower bottom surface. The sixth scanning ball is located at the edge line of the right side surface and the upper top surface and arranged in sequence along the edge line of the right side surface and the upper top surface. The seventh scanning ball is located at the center of the predetermined spatial range and arranged in sequence along the body diagonal line of the predetermined spatial range.

[0010] Furthermore, when there are multiple bases, the first scanning ball, the second scanning ball, the third scanning ball and the fourth scanning ball are located on one base, and the fifth scanning ball, the sixth scanning ball and the seventh scanning ball are located on another base.

[0011] Furthermore, the scanning ball has an extended section, which protrudes from the outer surface of the scanning ball, and the scanning balls in the same group are connected by the extended section to form a group.

[0012] Furthermore, the pillar includes a pillar body and a fastening portion, the bottom end of the pillar body is connected to the base, the top end of the pillar body has a connecting structure, the fastening portion is connected to the connecting structure, and a locking area is formed, and the extended section is passed through and locked in the locking area.

[0013] Furthermore, the connection structure includes a first recessed portion located at the top end of the pillar, the fastening portion is bent and forms a second recessed portion, and the first recessed portion and the second recessed portion are butt-jointed and cooperate with each other to form a locking area.

[0014] Furthermore, the top end of the pillar and the fastening portion both have a connecting section, which is located at the edge of the first recess or the second recess. When the fastening portion is connected to the pillar, the connecting section of the pillar and the connecting section of the fastening portion are connected and fastened via a fastener.

[0015] By applying the technical solution of the utility model, multiple scanning balls are set and set within a predetermined spatial range, thereby eliminating the need to rely on a robotic arm to fix and move the scanning balls. In other words, the multiple scanning balls themselves can cover all positions to be measured, thereby completing the measurement without moving the scanning balls. On the one hand, the waiting time when the robotic arm controls the scanning balls to move in sequence is reduced, thereby improving work efficiency. On the other hand, the influence of slight jitter of the robotic arm motor operation on the accuracy of the scanning data is eliminated. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings constituting part of the present application are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0017] Figure 1 A schematic diagram showing the position of the scanning ball during the first scanning of the utility model is shown;

[0018] Figure 2 A schematic diagram showing the position of the scanning ball during the second scan is shown;

[0019] Figure 3 A front view of the scanning sphere for the first scan is shown;

[0020] Figure 4 A front view of the scan sphere for the second scan is shown.

[0021] The above drawings include the following reference numerals:

[0022] 10. Base; 11. Mounting position; 20. Scanning ball; 21. First scanning ball; 22. Second scanning ball; 23. Third scanning ball; 24. Fourth scanning ball; 25. Fifth scanning ball; 26. Sixth scanning ball; 27. Seventh scanning ball; 28. Extension section; 30. Pillar; 31. Pillar body; 311. Connection structure; 32. Fastening part. DETAILED DESCRIPTION

[0023] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0024] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0025] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directional words are not used to limit the present invention.

[0026] In order to solve the problem of low efficiency of mechanical arm controlling ceramic balls in the prior art, the utility model provides an optical equipment precision measuring device.

[0027] like Figures 1 to 4 An optical device accuracy measuring device shown in the figure includes a base 10, a plurality of scanning balls 20, and a support 30. The scanning balls 20 are arranged within a predetermined spatial range. The scanning balls 20 are arranged in groups. The scanning balls 20 in the same group are arranged in sequence along one of the edge lines, face diagonals, and body diagonals of the predetermined spatial range. Along the scanning direction of the optical device, the scanning balls 20 in each group do not block each other. The support 30 is detachably arranged on the base 10, and the scanning balls 20 in groups are arranged on the support 30.

[0028] In this embodiment, a plurality of scanning balls 20 are arranged within a predetermined spatial range, thereby eliminating the need to rely on a robotic arm to fix and move the scanning balls 20. That is, the plurality of scanning balls 20 themselves can cover all positions to be measured, thereby completing the measurement without moving the scanning balls 20. This reduces the waiting time when the robotic arm controls the scanning balls 20 to move sequentially, thereby improving work efficiency. On the other hand, it eliminates the influence of slight jitter of the robotic arm motor operation on the accuracy of the scanning data.

