Damper spring and damper

Abstract

The utility model discloses a damping spring and a damping piece, and the damping spring comprises an elastic body which is provided with a deformation part used for elastic deformation; and the damping layer is arranged on the surface of the deformation part, and the elastic body is of a planar S-shaped structure, so that the damping effect of the elastic body can be improved through the special structure of the elastic body and the damping layer, and the damping effect of the damping spring is better. The shock absorber is applied to the field of shock absorbers of precision equipment.

Description

Technical Field

[0001] The utility model relates to the field of vibration reduction components for precision equipment, in particular to a vibration reduction spring and a vibration reduction component. Background Art

[0002] In the field of precision measurement, the measurement accuracy can reach the micron or even nanometer level. Many vibration reduction structures have been developed based on precision detection, which can ultimately be divided into active vibration reduction and passive vibration reduction. Compared with passive vibration reduction, active vibration reduction has better vibration reduction effect, but the active vibration reduction system is more complex, more difficult to design, and more expensive. The core components in the active vibration reduction system, the actuator, currently basically include voice coil motors, piezoelectric ceramics, etc. These actuators have one thing in common, that is, they are all active devices, which are prone to additional electrical noise interference for precision measurement. Generally, passive vibration reduction is only performed through conventional springs, and the vibration reduction effect is very limited. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vibration reduction spring that can improve the vibration reduction effect of passive vibration reduction.

[0004] The utility model also provides a vibration-damping component having the vibration-damping spring.

[0005] The damping spring according to the first embodiment of the utility model comprises:

[0006] an elastic body having a deformation portion for elastic deformation;

[0007] The damping layer is arranged on the surface of the deformation part.

[0008] The vibration-damping spring according to the embodiment of the first aspect of the utility model has at least the following beneficial effects: by adhering a damping layer to the first surface of the spring, the damping layer will consume the elastic potential energy of the deformation part along the elastic deformation direction, thereby improving the passive vibration reduction effect of the elastic body.

[0009] According to some embodiments of the present invention, the deformation portion is a planar serpentine structure.

[0010] According to some embodiments of the present invention, the damping layer is coated on the surface of the deformation portion along the serpentine line direction of the deformation portion.

[0011] According to some embodiments of the utility model, the deformation portion includes two segments and a first connecting segment, the two segments are spaced apart along the elastic deformation direction, the first connecting segment connects two adjacent segments, and the damping layer is provided on the top surface of the segment and / or the top surface of the first connecting segment;

[0012] Or, the deformation portion includes at least three segments, a first connecting segment and a second connecting segment, all of the segments are spaced apart along the elastic deformation direction, and form first intervals and second intervals alternately distributed along the elastic deformation direction, the segments have a first end and a second end opposite to each other in a direction perpendicular to the elastic deformation direction, the first connecting segment connects the two segments located on both sides of the first interval at the first end, the second connecting segment connects the two segments located on both sides of the second interval at the second end, and the damping layer is provided on the top surface of the segment and / or the top surface of the first connecting segment.

[0013] According to some embodiments of the present invention, along the spacing direction of the segments, the lengths of at least some of the segments decrease successively.

[0014] According to some embodiments of the present invention, a cross section of the deformation portion along a direction perpendicular to the serpentine line of the deformation portion is rectangular.

[0015] According to some embodiments of the present invention, a surface of the deformation portion is provided with an accommodating groove for accommodating the damping layer.

[0016] According to some embodiments of the present invention, the elastic body further includes a first connecting portion and a second connecting portion, and the first connecting portion and the second connecting portion are respectively arranged at two ends of the deformation portion along the elastic deformation direction.

[0017] According to some embodiments of the present invention, the first connecting portion and the second connecting portion are both located in the middle of the deformation portion perpendicular to the elastic deformation direction.

[0018] The vibration damping member according to the second embodiment of the utility model comprises:

[0019] load-bearing part;

[0020] A plurality of the damping springs described in the first aspect of the utility model are evenly distributed around the edge of the load-bearing part.

[0021] The vibration-damping component according to the embodiment of the second aspect of the utility model has at least the following beneficial effects: using the vibration-damping spring of the embodiment of the first aspect has a better passive vibration-damping effect.

