Silicon wafer receiving device and silicon wafer receiving equipment

Abstract

The utility model provides a silicon wafer receiving device and silicon wafer receiving equipment. The silicon wafer receiving device comprises a first conveying mechanism, a second conveying mechanism, a third conveying mechanism, a fourth conveying mechanism and a fifth conveying mechanism which convey along a first conveying direction. The third conveying mechanism is located behind the first conveying mechanism and the second conveying mechanism. The fourth conveying mechanism and the fifth conveying mechanism are located behind the third conveying mechanism. The first conveying mechanism and the second conveying mechanism alternately enter the sheet receiving position to receive the sheet bodies. The third conveying mechanism is configured to be capable of being in butt joint with the first conveying mechanism, the second conveying mechanism, the fourth conveying mechanism and the fifth conveying mechanism so as to receive a full material box which is output by the first conveying mechanism or the second conveying mechanism and full of sheet bodies. Or the empty material boxes received from the fifth conveying mechanism are conveyed to the first conveying mechanism or the second conveying mechanism, or the full material boxes are conveyed to the fourth conveying mechanism. According to the sheet collecting device, automatic box changing is achieved, and the sheet collecting efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic module production, and specifically to a wafer collecting device and silicon wafer collecting equipment. Background Art

[0002] The processed silicon wafers are transported via the silicon wafer conveyor line. During the transportation process, the silicon wafers are inspected and classified. The qualified silicon wafers will be collected into the basket or material box next to the silicon wafer conveyor line, and the unqualified silicon wafers will be directly transported by the silicon wafer conveyor line to the NG material box at the output end of the silicon wafer conveyor line.

[0003] After the NG box is full of silicon wafers, it is manually transported to the recycling station in the back-end, and the empty NG box is manually replenished to the output end of the silicon wafer conveyor line. The manual replacement of the NG box is inefficient and difficult to meet production requirements. Utility Model Content

[0004] In order to solve the above technical problems existing in the existing carrying platform, the present application provides a material box circulation device, which adopts the following technical solutions:

[0005] A film receiving device comprises a first conveying mechanism, a second conveying mechanism, a third conveying mechanism, a fourth conveying mechanism and a fifth conveying mechanism, all of which convey along a first direction, wherein:

[0006] The first conveying mechanism and the second conveying mechanism are arranged side by side; the third conveying mechanism is located behind the first conveying mechanism and the second conveying mechanism; the fourth conveying mechanism and the fifth conveying mechanism are arranged side by side and located behind the third conveying mechanism;

[0007] The first conveying mechanism and the second conveying mechanism are configured to be able to translate perpendicularly to the first direction, so that the first conveying mechanism switches between a first box changing position and a film receiving position, and the second conveying mechanism switches between a second box changing position and a film receiving position, wherein the film receiving position is located between the first box changing position and the second box changing position, when the first conveying mechanism switches to the film receiving position, the second conveying mechanism switches to the second box changing position, and when the second conveying mechanism switches to the film receiving position, the first conveying mechanism switches to the first box changing position;

[0008] The third conveying mechanism is configured to be able to translate perpendicularly to the first direction, so that the first end of the third conveying mechanism docks with the first conveying mechanism switched to the first box changing position, or docks with the second conveying mechanism switched to the second box changing position, and the second end of the third conveying mechanism docks with the fourth conveying mechanism or the fifth conveying mechanism; wherein, when the third conveying mechanism docks with the first conveying mechanism, it receives the full material box with full sheets output by the first conveying mechanism, or conveys the empty material box to the first conveying mechanism; when the third conveying mechanism docks with the second conveying mechanism, it receives the full material box with full sheets output by the second conveying mechanism, or conveys the empty material box to the second conveying mechanism; when the third conveying mechanism docks with the fourth conveying mechanism, it conveys the full material box to the fourth conveying mechanism, and the fourth conveying mechanism outputs the full material box to the back channel; when the third conveying mechanism docks with the fifth conveying mechanism, it receives the empty material box returned by the fifth conveying mechanism.

