Heating wire capable of realizing zoned temperature control

Abstract

The utility model relates to the technical field of semiconductors, in particular to a heating wire capable of controlling temperature in a partitioned manner, which comprises an armored shell, an insulating layer and heating wire cores, the insulating layer is arranged in the armored shell, and the two independent heating wire cores with different heating powers are respectively arranged in different length intervals in the insulating layer; the heating wire core comprises a heating wire inner core and a heating wire outer core, and the heating wire inner core and the heating wire outer core are arranged on the inner side and the outer side of the heating wire respectively; the heating wire is processed into a heating plate structure through bending, and the heating wire inner core and the heating wire outer core are distributed in different areas of the heating plate. According to the heating wire capable of realizing zoned temperature control, the inner cores of the armored heating wire are added, so that the two inner cores are respectively positioned in different intervals of the heating wire, and zoned temperature control of one heating wire is realized by respectively controlling the heating power of the two inner cores; the space is saved; the assembly is simple, and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a heating wire capable of controlling temperature by different zones. Background Art

[0002] The heating plate is a core component in the semiconductor industry. The wafer processing process is very sensitive to temperature changes, and the uniformity of wafer temperature is an important factor affecting the quality of wafer processing. The wafer temperature is affected by multiple factors such as the bombardment of plasma gas above and the heating of the heating plate below. At present, as the size of wafers continues to increase, the equipment requirements are more precise, and the structural design of the heating wire and its functional stability are becoming more and more important. The heating wire structure will affect the temperature distribution of the heating plate, thereby affecting the temperature of the wafer in contact with it. Therefore, it is very important to be able to design a heating wire structure with uniform temperature. However, the uneven distribution of plasma gas in the wafer processing chamber means that even if the temperature of the heating plate is uniform, the temperature of the wafer may not be uniform. Therefore, a heating plate with multi-zone temperature control can increase the power of the heating wire in the area with lower wafer temperature and reduce the power in the area with higher wafer temperature, which can improve the uniformity of wafer temperature to a certain extent. However, it is difficult to put multiple heating wires in the limited space structure inside the heating plate. Therefore, a heating wire structure with zoned temperature control that can achieve multi-zone temperature control in a limited space structure is proposed. Utility Model Content

[0003] In order to solve the above problems, the utility model provides a heating wire with zoned temperature control. The heating wire with zoned temperature control increases the inner core of the armored heating wire so that the two inner cores are respectively located in different intervals of the heating wire, and the zoned temperature control of one heating wire is achieved by separately controlling the heating power of the two inner cores. The utility model has the advantages of saving space and simple assembly.

[0004] The technical solution of the utility model is as follows:

[0005] A heating wire capable of zoned temperature control comprises an armored shell, an insulating layer and a heating wire core, wherein the insulating layer is arranged inside the armored shell, and two independent heating wire cores with different heating powers are respectively arranged in different length intervals in the insulating layer.

[0006] The heating wire core comprises a heating wire inner core and a heating wire outer core, and the heating wire inner core and the heating wire outer core are respectively arranged on the inner side and the outer side of the heating wire.

[0007] The heating wire is processed into a heating disk structure by bending, and the inner core of the heating wire and the outer core of the heating wire are distributed in different areas of the heating disk.

[0008] The inner core of the heating wire is distributed in the inner ring area of ​​the heating disk, and the outer core of the heating wire is distributed in the outer ring area of ​​the heating disk.

[0009] Optionally, the inner core of the heating wire is distributed in a left area of ​​the heating plate, and the outer core of the heating wire is distributed in a right area of ​​the heating plate.

[0010] Optionally, the inner core of the heating wire and the outer core of the heating wire are respectively provided with independent temperature control circuits.

[0011] The beneficial effects of the utility model are:

[0012] The utility model discloses a heating wire capable of zoned temperature control. The heating wire capable of zoned temperature control increases the inner core of the armored heating wire so that the two inner cores are respectively located in different intervals of the heating wire, and the zoned temperature control of one heating wire is achieved by respectively controlling the heating power of the two inner cores. The utility model has the advantages of saving space and simple assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only used to illustrate the preferred embodiment and are not considered to be limiting of the present invention.

