Water cooling device for production of single crystal furnace

Abstract

The utility model belongs to the technical field of single crystal furnace production, and particularly relates to a water cooling device for single crystal furnace production, which comprises a water cooling jacket body, a water inlet pipe, a water outlet pipe, a lifting mechanism and a crushing mechanism, the lifting mechanism comprises a power source, a lead screw and a nut seat, the power source is fixedly connected with the single crystal furnace body through the supporting frame, the lead screw is fixedly connected with an output shaft of the power source, the nut seat is fixedly connected with the water-cooled jacket body, the lead screw is in threaded connection with the nut seat, and the crushing mechanism is detachably connected with the single crystal furnace body. Comprising a pulling rope and a crushing head, a single crystal furnace body is fixedly connected with a plurality of groups of lifting lugs, the pulling rope is hung on the lifting lugs, the crushing head is in an inverted cone shape and is fixedly connected with the pulling rope, and the water cooling device in the single crystal furnace has the beneficial effects that the water cooling effect and the quality of a monocrystalline silicon finished product are improved, and the cleaning of the water cooling device in the single crystal furnace is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace production, in particular to a water cooling device for single crystal furnace production. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and uses the Czochralski method to grow single crystals without dislocation. The water cooling device is an important component of the water cooling system of the single crystal furnace. It is installed above the quartz crucible and uses the circulation of the cooling fluid to exchange heat more efficiently and energy-savingly, and reduce the temperature inside the furnace to a specified temperature to meet the production requirements of single crystal silicon. Existing water cooling devices are mostly installed at a fixed height inside the furnace cavity, and the longitudinal temperature of the crystal rod cannot be controlled. Uneven water cooling affects the drawing quality and efficiency of the crystal rod. In addition, factors such as uneven heating can easily lead to the explosion of the single crystal silicon rod during the equal diameter drawing process, thereby blocking the lower edge of the water cooling jacket and causing the single crystal furnace to fail to operate normally. Utility Model Content

[0003] The utility model aims at the above-mentioned problems and specifically designs a water cooling device for single crystal furnace production, so as to improve the water cooling effect and the quality of single crystal silicon finished products and increase the cleaning of the water cooling device in the single crystal furnace.

[0004] To achieve the above-mentioned purpose, the utility model provides a water cooling device for single crystal furnace production, comprising a water cooling jacket body, a water inlet pipe, a water outlet pipe, a lifting mechanism and a crushing mechanism, the water cooling jacket body is in the shape of an inverted cone sleeve, and a hollow structure is provided between the inner and outer walls of the water cooling jacket body, the water inlet pipe and the water outlet pipe are arranged on both sides of the water cooling jacket body, and are respectively connected to the hollow structure of the water cooling jacket body, one end of the lifting mechanism is fixedly connected to the single crystal furnace body, and the other end is fixedly connected to the water cooling jacket body, and the crushing mechanism is detachably connected to the single crystal furnace body.

[0005] By adopting the above technical scheme, the water inlet pipe injects cooling water into the hollow structure of the water-cooling jacket body, and the cold water circulation is used to take away the heat, thereby controlling the temperature in the furnace chamber of the single crystal furnace, so that the furnace chamber temperature is always maintained within a constant temperature range, so as to control the growth speed and quality of the crystal rod and ensure the smooth growth of the crystal; the lifting mechanism is used to adjust the height of the water-cooling jacket body in the furnace chamber. Before adding materials, the lifting mechanism is operated in advance to raise the water-cooling jacket body to ensure the normal unloading process of the silicon raw material and reduce the pollution to the water-cooling jacket body; in addition, by changing the height of the water-cooling jacket body, the longitudinal heat dissipation of the crystal rod is improved, the influence of the temperature gradient on the growth of the crystal rod is reduced, a uniform water cooling effect is formed, and the quality of the single crystal silicon product is ensured; the crushing mechanism is used to clean up the silicon material blocked at the lower edge of the water-cooling jacket body, reduce the downtime for maintenance, and enable the single crystal furnace to quickly resume normal operation.

[0006] Furthermore, the lifting mechanism includes a power source, a screw rod and a nut seat, the power source is fixedly connected to the single crystal furnace body through a support frame, the screw rod is fixedly connected to the output shaft of the power source, the nut seat is fixedly connected to the water cooling jacket body, and the screw rod is threadedly connected to the nut seat.

[0007] Preferably, the lifting mechanism has multiple groups, which are symmetrically arranged on both sides of the water cooling jacket body.

