Auxiliary tool for assembling and taking piece

Abstract

The auxiliary tool comprises a bottom plate, the top of the bottom plate is sequentially and fixedly provided with a limiting plate, a fixing plate and a supporting plate used for supporting the upper end of a wafer loading tool from left to right, and the limiting plate is provided with a limiting piece used for limiting the wafer loading tool in the left-right direction; the top of the fixing plate is provided with a bayonet used for limiting the wafer mounting tool in the front-back direction, and the bottom surface of the bayonet is provided with a vacancy used for preventing the wafer from making contact with the fixing plate. According to the utility model, the stability can be improved, the inclined loading and unloading can be avoided, and the risk of wafer slipping can be reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an auxiliary tooling for loading and unloading wafers. Background Art

[0002] In the semiconductor field, the wafers involved are generally fragile, so the wafer handling process has high requirements.

[0003] At present, the wafer loading tooling involved in the existing process has the characteristics of poor stability, low levelness and easy tilting during the loading and unloading process. The wafer is very easy to slide off during the loading and unloading process, so it is necessary to use auxiliary tooling to avoid loading and unloading tilting, increase stability, and reduce the risk of wafer sliding off. To this end, the utility model proposes an auxiliary tooling for loading and unloading wafers. Utility Model Content

[0004] The embodiment of the present application provides an auxiliary tooling for loading and unloading wafers, which can increase stability, avoid tilting during loading and unloading, and thus reduce the risk of wafers slipping.

[0005] In view of this, the present application provides an auxiliary tooling for loading and unloading sheets, comprising: a bottom plate;

[0006] A limit plate, a fixing plate and a supporting plate for supporting the upper end of the film loading tooling are fixedly arranged on the top of the bottom plate from left to right in sequence;

[0007] The limiting plate is provided with a limiting member for limiting the position of the sheet loading tool in the left and right directions;

[0008] A bayonet for limiting the front and rear directions of the film loading tooling is provided on the top of the fixing plate;

[0009] The bottom surface of the bayonet is provided with a space for preventing the wafer from contacting the fixing plate.

[0010] Optionally, the limiting member is a screw;

[0011] The limiting plate is provided with a threaded hole;

[0012] The screw is threadedly connected to the limiting plate through the threaded hole.

[0013] Optionally, the limiting plate is a flat rectangular parallelepiped structure, and a first chamfer is provided at a corner of the limiting plate.

[0014] Optionally, the first chamfer is an arc chamfer.

[0015] Optionally, the fixing plate is a flat rectangular parallelepiped structure, and a second chamfer is provided at the corner of the fixing plate;

[0016] A third chamfer is provided between the second chamfer and the bayonet.

[0017] Optionally, the second chamfer and the third chamfer are both arc chamfers.

[0018] Optionally, the support plate is a flat and smooth structure.

[0019] Optionally, a circular arc groove is formed on the top of the support plate;

[0020] The arc-shaped groove is provided with fourth chamfers at both ends;

[0021] The corners of the support plate are provided with fifth chamfers.

[0022] Optionally, the fourth chamfer and the fifth chamfer are both arc chamfers.

[0023] Optionally, the base plate is a flat rectangular parallelepiped structure.

[0024] It can be seen from the above technical scheme that the embodiments of the present application have the following advantages: the auxiliary tooling for loading and unloading wafers includes a base plate, and a limit plate, a fixed plate and a support plate are fixedly arranged on the top of the base plate from left to right in sequence. The loading tooling is supported by the bayonet on the support plate and the fixed plate to keep the loading tooling level. At the same time, the bayonet can limit the loading tooling in the front and rear directions, and a limit member is arranged on the limit plate, and the loading tooling can be limited in the left and right directions through the limit member, thereby improving the stability of the loading tooling in the actual operation process, which can greatly reduce the risk of wafer slipping, and at the same time improve the loading and unloading efficiency and increase the benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the structure of the auxiliary tooling for loading and unloading sheets in an embodiment of the present application;

[0026] Figure 2 This is a front view of an auxiliary tooling for loading and unloading sheets in an embodiment of the present application;

[0027] Figure 3 for Figure 2 Cross-section view along the AA direction;

[0028] Figure 4 for Figure 2 Cross-section along the BB direction;

[0029] Figure 5 This is a schematic diagram of the use of the auxiliary tooling for loading and unloading sheets in the embodiment of the present application;

[0030] Wherein, the accompanying drawings are marked as follows:

[0031] 1-limiting plate, 101-threaded hole, 102-first chamfer, 2-fixing plate, 201-bayonet, 202-empty position, 203-second chamfer, 204-third chamfer, 3-support plate, 301-arc-shaped groove, 302-fourth chamfer, 303-fifth chamfer, 4-bottom plate, 5-screw, 6-loading tooling. DETAILED DESCRIPTION

[0032] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0033] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0034] Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] This application provides an embodiment of an auxiliary tool for loading and unloading sheets. For details, please refer to Figures 1 to 5 .