[0009] The film collecting device of the present application can automatically collect the sheets into the material box located at the film collecting position, and automatically transport the full material box filled with sheets to the back channel. In addition, the film collecting device of the present application can also automatically transport the empty material box to the film recycling position, thereby realizing automatic box replacement. Compared with the existing film collecting method, the present application improves the efficiency of sheet collecting.

[0010] In some embodiments, the first conveying mechanism and the second conveying mechanism are fixedly connected, and the film receiving device also includes a first translation mechanism, which is connected to at least one of the first conveying mechanism and the second conveying mechanism, and is used to drive the first conveying mechanism and the second conveying mechanism to translate synchronously perpendicular to the first direction.

[0011] By setting the distance between the first conveying mechanism and the second conveying mechanism, the distance between the first box changing position and the film receiving position, and the distance between the film receiving position and the second box changing position to be equal, the first translation mechanism drives the first conveying mechanism and the second conveying mechanism to translate synchronously along a direction perpendicular to the first direction, so that the first conveying mechanism and the second conveying mechanism can alternately enter the film receiving position, thereby reducing equipment costs.

[0012] In some embodiments, the first translation mechanism includes a cylinder and a first guide assembly; the driving end of the cylinder is connected to one of the first conveying mechanism and the second conveying mechanism, the first conveying mechanism and the second conveying mechanism are overlapped on the first guide assembly, and the first guide assembly is configured to guide the translation of the first conveying mechanism and the second conveying mechanism.

[0013] Through the cooperation between the cylinder and the first guide assembly, it is ensured that the first translation mechanism drives the first conveying mechanism and the second conveying mechanism to translate stably perpendicular to the first direction, thereby preventing the first conveying mechanism and the second conveying mechanism from deviating.

[0014] In some embodiments, the film receiving device further includes a second translation mechanism, the second translation mechanism is fixedly connected to the third conveying mechanism, and the second translation mechanism is used to drive the third conveying mechanism to translate perpendicular to the first direction.

[0015] By providing the second translation mechanism, the translation drive of the third conveying mechanism is realized.

[0016] In some embodiments, the second translation mechanism includes a second guide assembly, a motor, a driving pulley, a driven pulley and a synchronous belt, wherein: the driving pulley and the driven pulley are arranged on both sides of the third conveying mechanism, the synchronous belt is sleeved on the driving pulley and the driven pulley, and one side of the synchronous belt is fixedly connected to the third conveying mechanism; the driving end of the motor is connected to the driving pulley, and the motor is used to drive the driving pulley to rotate to drive the synchronous belt to rotate, and when the synchronous belt rotates, it drives the third conveying mechanism to translate, and the second guide assembly is configured to guide the translation of the third conveying mechanism.

[0017] A second translation mechanism with a simple structure and stable driving is provided, which can drive the third conveying mechanism to translate stably perpendicular to the first direction to prevent the third conveying mechanism from going off track.

[0018] In some embodiments, the film receiving device includes a film receiving mechanism, which is configured to pick up a film from a film conveying line and place the picked up film in a material box on the first conveying mechanism or the second conveying mechanism located at the film receiving position.

[0019] By providing the sheet receiving mechanism, it is realized that the sheets on the sheet conveying line can be automatically received into the material box on the first conveying mechanism or the second conveying mechanism located at the sheet receiving position.

[0020] In some embodiments, the sheet collecting mechanism includes a mounting bracket, at least one conveyor belt and an adsorption assembly, wherein: the conveyor belt is disposed on the mounting bracket and conveys along a first direction; the adsorption assembly is mounted on the mounting bracket, the adsorption surface of the adsorption assembly is higher than the lower conveying surface of the conveyor belt, and the adsorption assembly is used to suck the sheet upward so that the sheet is adsorbed on the lower conveying surface of the conveyor belt; the conveyor belt is configured to convey the sheet to a material box on the first conveying mechanism or the second conveying mechanism located at the sheet collecting position.

[0021] A method for implementing a sheet receiving mechanism is provided, which absorbs sheets from a sheet conveying line through the cooperation of an adsorption component and a conveying belt, and automatically conveys and releases the sheets into a material box on a first conveying mechanism or a second conveying mechanism located at a sheet receiving position.