[0022] According to some embodiments of the present utility model, the load-bearing part is circular, the number of the vibration-damping springs is four, the four vibration-damping springs are evenly distributed around the edge of the load-bearing part, and the contours of the vibration-damping springs and the load-bearing part are rectangular.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 This is a schematic structural diagram of a vibration-damping spring according to an embodiment of the utility model;

[0026] Figure 2 The figure is a schematic structural diagram of a vibration damping member according to an embodiment of the utility model.

[0027] Figure Number:

[0028] Damping spring 1000;

[0029] Elastic body 100; deformation portion 110; segment body 111; first connecting segment 112; second connecting segment 113; first connecting portion 120; second connecting portion 130;

[0030] Damping layer 200;

[0031] Load-bearing part: 2000. DETAILED DESCRIPTION

[0032] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] In the description of the present utility model, "several" refers to one or more, and "multiple" refers to two or more. If there is a description of "first" or "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0035] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0036] In the related technology, active vibration reduction devices generally include basic passive vibration reduction and actuators for dynamic vibration compensation, which involve many aspects such as closed-loop feedback control, actuator drive control, and vibration sensor detection. The system is very complex and difficult to design, and the cost is generally high. In addition, most of the actuators inside the active vibration reduction system are active devices, and the circuits are relatively complex, which will inevitably cause electrical noise interference and affect precision measurement. Ordinary tension springs are often used for passive vibration reduction. Tension springs can only reduce vibration through air resistance during vibration, resulting in a longer vibration period and poor vibration reduction effect.

[0037] Reference Figure 1 As shown, the first embodiment of the utility model proposes a vibration-damping spring, including: an elastic body 100 and a damping layer 200 , the elastic body 100 has a deformation portion 110 for elastic deformation; the damping layer 200 is arranged on the surface of the deformation portion 110 .

[0038] Specifically, the deformation part 110 is a planar serpentine structure, the cross section of the deformation part 110 along the direction perpendicular to the serpentine direction is rectangular, the elastic body 100 is placed along the horizontal plane, a serpentine plane of the deformation part 110 is located on the top surface of the elastic body 100, and the elastic deformation direction of the deformation part 110 is also in the horizontal direction, and the top surface of the deformation part 110 is provided with a damping layer 200. During the deformation of the deformation part 110 along the elastic deformation direction, the damping layer 200 will absorb part of the energy of the elastic deformation, and in each deformation process, the damping layer 200 will absorb part of the energy of the elastic deformation, so that the amplitude of the deformation part 110 decays rapidly, thereby reducing the vibration time of the deformation part 110, and thereby improving the passive vibration reduction effect of the elastic body 100. In addition, the damping layer 200 can also be provided on the side or bottom surface of the deformation part 110.

[0039] Among them, a damping layer 200 is arranged on the top surface of the deformation part 110, and other surfaces of the deformation part 110 are not affected by the damping layer 200, so that the deformation part 110 can still undergo rapid elastic deformation to absorb the vibration energy of the object to be damped, and then part of the vibration energy is absorbed by the damping layer 200, so that the deformation part 110 can quickly return to stillness after rapid vibration, and the damping spring 1000 has an excellent damping effect.

[0040] In this embodiment, the damping layer 200 is a damping liquid. Although the damping liquid is in liquid form, it is different from conventional liquids such as water. The damping layer 200 has strong adhesion and poor fluidity. When the damping layer 200 is adhered to the top surface of the deformation part 110, the damping layer 200 is not easy to slide off under the action of gravity; of course, in theory, the damping layer 200 can also be bonded to the side or bottom surface of the deformation part 110 through its strong adhesion. The top surface of the deformation part 110 is a plane or a concave curved surface to directly place the damping layer 200 or to accommodate the damping layer 200 in the form of a groove. The damping layer 200 can also be a metal damping layer or a damping grease to better connect with the deformation part 110. The damping liquid is silicone oil.

[0041] The damping layer 200 is coated on the surface of the deformation part 110 along the serpentine line direction of the deformation part, specifically, on the top surface of the deformation part 110, so as to absorb the vibration energy of the deformation part 110 and reduce the gravity effect on the damping layer 200, so as to make the service life longer. Of course, the damping layer 200 can also be intermittently disposed on the surface of the deformation part 110. The damping coefficient of the damping layer 200 is greater than, equal to, or less than the damping coefficient of the elastic body 100.

