Infrared and microwave combined drying equipment for graphite plate

Abstract

The utility model relates to the technical field of rapid drying after cleaning of a semiconductor epitaxial growth bearing graphite plate, in particular to infrared and microwave combined drying equipment for a graphite plate, an infrared heating assembly and a microwave heating assembly are arranged in a drying cavity, the infrared heating assembly is used for infrared heating of a product, and the microwave heating assembly is used for microwave heating of the product. The microwave heating assembly is used for conducting microwave heating on products, an air inlet and an air outlet are formed in the two sides of the drying cavity correspondingly and communicate with the interior of the drying cavity correspondingly, the outer portions of the air inlet and the air outlet are connected through a ventilation pipeline to form an air flue closed loop, and a draught fan is arranged on the ventilation pipeline. The ventilation pipeline is further connected with a moisture discharging pipeline, and a first air adjusting valve is arranged on the moisture discharging pipeline. Compared with the prior art, the infrared and microwave combined drying equipment for the graphite plate adopts infrared and microwave to dry the graphite plate, so that the pollution is reduced, the productivity is improved, and the energy consumption is reduced.

Description

[Technical field]

[0001] The utility model relates to the technical field of quick drying after cleaning of a graphite disk carrying semiconductor epitaxial growth, in particular to infrared and microwave combined drying equipment for the graphite disk. [Background technology]

[0002] Since the components and connections in the integrated circuit are very fine, if they are contaminated by dust particles and metal during the manufacturing process, it is easy to cause damage to the circuit function in the chip, resulting in short circuits or open circuits, etc., leading to the failure of the integrated circuit and affecting the formation of geometric features. Therefore, during the manufacturing process, it is necessary to eliminate external pollution sources, and the carrier plate needs to be cleaned and dried to ensure the cleanliness of the carrier.

[0003] In the prior art, most semiconductor graphite disks are dried by 304 heating tubes + fans after cleaning, which has low drying efficiency and high power consumption. [Utility Model Content]

[0004] In order to overcome the above problems, the utility model proposes an infrared and microwave combined drying device for graphite discs which can effectively solve the above problems.

[0005] The utility model provides a technical solution to solve the above technical problems: provide an infrared and microwave combined drying device for graphite discs, including a drying cavity, wherein an infrared heating component and a microwave heating component are arranged inside the drying cavity, wherein the infrared heating component is used to perform infrared heating on the product, and the microwave heating component is used to perform microwave heating on the product; air inlets and air outlets are respectively arranged on both sides of the drying cavity, wherein the air inlets and air outlets are respectively communicated with the interior of the drying cavity, and the outsides of the air inlets and air outlets are connected through ventilation ducts to form a closed air duct loop; a fan is arranged on the ventilation duct, and a dehumidification duct is also connected to the ventilation duct, and a first air regulating valve is arranged on the dehumidification duct.

[0006] Preferably, the infrared heating assembly comprises a plurality of infrared heating tubes, and the plurality of infrared heating tubes are respectively arranged on two opposite inner side walls of the drying chamber.

[0007] Preferably, the microwave heating assembly comprises a plurality of microwave generators, and the plurality of microwave generators are respectively arranged on two opposite inner side walls of the drying cavity.

[0008] Preferably, the ventilation duct is connected to an air filter, and the air filter is located on one side of the air inlet.

[0009] Preferably, a fresh air duct is connected to the ventilation duct, and a second air regulating valve is provided on the fresh air duct.

[0010] Preferably, a heat-insulating layer is provided inside the drying chamber.

[0011] Preferably, an outer cover is provided on the outer side of the infrared heating tube.

[0012] Preferably, the microwave heating assembly comprises a microwave power supply, and the microwave power supply is connected to the microwave generator.

[0013] Preferably, the infrared heating component includes a temperature control probe, and the microwave heating component includes an infrared probe.

[0014] Preferably, a pneumatic door is provided on the drying chamber, and a product carrier is provided in the middle of the drying chamber.

[0015] Compared with the prior art, the infrared and microwave combined drying equipment for graphite discs of the utility model can effectively take into account the drying of graphite discs of various sizes and quantities, which is conducive to avoiding drying dead corners, and uses infrared and microwave to dry graphite discs, thereby reducing pollution, improving production capacity, and reducing energy consumption.

Brief Description of the Drawings

[0016] Figure 1 This is a schematic diagram of the structure of the infrared and microwave combined drying equipment for graphite discs of the utility model;

[0017] Figure 2 The utility model is a schematic diagram of a drying chamber of an infrared and microwave combined drying device for graphite disks. [Specific implementation method]

[0018] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below with reference to the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0019] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are limited to relative positions on the specified view rather than absolute positions.

[0020] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0021] See also Figure 1 and Figure 2The utility model discloses an infrared and microwave combined drying device for graphite discs, comprising a drying chamber 1, wherein an infrared heating component and a microwave heating component are arranged inside the drying chamber 1, wherein the infrared heating component is used for performing infrared heating on the product, and the microwave heating component is used for performing microwave heating on the product.