[0022] In some embodiments, the film receiving mechanism includes a mounting bracket and a transverse driving member and a suction cup mounted on the mounting bracket. The driving end of the transverse driving member is connected to the suction cup, the suction cup is used to suck the film, and the transverse driving member is configured to drive the suction cup to move between the film conveying line and the film receiving position.

[0023] A method for implementing a film receiving mechanism is provided, which drives a suction cup to move between a film conveying line and a film receiving position through a transverse driving member, so that the suction cup sucks the film from the film conveying line and automatically places the film into a material box on a first conveying mechanism or a second conveying mechanism located at the film receiving position.

[0024] In some embodiments, the film receiving device further includes an AGV transfer mechanism disposed after the fourth conveying mechanism and the fifth conveying mechanism, and the AGV transfer mechanism is used to receive full material boxes output by the fourth conveying mechanism and to convey empty material boxes to the fifth conveying mechanism.

[0025] By setting up an AGV transfer mechanism after the fourth conveying mechanism and the fifth conveying mechanism, it is possible to automatically transfer the full material boxes output by the fourth conveying mechanism to the subsequent workstation, and to transport the empty material boxes taken out of the subsequent workstation back to the fifth conveying mechanism.

[0026] In some embodiments, the AGV transfer mechanism includes two conveying channels arranged side by side, one of which is used to connect to the fourth conveying mechanism to receive the full material box output by the fourth conveying mechanism, and the other conveying channel is used to connect to the fifth conveying mechanism to convey the empty material box to the fifth conveying mechanism.

[0027] The AGV transfer mechanism is equipped with two parallel conveying channels, which are respectively connected to the fourth conveying mechanism and the fifth conveying mechanism. While one of the conveying channels receives the full material box output by the fourth conveying mechanism, the other conveying channel conveys the empty material box to the fifth conveying mechanism, thereby further improving the box changing efficiency.

[0028] The present application also provides a silicon wafer receiving device, which includes a silicon wafer conveyor line and a wafer receiving device as described in any of the above items, wherein: the wafer receiving device is located at the back of the output end of the silicon wafer conveyor line, the silicon wafer conveyor line is used to convey silicon wafers, and the material box on the first conveying mechanism or the second conveying mechanism at the wafer receiving position is used to receive the silicon wafers output from the output end of the silicon wafer conveyor line.

[0029] By arranging a wafer collecting device at the back of the silicon wafer conveyor line, the silicon wafer collecting equipment of the present application automatically collects the silicon wafers on the silicon wafer conveyor line into a material box, and realizes automatic box replacement, thereby improving the material collection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a schematic diagram of the structure of a film collecting device according to an embodiment of the present application;

[0031] Figure 2 It is a schematic diagram of the assembly of the first conveying mechanism, the second conveying mechanism and the first translation mechanism from one viewing angle of an embodiment of the present application;

[0032] Figure 3 It is a schematic diagram of the assembly of the first conveying mechanism, the second conveying mechanism and the first translation mechanism from another perspective of the embodiment of the present application;

[0033] Figure 4 Schematic diagram of the assembly of the third conveying mechanism and the second translation mechanism in the embodiment of the present application;

[0034] Figure 5 It is a structural schematic diagram of the film receiving mechanism in the application embodiment;

[0035] Figure 6 Schematic diagram of the position switching of the first conveying mechanism and the second conveying mechanism.

[0036] Figures 1 to 6 The present invention comprises: a first conveying mechanism 1, a second conveying mechanism 2, a third conveying mechanism 3, a fourth conveying mechanism 4, a fifth conveying mechanism 5, a first translation mechanism 6, a cylinder 61, a first guide assembly 62, a second translation mechanism 7, a motor 71, a driving pulley 72, a driven pulley 73, a synchronous belt 74, a second guide assembly 75, a film receiving mechanism 8, a mounting bracket 81, a conveying belt 82, an adsorption assembly 83, a film receiving position A, a first box changing position B, and a second box changing position C. DETAILED DESCRIPTION