[0042] It is worth understanding that the vibration reduction spring 1000 reduces vibration by passive vibration reduction. Compared with active vibration reduction, the system design is simpler and has lower costs while meeting the vibration reduction requirements of the equipment. At the same time, it avoids the electrical noise interference of active devices on the measurement, greatly improving the stability and reliability of precision measurement. Compared with traditional passive vibration reduction devices, the combination with damping fluid can achieve better vibration reduction effect.

[0043] Reference Figure 1 As shown, in some specific embodiments of the present invention, the deformation portion 110 includes two segments 111 and a first connecting segment 112, the two segments 111 are spaced apart along the elastic deformation direction, the first connecting segment 112 connects two adjacent segments 111, and the top surface of the segment 111 and / or the top surface of the first connecting segment 112 is provided with a damping layer 200.

[0044] Specifically, the first connecting section 112 connects the same end of the two segments 111, and the other ends of the two segments 111 are empty, so the other empty ends of the two segments 111 are away from or close to each other, and the first connecting section 112 undergoes corresponding elastic deformation, thereby achieving elastic deformation of the entire deformation portion 110. A damping layer 200 is provided on the top surface of the segment 111 and the top surface of the first connecting section 112, so that part of the energy of the segment 111 and the first connecting section 112 during the elastic deformation process is absorbed by the damping layer 200, thereby accelerating the stationary state of the segment 111 and the first connecting section 112, thereby improving the vibration reduction effect.

[0045] As another embodiment, the deformation portion 110 includes at least three segments 111, a first connecting segment 112 and a second connecting segment 113. The segment 111 has a first end and a second end relative to each other along a direction perpendicular to the elastic deformation direction. All the segments 111 are spaced apart along the elastic deformation direction and form first intervals and second intervals that are alternately distributed along the elastic deformation direction. The first connecting segment 112 connects the two segments 111 located on both sides of the first interval at the first end, and the second connecting segment 113 connects the two segments 111 located on both sides of the second interval at the second end. A damping layer 200 is provided on the top surface of the segment 111 and / or the top surface of the first connecting segment 112.

[0046] Specifically, the first connecting section 112 connects the first ends of the two segments 111, and the second ends of the two segments 111 corresponding to the first connecting section 112 are empty, and the two segments 111 corresponding to the first connecting section 112 move away from or approach each other through the second ends, and the first connecting section 112 undergoes corresponding elastic deformation; the second connecting section 113 connects the second ends of the two segments 111, and the first ends of the two segments 111 corresponding to the second connecting section 113 are empty, and the two segments 111 corresponding to the second connecting section 113 move away from or approach each other through the first ends, and the second connecting section 113 undergoes corresponding elastic deformation, thereby realizing the overall deformation of the deformation portion 110 and providing a damping layer 200 on the top surfaces of the segment 111 and the first connecting section 112, so that part of the energy of the segment 111 and the first connecting section 112 during the elastic deformation process is absorbed by the damping layer 200, thereby accelerating the stationary state of the segment 111 and the first connecting section 112, and thereby improving the vibration reduction effect.

[0047] It is worth understanding that the deformation portion 110 further enhances the vibration reduction effect through the special serpentine structure design, and the vibration reduction spring 1000 has a better vibration reduction effect through the damping layer 200 and the serpentine structure.

[0048] Reference Figure 1 As shown, in some specific embodiments of the present invention, along the spacing direction of the segments 111 , the lengths of at least some of the segments 111 decrease successively.

[0049] Specifically, by decreasing the length of some segments 111 , a partial contour shape of the deformation portion 110 forms a triangle or a trapezoid, wherein the first length of each segment 111 can be controlled to make a partial contour shape of the elastomer 100 form a right triangle.

[0050] It is worth understanding that when the partial contour shape of the deformation portion 110 forms a triangle or a trapezoid, the deformation portion 110 forms a special damping structure having a damping coefficient different from that of a conventional spring, so that the damping coefficient of the elastomer 100 is further increased, thereby reducing vibration together with the damping layer 200, thereby improving the vibration reduction effect of the vibration-reducing spring 1000.

[0051] Reference Figure 1 As shown, in some specific embodiments of the present invention, the segment body 111 is a straight body, and each segment body 111 is arranged flush with each other.

