Reflection power adjusting device

Abstract

The utility model provides a reflection power adjusting device which comprises a first power supply, a first switch, a first resistance measuring circuit, a first capacitance measuring circuit, a first display screen, a first programmable logic controller, a first motor, a second power supply, a second switch, a second resistance measuring circuit, a second capacitance measuring circuit and a second display screen. The first resistance measuring circuit and the first capacitance measuring circuit are respectively and electrically connected with the first switch, and the first resistance measuring circuit and the first capacitance measuring circuit are respectively and electrically connected with the first display screen; the second resistance measuring circuit and the second capacitance measuring circuit are respectively and electrically connected with the second switch; the second resistance measuring circuit and the second capacitance measuring circuit are also respectively and electrically connected with the second display screen; the first resistance measuring circuit and the first motor are electrically connected with the first programmable logic controller. According to values displayed by the first display screen and the second display screen, resistance values and capacitance values in the top matching box and the side matching box can be rapidly adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a device for adjusting reflected power. Background Art

[0002] HDP-CVD (High Density Plasma Chemical Vapor Deposition) equipment is an important equipment in the semiconductor industry. The equipment is equipped with a top match box and a side match box. The top match box and the side match box include resistance adjustment knobs and capacitance adjustment knobs respectively. The top match box is used to adjust the impedance of the RF signal input end, and the side match box is used to adjust the impedance of the load end. After the impedance of the input end and the load end are matched through these four knobs, the RF signal is transmitted to the host station to form an electric field. This process will generate reflected power. Excessive reflected power will affect product quality and even cause machine failure. Therefore, the reflected power needs to be adjusted in time to control it below the threshold.

[0003] When the reflected power is too high, engineers need to adjust the knobs on the top matching box and the side matching box based on experience, and then run a dummy wafer in the equipment to verify whether the reflected power meets the requirements through the quality of the test wafer. If not, the reflected power needs to be readjusted, and the adjustment efficiency is low, usually taking about 4 hours. Utility Model Content

[0004] The utility model provides a device for adjusting reflected power to solve the technical problem of low efficiency in adjusting reflected power.

[0005] In order to solve the above technical problems, the utility model provides a device for adjusting reflected power, comprising a first power supply, a first switch, a first resistance measuring circuit, a first capacitance measuring circuit, a first display screen, a first programmable logic controller, a first motor, a second power supply, a second switch, a second resistance measuring circuit, a second capacitance measuring circuit and a second display screen;

[0006] The first power supply is electrically connected to the first switch;

[0007] The first resistance measurement circuit and the first capacitance measurement circuit are connected in parallel, the first resistance measurement circuit and the first capacitance measurement circuit are electrically connected to the first switch respectively, and the first resistance measurement circuit and the first capacitance measurement circuit are also electrically connected to the first display screen respectively;

[0008] The second power supply is electrically connected to the second switch;

[0009] The second resistance measuring circuit and the second capacitance measuring circuit are connected in parallel, the second resistance measuring circuit and the second capacitance measuring circuit are electrically connected to the second switch respectively, and the second resistance measuring circuit and the second capacitance measuring circuit are also electrically connected to the second display screen respectively;

[0010] The first resistance measurement circuit and the first motor are electrically connected to the first programmable logic controller, respectively.

[0011] Optionally, the device further includes a second motor, and the first capacitance measurement circuit and the second motor are electrically connected to the first programmable logic controller respectively.

[0012] Optionally, the device further includes a second programmable logic controller and a third motor, and the second resistance measurement circuit and the third motor are electrically connected to the second programmable logic controller, respectively.

[0013] Optionally, the device further includes a fourth motor, and the second capacitance measurement circuit and the fourth motor are electrically connected to the second programmable logic controller, respectively.

[0014] Optionally, the first programmable logic controller and the second programmable logic controller are the same programmable logic controller.

[0015] Optionally, the first power supply and the second power supply are the same power supply.

[0016] Optionally, the first switch and the first display screen are installed on the same panel.

[0017] Optionally, the second switch and the second display screen are installed on the same panel.