[0037] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0038] like Figure 1 As shown, the film collecting device in the embodiment of the present application includes a film collecting device along a first direction (such as Figure 1 The first conveying mechanism 1, the second conveying mechanism 2, the third conveying mechanism 3, the fourth conveying mechanism 4 and the fifth conveying mechanism 4 for conveying in the X-axis direction of the image, wherein:

[0039] The first conveying mechanism 1 and the second conveying mechanism 2 are arranged side by side. The third conveying mechanism 3 is located after the first conveying mechanism 1 and the second conveying mechanism 2. The fourth conveying mechanism 4 and the fifth conveying mechanism 5 are arranged side by side and located after the third conveying mechanism 2.

[0040] The first conveying mechanism 1 and the second conveying mechanism 2 are configured to be able to translate perpendicularly to the first direction, so that the first conveying mechanism 1 switches between the first box changing position and the film receiving position, and the second conveying mechanism switches between the second box changing position and the film receiving position. The film receiving position is located between the first box changing position and the second box changing position. Figure 6 As shown in (a) of FIG. 1 , when the first conveying mechanism 1 is switched to the film receiving position A, the second conveying mechanism 2 is switched to the second box changing position C. Figure 6As shown in (b), when the second conveying mechanism 2 is switched to the film receiving position A, the first conveying mechanism 1 is switched to the first box changing position B.

[0041] The third conveying mechanism 3 is configured to be able to translate perpendicularly to the first direction, so that the first end of the third conveying mechanism 3 docks with the first conveying mechanism 1 switched to the first box changing position B, or docks with the second conveying mechanism 2 switched to the second box changing position C, or the second end of the third conveying mechanism 3 docks with the fourth conveying mechanism 4 or the fifth conveying mechanism 5. Wherein: when the third conveying mechanism 3 docks with the first conveying mechanism 1 switched to the first box changing position B, the third conveying mechanism 3 receives the full material box with full sheets output by the first conveying mechanism 1, or conveys the empty material box to the first conveying mechanism 1. When the third conveying mechanism 3 docks with the second conveying mechanism 2 switched to the second box changing position C, the third conveying mechanism 3 receives the full material box with full sheets output by the second conveying mechanism 2, or conveys the empty material box to the second conveying mechanism 2. When the third conveying mechanism 3 docks with the fourth conveying mechanism 4, the full material box is conveyed to the fourth conveying mechanism 4, and the fourth conveying mechanism 4 outputs the full material box to the back channel. When the third conveying mechanism 3 docks with the fifth conveying mechanism 5, it receives the empty material box conveyed back by the fifth conveying mechanism 5.

[0042] The optional film collection process of the film collection device in the embodiment of the present application is as follows:

[0043] In an initial state, both the first conveying mechanism 1 and the second conveying mechanism 2 carry empty material boxes.

[0044] First, if Figure 6 As shown in (a), the first conveying mechanism 1 is controlled to translate and switch to the film receiving position A, and the second conveying mechanism 2 is controlled to translate and switch to the second box changing position C. The material box on the first conveying mechanism 1 receives the film.

[0045] When the material box on the first conveying mechanism 1 is full of sheets. Figure 6 As shown in (b), the first conveying mechanism 1 is controlled to translate and switch to the first box-changing position B, and the second conveying mechanism 2 is controlled to translate and switch to the wafer-collecting position A. The material box on the second conveying mechanism 2 collects the wafers. At the same time, the third conveying mechanism 3 docks with the first conveying mechanism 1 to receive the full material box full of silicon wafers output by the first conveying mechanism 1. The third conveying mechanism 3 then docks with the fourth conveying mechanism 4 to transport the full material box to the fourth conveying mechanism 4. Next, the third conveying mechanism 3 docks with the fifth conveying mechanism 5 to receive the empty material box transported by the fifth conveying mechanism 5. Finally, the third conveying mechanism 3 docks with the first conveying mechanism 1 maintained at the first box-changing position B again to transport the empty material box to the first conveying mechanism 1.