[0029] It should be noted that the predetermined spatial range refers to the scanning range of the optical device, that is, the rectangular space range that the scanning ball 20 needs to cover, that is, Figure 1 , Figure 2 The scanning area of ​​the optical device is located in the smallest rectangular parallelepiped range where each group of scanning balls 20 is located. In this embodiment, the scanning balls 20 are generally ceramic balls.

[0030] In this embodiment, the scanning balls 20 are formed into multiple groups so that they can measure multiple spatial positions. There are multiple bases 10 to ensure that each group of scanning balls 20 can not block each other. At least two groups of scanning balls 20 are set on different bases 10 to ensure the measurement effect. As the main supporting component of each scanning ball 20, the base 10 is in the shape of a flat plate and is set at the bottom of the optical device precision measurement device. The scanning balls 20 are set at different positions of the base 10. Preferably, the multiple bases 10 have the same structure to facilitate the installation of the scanning balls 20 and the scanning of the optical device. In this embodiment, a total of seven groups of scanning balls 20 are set, two in a group, and the base 10 is set to two. The seven groups of scanning balls 20 are distributed to the two bases 10 on the principle of not blocking each other. In this way, it is ensured that the optical device can scan each group of scanning balls 20 to ensure that the measurement results of each group of scanning balls 20 are valid, and the measurement of each group of scanning balls 20 can be completed by scanning each base 10 separately, without moving the scanning balls 20, reducing waiting time and improving work efficiency. Of course, depending on different actual needs and different reference standards, the number of scanning balls 20 in each group can be set to be more, and the number of groups of scanning balls 20 can be set to fewer groups or more groups to meet the measurement needs of different spatial positions. Correspondingly, the base 10 can also be set to one or more to meet the requirement that the scanning balls 20 in each group do not block each other.

[0031] In particular, when the predetermined spatial range can meet the requirements of accommodating all scanning balls 20 at the same time and the scanning balls 20 do not block each other, only one base 10 can be set. At this time, all scanning balls 20 are installed on the same base 10, so that one base 10 can also meet the needs of scanning detection. Of course, since this embodiment is explained by taking seven groups of scanning balls 20 as an example, two bases 10 are provided in this embodiment. Of course, more bases 10 can also be provided as needed.

[0032] In this embodiment, the base 10 is vertically arranged with the support column 30, and the upper surface of the base 10 has a mounting position 11, and the support column 30 is extended in the height direction and arranged at the mounting position 11. The shapes of the mounting positions 11 on the same base 10 can be the same or different, as long as they can cooperate with the support column 30, so that the installation of the support column 30 can be realized, and the stable and reliable support of the scanning ball 20 is ensured, so that the scanning ball 20 has the same or different heights. As for the shapes, quantities and positions of the mounting positions 11 on different bases 10, in this embodiment, they are preferably the same, that is, the bases 10 are completely the same, so as to facilitate the installation and adjustment of the support column 30, and there is no need to distinguish different bases 10. In this way, the scanning ball 20 is fixed to different positions of the base 10 by fixing the support column 30 on the base 10. In this way, the spatial position of the scanning ball 20 can be changed by changing the height of the support column 30 or changing the installation position of the support column 30 on the base 10 as a whole. In this embodiment, each base 10 is provided with five mounting positions 11, which are respectively located at the edges around the base 10 and the center of the base 10. The mounting positions 11 at the edges can fix the scanning ball 20 to the edge lines and face diagonals of a predetermined spatial range through pillars 30, and the mounting positions 11 at the center of the base 10 can fix the scanning ball 20 to the body diagonals of a predetermined spatial range through pillars 30. In this way, the scanning ball 20 can be set near the four peripheral sides and the center of the predetermined spatial range to meet the scanning requirements of the optical setting.

[0033] In this embodiment, the mounting position 11 includes a mounting groove, the bottom of the pillar 30 has a mounting protrusion, the mounting protrusion and the mounting groove both have a mounting hole, the mounting protrusion is set in the mounting groove, and the pillar 30 and the base 10 are connected by fasteners inserted into the mounting hole, so that on the one hand, the connection between the pillar 30 and the base 10 is ensured to be stable and reliable, and on the other hand, the pillar 30 and the scanning ball 20 can be replaced by disassembling and assembling the fasteners when disassembly and assembly are required to meet the measurement requirements of the optical device. Optionally, the fastener can be set as a bolt, and accordingly, the mounting hole of the mounting groove is set as a threaded hole.