[0018] The utility model provides a device for adjusting reflected power, comprising a first power supply, a first switch, a first resistance measurement circuit, a first capacitance measurement circuit, a first display screen, a second power supply, a second switch, a second resistance measurement circuit, a second capacitance measurement circuit, and a second display screen; the first power supply can supply power to the first resistance measurement circuit, the first capacitance measurement circuit, and the first display screen; the first switch can control the first resistance measurement circuit and the first capacitance measurement circuit to start and shut down; the first resistance measurement circuit can be electrically connected to the variable resistor in the top matching box to measure the resistance value of the variable resistor; the first capacitance measurement circuit can be electrically connected to the variable capacitor in the top matching box to measure the capacitance value of the variable capacitor. Similarly, the second power supply can supply power to the second resistance measurement circuit, the second capacitance measurement circuit, and the second display screen; the second switch can control the second resistance measurement circuit and the second capacitance measurement circuit to start and shut down; the second resistance measurement circuit can be electrically connected to the variable resistor in the side matching box to measure the resistance value of the variable resistor; the second capacitance measurement circuit can be electrically connected to the variable capacitor in the side matching box to measure the capacitance value of the variable capacitor. The unexpected effect is that the first display screen can display the resistance value and capacitance value in the top matching box, and the second display screen can display the resistance value and capacitance value in the side matching box. Engineers can quickly adjust the resistance value and capacitance value in the top matching box and the side matching box according to the values ​​displayed on the first display screen and the second display screen, so as to complete the adjustment of the reflected power as soon as possible, thereby improving the efficiency of adjusting the reflected power. In addition, the first motor is connected to the resistance adjustment knob in the top matching box, and the first programmable logic controller stores the preset resistance value of the variable resistor in the top matching box. The first resistance measurement circuit sends the measured resistance value to the first programmable logic controller, and the first programmable logic controller drives the first motor to rotate according to the difference between the received resistance value and the preset resistance value, thereby making the resistance value of the variable resistor in the top matching box equal to or close to the preset resistance value, so as to realize the automatic adjustment of the resistance value in the top matching box. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a module schematic diagram of a reflected power adjustment device provided in one embodiment of the utility model.

[0020] Figure 2 It is a partial exploded schematic diagram of a reflected power adjustment device provided in one embodiment of the utility model.

[0021] [Description of reference numerals is as follows]:

[0022] A first power supply-11, a first switch-12, a first resistance measuring circuit-13, a first capacitance measuring circuit-14, a first display screen-15, a first programmable logic controller-16, a first motor-17, a second motor-18, a resistance adjusting knob-19, and a capacitance adjusting knob-20;

[0023] The second power supply-21, the second switch-22, the second resistance measuring circuit-23, the second capacitance measuring circuit-24, the second display screen-25, the second programmable logic controller-26, the third motor-27, and the fourth motor-28. DETAILED DESCRIPTION

[0024] In order to make the purpose, advantages and features of the utility model clearer, a reflected power adjustment device proposed by the utility model is further described in detail below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0025] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0026] like Figure 1 As shown, this embodiment provides a reflected power adjustment device, including a first power supply 11, a first switch 12, a first resistance measurement circuit 13, a first capacitance measurement circuit 14, a first display screen 15, a first programmable logic controller 16, a first motor 17, a second power supply 21, a second switch 22, a second resistance measurement circuit 23, a second capacitance measurement circuit 24 and a second display screen 25; the first power supply 11 is electrically connected to the first switch 12; the first resistance measurement circuit 13 and the first capacitance measurement circuit 14 are connected in parallel, and the first resistance measurement circuit 13 and the first capacitance measurement circuit 14 are electrically connected to the first switch 12 respectively. The first resistance measuring circuit 13 and the first capacitance measuring circuit 14 are also electrically connected to the first display screen 15, respectively; the second power supply 21 is electrically connected to the second switch 22; the second resistance measuring circuit 23 and the second capacitance measuring circuit 24 are connected in parallel, the second resistance measuring circuit 23 and the second capacitance measuring circuit 24 are electrically connected to the second switch 22, respectively, and the second resistance measuring circuit 23 and the second capacitance measuring circuit 24 are also electrically connected to the second display screen 25, respectively; the first resistance measuring circuit 13 and the first motor 17 are electrically connected to the first programmable logic controller 16, respectively.

[0027] The first resistance measuring circuit 13, the first capacitance measuring circuit 14, the second resistance measuring circuit 23 and the second capacitance measuring circuit 24 may be circuits for measuring resistance and capacitance in devices such as a multimeter or an oscilloscope.