[0046] When the material box on the second conveying mechanism 2 is full of sheets. Figure 6As shown in (a), the second conveying mechanism 2 is controlled to translate and switch to the second box-changing position C again, and the first conveying mechanism 1 is controlled to translate and switch to the wafer receiving position A. The material box on the first conveying mechanism 1 collects the wafers. At the same time, the third conveying mechanism 3 docks with the second conveying mechanism 2 to receive the full material box full of silicon wafers output by the second conveying mechanism 2. The third conveying mechanism 3 then docks with the fourth conveying mechanism 4 to transport the full material box to the fourth conveying mechanism 4. Next, the third conveying mechanism 3 docks with the fifth conveying mechanism 5 to receive the empty material box transported by the fifth conveying mechanism 5. Finally, the third conveying mechanism 3 docks with the second conveying mechanism 2 maintained at the second box-changing position C again to transport the empty material box to the second conveying mechanism 2.

[0047] Repeat the above film collection process.

[0048] It can be seen that the film collecting device of the embodiment of the present application can automatically collect the sheets into the material box located at the film collecting position A, and automatically transport the full material box filled with sheets to the back channel. In addition, the film collecting device of the embodiment of the present application can also automatically transport the empty material box to the film recycling position A, thereby realizing automatic box replacement. Compared with the existing film collecting method, the present application improves the efficiency of sheet material collection.

[0049] The wafer collecting device of the embodiment of the present application is suitable for automatically collecting the silicon wafers on the silicon wafer conveyor line, for example, the silicon wafers that fail the inspection on the silicon wafer conveyor line. Of course, the wafer collecting device of the embodiment of the application is also suitable for collecting other types of wafers.

[0050] like Figures 1 to 3 As shown, optionally, the first conveying mechanism 1 and the second conveying mechanism 2 are fixedly connected, and the film receiving device in the embodiment of the present application further includes a first translation mechanism 6, which is connected to at least one of the first conveying mechanism 1 and the second conveying mechanism 2, and the first translation mechanism 6 is used to drive the first conveying mechanism 1 and the second conveying mechanism 2 to translate synchronously perpendicular to the first direction, so that when the first conveying mechanism 1 switches to the film receiving position A, the second conveying mechanism 2 switches to the second box changing position C. When the second conveying mechanism 2 switches to the film receiving position A, the first conveying mechanism 1 switches to the first box changing position B. Of course, the spacing between the first conveying mechanism 1 and the second conveying mechanism 2, the spacing between the first box changing position B and the film receiving position A, and the spacing between the film receiving position A and the second box changing position C need to be set to be equal.

[0051] The first translation mechanism 6 drives the first conveying mechanism 1 and the second conveying mechanism 2 to translate synchronously along a direction perpendicular to the first direction, so that the first conveying mechanism 1 and the second conveying mechanism 2 alternately enter the film receiving position A to receive the films, thereby reducing the equipment cost.

[0052] Of course, the first conveying mechanism 1 and the second conveying mechanism 2 can also be separately arranged, and are translated by their respective corresponding translation driving mechanisms. When the first conveying mechanism 1 is driven by the corresponding translation driving mechanism to switch to the film receiving position A, the second conveying mechanism 2 is driven by the corresponding translation driving mechanism to switch to the second box changing position C. When the second conveying mechanism 2 is driven by the corresponding translation driving mechanism to switch to the film receiving position A, the first conveying mechanism 1 is driven by the corresponding translation driving mechanism to switch to the first box changing position B. In this way, the first conveying mechanism 1 and the second conveying mechanism 2 are independently translated. When one of the first conveying mechanism 1 and the second conveying mechanism 2 fails and cannot perform normal film receiving and conveying, the other can still perform normal film receiving and conveying.

[0053] Optionally, the first translation mechanism 6 includes a cylinder 61 and a first guide assembly 62. The driving end of the cylinder 61 is connected to one of the first conveying mechanism 1 and the second conveying mechanism 2, and the first conveying mechanism 1 and the second conveying mechanism 2 are overlapped on the first guide assembly.

