Substrate pickling device for maintaining morphology of polycrystalline silicon deposition layer

Abstract

The utility model relates to the technical field of polycrystalline silicon deposition layer morphology processing, in particular to a base plate pickling device for maintaining polycrystalline silicon deposition layer morphology, which automatically transfers pickling baskets and workpieces through a transfer mechanism, does not need to manually lift the pickling baskets to transfer the workpieces by a worker through a lifting stick, improves the working efficiency, and reduces the labor intensity of the worker. The pickling solution is prevented from splashing to the human body, and the use convenience is improved; comprising a supporting frame, an acid pickling box, a partition plate and a transfer mechanism, the acid pickling box is fixedly installed on the supporting frame, the partition plate is fixedly installed in the acid pickling box and divides the interior of the acid pickling box into an acid pickling cavity and a draining cavity, and the transfer mechanism is fixedly installed on the outer side wall of the acid pickling box; the transfer mechanism comprises a transfer supporting plate, a motor mounting seat, a first motor, a first screw rod, a lifting screw sleeve, a linkage plate, a lifting sliding plate, a first guide rail, a first sliding block, a horizontal bracket, a second guide rail, a horizontal sliding plate, a second sliding block, a second screw rod, a second motor and a pickling basket; and the transfer supporting plate is fixedly mounted on the outer side wall of the pickling box.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon deposition layer morphology processing, in particular to a substrate pickling device for maintaining the polysilicon deposition layer morphology. Background Art

[0002] Polysilicon is a crystalline form of silicon in which the lattice consists of multiple grains rather than a single crystal. Polysilicon is a common form of silicon material and is used to manufacture various electronic devices such as solar cells and integrated circuits. The polysilicon deposit layer refers to a thin film formed by depositing polysilicon material on the surface of a substrate through a series of process steps. This film can be used to manufacture various components in integrated circuits. The key step in maintaining the morphology of the polysilicon deposit layer is to ensure the surface cleanliness and uniformity of the substrate to improve the deposition and adhesion stability of polysilicon. Therefore, the substrate needs to be pickled. The existing pickling processing equipment has a low degree of automation when in use. When transferring the drain basket and workpiece, workers need to use a pickling rod to move them, resulting in low work efficiency and poor convenience. Utility Model Content

[0003] In order to solve the above technical problems, the utility model provides a substrate pickling device for maintaining the morphology of a polycrystalline silicon deposition layer, which can automatically transport a pickling basket and workpieces through a transport mechanism, eliminating the need for personnel to manually lift the pickling basket with a lifting stick to transport the workpieces, thereby improving work efficiency, preventing the pickling liquid from splashing onto people, and improving ease of use.

[0004] The utility model discloses a substrate pickling device for maintaining the morphology of a polycrystalline silicon deposition layer, comprising a support frame, a pickling box, a partition and a transfer mechanism, wherein the pickling box is fixedly mounted on the support frame, a partition is fixedly mounted inside the pickling box, and the partition divides the inside of the pickling box into a pickling chamber and a drainage chamber, and the transfer mechanism is fixedly mounted on the outer side wall of the pickling box;