[0036] The auxiliary tooling for loading and unloading wafers in this embodiment includes: a base plate 4, on the top of which are fixedly provided with a limit plate 1, a fixed plate 2 and a support plate 3 for supporting the upper end of a wafer loading tooling 6 from left to right, wherein the wafer loading tooling 6 belongs to the prior art and its function is to be a carrier for growing wafers; a limit member for limiting the wafer loading tooling 6 in the left and right directions is provided on the limit plate 1, a bayonet 201 for limiting the wafer loading tooling 6 in the front and rear directions is provided on the top of the fixed plate 2, and a space 202 for preventing the wafer from contacting the fixed plate 2 is provided on the bottom surface of the bayonet 201.

[0037] It should be noted that the auxiliary tooling for loading and unloading wafers includes a base plate 4, on the top of which a limit plate 1, a fixed plate 2 and a support plate 3 are fixedly arranged in sequence from left to right. The wafer loading tooling 6 is supported by the bayonet 201 on the support plate 3 and the fixed plate 2, so that the wafer loading tooling 6 remains horizontal. At the same time, the bayonet 201 can limit the wafer loading tooling 6 in the front and rear directions, and a limit member is arranged on the limit plate 1, and the wafer loading tooling 6 can be limited in the left and right directions by the limit member, thereby improving the stability of the wafer loading tooling 6 during actual operation, which can greatly reduce the risk of wafer slipping, while improving the loading and unloading efficiency and increasing benefits.

[0038] The above is an embodiment of the first embodiment of an auxiliary tooling for loading and unloading a sheet provided in the embodiment of the present application. The following is an embodiment of the second embodiment of an auxiliary tooling for loading and unloading a sheet provided in the embodiment of the present application. For details, please refer to Figures 1 to 5 .

[0039] The auxiliary tooling for loading and unloading wafers in this embodiment comprises: a bottom plate 4, a limit plate 1, a fixed plate 2 and a support plate 3 for supporting the upper end of the wafer loading tooling 6 are fixedly arranged on the top of the bottom plate 4 from left to right in sequence, a limit plate 1 is provided with a limiter for limiting the wafer loading tooling 6 in the left and right directions, a bayonet 201 is provided on the top of the fixed plate 2 for limiting the wafer loading tooling 6 in the front and rear directions, and a space 202 is provided on the bottom surface of the bayonet 201 for preventing the wafer from contacting the fixed plate 2. In this embodiment, the length of the space 202 is 33 mm and the depth is 10 mm.

[0040] It can be understood that the depth of the empty space 202 is designed according to the depth of the tooling for loading wafers to prevent the wafer from contacting the bottom surface of the empty space 202; the bayonet 201 can prevent the loading wafer tooling 6 from moving forward and backward while supporting the loading wafer tooling 6 (the bottom surface of the bayonet 201 is used to support the loading wafer tooling 6, and the side walls are used for front and rear limiting).

[0041] The limiting member may be a screw 5, and a threaded hole 101 is provided on the limiting plate 1. The screw 5 is threadedly connected to the limiting plate 1 through the threaded hole 101. By rotating the screw 5, the left and right limits of the film loading tool 6 can be adjusted (to facilitate the limiting of different states of the film loading tool 6), thereby improving the stability of the film loading tool 6 during actual operation. Specifically, the aperture of the threaded hole 101 may be between M8 and M20, and the length of the screw 5 may be 8 to 14 mm.

[0042] The limiting plate 1 may be a flat rectangular parallelepiped structure, and a first chamfer 102 is provided at the corner of the limiting plate 1. Specifically, the first chamfer 102 may be an arc chamfer, one is to reduce right angles and reduce risks, and the other is for aesthetics. In this embodiment, the length, width, and height of the limiting plate 1 are 70 mm, 5 mm, and 75 mm, respectively, and the size is designed to cooperate with the film loading tooling 6 involved in the process; the arc diameter of the first chamfer 102 is 3 mm.