[0008] By adopting the above technical scheme, the power source is used to output power, the transmission accuracy and efficiency of the screw rod and the nut seat are high, and the connection rigidity between them is good, ensuring smooth and efficient adjustment of the longitudinal height of the water-cooling jacket body and improving the quality of monocrystalline silicon products. Multiple sets of lifting mechanisms cooperate to jointly constrain the lifting path of the water-cooling jacket body, reduce the probability of eccentricity after multiple lifting operations, and ensure the water cooling effect.

[0009] Furthermore, the crushing mechanism includes a traction rope and a crushing head, the single crystal furnace body is fixedly connected to a plurality of sets of lifting ears, the traction rope is hung on the lifting ears, and the crushing head is fixedly connected to the traction rope.

[0010] Preferably, the crushing head is in an inverted cone shape, and the maximum diameter of the crushing head is smaller than the minimum inner diameter of the water-cooling jacket body.

[0011] By adopting the above technical scheme, the traction rope is used to support and hoist the crushing head, and the crushing head is hung just above the water-cooling jacket body. The crushing head is used to apply impact stress to the silicon material. By releasing the restriction of the traction rope on the crushing head, the free fall of the crushing head is a process of converting the gravitational potential energy of an object into kinetic energy. Finally, the crushing head knocks down the accumulated and blocked silicon material, completes the cleaning of the water-cooling jacket body, and saves maintenance manpower and time; adjusting the release length of the traction rope can prevent the crushing head from contacting the molten material in the quartz crucible and reduce pollution; the inverted cone design facilitates the crushing head to concentrate the impact stress and efficiently and quickly complete the cleaning of the water-cooling jacket body.

[0012] Furthermore, a baffle is fixedly connected inside the hollow structure of the water cooling jacket body.

[0013] Preferably, the baffle is in a spiral shape.

[0014] By adopting the above technical solution, the baffle is used to limit the flow direction of cooling water, increase the circulation path and duration of cooling water, and give full play to the water cooling effect; the spiral line design reduces the cooling water flow rate through regular bending and rotation, increases the circulation period, and ensures uniform diffusion and full utilization of cold air.

[0015] In summary, the utility model has the following advantages and beneficial technical effects:

[0016] 1. The utility model utilizes a lifting mechanism to adjust the longitudinal height of the water-cooling jacket body. Before adding materials, the water-cooling jacket body is lifted in advance to ensure that the unloading process of the silicon raw material is carried out normally, while reducing the pollution of the silicon material to the water-cooling jacket body; secondly, the height of the water-cooling jacket body is changed to increase the heat dissipation dimension of the crystal rod, reduce the influence of the temperature gradient on the growth of the crystal rod, form a uniform water-cooling effect, and ensure the quality of the monocrystalline silicon finished product; multiple groups of lifting mechanisms cooperate to jointly constrain the lifting path of the water-cooling jacket body, reduce the probability of eccentricity after multiple lifting operations, and ensure the water cooling effect.

[0017] 2. Use the crushing mechanism to clean the silicon material blocking the lower edge of the water-cooling jacket body, reduce the downtime for maintenance, and quickly restore the single crystal furnace to normal operation; the inverted cone design of the crushing head is convenient for concentrating the impact stress and completing the cleaning of the water-cooling jacket body efficiently and quickly.

[0018] 3. The baffle is used to limit the flow direction of cooling water, increase the circulation path and duration of cooling water, and give full play to the water cooling effect; the spiral line design reduces the cooling water flow rate through regular bending and rotation, increases the circulation period, and ensures the uniform diffusion and full utilization of cold air. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 It is a structural schematic diagram of the utility model;

[0021] Figure 2 It is a structural schematic diagram of the lifting mechanism in the utility model;

[0022] Figure 3 It is a cross-sectional schematic diagram of a part of the structure of the utility model;

[0023] Figure 4 It is a schematic cross-sectional view of the water cooling jacket body in the utility model.