[0005] The transfer mechanism includes a transfer support plate, a motor mounting seat, a first motor, a first screw, a lifting screw sleeve, a linkage plate, a lifting slide plate, a first guide rail, a first slider, a horizontal bracket, a second guide rail, a horizontal slide plate, a second slider, a second screw, a second motor and a pickling basket. The transfer support plate is fixedly mounted on the outer wall of the pickling box, the motor mounting seat is fixedly mounted on the bottom end of the transfer support plate, the bottom end of the motor mounting seat is fixedly mounted with a first motor, the first screw is rotatably mounted on the transfer support plate, the power input end of the first screw is tightly connected to the power output end of the first motor, the lifting screw sleeve is threadedly mounted on the first screw, the linkage plate is tightly connected to the lifting screw sleeve, the linkage plate is slidably arranged in the transfer support plate, the lifting slide plate is fixedly mounted on the linkage plate, the lifting Four groups of first sliders are fixedly installed on the slide, two groups of first guide rails are symmetrically fixedly installed on the front end surface of the transfer support plate, and the four groups of the first sliders are slidably clamped on the two groups of first guide rails respectively, the horizontal bracket is fixedly installed on the lifting slide, and two groups of second guide rails are fixedly installed on the horizontal bracket, and two groups of second sliders are relatively fixedly installed on the horizontal slide, and the two groups of second sliders are slidably clamped on the two groups of second guide rails respectively, the second screw is rotatably installed in the horizontal bracket, the second motor is fixedly installed on the horizontal bracket, the output end of the second motor is connected with the input end of the second screw, a threaded sleeve is provided on the horizontal slide, and the threaded sleeve of the horizontal slide is sleeved on the second screw, the pickling basket is fixedly installed on the horizontal slide, and the pickling basket is provided with a mesh.

[0006] The utility model provides a substrate pickling device for maintaining the morphology of a polysilicon deposition layer, and further includes an oil pipe, an oil inlet valve and an oil outlet valve. The oil pipe is coiled and laid at the bottom end of the drainage chamber, and an inlet port and an outlet port are provided on the oil pipe. The inlet port of the oil pipe is connected to an oil inlet valve fixedly installed thereon, and the outlet port of the oil pipe is connected to an oil outlet valve fixedly installed thereon. The oil inlet valve and the oil outlet valve are connected to an external circulation pump.

[0007] The substrate pickling device for maintaining the morphology of a polysilicon deposition layer of the utility model also comprises a liquid level meter, which is fixedly mounted on the side wall of the pickling box and arranged at one side of the pickling chamber.

[0008] The substrate pickling device for maintaining the morphology of a polysilicon deposition layer of the utility model also comprises anti-skid pads, and a plurality of groups of anti-skid pads are arranged at the bottom end of the support frame.

[0009] The substrate pickling device for maintaining the morphology of the polysilicon deposition layer of the utility model also includes fastening bolts and pressure strips. Four groups of fastening bolts are threadedly inserted on the four corners of the bottom end of the drainage chamber, and a group of pressure strips are fastened on each group of fastening bolts. The bottom end of the pressure strip is tightly attached to the oil pipe.

[0010] In the substrate pickling device for maintaining the morphology of a polysilicon deposition layer of the utility model, a limiting plate is arranged at the end of the first guide rail.

[0011] In the substrate pickling device for maintaining the morphology of a polysilicon deposition layer of the utility model, two sets of limiting plates are arranged at both ends of the second guide rail.

[0012] The utility model discloses a substrate pickling device for maintaining the morphology of a polysilicon deposition layer, wherein the oil pipe is made of stainless steel.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] The substrate is placed inside the pickling basket, and then the pickling basket is controlled to enter the pickling chamber for pickling processing. After the pickling is completed, the first motor is started, and the output end of the first motor drives the first screw to rotate, and then the rotating first screw cooperates with the lifting screw sleeve thread to move the lifting screw sleeve upward, and then the lifted lifting screw sleeve drives the lifting slide plate upward through the linkage plate, and then the lifting slide plate drives the horizontal bracket to move upward as a whole, thereby driving the pickling basket to move upward. When the bottom end of the pickling basket is higher than the top end of the pickling box, the second motor is started, and the output end of the second motor drives the second screw to rotate, and then the rotating second screw and the horizontal slide plate The threaded sleeve cooperates with the threaded sleeve to drive the horizontal slide to translate, and then the horizontal slide smoothly slides on the two sets of second guide rails through the second slider to translate the horizontal slide, and then the pickling basket is driven to translate by the horizontal slide until the pickling basket moves to the upper side of the drain chamber, and then the first motor is started to control the pickling basket to descend, so that the pickling basket enters the drain chamber, and the liquid adhered to the workpiece inside the pickling basket is drained, and the pickling basket and the workpiece are automatically transferred through the transfer mechanism, without the need for personnel to use a lifting stick to manually lift the pickling basket to transfer the workpiece, thereby improving work efficiency, preventing the pickling liquid from splashing on people, and improving convenience of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model will be further described below in conjunction with the accompanying drawings.