[0022] The drying chamber 1 is provided with an air inlet 3 and an air outlet 31 on both sides thereof, the air inlet 3 and the air outlet 31 are respectively connected to the interior of the drying chamber 1 , and the outside of the air inlet 3 and the air outlet 31 are connected through a ventilation duct to form a closed air duct loop.

[0023] The ventilation duct is provided with a fan 6 for promoting air circulation.

[0024] The ventilation duct is also connected to a dehumidification duct, and a first air regulating valve 11 is provided on the dehumidification duct. The first air regulating valve 11 is used to adjust the exhaust volume of the dehumidification duct.

[0025] The inner side of the drying chamber 1 is provided with a heat-insulating layer 2 to prevent heat loss and improve drying efficiency.

[0026] The infrared heating assembly includes a plurality of infrared heating tubes 5, which are respectively arranged on two opposite inner side walls of the drying chamber 1. An outer cover is arranged outside the infrared heating tube 5 to prevent infrared rays from directly irradiating the product. The infrared heating tube 5 is a quartz heating tube.

[0027] The microwave heating assembly includes a plurality of microwave generators 8 , which are respectively disposed on two opposite inner side walls of the drying cavity 1 .

[0028] A product carrier is disposed in the middle of the drying chamber 1 for carrying products.

[0029] The microwave heating assembly includes a microwave power supply 4 , which is connected to a microwave generator 8 and is used to supply power to the microwave generator 8 .

[0030] The infrared heating component includes a temperature control probe, and the microwave heating component includes an infrared probe.

[0031] The ventilation duct is connected with an air filter 7 , which is located at one side of the air inlet 3 to ensure that the air entering the drying chamber 1 is free of impurities.

[0032] The ventilation duct is connected to a fresh air duct, on which a second air regulating valve 10 is provided. The fresh air duct is used to supplement fresh air to the air duct closed loop.

[0033] The fresh air duct and the moisture removal duct are respectively located on both sides of the fan 6.

[0034] The drying chamber 1 is provided with a pneumatic door for opening or closing.

[0035] During operation, the pneumatic door of the drying chamber 1 is opened, and the mechanical arm puts the cleaned graphite disc and flower basket into the drying chamber 1. After the pneumatic door is closed and sealed, the microwave power supply 4 is turned on, and the microwave generator 8 dries the moisture on the graphite disc. Microwave heating is turned on first. While drying, the fan 6 operates to circulate air, and the air is filtered by the air filter 7 and enters the drying chamber 1 through the air inlet 3. After N minutes, infrared heating is turned on again, and the heating cycle is repeated. The second air regulating valve 10 and the first air regulating valve 11 on the ventilation duct can be controlled to add fresh air and remove moisture.

[0036] Compared with the prior art, the infrared and microwave combined drying equipment for graphite discs of the utility model can effectively take into account the drying of graphite discs of various sizes and quantities, which is conducive to avoiding drying dead corners, and uses infrared and microwave to dry graphite discs, thereby reducing pollution, improving production capacity, and reducing energy consumption.

[0037] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Any modifications, equivalent substitutions and improvements made within the concept of the present invention should be included in the patent protection scope of the present invention.

Claims

1. An infrared and microwave combined drying device for graphite discs, characterized in that: It comprises a drying cavity, wherein an infrared heating component and a microwave heating component are arranged inside the drying cavity, wherein the infrared heating component is used to perform infrared heating on the product, and the microwave heating component is used to perform microwave heating on the product; An air inlet and an air outlet are respectively arranged on both sides of the drying chamber, the air inlet and the air outlet are respectively connected to the inside of the drying chamber, and the outside of the air inlet and the air outlet are connected through a ventilation duct to form a closed air duct loop; The ventilation duct is provided with a fan, the ventilation duct is also connected with a dehumidification duct, and the dehumidification duct is provided with a first air regulating valve.

2. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: The infrared heating assembly comprises a plurality of infrared heating tubes, and the plurality of infrared heating tubes are respectively arranged on two opposite inner side walls of the drying chamber.

3. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: The microwave heating assembly comprises a plurality of microwave generators, and the plurality of microwave generators are respectively arranged on two opposite inner side walls of the drying cavity.

4. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: The ventilation duct is connected with an air filter, and the air filter is located at one side of the air inlet.

5. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: The ventilation duct is connected to a fresh air duct, and the fresh air duct is provided with a second air regulating valve.

6. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: A heat-insulating layer is arranged inside the drying cavity.

7. The infrared and microwave combined drying device for graphite discs according to claim 2, characterized in that: An outer cover is arranged on the outer side of the infrared heating tube.

8. The infrared and microwave combined drying device for graphite discs according to claim 3, characterized in that: The microwave heating assembly comprises a microwave power supply, and the microwave power supply is connected to a microwave generator.

9. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: The infrared heating component includes a temperature control probe, and the microwave heating component includes an infrared probe.

10. The infrared and microwave combined drying device for graphite discs according to claim 1, characterized in that: The drying chamber is provided with a pneumatic door, and a product carrier is provided at the middle position inside the drying chamber.

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