[0054] When the cylinder 61 drives the first conveying mechanism 1 and the second conveying mechanism 2 to translate synchronously, the first guide assembly guides the translation of the first conveying mechanism 1 and the second conveying mechanism 2 to ensure the stability of the translation of the first conveying mechanism 1 and the second conveying mechanism 2 and prevent the first conveying mechanism 1 and the second conveying mechanism 2 from deviating.

[0055] The first guide assembly can adopt various existing linear guide mechanisms such as a slide rail and slider matching mechanism.

[0056] like Figure 1 and Figure 3 As shown, optionally, the film receiving device in the embodiment of the present application further includes a second translation mechanism 7, the second translation mechanism 7 is fixedly connected to the third conveying mechanism 3, and the second translation mechanism 7 is used to drive the third conveying mechanism 3 to translate perpendicular to the first direction.

[0057] Optionally, the second translation mechanism 7 includes a second guide assembly 75, a motor 71, a driving pulley 72, a driven pulley 73 and a synchronous belt 74, wherein: the driving pulley 72 and the driven pulley 73 are arranged on both sides of the third conveying mechanism 3, the synchronous belt 74 is sleeved on the driving pulley 72 and the driven pulley 73, and one side of the synchronous belt 74 is fixedly connected to the third conveying mechanism 3. The driving end of the motor 71 is connected to the driving pulley 72, and the motor 71 is used to drive the driving pulley 72 to rotate to drive the synchronous belt 74 to rotate, and the synchronous belt 74 drives the third conveying mechanism 3 to translate when it rotates. The second guide assembly is configured to guide the translation of the third conveying mechanism 3 to ensure the translation stability of the third conveying mechanism 3 and prevent the third conveying mechanism 3 from going off track.

[0058] The second guide assembly can adopt various existing linear guide mechanisms such as a slide rail and slider matching mechanism.

[0059] like Figure 1 and Figure 5 As shown, optionally, the film receiving device in the embodiment of the present application further includes a film receiving mechanism 8, which is configured to pick up the film from the film conveying line and place the picked up film in a material box on the first conveying mechanism 1 or the second conveying mechanism 2 located at the film receiving position A.

[0060] Figure 5 The film receiving mechanism 8 in the embodiment includes a mounting bracket 81, at least one (e.g. Figure 5 The conveyor belt 82 and the suction assembly 83 are provided, wherein: the conveyor belt 82 is provided on the mounting bracket 81 and conveys in the first direction. The suction assembly 83 is installed on the mounting bracket 81, and the suction surface of the suction assembly 83 is higher than the lower conveying surface of the conveyor belt 82. The suction assembly 83 is used to suck the sheet upward so that the sheet is sucked on the lower conveying surface of the conveyor belt 82. The conveyor belt 82 is configured to convey the sheet to the first conveying mechanism 1 or the second conveying mechanism 2 at the sheet receiving position A.

[0061] It can be seen that through the cooperation of the adsorption component 83 and the conveyor belt 82, after the sheet collecting mechanism 8 absorbs the sheet from the sheet conveying line, it conveys and releases the sheet to the material box on the first conveying mechanism 1 or the second conveying mechanism 2 located at the sheet collecting position A, thereby realizing the automatic sheet collecting of the sheet on the sheet conveying line.

[0062] In another embodiment, the film collection mechanism 8 includes a mounting bracket, a transverse driving member and a suction cup mounted on the mounting bracket, and the driving end of the transverse driving member is connected to the suction cup. The transverse driving member is configured to drive the suction cup to move between the sheet conveying line and the film collection position A, so that the suction cup sucks the sheet from the sheet conveying line and releases the sheet into the material box on the first conveying mechanism 1 or the second conveying mechanism 2 located at the film collection position A, thereby realizing automatic film collection of the sheet on the sheet conveying line.

[0063] Optionally, the film receiving device in the embodiment of the present application further includes an AGV transfer mechanism disposed after the fourth conveying mechanism 4 and the fifth conveying mechanism 5, the AGV transfer mechanism being used to receive the full material box output by the fourth conveying mechanism 4 and transfer the full material box to the processing station of the subsequent process. The AGV transfer mechanism is also used to transfer the empty material box taken from the processing station of the subsequent process to the fifth conveying mechanism 5.