[0016] Figure 1 It is a structural schematic diagram of the utility model;

[0017] Figure 2 It is a schematic diagram of the connection structure of the lifting components;

[0018] Figure 3 It is an enlarged structural diagram of the transfer mechanism;

[0019] Figure 4 It is a schematic diagram of the oil pipe installation structure;

[0020] Figure 5 yes Figure 4 A schematic diagram of the enlarged structure of the middle part A;

[0021] Markings in the attached drawings: 1. support frame; 2. pickling box; 3. partition; 4. transfer support plate; 5. motor mounting seat; 6. first motor; 7. first screw; 8. lifting screw sleeve; 9. linkage plate; 10. lifting slide plate; 11. first guide rail; 12. first slider; 13. horizontal bracket; 14. second guide rail; 15. horizontal slide plate; 16. second slider; 17. second screw; 18. second motor; 19. pickling basket; 20. oil pipe; 21. oil inlet valve; 22. oil outlet valve; 23. liquid level meter; 24. anti-slip pads; 25. fastening bolts; 26. pressure strip. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0023] like Figures 1 to 5 As shown, the substrate pickling device for maintaining the morphology of a polycrystalline silicon deposition layer of the utility model comprises a support frame 1, a pickling box 2, a partition 3 and a transfer mechanism, the pickling box 2 is fixedly mounted on the support frame 1, a partition 3 is fixedly mounted inside the pickling box 2, the partition 3 divides the inside of the pickling box 2 into a pickling chamber and a draining chamber, and the transfer mechanism is fixedly mounted on the outer wall of the pickling box 2;

[0024] The transfer mechanism includes a transfer support plate 4, a motor mounting seat 5, a first motor 6, a first screw 7, a lifting screw sleeve 8, a linkage plate 9, a lifting slide plate 10, a first guide rail 11, a first slider 12, a horizontal bracket 13, a second guide rail 14, a horizontal slide plate 15, a second slider 16, a second screw 17, a second motor 18 and a pickling basket 19. The transfer support plate 4 is fixedly mounted on the outer wall of the pickling box 2, the motor mounting seat 5 is fixedly mounted on the bottom end of the transfer support plate 4, the bottom end of the motor mounting seat 5 is fixedly mounted with the first motor 6, the first screw 7 is rotatably mounted on the transfer support plate 4, the power input end of the first screw 7 is tightly connected to the power output end of the first motor 6, the lifting screw sleeve 8 is threadedly mounted on the first screw 7, the linkage plate 9 is tightly connected to the lifting screw sleeve 8, the linkage plate 9 is slidably arranged in the transfer support plate 4, the lifting slide plate 10 is fixedly mounted on the linkage plate 9, and the lifting slide Four groups of first sliders 12 are fixedly installed on the plate 10, two groups of first guide rails 11 are symmetrically fixedly installed on the front end surface of the transfer support plate 4, and the four groups of first sliders 12 are slidably mounted on the two groups of first guide rails 11 respectively. The horizontal bracket 13 is fixedly installed on the lifting slide 10, and two groups of second guide rails 14 are fixedly installed on the horizontal bracket 13. Two groups of second sliders 16 are relatively fixedly installed on the horizontal slide 15, and the two groups of second sliders 16 are slidably mounted on the two groups of second guide rails 14 respectively. The second screw 17 is rotatably installed in the horizontal bracket 13, and the second motor 18 is fixedly installed on the horizontal bracket 13. The output end of the second motor 18 is connected to the input end of the second screw 17. A threaded sleeve is provided on the horizontal slide 15, and the threaded sleeve of the horizontal slide 15 is sleeved on the second screw 17. The pickling basket 19 is fixedly installed on the horizontal slide 15, and the pickling basket 19 is provided with a mesh.The substrate is placed inside the pickling basket 19, and then the pickling basket 19 is controlled to enter the pickling chamber for pickling processing. After the pickling is completed, the first motor 6 is started, and the output end of the first motor 6 drives the first screw 7 to rotate, and then the rotating first screw 7 is threadedly matched with the lifting screw sleeve 8 to move the lifting screw sleeve 8 upward, and then the upwardly moved lifting screw sleeve 8 drives the lifting slide plate 10 to move upward through the linkage plate 9, and then the lifting slide plate 10 drives the horizontal bracket 13 to move upward as a whole, thereby driving the pickling basket 19 to move upward, and when the bottom end of the pickling basket 19 is higher than the top end of the pickling box 2, the second motor 18 is started, and the output end of the second motor 18 drives the second screw 17 to rotate, and then the rotating second screw 17 and the horizontal slide The threaded sleeve of the plate 15 cooperates to make the threaded sleeve drive the horizontal slide plate 15 to translate, and then the horizontal slide plate 15 slides smoothly on the two sets of second guide rails 14 through the second slider 16, so that the horizontal slide plate 15 translates, and then the pickling basket 19 is driven to translate by the horizontal slide plate 15 until the pickling basket 19 moves to the upper side of the drain chamber, and then the first motor 6 is started to control the pickling basket 19 to descend, so that the pickling basket 19 enters the drain chamber, drains the liquid adhering to the workpiece inside the pickling basket 19, and automatically transfers the pickling basket 19 and the workpiece through the transfer mechanism, without the need for personnel to manually lift the pickling basket 19 with a pick stick to transfer the workpiece, thereby improving work efficiency, preventing the pickling liquid from splashing on people, and improving convenience of use. ;

