Device for detecting downward pressure of travelling wheels of carrying mechanism and intelligent storage equipment

Abstract

The utility model discloses a device for detecting the downward pressure of a travelling wheel of a carrying mechanism and intelligent storage equipment. The device comprises a detection track, a pressure detection assembly and at least one supporting assembly, the supporting assembly is connected to the lower portion of the detection track, the detection track is provided with a groove, and the pressure detection assembly is installed in the groove and connected with the detection track. According to the scheme, the downward pressure generated by the walking wheels on the track when the carrying mechanism walks along the track of the walking shaft can be detected, personnel can judge the friction force between the walking wheels and the track according to the downward pressure, and then data reference is provided for reducing the overall production takt of Stocker; and the abrasion degree of the walking wheels can be judged according to the change of the downward pressure, so that support is provided for regular maintenance.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a device for detecting the downward pressure of a running wheel of a transport mechanism and intelligent storage equipment. Background Art

[0002] Stocker is an intelligent storage device in semiconductor factories. It has multiple layers of storage space and is mainly used for the automated transportation and storage of FOUP (a type of material box) in semiconductor factories to realize the flow of wafers between processes. Crane (automatic handling component of Stocker) is one of the core structures in Stocker and bears the responsibility of the normal operation of the equipment.

[0003] The transport mechanism is usually driven by a wheel structure. Specifically, the transport mechanism runs on the running shaft through the running wheels. The downward force of the running wheels on the running shaft track determines the speed and stability of the transport mechanism running along the running shaft track. Therefore, it is of great significance to detect the downward force of the running wheels on the track. Utility Model Content

[0004] In order to overcome the defects in the prior art, the embodiments of the utility model provide a device for detecting the downward pressure of the running wheels of a transporting mechanism and intelligent warehousing equipment, which can detect the downward pressure generated by the running wheels on the track when the transporting mechanism runs along the track of the running axis. Personnel can use this downward pressure to judge the friction between the running wheels and the track, thereby providing data reference for reducing the overall production rhythm of the stocker; the degree of wear of the running wheels can also be judged by the change in the downward pressure, providing support for regular maintenance.

[0005] The embodiment of the present application discloses: a device for detecting the pressure under the running wheels of a transport mechanism, comprising: a detection track, a pressure detection component and at least one support component, wherein the support component is connected under the detection track, the detection track is provided with a groove, the pressure detection component is installed in the groove and connected to the detection track.

[0006] Specifically, the detection track includes a top surface and a bottom surface that are opposite to each other, and the opening of the groove along the Z direction passes through the top surface.

[0007] Specifically, the pressure detection assembly includes a mounting plate, a pressure sensor, an upper pressure plate and a display instrument. The mounting plate is connected to the detection track via a first fastener, the pressure sensor is fixedly connected to the mounting plate via a second fastener, the upper pressure plate is fixedly connected to the pressure sensor and the upper surface of the upper pressure plate is flush with the top surface of the detection track, and the display instrument is electrically connected to the pressure sensor.

[0008] Specifically, the gap between the upper pressing plate and the wall surface of the groove is between 0.1 and 0.2 mm.

[0009] Specifically, the detection track is made of profiled material.

[0010] Specifically, the support assembly includes a support plate and two supporting legs, the support plate is connected to the detection track, and the two supporting legs are used to support the support plate.

[0011] The embodiment of the present application also discloses: an intelligent storage device, which includes a running shaft track and a device for detecting the downward pressure of the running wheels of the transport mechanism as described in the embodiment, wherein the detection track is connected to the running shaft track.

[0012] The utility model has at least the following beneficial effects: the device for detecting the downward pressure of the running wheel of the transport mechanism of the present embodiment can detect the downward pressure generated by the running wheel on the track when the transport mechanism is running along the track of the running axis. The personnel can judge the friction between the running wheel and the track by the downward pressure, and then provide data reference for reducing the overall production cycle of the stocker. In addition, the degree of wear of the running wheel can be judged by the change of the downward pressure, which provides support for regular maintenance.

[0013] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a structural schematic diagram of a device for detecting the downward pressure of the running wheels of a transport mechanism in an embodiment of the utility model;

[0016] Figure 2 It is a cross-sectional view of the pressure detection assembly installed on the detection track in the embodiment of the utility model;

[0017] Figure 3 It is a structural schematic diagram of the pressure detection component in the embodiment of the utility model.

[0018] The figure markings of the above drawings are: 1. detection track; 11. top surface; 12. bottom surface; 2. pressure detection assembly; 21. mounting plate; 22. pressure sensor; 23. upper pressure plate; 3. support assembly; 31. support plate; 32. support foot; 41. first fastener; 42. second fastener; 5. running wheel. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "fixed", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood by specific circumstances.

[0021] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "below" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0022] In the description of this embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present application.

[0023] In addition, the terms "first", "second", etc. are only used to distinguish in description and have no special meaning.

