Novel gas sensor for printing optical sensing waveguide by using two-photon exposure

Abstract

The utility model provides a novel gas sensor using a two-photon exposure printing optical sensing waveguide. The novel gas sensor comprises a substrate 1, a first substrate 2, a second substrate 3, a laser emitter 4, an optical detector 5 and an optical sensing waveguide 6, wherein the first substrate 2 and the second substrate 3 are respectively arranged on the substrate 1; the laser emitter 4 is arranged on the first substrate 2; the light detector 5 is arranged on the second substrate 3; the laser emitter 4 and the optical detector 5 are connected through the optical sensing waveguide 6; the optical sensing waveguide 6 comprises a structure formed by two-photon exposure printing and is used for guiding a laser beam emitted by the laser emitter 4 into a gas sample and transmitting the laser beam out of an evanescent field, so that photons interact with gas molecules; during gas measurement, the TDLAS technology is adopted, and the novel gas sensor for printing the optical sensing waveguide through two-photon exposure is used for gas measurement. And high sensitivity, high response speed, miniaturization, low power consumption and high reliability are realized.

Description

Technical Field

[0001] The utility model relates to the technical field of laser sensors, in particular to a novel gas sensor using a double-photon exposure printing optical sensing waveguide. Background Art

[0002] As people pay more attention to environmental protection and safety, there is an increasing demand for monitoring the concentration of specific gases, such as natural gas as a fuel. A gas sensor is a device that can detect and respond to the presence of a specific gas. According to the gas-sensitive characteristics, gas sensors can be divided into semiconductor type, electrochemical type, solid electrolyte type and contact combustion type.

[0003] Semiconductor gas sensors are the most commonly used and practical type of gas sensors. They have the advantages of low cost, simple manufacturing, high sensitivity, fast response, long life, low sensitivity to humidity and simple circuit. However, their disadvantages are that they must work at high temperatures, have poor selectivity for gases or odors, have dispersed component parameters, unsatisfactory stability and high power consumption.

[0004] Electrochemical gas sensors detect gas concentration by detecting current. They are divided into primary battery type that does not require power supply and controllable potential electrolysis type that requires power supply. The main advantages of electrochemical sensors are high sensitivity and good selectivity of gases. The disadvantage is that they have a lifespan limit of generally two years.

[0005] Solid electrolyte gas sensors use solid electrolytes to detect gases. They have the advantages of fast response, good selectivity, and a wide operating temperature range, but their response to interfering gases will affect their accuracy, require regular calibration and replacement, and have a complex structure, resulting in high manufacturing and maintenance costs.

[0006] The contact combustion type gas sensor prepares a high temperature resistant catalyst layer on the surface of the platinum resistor. The combustible gas catalytically burns on its surface, and the concentration of the gas is detected by measuring the change in reaction temperature. The contact combustion type gas sensor has the characteristic of selectively detecting combustible gases, but it is not selective within the range of combustible gases. In addition, it works in a dark fire state, and there is a risk of ignition and explosion. Most elemental organic vapors have a poisoning effect on the sensor. The response time of the contact combustion type gas sensor is fast, generally within a few seconds, and multiple gases can be continuously detected in a short time.

[0007] Therefore, traditional sensors have problems such as low sensitivity, slow response speed, large size, high power consumption and poor reliability. It is necessary to develop a new type of laser gas sensor to meet market demand. Utility Model Content

[0008] The utility model aims to provide a novel gas sensor and a gas measurement method using a two-photon exposure printed optical sensing waveguide, which overcome the above problems or at least partially solve the above problems.

[0009] In order to achieve the above-mentioned purpose, the technical solution of the utility model is specifically implemented as follows:

[0010] The utility model provides a novel gas sensor using two-photon exposure to print optical sensing waveguides, comprising: a substrate 1, a first substrate 2, a second substrate 3, a laser emitter 4, a light detector 5 and an optical sensing waveguide 6; wherein:

[0011] The first substrate 2 and the second substrate 3 are respectively arranged on the substrate 1;

[0012] The laser emitter 4 is arranged on the first substrate 2;

[0013] The light detector 5 is arranged on the second substrate 3;

[0014] The laser emitter 4 and the light detector 5 are connected via a light sensing waveguide 6;

[0015] The optical sensing waveguide 6 includes a structure formed by printing using two-photon exposure, and is used to guide the laser beam emitted by the laser emitter 4 into the gas sample and transmit it from the evanescent field so that the photons interact with the gas molecules;

[0016] When measuring gas, TDLAS (Tunable Diode Laser Absorption Spectroscopy) technology is used to perform gas measurement through a new gas sensor that uses two-photon exposure to print optical sensing waveguides.