[0034] In this embodiment, the predetermined spatial range has a front side and a rear side facing the optical device, the front side is closer to the optical device than the rear side, the predetermined spatial range also has an upper top surface and a lower bottom surface, as well as a left side and a right side, the scanning ball 20 includes a plurality of first scanning balls 21, a plurality of second scanning balls 22, a plurality of third scanning balls 23, a plurality of fourth scanning balls 24, a plurality of fifth scanning balls 25, a plurality of sixth scanning balls 26, and a plurality of seventh scanning balls 27, the first scanning balls 21 are located at the edge line of the front side and the left side and are arranged in sequence along the edge line of the front side and the left side, the second scanning balls 22 are located at the front side and are arranged along the facing angle of the front side. The third scanning ball 23 is located at the rear side surface and is arranged in sequence along the diagonal line of the rear side surface, and the arrangement direction of the second scanning ball 22 is not parallel to the arrangement direction of the third scanning ball 23. The fourth scanning ball 24 is located at the right side surface and is arranged in sequence along the diagonal line of the right side surface. The fifth scanning ball 25 is located at the edge line of the rear side surface and the lower bottom surface and is arranged in sequence along the edge line of the rear side surface and the lower bottom surface. The sixth scanning ball 26 is located at the edge line of the right side surface and the upper top surface and is arranged in sequence along the edge line of the right side surface and the upper top surface. The seventh scanning ball 27 is located at the center of the predetermined spatial range and is arranged in sequence along the body diagonal line of the predetermined spatial range. In this way, the spatial positions of the seven groups of scanning balls 20 cover the edge lines, face diagonals, and body diagonals of the predetermined spatial range, and the spatial positions do not overlap with each other to meet the measurement requirements of the optical device. Of course, the specific number and setting positions of the scanning balls 20 can be adjusted accordingly according to actual needs, and are not limited to the above-mentioned setting method of this embodiment.

[0035] In this embodiment, the first scanning ball 21, the second scanning ball 22, the third scanning ball 23 and the fourth scanning ball 24 are located on one base 10, and the fifth scanning ball 25, the sixth scanning ball 26 and the seventh scanning ball 27 are located on another base 10, so as to ensure that the scanning balls 20 of each group do not block each other, thereby ensuring the validity of the measurement data. Of course, the spatial positions of the seven groups of scanning balls 20 can be interchanged, but it is necessary to meet the requirement that the scanning balls 20 of each group installed in the same base 10 do not block each other, for example, the positions of the second scanning ball 22 and the third scanning ball 23 can be interchanged, and the integrity and validity of the measurement data can still be ensured.

[0036] In this embodiment, the scanning ball 20 has an extension section 28, which protrudes from the outer surface of the scanning ball 20. The scanning balls 20 in the same group are connected to form a group through the extension section 28. In this way, the extension section 28 fixes the relative positions of the scanning balls 20 in the same group, which can improve the reliability of the measurement results. At the same time, it also provides a fixed position for the installation and fixation of the scanning ball 20 on the support 30.

[0037] In this embodiment, the pillar 30 includes a pillar body 31 and a fastening portion 32. The bottom end of the pillar body 31 is connected to the base 10. The top end of the connecting body has a connecting structure 311. The fastening portion 32 is connected to the connecting structure 311 to form a locking area. The extension section 28 is passed through and locked in the locking area. In this way, the locking area fixes the scanning ball 20 to the base 10 by fixing the extension section 28. Moreover, based on the fact that the extension section 28 extends from both ends of the locking area, the setting direction of the extension section can be changed by changing the opening direction of the locking area, thereby fixing each group of scanning balls 20 to different directions.