[0043] The fixing plate 2 may be a flat rectangular parallelepiped structure, and a second chamfer 203 is provided at the corner of the fixing plate 2; a third chamfer 204 is provided between the second chamfer 203 and the bayonet 201. Specifically, both the second chamfer 203 and the third chamfer 204 may be arc chamfers. In this embodiment, the arc diameter of the second chamfer 203 is 3 mm, and its function is the same as that of the first chamfer 102; the arc diameter of the third chamfer 204 is 2 mm, which reduces the right angle and reduces the risk of the boron sheet being broken.

[0044] The support plate 3 may be a flat and smooth structure.

[0045] The top of the support plate 3 is provided with an arc-shaped groove 301, which plays the role of supporting the sheet loading tool 6. By cooperating with the fixing plate 2, the sheet loading tool 6 is horizontally arranged, thereby achieving the purpose of stabilizing the tool; fourth chamfers 302 are arranged at both ends of the arc-shaped groove 301, and fifth chamfers 303 are arranged at the corners of the support plate 3. Specifically, the fourth chamfer 302 and the fifth chamfer 303 can both be arc chamfers, and their functions are the same as those of the first chamfer 102.

[0046] The bottom plate 4 may be a flat rectangular parallelepiped structure, and its size may be designed according to the size of the film loading tool 6 and the convenience of operation by personnel. In this embodiment, the bottom plate 4 has a length of 250-350 mm and a width of 70 mm.

[0047] In the specific implementation, the film loading tool 6 is manually placed on the auxiliary tool. The bottom of the film loading tool 6 is in close contact with the screw 5 on the limit plate 1. The limit of the film loading tool 6 in the left and right directions can be adjusted by adjusting the extension of the screw 5. The upper end of the film loading tool 6 is placed on the support plate 3, so that the film loading tool 6 can be in a horizontal state. The middle part of the film loading tool 6 is stuck on the bayonet 201 of the fixed plate 2 to prevent the film loading tool 6 from moving in the front and back directions. After placing it, the film is loaded and unloaded. After taking out a piece, the film loading tool 6 is lifted and rotated. In the same way, it is fixed again, and then the next piece is taken out, and so on.

[0048] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An auxiliary tool for loading and unloading sheets, characterized in that: include: Base plate; A limit plate, a fixing plate and a supporting plate for supporting the upper end of the film loading tooling are fixedly arranged on the top of the bottom plate from left to right in sequence; The limiting plate is provided with a limiting member for limiting the position of the sheet loading tool in the left and right directions; A bayonet for limiting the front and rear directions of the film loading tooling is provided on the top of the fixing plate; The bottom surface of the bayonet is provided with a space for preventing the wafer from contacting the fixing plate.

2. The auxiliary tooling for loading and unloading sheets according to claim 1, characterized in that: The limiting member is a screw; The limiting plate is provided with a threaded hole; The screw is threadedly connected to the limiting plate through the threaded hole.

3. The auxiliary tooling for loading and unloading sheets according to claim 1, characterized in that: The limiting plate is a flat rectangular parallelepiped structure, and a first chamfer is arranged at a corner of the limiting plate.

4. The auxiliary tooling for loading and unloading sheets according to claim 3, characterized in that: The first chamfer is an arc chamfer.

5. The auxiliary tooling for loading and unloading sheets according to claim 1, characterized in that: The fixing plate is a flat rectangular parallelepiped structure, and a second chamfer is provided at the corner of the fixing plate; A third chamfer is provided between the second chamfer and the bayonet.

6. The auxiliary tool for loading and unloading sheets according to claim 5, characterized in that: The second chamfer and the third chamfer are both arc chamfers.

7. The auxiliary tool for loading and unloading sheets according to claim 1, characterized in that: The support plate is a flat and smooth structure.

8. The auxiliary tooling for loading and unloading sheets according to claim 1, characterized in that: The top of the support plate is provided with an arc-shaped groove; The arc-shaped groove is provided with fourth chamfers at both ends; The corners of the support plate are provided with fifth chamfers.

9. The auxiliary tooling for loading and unloading sheets according to claim 8, characterized in that: The fourth chamfer and the fifth chamfer are both arc chamfers.

10. The auxiliary tool for loading and unloading sheets according to claim 1, characterized in that: The bottom plate is a flat rectangular parallelepiped structure.

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