[0028] A reflected power adjustment device provided in this embodiment includes a first power supply 11, a first switch 12, a first resistance measurement circuit 13, a first capacitance measurement circuit 14, a first display screen 15, a second power supply 21, a second switch 22, a second resistance measurement circuit 23, a second capacitance measurement circuit 24 and a second display screen 25; the first power supply 11 can supply power to the first resistance measurement circuit 13, the first capacitance measurement circuit 14 and the first display screen 15; the first switch 12 can control the first resistance measurement circuit 13 and the first capacitance measurement circuit 14 to start and stop; the first resistance measurement circuit 13 can be electrically connected to a variable resistor in a top matching box to measure the resistance value of the variable resistor; the first capacitance measurement circuit 14 can be electrically connected to a variable capacitor in the top matching box to measure the capacitance value of the variable capacitor. Similarly, the second power supply 21 can supply power to the second resistance measurement circuit 23, the second capacitance measurement circuit 24, and the second display screen 25; the second switch 22 can control the second resistance measurement circuit 23 and the second capacitance measurement circuit 24 to start and shut down; the second resistance measurement circuit 23 can be electrically connected to the variable resistor in the side matching box to measure the resistance value of the variable resistor; the second capacitance measurement circuit 24 can be electrically connected to the variable capacitor in the side matching box to measure the capacitance value of the variable capacitor. The unexpected effect is that the first display screen 15 can display the resistance value and capacitance value in the top matching box, and the second display screen 25 can display the resistance value and capacitance value in the side matching box. Engineers can quickly adjust the resistance value and capacitance value in the top matching box and the side matching box according to the values ​​displayed on the first display screen 15 and the second display screen 25, so as to complete the adjustment of the reflected power as soon as possible, thereby improving the efficiency of adjusting the reflected power. In addition, the first motor 17 is connected to the resistance adjustment knob 19 in the top matching box, the first programmable logic controller 16 stores the preset resistance value of the variable resistor in the top matching box, the first resistance measurement circuit 13 sends the measured resistance value to the first programmable logic controller 16, and the first programmable logic controller 16 drives the first motor 17 to rotate according to the difference between the received resistance value and the preset resistance value, thereby making the resistance value of the variable resistor in the top matching box equal to or close to the preset resistance value, so as to realize automatic adjustment of the resistance value in the top matching box.

[0029] Optional, such as Figure 1 and Figure 2As shown, the device further includes a second motor 18, and the first capacitance measuring circuit 14 and the second motor 18 are electrically connected to the first programmable logic controller 16, respectively. The second motor 18 is connected to the capacitance adjustment knob 20 in the top matching box, and the first programmable logic controller 16 stores the preset capacitance value of the variable capacitor in the top matching box. The first capacitance measuring circuit 14 sends the measured capacitance value to the first programmable logic controller 16, and the first programmable logic controller 16 drives the second motor 18 to rotate according to the difference between the received capacitance value and the preset capacitance value, thereby making the capacitance value of the variable capacitor in the top matching box equal to or close to the preset capacitance value, so as to realize automatic adjustment of the capacitance value in the top matching box.

[0030] Optional, such as Figure 1 As shown, the device further includes a second programmable logic controller 26 and a third motor 27, and the second resistance measuring circuit 23 and the third motor 27 are electrically connected to the second programmable logic controller 26, respectively. The third motor 27 is connected to the resistance adjustment knob in the side matching box, and the preset resistance value of the variable resistor in the side matching box is stored in the second programmable logic controller 26. The second resistance measuring circuit 23 sends the measured resistance value to the second programmable logic controller 26, and the second programmable logic controller 26 drives the third motor 27 to rotate according to the difference between the received resistance value and the preset resistance value, thereby making the resistance value of the variable resistor in the side matching box equal to or close to the preset resistance value, so as to realize automatic adjustment of the resistance value in the side matching box.

[0031] Optional, such as Figure 1 As shown, the device further includes a fourth motor 28, and the second capacitance measuring circuit 24 and the fourth motor 28 are respectively electrically connected to the second programmable logic controller 26. The fourth motor 28 is connected to the capacitance adjustment knob in the side matching box, and the second programmable logic controller 26 stores the preset capacitance value of the variable capacitor in the side matching box. The second capacitance measuring circuit 24 sends the measured capacitance value to the second programmable logic controller 26, and the second programmable logic controller 26 drives the fourth motor 28 to rotate according to the difference between the received capacitance value and the preset capacitance value, thereby making the capacitance value of the variable capacitor in the side matching box equal to or close to the preset capacitance value, so as to realize automatic adjustment of the capacitance value in the side matching box.

[0032] Optional, reference Figure 1 As shown, the first programmable logic controller 16 and the second programmable logic controller 26 are the same programmable logic controller, which can reduce the number of components of the device and reduce costs.

[0033] Optional, reference Figure 1As shown, the first power source 11 and the second power source 21 are the same power source, which can reduce the number of components of the device and reduce costs.

[0034] Optional, such as Figure 2 As shown, the first switch 12 and the first display screen 15 are installed on the same panel, which makes it convenient to operate the first switch 12 and to view the resistance value and the capacitance value displayed on the first display screen 15.