[0025] As a preferred embodiment of the above embodiment, it also includes an oil pipe 20, an oil inlet valve 21 and an oil outlet valve 22. The oil pipe 20 is coiled and paved at the bottom of the drain chamber. The oil pipe 20 is provided with an inlet port and an outlet port. The inlet port of the oil pipe 20 is connected to an oil inlet valve 21 fixedly installed, and the outlet port of the oil pipe 20 is connected to an oil outlet valve 22 fixedly installed. The oil inlet valve 21 and the oil outlet valve 22 are connected to an external circulation pump; the high-temperature oil is pumped from the oil inlet valve 21 to the oil pipe 20 through the circulation pump, and then the high-temperature oil flows out from the oil outlet valve 22, so that the high-temperature oil circulates in the oil pipe 20, so that the oil pipe 20 maintains a high temperature, and then under the action of the high temperature of the oil pipe 20, the pickling basket 19 and the workpiece drying speed entering the drain chamber will be accelerated, thereby improving the processing efficiency.

[0026] As a preferred embodiment of the above embodiment, it also includes a liquid level meter 23, which is fixedly installed on the side wall of the pickling box 2 and is arranged on one side of the pickling chamber. By arranging the liquid level meter 23, it is convenient to observe the liquid level height inside the pickling chamber, and then replenish the pickling liquid in time, thereby improving practicality of use.

[0027] As a preferred embodiment of the above embodiment, it also includes anti-skid feet 24. A plurality of groups of anti-skid feet 24 are provided at the bottom of the support frame 1. By providing the anti-skid feet 24, the supporting friction force at the bottom of the support frame 1 is increased to prevent the device from accidentally sliding and improve the stability of use.

[0028] As a preferred embodiment of the above embodiment, it also includes fastening bolts 25 and pressure strips 26. Four groups of fastening bolts 25 are threadedly inserted on the four corners of the bottom end of the drain chamber. A group of pressure strips 26 is fastened on each group of fastening bolts 25. The bottom end of the pressure strip 26 is tightly attached to the oil pipe 20. By arranging the fastening bolts 25 and the pressure strips 26, it is convenient to fix the oil pipe 20, prevent the oil pipe 20 from shaking, and improve the stability of use.