[0014] In the attached picture:

[0015] Figure 1 This is a schematic diagram of the expanded cross-sectional structure of a heating wire capable of zoned temperature control according to an embodiment of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of a heating plate formed by bending a heating wire capable of zoned temperature control according to an embodiment of the utility model;

[0017] The components represented by the reference numerals in the figure are:

[0018] The utility model comprises: 1. an armored outer shell, 2. an insulating layer, 3. a heating wire inner core, and 4. a heating wire outer core. DETAILED DESCRIPTION

[0019] like Figure 1 As shown, the heating wire has a zone temperature control function, and its structure mainly includes an armored shell 1, an insulating layer 2 and a heating wire core. Inside the armored shell 1, an insulating layer 2 is provided to provide electrical isolation. Inside the insulating layer 2, two independent heating wire cores with different heating powers are provided, which are respectively located in different length intervals.

[0020] The design of the heating wire core is special in that it is composed of a heating wire inner core 3 and a heating wire outer core 4. The heating wire inner core 3 is located inside the heating wire, while the heating wire outer core 4 surrounds the outer side of the inner core. Thus, the heating wire is divided into a heating wire section A and a heating wire section B from a whole perspective.

[0021] In order to meet the requirements of specific applications, the heating wire adopts a bending design to form a heating disk structure. In this structure, the heating wire inner core 3 and the heating wire outer core 4 are respectively distributed in different areas of the heating disk to achieve temperature zone control.

[0022] A specific distribution method is as follows: Figure 2 As shown, the heating wire inner core 3 is located in the inner ring area of ​​the heating disk, while the heating wire outer core 4 is located in the outer ring area. Such a layout helps to achieve temperature gradient control from the center to the edge.

[0023] Another distribution mode is that the heating wire inner core 3 is located in the left area of ​​the heating plate, and the heating wire outer core 4 is located in the right area. This layout is suitable for the scene that the temperature of the left and right sides needs to be independently controlled.

[0024] To ensure that the heating wire inner core 3 and the heating wire outer core 4 can independently control the temperature, they are each equipped with an independent temperature control circuit. Through these circuits, the temperature of each area can be accurately adjusted to meet different application requirements.

[0025] The heating wire with zoned temperature control is used for heating equipment such as heating plates and heating uniform gas plates. By designing the internal structure of the armored heating wire, multi-zone temperature control of a single heating wire is achieved. By adding the inner core of the armored heating wire, the two inner cores are placed in different zones of the heating wire, and by controlling the heating power of the two inner cores separately, zoned temperature control of a heating wire is achieved. It has the advantages of saving space and simple assembly.

Claims

1. A heating wire capable of zoned temperature control, characterized in that: It comprises an armored shell (1), an insulating layer (2) and a heating wire core, wherein the insulating layer (2) is arranged inside the armored shell (1), and two mutually independent heating wire cores with different heating powers are respectively arranged at different length intervals inside the insulating layer (2).

2. A heating wire capable of zoned temperature control according to claim 1, characterized in that: The heating wire core comprises a heating wire inner core (3) and a heating wire outer core (4), and the heating wire inner core (3) and the heating wire outer core (4) are respectively arranged on the inner side and the outer side of the heating wire.

3. A heating wire capable of zoned temperature control according to claim 2, characterized in that: The heating wire is processed into a heating disk structure by bending, and the heating wire inner core (3) and the heating wire outer core (4) are distributed in different areas of the heating disk.

4. The heating wire capable of zoned temperature control according to claim 3, characterized in that: The heating wire inner core (3) is distributed in the inner ring area of ​​the heating disk, and the heating wire outer core (4) is distributed in the outer ring area of ​​the heating disk.

5. The heating wire capable of zoned temperature control according to claim 3, characterized in that: The heating wire inner core (3) is distributed in the left area of ​​the heating disk, and the heating wire outer core (4) is distributed in the right area of ​​the heating disk.

6. The heating wire capable of zoned temperature control according to claim 2, characterized in that: The heating wire inner core (3) and the heating wire outer core (4) are respectively provided with independent temperature control circuits.

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