[0035] Optional, reference Figure 1 and Figure 2 As shown, the second switch 22 and the second display screen 25 are installed on the same panel, which makes it convenient to operate the second switch 22 and to view the resistance value and the capacitance value displayed on the second display screen 25.

[0036] In summary, the utility model provides a reflected power regulating device, comprising a first power supply 11, a first switch 12, a first resistance measuring circuit 13, a first capacitance measuring circuit 14, a first display screen 15, a second power supply 21, a second switch 22, a second resistance measuring circuit 23, a second capacitance measuring circuit 24 and a second display screen 25; the first power supply 11 can supply power to the first resistance measuring circuit 13, the first capacitance measuring circuit 14 and the first display screen 15; the first switch 12 can control the start and stop of the first resistance measuring circuit 13 and the first capacitance measuring circuit 14; the first resistance measuring circuit 13 can be electrically connected to the variable resistor in the top matching box to measure the resistance value of the variable resistor; the first capacitance measuring circuit 14 can be electrically connected to the variable capacitor in the top matching box to measure the capacitance value of the variable capacitor. Similarly, the second power supply 21 can supply power to the second resistance measurement circuit 23, the second capacitance measurement circuit 24, and the second display screen 25; the second switch 22 can control the second resistance measurement circuit 23 and the second capacitance measurement circuit 24 to start and shut down; the second resistance measurement circuit 23 can be electrically connected to the variable resistor in the side matching box to measure the resistance value of the variable resistor; the second capacitance measurement circuit 24 can be electrically connected to the variable capacitor in the side matching box to measure the capacitance value of the variable capacitor. The unexpected effect is that the first display screen 15 can display the resistance value and capacitance value in the top matching box, and the second display screen 25 can display the resistance value and capacitance value in the side matching box. Engineers can quickly adjust the resistance value and capacitance value in the top matching box and the side matching box according to the values ​​displayed on the first display screen 15 and the second display screen 25, so as to complete the adjustment of the reflected power as soon as possible, thereby improving the efficiency of adjusting the reflected power. In addition, the first motor 17 is connected to the resistance adjustment knob 19 in the top matching box, the first programmable logic controller 16 stores the preset resistance value of the variable resistor in the top matching box, the first resistance measurement circuit 13 sends the measured resistance value to the first programmable logic controller 16, and the first programmable logic controller 16 drives the first motor 17 to rotate according to the difference between the received resistance value and the preset resistance value, thereby making the resistance value of the variable resistor in the top matching box equal to or close to the preset resistance value, so as to realize automatic adjustment of the resistance value in the top matching box.

[0037] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A device for adjusting reflected power, characterized in that: It includes a first power supply, a first switch, a first resistance measuring circuit, a first capacitance measuring circuit, a first display screen, a first programmable logic controller, a first motor, a second power supply, a second switch, a second resistance measuring circuit, a second capacitance measuring circuit and a second display screen; The first power supply is electrically connected to the first switch; The first resistance measurement circuit and the first capacitance measurement circuit are connected in parallel, the first resistance measurement circuit and the first capacitance measurement circuit are electrically connected to the first switch respectively, and the first resistance measurement circuit and the first capacitance measurement circuit are also electrically connected to the first display screen respectively; The second power supply is electrically connected to the second switch; The second resistance measuring circuit and the second capacitance measuring circuit are connected in parallel, the second resistance measuring circuit and the second capacitance measuring circuit are electrically connected to the second switch respectively, and the second resistance measuring circuit and the second capacitance measuring circuit are also electrically connected to the second display screen respectively; The first resistance measurement circuit and the first motor are electrically connected to the first programmable logic controller, respectively.

2. A reflected power adjustment device as claimed in claim 1, characterized in that: The device further includes a second motor, and the first capacitance measuring circuit and the second motor are electrically connected to the first programmable logic controller respectively.

3. A reflected power adjustment device as claimed in claim 2, characterized in that: The device further includes a second programmable logic controller and a third motor, and the second resistance measurement circuit and the third motor are electrically connected to the second programmable logic controller respectively.

4. A reflected power adjustment device as claimed in claim 3, characterized in that: The device further includes a fourth motor, and the second capacitance measurement circuit and the fourth motor are electrically connected to the second programmable logic controller respectively.

5. A reflected power adjustment device as claimed in claim 3, characterized in that: The first programmable logic controller and the second programmable logic controller are the same programmable logic controller.

6. A reflected power adjustment device as claimed in claim 1, characterized in that: The first power source and the second power source are the same power source.

7. A reflected power adjustment device as claimed in claim 1, characterized in that: The first switch and the first display screen are mounted on the same panel.

8. The reflected power adjustment device according to claim 1, characterized in that: The second switch and the second display screen are mounted on the same panel.

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