[0029] As a preferred embodiment of the above, a limit plate is provided at the end of the first guide rail 11 to limit the sliding travel of the lifting slide 10 on the first guide rail 11, thereby preventing the lifting slide 10 from detaching and improving the stability in use.

[0030] As a preferred embodiment of the above, two sets of limit plates are provided at both ends of the second guide rail 14 to limit the sliding travel of the horizontal slide 15 on the second guide rail 14, prevent the horizontal slide 15 from detaching from the second guide rail 14, and improve the stability in use.

[0031] As a preferred embodiment of the above embodiment, the oil pipe 20 is made of stainless steel to increase the corrosion resistance of the oil pipe 20 and improve the stability in use.

[0032] The substrate pickling device for maintaining the morphology of a polycrystalline silicon deposition layer of the utility model, when working, places the substrate inside the pickling basket 19, then controls the pickling basket 19 to enter the pickling chamber for pickling processing, after the pickling is completed, starts the first motor 6, the output end of the first motor 6 drives the first screw 7 to rotate, and then the rotating first screw 7 is threadedly matched with the lifting screw sleeve 8 to make the lifting screw sleeve 8 move up, and then the lifting screw sleeve 8 that moves up drives the lifting slide plate 10 to move up through the linkage plate 9, and then drives the horizontal bracket 13 to move up as a whole through the lifting slide plate 10, and then drives the pickling basket 19 to move up, and when the bottom end of the pickling basket 19 is higher than the acid When the washing box 2 is at the top, the second motor 18 is started, and the output end of the second motor 18 drives the second screw 17 to rotate, and then the rotating second screw 17 cooperates with the threaded sleeve of the horizontal slide 15 so that the threaded sleeve drives the horizontal slide 15 to translate, and then the horizontal slide 15 slides smoothly on the two sets of second guide rails 14 through the second slider 16, so that the horizontal slide 15 translates, and then the pickling basket 19 is driven to translate through the horizontal slide 15 until the pickling basket 19 moves to the upper side of the drain chamber, and then the first motor 6 is started to control the pickling basket 19 to descend, so that the pickling basket 19 enters the drain chamber to drain the liquid adhering to the workpiece inside the pickling basket 19.

[0033] The substrate pickling device for maintaining the morphology of a polysilicon deposition layer of the utility model has common mechanical installation, connection or setting methods, and can be implemented as long as its beneficial effects can be achieved.