[0024] The reference numerals in the accompanying drawings are:

[0025] 1. Water cooling jacket body; 2. Water inlet pipe; 3. Water outlet pipe;

[0026] 4. Lifting mechanism; 41. Power source; 42. Screw rod; 43. Nut seat;

[0027] 5. Crushing mechanism; 51. Traction rope; 52. Crushing head;

[0028] 6. Baffle; 7. Lifting lug; 8. Support frame; 9. Single crystal furnace body. DETAILED DESCRIPTION

[0029] The following is combined with Figure 1-Figure 4 The utility model is further described in detail:

[0030] like Figure 1 As shown, this embodiment discloses a water cooling device for single crystal furnace production, including a water cooling jacket body 1, a water inlet pipe 2, a water outlet pipe 3, a lifting mechanism 4 and a crushing mechanism 5. The water cooling jacket body 1 is in the shape of an inverted cone sleeve, and has a hollow structure between the inner and outer walls. The water inlet pipe 2 and the water outlet pipe 3 are arranged on both sides of the water cooling jacket body 1, and are respectively connected to the hollow structure of the water cooling jacket body 1. One end of the lifting mechanism 4 is fixedly connected to the single crystal furnace body 9, and the other end is fixedly connected to the water cooling jacket body 1. The crushing mechanism 5 is detachably connected to the single crystal furnace body 9.

[0031] like Figure 2 As shown, the lifting mechanism 4 includes a power source 41, a screw rod 42 and a nut seat 43. The power source 41 is a motor. The support frame 8 is fixedly installed on the outside of the furnace cover in the single crystal furnace body 9. The motor housing is fixedly connected to the support frame 8 by fasteners. One end of the screw rod 42 is fixedly connected to the output shaft of the power source 41 through a coupling, and the other end passes through the furnace cover and extends into the furnace chamber of the single crystal furnace body 9. The nut seat 43 is in the furnace chamber and is fixedly connected to the water cooling jacket body 1. The screw rod 42 is threadedly connected to the nut seat 43. The lifting mechanism 4 has two groups, which are symmetrically arranged on both sides of the single crystal furnace body 9.

[0032] like Figure 3 As shown, the crushing mechanism 5 includes a traction rope 51 and a crushing head 52. A plurality of sets of lifting ears 7 are fixedly connected to the outer side of the furnace shell of the single crystal furnace body 9. The traction rope 51 is hung on the lifting ears 7 in sequence. The crushing head 52 is tied with the traction rope 51 and is located directly above the sleeve structure of the water-cooling jacket body 1. The crushing head 52 is in an inverted cone shape, and the maximum diameter of the crushing head 52 is smaller than the minimum inner diameter of the water-cooling jacket body 1.

[0033] like Figure 4 As shown, a baffle 6 is fixedly connected inside the hollow structure of the water cooling jacket body 1; the baffle 6 is spiral-shaped, the water inlet pipe 2 is close to the starting point of the spiral-shaped baffle 6, and the water outlet pipe 3 is close to the end point of the baffle 6.

[0034] The working principle of a water cooling device for single crystal furnace production of the utility model is:

[0035] 1. The device comprises a water-cooling jacket body 1, a water inlet pipe 2, a water outlet pipe 3, a lifting mechanism 4 and a crushing mechanism 5. The water-cooling jacket body 1 is in the shape of an inverted cone sleeve and has a hollow structure between the inner and outer walls. The water inlet pipe 2 and the water outlet pipe 3 are arranged on both sides of the water-cooling jacket body 1 and are respectively connected to the hollow structure of the water-cooling jacket body 1. One end of the lifting mechanism 4 is fixedly connected to the single crystal furnace body 9, and the other end is fixedly connected to the water-cooling jacket body 1. The crushing mechanism 5 is detachably connected to the single crystal furnace body 9; the water inlet pipe 2, the hollow structure of the water-cooling jacket body 1 and the water outlet pipe 3 constitute a water-cooled circulation pipeline, and cooling water is introduced to control the temperature inside the single crystal furnace body 9. The lifting mechanism 4 is started to drive the water-cooling jacket body 1 to move up and down along the furnace cavity, and the cold air will be evenly dispersed to the inside of the single crystal furnace body 9, so as to realize the longitudinal temperature regulation of the crystal rod and facilitate the unloading process of the silicon raw material; the crushing mechanism 5 is used to impact the silicon material blocked at the lower edge of the water-cooling jacket body 1 to realize the cleaning of the water-cooling jacket body 1.

[0036] 2. The lifting mechanism 4 includes a power source 41, a screw rod 42 and a nut seat 43. The power source 41 is a motor. The support frame 8 is fixedly installed on the outside of the furnace cover in the single crystal furnace body 9. The motor housing is fixedly connected to the support frame 8 through fasteners. One end of the screw rod 42 is fixedly connected to the output shaft of the power source 41 through a coupling, and the other end passes through the furnace cover and extends into the furnace chamber of the single crystal furnace body 9. The nut seat 43 is in the furnace chamber and is fixedly connected to the water-cooling jacket body 1. The screw rod 42 is threadedly connected to the nut seat 43; the power source 41 outputs power to drive the screw rod 42 to rotate, and the nut seat 43 will feed along the screw rod 42 in a straight line, driving the water-cooling jacket body 1 to achieve lifting.