[0052] It is worth understanding that the segment 111 is a straight body, and all the segments 111 are arranged flush with each other, so that all the segments 111 can be regarded as being in the same plane, and elastic deformation occurs in the plane along the elastic deformation direction. Among them, the cross-sectional shape of the segment 111 is also rectangular. In this embodiment, when the elastomer 100 is in a free state, all the segments 111 are parallel to each other. In addition, the first connecting segment 112 and the second connecting segment 113 are also straight bodies. As another embodiment, the first connecting segment 112 and the second connecting segment 113 can also be arc bodies, or the side of the first connecting segment 112 away from the segment 111 is straight, and the side of the first connecting segment 112 facing the segment 111 is arc-shaped.

[0053] Reference Figure 1 As shown, in some specific embodiments of the present invention, the cross section of the deformation portion 110 along the serpentine line perpendicular to the deformation portion 110 is rectangular.

[0054] It should be noted that when the deformation portion 110 presents a planar serpentine structure and the cross section perpendicular to the serpentine line is a rectangle, the damping coefficient of the deformation portion 110 will be further increased, thereby having a better vibration reduction effect.

[0055] Reference Figure 1 As shown, in some specific embodiments of the present invention, a receiving groove for receiving the damping layer 200 is provided on the surface of the deformation portion 110 .

[0056] It is worth understanding that the deformation portion 110 accommodates the damping layer 200 through the accommodating groove, which can better limit the damping layer 200. For example, when the damping layer 200 is a damping liquid, the loss of the damping liquid can be avoided.

[0057] Specifically, the receiving groove can be made by directly cutting a groove on the surface of the deformation portion 110, or by adding a protruding retaining wall on the surface of the deformation portion 110, and the retaining wall is used to enclose the receiving groove. The receiving groove can be multiple receiving grooves, for example, each segment 111 and the first connecting segment 112 and the second connecting segment 113 is provided with a receiving groove.

[0058] Reference Figure 1 As shown, in some specific embodiments of the present invention, the elastic body 100 further includes a first connecting portion 120 and a second connecting portion 130 , and the first connecting portion 120 and the second connecting portion 130 are respectively arranged at two ends of the deformation portion 110 along the elastic deformation direction.

[0059] It is worth to understand that the elastic body 100 is connected to other structures through the first connecting part 120 and the second connecting part 130 to achieve the installation of the elastic body 100 for vibration reduction.

[0060] Specifically, the first connection part 120 may be integrally connected to the component to be damped, and the second connection part 130 is provided with a hook or a through hole, which is connected to other supporting structures through the hook or the through hole to achieve suspension of the component to be damped.

[0061] Reference Figure 1 As shown, in some specific embodiments of the present invention, the first connection portion 120 and the second connection portion 130 are both located in the middle of the deformation portion 110 perpendicular to the elastic deformation direction.

[0062] It is worth understanding that the first connection part 120 is arranged at the center position of one end of the deformation part 110, and the second connection part 130 is arranged at the center position of the other end of the deformation part 110. When the first connection part 120 and the second connection part 130 transmit vibration force, the vibration force can be evenly distributed in the elastomer 100, so that the force on the deformation part 110 is more uniform, and the vibration can be evenly distributed, thereby improving the vibration reduction effect.

[0063] Reference Figure 1 and Figure 2 As shown, the second embodiment of the utility model proposes a vibration damping component, including: a load-bearing portion 2000 and multiple vibration damping springs 1000 of the first embodiment of the utility model, and the multiple vibration damping springs 1000 are evenly distributed around the edge of the load-bearing portion 2000.

[0064] In this embodiment, the load-bearing part 2000 is suspended and used to place precision measuring equipment, such as a microscope (Multimode), an optical measuring instrument, etc., with a precision of up to micrometer level or even nanometer level.

[0065] Specifically, after the precision equipment is placed on the load-bearing part 2000, the suspended load-bearing part 2000 is affected by the precision measuring equipment and vibrates up and down under the pull of the vibration-damping spring 1000. At this time, the vibration-damping spring 1000 quickly reduces the amplitude of the load-bearing part 2000 through its own structure and the damping effect of the damping layer 200, thereby causing the load-bearing part 2000 to stop quickly, thereby improving the vibration-damping effect of the load-bearing part 2000. Multiple vibration-damping springs 1000 are evenly distributed around the load-bearing part 2000, so that the vibration force shared by each vibration-damping spring 1000 is even, which is convenient for synchronous vibration-damping of the load-bearing part 2000, and the vibration-damping effect is better.