[0064] Optionally, the AGV transfer mechanism includes two conveying channels arranged side by side, and the two conveying channels are respectively connected to the fourth conveying mechanism 4 and the fifth conveying mechanism 5. While one of the conveying channels receives the full material box output by the fourth conveying mechanism 4, the other conveying channel conveys the empty material box to the fifth conveying mechanism 5, thereby improving the box changing efficiency.

[0065] An embodiment of the present application also provides a silicon wafer receiving device, which includes a silicon wafer conveyor line and a wafer receiving device provided by any of the above embodiments, wherein: the wafer receiving device is located at the back of the output end of the silicon wafer conveyor line, the silicon wafer conveyor line is used to convey silicon wafers, and the material box on the first conveying mechanism 1 or the second conveying mechanism 2 at the wafer receiving position A is used to receive the silicon wafers output from the output end of the silicon wafer conveyor line.

[0066] The silicon wafers output from the output end of the silicon wafer conveyor line can be directly conveyed to the material box on the first conveyor mechanism 1 or the second conveyor mechanism 2 at the wafer receiving position A. The silicon wafers can also be sucked from the output end of the silicon wafer conveyor line by the wafer receiving mechanism 8, and then placed in the material box on the first conveyor mechanism 1 or the second conveyor mechanism 2 at the wafer receiving position A.

[0067] It can be seen that by setting a wafer collecting device at the back of the silicon wafer conveyor line, the silicon wafer collecting device in the embodiment of the present application automatically collects the silicon wafers on the silicon wafer conveyor line into the material box, and realizes automatic box replacement, thereby improving the material collection efficiency. The silicon wafers on the silicon wafer conveyor line can be, for example, unqualified silicon wafers after detection.

[0068] The above description of the present application is sufficiently detailed and has certain particularities. Those skilled in the art should understand that the description in the embodiments is merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the scope of protection of the present application. The scope of protection claimed in the present application is defined by the claims, not by the above description in the embodiments. Moreover, the embodiments mentioned in the present application are not limited to being implemented individually, and some embodiments can also be implemented in combination.

Claims

1. A film collecting device, characterized in that: The film receiving device comprises a first conveying mechanism, a second conveying mechanism, a third conveying mechanism, a fourth conveying mechanism and a fifth conveying mechanism, all of which convey along a first direction, wherein: The first conveying mechanism and the second conveying mechanism are arranged side by side; the third conveying mechanism is located behind the first conveying mechanism and the second conveying mechanism; the fourth conveying mechanism and the fifth conveying mechanism are arranged side by side and located behind the third conveying mechanism; The first conveying mechanism and the second conveying mechanism are configured to be able to translate perpendicularly to the first direction, so that the first conveying mechanism switches between a first box changing position and a film receiving position, and the second conveying mechanism switches between a second box changing position and the film receiving position, wherein the film receiving position is located between the first box changing position and the second box changing position, when the first conveying mechanism switches to the film receiving position, the second conveying mechanism switches to the second box changing position, and when the second conveying mechanism switches to the film receiving position, the first conveying mechanism switches to the first box changing position; The third conveying mechanism is configured to be able to translate perpendicularly to the first direction, so that the first end of the third conveying mechanism docks with the first conveying mechanism switched to the first box changing position, or docks with the second conveying mechanism switched to the second box changing position, and the second end of the third conveying mechanism docks with the fourth conveying mechanism or the fifth conveying mechanism; wherein, when the third conveying mechanism docks with the first conveying mechanism, it receives the full material box with full sheets output by the first conveying mechanism, or conveys the empty material box to the first conveying mechanism; when the third conveying mechanism docks with the second conveying mechanism, it receives the full material box with full sheets output by the second conveying mechanism, or conveys the empty material box to the second conveying mechanism; when the third conveying mechanism docks with the fourth conveying mechanism, it conveys the full material box to the fourth conveying mechanism, and the fourth conveying mechanism outputs the full material box to the back channel; when the third conveying mechanism docks with the fifth conveying mechanism, it receives the empty material box returned by the fifth conveying mechanism.