[0034] The above are only preferred implementations of the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A substrate pickling device for maintaining the morphology of a polycrystalline silicon deposition layer, characterized in that: It comprises a support frame (1), a pickling box (2), a partition (3) and a transfer mechanism, wherein the pickling box (2) is fixedly mounted on the support frame (1), a partition (3) is fixedly mounted inside the pickling box (2), the partition (3) divides the inside of the pickling box (2) into a pickling chamber and a drain chamber, and the transfer mechanism is fixedly mounted on the outer wall of the pickling box (2); The transfer mechanism comprises a transfer support plate (4), a motor mounting seat (5), a first motor (6), a first screw (7), a lifting screw sleeve (8), a linkage plate (9), a lifting slide plate (10), a first guide rail (11), a first slider (12), a horizontal support (13), a second guide rail (14), a horizontal slide plate (15), a second slider (16), a second screw (17), a second motor (18) and a pickling basket (19). The transfer support plate (4) is fixedly mounted on the outer side wall of the pickling box (2), and the motor mounting seat (5) is fixedly mounted on the outer side wall of the pickling box (2). The motor mounting seat (5) is fixedly mounted at the bottom end of the transfer support plate (4); the first motor (6) is fixedly mounted at the bottom end of the motor mounting seat (5); the first screw rod (7) is rotatably mounted on the transfer support plate (4); the power input end of the first screw rod (7) is tightly connected to the power output end of the first motor (6); the lifting screw sleeve (8) is threadedly mounted on the first screw rod (7); the linkage plate (9) is tightly connected to the lifting screw sleeve (8); the linkage plate (9) is slidably arranged in the transfer support plate (4); and the lifting slide plate (10) is fixedly mounted on the linkage plate (9). The lifting slide (10) is fixedly mounted with four groups of first slide blocks (12); the front end surface of the transfer support plate (4) is symmetrically fixedly mounted with two groups of first guide rails (11); the four groups of first slide blocks (12) are respectively slidably mounted on the two groups of first guide rails (11); the horizontal bracket (13) is fixedly mounted on the lifting slide (10); the horizontal bracket (13) is fixedly mounted with two groups of second guide rails (14); the horizontal slide (15) is relatively fixedly mounted with two groups of second slide blocks (16); the two groups of second slide blocks (16) are relatively fixedly mounted on the lifting slide (10); the two groups of second slide blocks (16) are relatively fixedly mounted on the lifting slide (10); the two groups of second slide blocks (16) are relatively fixedly mounted on the lifting slide (10); the two groups of second slide blocks (16) are relatively fixedly mounted on the lifting slide (10); the two groups of second slide blocks (14 ... ) are respectively slidably mounted on two sets of second guide rails (14), the second screw rod (17) is rotatably mounted in the horizontal bracket (13), the second motor (18) is fixedly mounted on the horizontal bracket (13), the output end of the second motor (18) is connected to the input end of the second screw rod (17), the horizontal slide plate (15) is provided with a threaded sleeve, the threaded sleeve of the horizontal slide plate (15) is sleeved on the second screw rod (17), the pickling basket (19) is fixedly mounted on the horizontal slide plate (15), and the pickling basket (19) is provided with a mesh.

2. The substrate pickling device for maintaining the morphology of a polycrystalline silicon deposited layer according to claim 1, characterized in that: It also comprises an oil pipe (20), an oil inlet valve (21) and an oil outlet valve (22); the oil pipe (20) is coiled and paved at the bottom end of the drain chamber; the oil pipe (20) is provided with an inlet pipe opening and an outlet pipe opening; the inlet pipe opening of the oil pipe (20) is connected to an oil inlet valve (21) fixedly installed thereon; the outlet pipe opening of the oil pipe (20) is connected to an oil outlet valve (22) fixedly installed thereon; the oil inlet valve (21) and the oil outlet valve (22) are connected to an external circulation pump.

3. The substrate pickling device for maintaining the morphology of a polycrystalline silicon deposited layer according to claim 1, characterized in that: It also includes a liquid level meter (23), the liquid level meter (23) being fixedly mounted on the side wall of the pickling tank (2), and the liquid level meter (23) being arranged on one side of the pickling chamber.

4. The substrate pickling device for maintaining the polycrystalline silicon deposited layer morphology according to claim 1, characterized in that: It also includes anti-skid pad feet (24), and a plurality of groups of anti-skid pad feet (24) are arranged at the bottom end of the support frame (1).

5. The substrate pickling device for maintaining the morphology of a polycrystalline silicon deposited layer according to claim 2, characterized in that: It also includes fastening bolts (25) and pressure strips (26), wherein four groups of fastening bolts (25) are threadedly inserted on the four corners of the bottom end of the drain chamber, and a group of pressure strips (26) are fastened on each group of fastening bolts (25), and the bottom end of the pressure strip (26) is tightly attached to the oil pipe (20).

6. The substrate pickling device for maintaining the morphology of a polycrystalline silicon deposited layer according to claim 1, characterized in that: A limiting plate is provided at the end of the first guide rail (11).

7. The substrate pickling device for maintaining the polysilicon deposition layer morphology according to claim 1, characterized in that: Two sets of limiting plates are provided at both ends of the second guide rail (14).

8. The substrate pickling device for maintaining the polycrystalline silicon deposited layer morphology according to claim 2, characterized in that: The oil pipe (20) is made of stainless steel.

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