Chip cleaning device

Abstract

The utility model discloses a chip cleaning device, which belongs to the technical field of chip processing and is technically characterized by comprising a lifting mechanism and a cleaning mechanism. According to the chip cleaning device, when a chip is cleaned, the chip can be placed in the containing groove according to the size of the chip, then the containing piece is covered with the cover plate, the cover plate and the containing piece are clamped through the clamping piece so that the cover plate and the containing piece can be more stable, and then the lifting mechanism can be controlled to operate by starting the motor; through operation of the lifting mechanism, the cleaning mechanism can be controlled to carry out lifting operation, during the cleaning period of the chip, circulation of cleaning liquid on the surface of the chip can be increased through vertical movement of the cleaning mechanism, and then dust on the surface of the chip can be taken away.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip processing, and in particular relates to a chip cleaning device. Background Art

[0002] The design and production of semiconductor integrated circuits, as well as the manufacturing of various micro-electromechanical systems (MEMS) functional devices, are increasingly showing a tendency towards large-scale development. At the same time, the development of material technology has also enabled various large-sized semiconductor material wafers to be put into the field of device manufacturing. In order to ensure the performance consistency and yield rate of the chip, the uniformity of materials and processes in the manufacturing process has become an important reference indicator. For some functional devices, more and more complex process steps are still required after chip screening.

[0003] When processing chips, fine dust generated during processing may stick to the chip surface. In order to prevent the dust from affecting the quality of the chip, the chip usually needs to be placed in a cleaning solution for cleaning. However, in the prior art, manual cleaning operations are usually required. Therefore, we propose a chip cleaning device to solve the above-mentioned problem. Utility Model Content

[0004] The purpose of the utility model is to provide a chip cleaning device to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A chip cleaning device, a base; characterized in that: comprising:

[0007] A lifting mechanism is arranged at the upper end of the base, and the lifting mechanism includes a fixing member, a lifting member and a screw rod. The fixing member is arranged at the upper end of the base, a lifting groove is opened at one end of the fixing member, the screw rod is arranged in the lifting groove, and the lifting member is arranged on the circumferential surface of the screw rod;

[0008] A cleaning mechanism is arranged on one side of the lifting member.

[0009] Preferably, the lifting mechanism further includes a clamping member, the clamping member is arranged at one end of the lifting member, and the cleaning mechanism is arranged inside the clamping member.

[0010] Preferably, the lifting mechanism further includes a motor, a rotating hole is opened at the upper end of the fixing member, the motor is arranged at the upper end of the fixing member, the output end of the motor is arranged in the rotating hole, and the output end of the motor is connected to the screw rod.

[0011] Preferably, the cleaning mechanism comprises a cover plate and a placement piece, the cover plate and the placement piece are both arranged inside the clamping piece, and the cover plate is arranged above the placement piece.

[0012] Preferably, a first through hole is opened at the upper end of the cover plate, and the first through hole passes through the cover plate.

[0013] Preferably, a placement groove is provided at the upper end of the placement piece, a second through hole is provided inside the placement groove, and the second through hole passes through the placement piece.

[0014] Preferably, the first through hole and the second through hole are of the same size and shape and are located on the same vertical line.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. The chip can be placed more stably through the cleaning mechanism, and the cleaning liquid can contact the chip through the first through hole and the second through hole during cleaning, so as to wash away the dust on the surface of the chip.

[0017] 2. The cleaning mechanism can be controlled to rise and fall through the lifting mechanism, so that when cleaning the chip and after cleaning, there is no need for the staff to manually control the cleaning mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a top view of the utility model;

[0019] Figure 2 It is a partial exploded view of the lifting mechanism of the utility model;

[0020] Figure 3 It is a partial exploded view of the cleaning mechanism of the utility model.

[0021] In the figure: 10, base; 20, fixing part; 21, motor; 22, lifting slot; 23, clamping part; 24, lifting part; 25, screw rod; 26, rotating hole; 30, cover plate; 31, first through hole; 40, placement part; 41, placement slot; 42, second through hole. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-Figure 3 The utility model provides a chip cleaning device, which is characterized by:

[0024] A chip cleaning device, a base 10; characterized in that: it includes

[0025] The lifting mechanism is arranged at the upper end of the base 10, and the lifting mechanism includes a fixing member 20, a lifting member 24 and a screw rod 25. The fixing member 20 is arranged at the upper end of the base 10, and a lifting groove 22 is opened at one end of the fixing member 20. The screw rod 25 is arranged in the lifting groove 22, and the lifting member 24 is arranged on the circumferential surface of the screw rod 25;

[0026] Cleaning mechanism: The cleaning mechanism is arranged on one side of the lifting member 24 .

[0027] Specifically, when cleaning the chip, the chip is first placed through the cleaning mechanism, and then the cleaning mechanism is set at one end of the lifting member 24. Since the lifting member 24 is threaded on the circumferential surface of the screw rod 25, the lifting member 24 and the cleaning mechanism can be driven to rise and fall by rotating the screw rod 25, thereby facilitating the cleaning operation.

[0028] In this embodiment, the lifting mechanism further includes a clamping member 23 . The clamping member 23 is disposed at one end of the lifting member 24 , and the cleaning mechanism is disposed inside the clamping member 23 .