2. The film collecting device according to claim 1, characterized in that: The first conveying mechanism and the second conveying mechanism are fixedly connected, and the film receiving device also includes a first translation mechanism, which is connected to at least one of the first conveying mechanism and the second conveying mechanism, and is used to drive the first conveying mechanism and the second conveying mechanism to translate synchronously perpendicular to the first direction.

3. The film collecting device according to claim 2, characterized in that: The first translation mechanism includes a cylinder and a first guide assembly; The driving end of the cylinder is connected to one of the first conveying mechanism and the second conveying mechanism. The first conveying mechanism and the second conveying mechanism are overlapped on the first guide assembly. The first guide assembly is configured to guide the translation of the first conveying mechanism and the second conveying mechanism.

4. The film collecting device according to claim 1, characterized in that: The film receiving device further comprises a second translation mechanism, the second translation mechanism is fixedly connected to the third conveying mechanism, and the second translation mechanism is used to drive the third conveying mechanism to translate perpendicularly to the first direction.

5. The film collecting device according to claim 4, characterized in that: The second translation mechanism includes a second guide assembly, a motor, a driving pulley, a driven pulley and a synchronous belt, wherein: The driving pulley and the driven pulley are arranged on both sides of the third conveying mechanism, the synchronous belt is sleeved on the driving pulley and the driven pulley, and one side of the synchronous belt is fixedly connected to the third conveying mechanism; The driving end of the motor is connected to the driving pulley, and the motor is used to drive the driving pulley to rotate to drive the synchronous belt to rotate. When the synchronous belt rotates, it drives the third conveying mechanism to translate, and the second guide assembly is configured to guide the translation of the third conveying mechanism.

6. The film collecting device according to claim 1, characterized in that: The film receiving device comprises a film receiving mechanism, which is configured to pick up a film from a film conveying line and place the picked up film in a material box on the first conveying mechanism or the second conveying mechanism located at the film receiving position.

7. The film collecting device according to claim 6, characterized in that: The sheet collecting mechanism comprises a mounting bracket, at least one conveyor belt and an adsorption assembly, wherein: The conveyor belt is arranged on the mounting bracket and conveys along the first direction; The adsorption component is installed on the mounting bracket, the adsorption surface of the adsorption component is higher than the lower conveying surface of the conveyor belt, and the adsorption component is used to suck the sheet upward so that the sheet is adsorbed on the lower conveying surface of the conveyor belt; The conveyor belt is configured to convey the sheet to a material box on the first conveying mechanism or the second conveying mechanism located at the sheet receiving position.

8. The film collecting device according to claim 6, characterized in that: The film receiving mechanism includes a mounting bracket and a transverse driving member and a suction cup mounted on the mounting bracket. The driving end of the transverse driving member is connected to the suction cup, and the suction cup is used to suck the film. The transverse driving member is configured to drive the suction cup to move between the film conveying line and the film receiving position.

9. The film collecting device according to claim 1, characterized in that: The film receiving device also includes an AGV transfer mechanism arranged behind the fourth conveying mechanism and the fifth conveying mechanism, and the AGV transfer mechanism is used to receive the full material box output by the fourth conveying mechanism and convey the empty material box to the fifth conveying mechanism.

10. The film collecting device according to claim 9, characterized in that: The AGV transfer mechanism includes two conveying channels arranged side by side, one of which is used to connect to the fourth conveying mechanism to receive the full material box output by the fourth conveying mechanism, and the other conveying channel is used to connect to the fifth conveying mechanism to convey the empty material box to the fifth conveying mechanism.

11. A silicon wafer receiving device, characterized in that: The silicon wafer receiving equipment comprises a silicon wafer conveying line and a wafer receiving device according to any one of claims 1 to 10, wherein: The wafer receiving device is located at the rear of the output end of the silicon wafer conveying line; The silicon wafer conveying line is used to convey silicon wafers, and the material box on the first conveying mechanism or the second conveying mechanism at the wafer receiving position is used to receive the silicon wafers output from the output end of the silicon wafer conveying line.

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