[0038] Specifically, the connection structure 311 of the present embodiment includes a first recessed portion located at the top of the pillar 30, the fastening portion 32 is bent and forms a second recessed portion, the first recessed portion and the second recessed portion are butt-jointed and cooperate to form a locking area together, so that the extension section 28 can be fixed to the locking area. In order to facilitate the connection and fixation of the pillar 30 and the fastening portion 32, the top of the pillar 30 and the fastening portion 32 are both provided with a connecting section, and the connecting section is located at the edge of the first recessed portion or the second recessed portion. When the fastening portion 32 is connected to the pillar 30, the connecting section of the pillar 30 and the connecting section of the fastening portion 32 are connected and fastened by a fastener. In the present embodiment, the cross section of the first recessed portion is set to be semicircular, and the cross section of the second recessed portion is also set to be semicircular. The first recessed portion and the second recessed portion jointly form an annular locking area to match the cylindrical shape of the extension section 28. The connecting section is located at the end of the semicircle and extends radially. At the same time, connecting sections are provided at both ends of the semicircle, so that the opposite sides of the locking area can be locked, ensuring the fixing effect on the scanning ball 20, thereby ensuring the accuracy of the detection.

[0039] Optionally, the connection structure 311 and the fastening portion 32 may be configured as follows: Figure 3 The fixing method of the first scanning ball 21 is to set two threaded holes in the connecting section on both sides of the first recess, and set two through holes in the connecting section on both sides of the second recess, that is, to set the fastening part 32 in the shape of a semicircular clamp, and the bolt passes through the through hole of the fastening part 32 and cooperates with the threaded hole, so as to fix the fastening part 32 to the connecting structure 311, thereby fixing the scanning ball 20 to the support 30. The connecting structure 311 and the fastening part 32 can also be set as follows Figure 4The sixth scanning ball 26 is fixed in a manner that the first recess is located at the top end surface of the support body 31, and the connecting section extends transversely and protrudes from the top end surface of the support body 31, thereby forming a suspended connecting section, so that two through holes can be respectively provided in the connecting sections on both sides of the first recess and the second recess, so that the bolt can pass through the through holes of the fastening portion 32 and the connecting structure 311 and cooperate with the nut, thereby fixing the protruding section 28 to the support 30, thereby fixing the spatial position of the scanning ball 20. Of course, the cooperation manner of the connecting structure 311 and the fastening portion 32 can also be set to other forms, as long as the connection of the scanning ball 20 is stable and reliable.

[0040] The process of using the optical device accuracy measuring device is as follows: place the optical device in the scanning direction of the scanning ball 20, that is, Figure 3 , Figure 4 In the facing direction, adjust the distance between the optical device and the scanning ball 20 so that the scanning ball 20 performs two scans in the working area of ​​the optical device. Figure 1 The position of the scanning ball 20 for the first scan, Figure 2 To scan the position of the scanning ball 20 for the second time, after the first scan is completed, there is no need to move the optical device. You only need to replace the base 10 and the scanning ball 20 thereon as a whole to perform the second scan. Calculate the center distance of the scanning ball 20 obtained by the scan, and calculate the deviation from the actual calibration ball center distance. If the deviation is within the specified standard value, the optical device is accepted.

[0041] It should be noted that, the multiple in the above embodiments refers to at least two.

[0042] From the above description, it can be seen that the above embodiments of the utility model achieve the following technical effects:

[0043] 1. Solved the problem of low efficiency of the robot arm controlling the scanning ball in the prior art;

[0044] 2. By setting up multiple scanning balls and setting them within a predetermined space, it is not necessary to rely on a robotic arm to fix and move the scanning balls;

[0045] 3. It reduces the waiting time when the robot arm controls the scanning ball to move in sequence, improves work efficiency, and eliminates the influence of slight jitter of the robot arm motor on the accuracy of scanning data.

[0046] Obviously, the embodiments described above are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0047] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0048] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0049] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. An optical equipment precision measuring device, characterized in that: include: Base (10); A plurality of scanning balls (20), the scanning balls (20) being arranged within a predetermined spatial range, the scanning balls (20) being arranged in groups, the scanning balls (20) in the same group being arranged in sequence along one of an edge line, a face diagonal line, and a body diagonal line of the predetermined spatial range, and along a scanning direction of the optical device, the scanning balls (20) in each group do not block each other; A support (30) is detachably arranged on the base (10), and the scanning balls (20) in groups are arranged on the support (30).