[0029] Specifically, in order to make the arrangement of the cleaning mechanism more stable, a clamping member 23 is provided at one end of the lifting member 24, and the cleaning mechanism is clamped by the clamping member 23, so as to prevent the cleaning mechanism from falling during the cleaning process.

[0030] In this embodiment, the lifting mechanism also includes a motor 21. A rotating hole 26 is opened at the upper end of the fixing member 20. The motor 21 is arranged at the upper end of the fixing member 20. The output end of the motor 21 is arranged in the rotating hole 26. The output end of the motor 21 is connected to the screw rod 25.

[0031] Specifically, in order to automatically control the lifting of the cleaning mechanism, a motor 21 is provided at the upper end of the fixing member 20. By connecting the output end of the motor 21 to the screw rod 25, the rotation of the screw rod 25 can be automatically controlled, thereby controlling the lifting of the cleaning mechanism.

[0032] In this embodiment, the cleaning mechanism includes a cover plate 30 and a placement member 40 . The cover plate 30 and the placement member 40 are both disposed inside the clamping member 23 , and the cover plate 30 is disposed above the placement member 40 .

[0033] Specifically, in order to facilitate the placement of chips before cleaning and the removal of chips after cleaning, a cover plate 30 and a placement piece 40 are provided, and the cover plate 30 is provided at the upper end of the placement piece 40. In order to make the settings of the two more stable, both are provided inside the clamping piece 23.

[0034] In this embodiment, a first through hole 31 is defined at the upper end of the cover plate 30 , and the first through hole 31 passes through the cover plate 30 .

[0035] Specifically, in order to allow the cleaning liquid to flow between the cover plate 30 and the placement member 40 during cleaning, a first through hole 31 is opened at the upper end of the cover plate 30 .

[0036] In this embodiment, a placement groove 41 is formed at the upper end of the placement piece 40 , a second through hole 42 is formed inside the placement groove 41 , and the second through hole 42 penetrates the placement piece 40 .

[0037] Specifically, in order to place the chip more stably during cleaning, a placement groove 41 is opened at the upper end of the placement member 40 . Similarly, in order to allow the cleaning liquid to flow, a second through hole 42 is opened inside the placement groove 41 .

[0038] In this embodiment, the first through hole 31 and the second through hole 42 are the same in size and shape and are located on the same vertical line.

[0039] Specifically, in order to make the cleaning liquid flow more smoothly, the first through hole 31 and the second through hole 42 are set to have the same size and shape, and the two are located on the same vertical line.

[0040] The working principle and use process of the utility model are as follows: when cleaning the chip, the chip can be first placed in the placement groove 41 according to its own size, and then the cover plate 30 is covered on the top of the placement piece 40, and the cover plate 30 and the placement piece 40 are clamped together by the clamping piece 23, so that the two are more stable, and then the motor 21 can be started to control the operation of the lifting mechanism. Through the operation of the lifting mechanism, the cleaning mechanism can be controlled to perform lifting operations. During the cleaning of the chip, the up and down movement of the cleaning mechanism can increase the circulation of the cleaning liquid on the chip surface, thereby being able to remove the dust on the chip surface.

[0041] The electronic components and modules used in the content of this utility model can all be parts commonly used in the market that can realize the specific functions in this case, and the specific models and sizes can be selected and adjusted according to actual needs.

[0042] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A chip cleaning device, a base (10); characterized in that: include A lifting mechanism is arranged at the upper end of the base (10), the lifting mechanism comprises a fixing member (20), a lifting member (24) and a screw rod (25), the fixing member (20) is arranged at the upper end of the base (10), a lifting groove (22) is opened at one end of the fixing member (20), the screw rod (25) is arranged in the lifting groove (22), and the lifting member (24) is arranged on the circumferential surface of the screw rod (25); A cleaning mechanism is provided on one side of the lifting member (24).

2. A chip cleaning device according to claim 1, characterized in that: The lifting mechanism further comprises a clamping member (23), wherein the clamping member (23) is arranged at one end of the lifting member (24), and the cleaning mechanism is arranged inside the clamping member (23).

3. A chip cleaning device according to claim 2, characterized in that: The lifting mechanism further comprises a motor (21); a rotating hole (26) is provided at the upper end of the fixing member (20); the motor (21) is arranged at the upper end of the fixing member (20); an output end of the motor (21) is arranged in the rotating hole (26); and the output end of the motor (21) is connected to the screw rod (25).

4. A chip cleaning device according to claim 2, characterized in that: The cleaning mechanism comprises a cover plate (30) and a placement piece (40); the cover plate (30) and the placement piece (40) are both arranged inside the clamping piece (23); and the cover plate (30) is arranged above the placement piece (40).

5. A chip cleaning device according to claim 4, characterized in that: A first through hole (31) is provided at the upper end of the cover plate (30), and the first through hole (31) passes through the cover plate (30).

6. A chip cleaning device according to claim 5, characterized in that: A placement groove (41) is provided at the upper end of the placement piece (40), a second through hole (42) is provided inside the placement groove (41), and the second through hole (42) passes through the placement piece (40).

7. A chip cleaning device according to claim 6, characterized in that: The first through hole (31) and the second through hole (42) are of the same size and shape and are located on the same vertical line.

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