[0066] Reference Figure 1 and Figure 2As shown, in some specific embodiments of the present invention, the load-bearing part 2000 is circular, the number of the vibration-damping springs 1000 is four, the four vibration-damping springs 1000 are evenly distributed around the edge of the load-bearing part 2000, and the contour shape of the vibration-damping springs 1000 and the load-bearing part 2000 is rectangular.

[0067] It is worth understanding that the installation space of the vibration damping component is generally rectangular, and the object to be measured is generally a wafer, which is circular in shape, so the load-bearing part 2000 is generally circular, and the shape of the vibration damping spring 1000 fills the gap between the load-bearing part 2000 and the installation space, so that the contour shape of the vibration damping spring 1000 and the load-bearing part 2000 is rectangular, thereby improving space utilization and increasing the space occupied by the vibration damping spring 1000, thereby improving the vibration damping effect.

[0068] Specifically, at least part of the damping spring 1000 is made into a right triangle shape, and the right angle of the damping spring 1000 is located on the side away from the load-bearing part 2000, and forms the corner of the rectangular outline of the damping part. The first connecting part 120 of the damping spring 1000 is integrally connected with the load-bearing part 2000, and the second connecting part 130 of the damping spring 1000 is provided with a through hole, and is hung on the inner wall of the installation space through the through hole to realize the installation of the damping spring 1000 and the load-bearing part 2000. In addition, the damping spring 1000 is integrally connected with the load-bearing part 2000, and its vibration transmission effect is better, and the vibration energy can be better transmitted to the damping spring 1000.

[0069] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A damping spring, characterized in that: include: an elastic body having a deformation portion for elastic deformation; A damping layer is provided on the surface of the deformation portion; The deformation portion comprises two segments and a first connecting segment, the two segments are spaced apart along the elastic deformation direction, the first connecting segment connects two adjacent segments, and the damping layer is provided on the top surface of the segment and / or the top surface of the first connecting segment; Or, the deformation portion includes at least three segments, a first connecting segment and a second connecting segment, all of the segments are spaced apart along the elastic deformation direction to form first intervals and second intervals that are alternately distributed along the elastic deformation direction, the segments have opposite first ends and second ends perpendicular to the elastic deformation direction, the first connecting segment connects two of the segments located on both sides of the first interval at the first end, the second connecting segment connects two of the segments located on both sides of the second interval at the second end, and the damping layer is provided on the top surface of the segment and / or the top surface of the first connecting segment; Alternatively, the damping layer is bonded to the side surface or bottom surface of the deformation portion.

2. The damping spring according to claim 1, characterized in that: The deformation portion is a planar serpentine structure.

3. The damping spring according to claim 2, characterized in that: The damping layer is coated on the surface of the deformation part along the serpentine line direction of the deformation part.

4. The damping spring according to claim 1, characterized in that: Along the spacing direction of the segments, the lengths of at least some of the segments decrease in sequence.

5. The damping spring according to claim 2, characterized in that: The cross section of the deformation portion along a direction perpendicular to the serpentine line of the deformation portion is rectangular.

6. The damping spring according to claim 1, characterized in that: A receiving groove for receiving the damping layer is provided on the surface of the deformation portion.

7. The damping spring according to claim 1, characterized in that: The elastic body further includes a first connecting portion and a second connecting portion, wherein the first connecting portion and the second connecting portion are respectively arranged at two ends of the deformation portion along the elastic deformation direction.

8. A vibration damping member, characterized in that: include: load-bearing part; A plurality of vibration-damping springs according to any one of claims 1 to 7, wherein the plurality of vibration-damping springs are evenly distributed around the edge of the load-bearing portion.

9. The vibration damping member according to claim 8, characterized in that: The load-bearing part is circular, the number of the vibration-damping springs is four, the four vibration-damping springs are evenly distributed around the edge of the load-bearing part, and the contours of the vibration-damping springs and the load-bearing part are rectangular.

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