2. The optical device accuracy measuring device according to claim 1, characterized in that: There is one base (10), and all the scanning balls (20) are arranged on the one base (10); or The scanning balls (20) form a plurality of groups, the bases (10) are a plurality, and at least two groups of the scanning balls (20) are arranged on different bases (10).

3. The optical device accuracy measuring device according to claim 2, characterized in that: The base (10) has a mounting position (11), and the pillar (30) is arranged at the mounting position (11). When there are multiple bases (10), the shapes, quantities and positions of the mounting positions (11) on different bases (10) are all the same.

4. The optical device precision measuring device according to claim 3, characterized in that: The mounting position (11) comprises a mounting groove, the bottom of the pillar (30) has a mounting protrusion, the mounting protrusion and the mounting groove both have a mounting hole, the mounting protrusion is arranged in the mounting groove, and the pillar (30) and the base (10) are connected by fasteners inserted into the mounting hole.

5. The optical device accuracy measuring device according to claim 2, characterized in that: The predetermined spatial range has a front side and a rear side facing the optical device, the front side is closer to the optical device than the rear side, the predetermined spatial range also has an upper top surface and a lower bottom surface, and a left side surface and a right side surface, and the scanning ball (20) comprises: A plurality of first scanning balls (21), wherein the first scanning balls (21) are located at edge lines of the front side surface and the left side surface and are arranged in sequence along the edge lines of the front side surface and the left side surface; a plurality of second scanning balls (22), wherein the second scanning balls (22) are located at the front side surface and are arranged in sequence along a diagonal line of the front side surface; a plurality of third scanning balls (23), the third scanning balls (23) being located at the rear side surface and arranged in sequence along the diagonal line of the rear side surface, and the arrangement direction of the second scanning balls (22) is not parallel to the arrangement direction of the third scanning balls (23); A plurality of fourth scanning balls (24), the fourth scanning balls (24) being located on the right side surface and arranged in sequence along a diagonal line of the right side surface; A plurality of fifth scanning balls (25), the fifth scanning balls (25) being located at the edge line of the rear side surface and the lower bottom surface and being arranged in sequence along the edge line of the rear side surface and the lower bottom surface; A plurality of sixth scanning balls (26), the sixth scanning balls (26) being located at edge lines of the right side surface and the upper top surface and being arranged in sequence along the edge lines of the right side surface and the upper top surface; A plurality of seventh scanning balls (27), wherein the seventh scanning balls (27) are located at the center of the predetermined spatial range and are arranged in sequence along the body diagonal of the predetermined spatial range.

6. The optical device precision measuring device according to claim 5, characterized in that: When there are multiple bases (10), the first scanning ball (21), the second scanning ball (22), the third scanning ball (23) and the fourth scanning ball (24) are located on one base (10), and the fifth scanning ball (25), the sixth scanning ball (26) and the seventh scanning ball (27) are located on another base (10).

7. The optical device precision measuring device according to any one of claims 1 to 6, characterized in that: The scanning ball (20) has a protruding section (28) which protrudes from the outer surface of the scanning ball (20). The scanning balls (20) in the same group are connected via the protruding section (28) to form a group.

8. The optical device precision measuring device according to claim 7, characterized in that: The support (30) comprises a support body (31) and a fastening portion (32), wherein the bottom end of the support body (31) is connected to the base (10), the top end of the support body (31) has a connecting structure (311), the fastening portion (32) is connected to the connecting structure (311), and a locking area is formed, and the extending section (28) is passed through and locked in the locking area.

9. The optical device precision measuring device according to claim 8, characterized in that: The connection structure (311) comprises a first recessed portion located at the top end of the pillar (30); the fastening portion (32) is bent and forms a second recessed portion; the first recessed portion and the second recessed portion are butt-jointed and cooperate with each other to form the locking area.

10. The optical device precision measuring device according to claim 9, characterized in that: The top end of the pillar (30) and the fastening portion (32) both have a connecting section, and the connecting section is located at the edge of the first recess or the second recess. When the fastening portion (32) is connected to the pillar (30), the connecting section of the pillar (30) and the connecting section of the fastening portion (32) are connected and fastened by a fastener.

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