[0037] 3. There are two groups of lifting mechanisms 4, which are symmetrically arranged on both sides of the single crystal furnace body 9; the lifting mechanisms 4 on both sides cooperate with each other to effectively avoid the eccentricity of the water cooling jacket body 1 after multiple lifting and lowering.

[0038] 4. The crushing mechanism 5 includes a traction rope 51 and a crushing head 52. A plurality of sets of lifting ears 7 are fixedly connected to the outer side of the furnace shell of the single crystal furnace body 9. The traction rope 51 is hung on the lifting ears 7 in sequence. The crushing head 52 is tied with the traction rope 51 and is located directly above the sleeve structure of the water cooling jacket body 1. When the traction rope 51 is loosened, the crushing head 52 falls freely under gravity. The length of the traction rope 51 is adjusted to ensure that the crushing head 52 accurately releases the impact force to the accumulated silicon material, thereby realizing the cleaning of the water cooling jacket body 1.

[0039] 5. The crushing head 52 is in an inverted cone shape, and the maximum diameter of the crushing head 52 is smaller than the minimum inner diameter of the water-cooling jacket body 1; after the crushing head 52 falls freely, the sharp part first inserts into the accumulated silicon material, and increases the local impact stress by reducing the contact area with the silicon material, thereby achieving a better impact effect.

[0040] 6. A baffle plate 6 is fixedly connected to the hollow structure of the water cooling jacket body 1. The cooling water injected through the water inlet pipe 2 is restricted by the flow direction of the baffle plate 6, and the flow rate is slowed down, thereby increasing the circulation period of the cooling water and achieving full utilization of water cooling.

[0041] 7. The baffle plate 6 is spiral-shaped, the water inlet pipe 2 is close to the starting point of the spiral baffle plate 6, and the water outlet pipe 3 is close to the end point of the baffle plate 6; the cooling water is continuously bent and rotated through the spiral baffle plate 6, and after filling the entire hollow structure of the water-cooling jacket body 1, it is finally discharged from the water outlet pipe 3 at the bottom, so as to achieve uniform diffusion and full utilization of the cold air.

[0042] The above are all preferred embodiments of the present utility model, and are not intended to limit the protection scope of the present utility model. Therefore, any equivalent changes made based on the structure, shape, and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A water cooling device for single crystal furnace production, characterized in that: It includes a water-cooling jacket body, a water inlet pipe, a water outlet pipe, a lifting mechanism and a crushing mechanism. The water-cooling jacket body is in the shape of an inverted cone sleeve, and there is a hollow structure between the inner and outer walls of the water-cooling jacket body. The water inlet pipe and the water outlet pipe are arranged on both sides of the water-cooling jacket body and are respectively connected to the hollow structure of the water-cooling jacket body. One end of the lifting mechanism is fixedly connected to the single crystal furnace body, and the other end is fixedly connected to the water-cooling jacket body. The crushing mechanism is detachably connected to the single crystal furnace body.

2. A water cooling device for single crystal furnace production according to claim 1, characterized in that: The lifting mechanism includes a power source, a screw and a nut seat. The power source is fixedly connected to the single crystal furnace body through a support frame, the screw is fixedly connected to the output shaft of the power source, the nut seat is fixedly connected to the water cooling jacket body, and the screw is threadedly connected to the nut seat.

3. A water cooling device for single crystal furnace production according to claim 2, characterized in that: The lifting mechanism has multiple groups, which are symmetrically arranged on both sides of the water cooling jacket body.

4. A water cooling device for single crystal furnace production according to claim 3, characterized in that: The crushing mechanism comprises a traction rope and a crushing head. The single crystal furnace body is fixedly connected to a plurality of groups of lifting ears. The traction rope is hung on the lifting ears. The crushing head is fixedly connected to the traction rope.

5. A water cooling device for single crystal furnace production according to claim 4, characterized in that: The crushing head is in an inverted cone shape, and the maximum diameter of the crushing head is smaller than the minimum inner diameter of the water cooling jacket body.

6. A water cooling device for single crystal furnace production according to claim 5, characterized in that: A baffle is fixedly connected inside the hollow structure of the water cooling jacket body.

7. A water cooling device for single crystal furnace production according to claim 6, characterized in that: The baffle is in a spiral shape.

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