[0017] Wherein, the substrate 1 is a silicon dioxide substrate, a tungsten copper substrate or a diamond copper substrate.

[0018] The first substrate 2 and the second substrate 3 are made of aluminum nitride substrate, diamond substrate or diamond copper substrate.

[0019] The laser emitter 4 is a semiconductor laser.

[0020] The light detector 5 is a photodiode detector.

[0021] It can be seen that the new gas sensor using two-photon exposure printed light sensing waveguide provided by the utility model, by adopting TDLAS technology and two-photon exposure printed light sensing waveguide, achieves high sensitivity, high response speed, miniaturization, low power consumption and high reliability, and effectively solves the problems existing in existing gas sensors. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A schematic structural diagram of a novel gas sensor using two-photon exposure to print optical sensing waveguides provided in an embodiment of the utility model. DETAILED DESCRIPTION

[0024] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0025] Figure 1 FIG. 1 shows a schematic diagram of a novel gas sensor using a two-photon exposure printed optical sensing waveguide provided by an embodiment of the utility model, see FIG. Figure 1 The novel gas sensor using two-photon exposure printing optical sensing waveguide provided by the embodiment of the utility model comprises: a substrate 1, a first substrate 2, a second substrate 3, a laser emitter 4, a light detector 5 and an optical sensing waveguide 6; wherein:

[0026] The first substrate 2 and the second substrate 3 are respectively arranged on the substrate 1;

[0027] The laser emitter 4 is arranged on the first substrate 2;

[0028] The light detector 5 is arranged on the second substrate 3;

[0029] The laser emitter 4 and the light detector 5 are connected via a light sensing waveguide 6;

[0030] The optical sensing waveguide 6 includes a structure formed by printing using two-photon exposure, and is used to guide the laser beam emitted by the laser emitter 4 into the gas sample and transmit it from the evanescent field so that the photons interact with the gas molecules;

[0031] When measuring gas, TDLAS (Tunable Diode Laser Absorption Spectroscopy) technology is used to perform gas measurement through a new gas sensor that uses two-photon exposure to print optical sensing waveguides.

[0032] Among them, when measuring gas, TDLAS (Tunable Diode Laser Absorption Spectroscopy) technology is used to measure gas by using a new type of gas sensor that uses two-photon exposure to print optical sensing waveguides, including:

[0033] The laser emitter 4 emits a laser beam of a specific wavelength, and the laser beam of the specific wavelength enters the gas sample chamber through the optical sensing waveguide 6;

[0034] When a laser beam of a specific wavelength passes through a gas sample, specific molecules absorb the energy of the laser beam of a specific wavelength;

[0035] After absorption, the laser beam continues to propagate and enters the spectrometer for spectral analysis;

[0036] The spectrometer measures the change in intensity of the laser beam after absorption and determines the concentration of specific molecules in the sample based on the size of the absorption peak.

[0037] Specifically, the utility model adopts the technology of two-photon exposure printing light sensing waveguide, also known as two-photon 3D printing technology, also known as two-photon laser direct writing technology or two-photon polymerization photocuring forming technology, which can form nano-sized cavities inside the material and form continuous paths in different layers. This technology uses laser as a light source and realizes 3D printing by controlling the exposure of the laser. During the printing process, the laser will produce a photochemical reaction on the surface of the material, making the material photosensitized and cured. By adjusting the exposure time and angle of the laser, complex structures can be formed on the material. This technology can be applied to the preparation of micro-nanostructured materials and devices, and has broad application prospects in the fields of biomedicine, materials science, and electronics.

[0038] TDLAS technology mainly uses the narrow line width and wavelength of tunable semiconductor lasers that change with the injected current to measure single or several absorption lines of molecules that are very close and difficult to distinguish. It can be used to obtain information on molecular structure, study its dynamic process, and monitor and analyze trace gases. This technology has highly selective and high-resolution spectral technology, is not interfered by other gases, and can be applied to all active molecules that absorb in the infrared. In addition, this technology also has the advantages of fast speed and high sensitivity, and can achieve rapid measurement without losing sensitivity. This technical solution has the advantages of high sensitivity, extremely small size, high reliability, and low cost, and can be widely used in air quality monitoring, industrial production process control and other fields.