[0024] like Figure 1 As shown, the device for detecting the pressure under the running wheel 5 of the transport mechanism of this embodiment comprises: a detection track 1, a pressure detection component 2 and two support components 3. Among them, the detection track 1 can provide a running axis environment for the transport mechanism; the support component 3 is connected to the bottom of the detection track 1 and is used to support the detection track 1; the detection track 1 is provided with a groove, and the pressure detection component 2 is installed in the groove and fixedly connected to the detection track 1, and is used to detect the pressure under the running wheel 5 of the transport mechanism that moves above the pressure detection component 2.

[0025] With the above structure, the device for detecting the downward pressure of the running wheel 5 of the transport mechanism of this embodiment can detect the downward pressure generated by the running wheel 5 on the track when the transport mechanism travels along the track of the running axis. The personnel can judge the friction between the running wheel 5 and the track based on the downward pressure, thereby providing data reference for reducing the overall production cycle of the stocker. In addition, the degree of wear of the running wheel 5 can also be judged by the change of downward pressure, providing support for regular maintenance.

[0026] Specifically, Figure 1 As shown, the detection track 1 of this embodiment includes a top surface 11 and a bottom surface 12 opposite to each other, and a groove runs through the top surface 11 along the Z direction (or in other words, a direction perpendicular to the detection track 1) to facilitate the installation of the pressure detection assembly 2 and detection after contact with the running wheel 5. The detection track 1 can be prepared by a profile.

[0027] Combination Figure 2 and Figure 3 As shown, the pressure detection assembly 2 of this embodiment includes: a mounting plate 21, a pressure sensor 22, an upper pressure plate 23 and a display instrument (not shown). Among them, the mounting plate 21 is fixedly connected to the detection track 1 through a first fastener 41, the pressure sensor 22 is fixedly connected to the mounting plate 21 through a second fastener 42, the upper pressure plate 23 is fixedly connected to the pressure sensor 22, and the display instrument is electrically connected to the pressure sensor 22. When the pressure detection assembly 2 is embedded in the groove of the detection track 1, the upper surface of the upper pressure plate 23 is flush with the top surface 11 of the detection track 1 to avoid large fluctuations when the running wheel 5 runs above the upper pressure plate 23, thereby affecting the accuracy of the lower pressure detection.

[0028] Furthermore, there is a gap between the upper pressing plate 23 and the wall of the groove, and the gap is between 0.1 and 0.2 mm. In other words, along the running direction of the running wheel 5, there is a gap between the two ends of the upper pressing plate 23 and the detection track 1 to prevent the detection track 1 from exerting pressure on the upper pressing plate 23, thereby affecting the accuracy of the detection.

[0029] like Figure 1 As shown, the support assembly 3 of this embodiment includes a support plate 31 and two support legs 32. The support plate 31 is connected to the detection track 1, and the two support legs 32 are used to support the support plate 31.

[0030] The device for detecting the downward pressure of the running wheels 5 of the transport mechanism of this embodiment can be connected to the running axis track of the Stocker (intelligent storage equipment) for use. Specifically, the detection track 1 is connected to the running axis track.

[0031] The method of using the device for detecting the downward pressure of the running wheels 5 of the transport mechanism of this embodiment is as follows: connect the detection track 1 of the device to the running axis track of the Stocker, and the transport mechanism regularly moves to the upper pressure plate 23 and rests for a certain period of time. After the pressure sensor 22 stably reads the downward pressure value, the electrical program collects it for final processing, and then the transport mechanism leaves the upper pressure plate 23.

[0032] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A device for detecting the downward pressure of the running wheels of a transport mechanism, characterized in that: include: A detection track, a pressure detection component and at least one support component, wherein the support component is connected below the detection track, the detection track is provided with a groove, and the pressure detection component is installed in the groove and connected to the detection track.

2. The device for detecting the downward pressure of the running wheels of a transport mechanism according to claim 1, characterized in that: The detection track includes a top surface and a bottom surface that are opposite to each other, and the opening of the groove along the Z direction passes through the top surface.

3. The device for detecting the downward pressure of the running wheels of a transport mechanism according to claim 2, characterized in that: The pressure detection assembly includes a mounting plate, a pressure sensor, an upper pressure plate and a display instrument. The mounting plate is connected to the detection track via a first fastener, the pressure sensor is fixedly connected to the mounting plate via a second fastener, the upper pressure plate is fixedly connected to the pressure sensor and the upper surface of the upper pressure plate is flush with the top surface of the detection track, and the display instrument is electrically connected to the pressure sensor.

4. The device for detecting the downward pressure of the running wheels of a transport mechanism according to claim 3, characterized in that: The gap between the upper pressing plate and the wall surface of the groove is between 0.1 and 0.2 mm.

5. The device for detecting the downward pressure of the running wheels of a transport mechanism according to claim 1, characterized in that: The detection track is made of profiled material.

6. The device for detecting the downward pressure of the running wheels of a transport mechanism according to claim 1, characterized in that: The support assembly includes a support plate and two supporting legs. The support plate is connected to the detection track, and the two supporting legs are used to support the support plate.

7. An intelligent storage device, characterized in that: It comprises a running shaft track and a device for detecting the downward pressure of the running wheels of a handling mechanism as claimed in any one of claims 1 to 6, wherein the detection track is connected to the running shaft track.

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