[0039] Specifically, TDLAS is an instrument based on laser absorption spectroscopy technology, which is used to measure the concentration of specific molecules in a gas sample. The measurement principle of the TDLAS instrument is to use the absorption characteristics of laser to analyze the molecular concentration in the gas sample.

[0040] In the TDLAS instrument, the laser emits a laser beam of a specific wavelength, which enters the gas sample chamber through the optical path system. When the laser beam passes through the gas sample, specific molecules in it absorb the energy of the laser. After absorption, the laser beam continues to propagate and enters the spectrometer for spectral analysis. The spectrometer measures the intensity change of the laser beam and determines the concentration of specific molecules in the sample based on the size of the absorption peak.

[0041] The measurement principle of TDLAS instrument is based on the absorption characteristics of light. It indirectly measures the concentration of molecules in the gas sample by measuring the intensity change of the laser beam. Compared with traditional gas analysis methods, TDLAS has the advantages of fast measurement speed, high accuracy and high sensitivity.

[0042] As an optional implementation of the embodiment of the utility model, the substrate 1 is a silicon dioxide substrate, a tungsten copper substrate or a diamond copper substrate. The first substrate 2 and the second substrate 3 are aluminum nitride substrates, diamond substrates or diamond copper substrates. The laser emitter 4 is a semiconductor laser. The light detector 5 is a photodiode detector.

[0043] It can be seen that the novel gas sensor using two-photon exposure printing optical sensing waveguide provided by the embodiment of the utility model has the following beneficial effects:

[0044] (1) High sensitivity and high response speed: By using TDLAS technology and two-photon exposure to print optical sensing waveguides, rapid and accurate measurement of gas concentration can be achieved in extremely small sizes. By controlling the exposure time and angle of the laser, complex structures can be formed on the material, greatly increasing the length of the optical sensing waveguide per unit area. The response speed and sensitivity are greatly improved compared to traditional sensors.

[0045] (2) Miniaturization and low power consumption: Because laser is used as the light source and nanometer-sized cavities can be formed inside the material, the sensor can be miniaturized. At the same time, because laser is used, the power consumption will be relatively low.

[0046] (3) High reliability: Since the present invention adopts photochemical reaction for curing, the structural performance is stable, the reliability is high, and it is not easy to cause performance degradation due to environmental factors.

[0047] Therefore, the utility model realizes high sensitivity, high response speed, miniaturization, low power consumption and high reliability by adopting a new gas sensor of TDLAS technology and two-photon exposure printed optical sensing waveguide, which effectively solves the problems existing in the existing gas sensors.

[0048] The above are only embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included within the scope of the claims of the present application.

Claims

1. A novel gas sensor using two-photon exposure printed optical sensing waveguide, characterized in that: include: A substrate (1), a first substrate (2), a second substrate (3), a laser emitter (4), a light detector (5) and a light sensing waveguide (6); wherein: The first substrate (2) and the second substrate (3) are respectively arranged on the substrate (1); The laser emitter (4) is arranged on the first substrate (2); The light detector (5) is arranged on the second substrate (3); The laser emitter (4) and the light detector (5) are connected via the light sensing waveguide (6); The optical sensing waveguide (6) comprises a structure formed by two-photon exposure printing, and is used to guide the laser beam emitted by the laser emitter (4) into the gas sample and transmit it from the evanescent field so that the photons interact with the gas molecules; When performing gas measurement, TDLAS technology is used to perform gas measurement through the novel gas sensor using two-photon exposure printed optical sensing waveguide.

2. The novel gas sensor using two-photon exposure printing optical sensing waveguide according to claim 1, characterized in that: The substrate (1) is a silicon dioxide substrate, a tungsten copper substrate or a diamond copper substrate.

3. The novel gas sensor using two-photon exposure printing optical sensing waveguide according to claim 2, characterized in that: The first substrate (2) and the second substrate (3) are made of aluminum nitride substrate, diamond substrate or diamond copper substrate.

4. The novel gas sensor using two-photon exposure printing optical sensing waveguide according to claim 3, characterized in that: The laser emitter (4) adopts a semiconductor laser.

5. The novel gas sensor using two-photon exposure printing optical sensing waveguide according to claim 4, characterized in that: The light detector (5) is a photodiode detector.

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