Automatic boat carrying device for annealing quartz boat

Abstract

The utility model relates to an automatic boat carrying device for annealing quartz boats, which comprises an extension frame, a movable frame, a movable frame and a control device, wherein one end of the extension frame extends out of annealing equipment; the three-axis moving mechanism comprises an X-axis moving assembly, a Y-axis moving assembly and a Z-axis moving assembly; the boat carrying assembly is connected with the three-axis moving mechanism, the boat carrying assembly is used for clamping the quartz boat, and the three-axis moving mechanism is used for driving the boat carrying assembly to move; the boat carrying assembly comprises a mounting frame body and a plurality of clamping assemblies, and quartz boats are clamped among the clamping assemblies. According to the automatic boat carrying device for the annealing quartz boat, the three-axis lifting mechanism can move in three directions, so that the positioning precision of the boat in transmission can be reduced; the stroke is increased through the extension of the frame, and the frame can be directly placed on butt joint equipment and does not need to be overlapped with the butt joint equipment frame, so that the equipment width is effectively shortened, the space above is fully utilized, the structure is compact, the space utilization rate of the equipment is improved, and the optimization of plant layout is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to an automatic boat moving device for annealing quartz boats. Background Art

[0002] In the solar cell manufacturing process, silicon wafers need to be diffused, annealed, and thermally oxidized. Quartz boats are used to carry silicon wafers for processing in diffusion equipment, annealing equipment, thermally oxidized equipment, and other process equipment. Quartz boats refer to quartz glass, which is crucial in the production process of silicon wafer annealing.

[0003] The equipment used to transport quartz boats in industry is called a moving boat. Since there is a certain setting position relationship between each process equipment and the flower basket, the quartz boat usually needs to be transported to different locations.

[0004] The existing boat moving mechanism usually includes a quartz boat clamp, which can only move quartz boats on a set number of workstations at a time. If you want to move quartz boats on more workstations, you need to use multiple boat moving mechanisms. Multiple independent boat moving mechanisms occupy a large space and it is difficult to achieve docking between devices. How to move products on more workstations while minimizing the space occupied by the boat moving mechanism and the docking between different devices is a technical problem that needs to be solved in this application. Utility Model Content

[0005] Therefore, the technical problem to be solved by the utility model is to overcome the problem that the boat moving mechanism in the prior art is unreasonable in design, which causes great inconvenience in the use process.

[0006] To solve the above technical problems, the utility model provides an automatic boat moving device for annealing quartz boats, comprising: an extension frame, which is arranged on the annealing equipment, and one end of the extension frame extends out of the annealing equipment; a three-axis moving mechanism, which is arranged on the extension frame, and the three-axis moving mechanism includes an X-axis moving component, a Y-axis moving component and a Z-axis moving component, the X-axis moving component is arranged on the extension frame, the Y-axis moving component is arranged on the X-axis moving component, and the Z-axis moving component is arranged on the Y-axis moving component, and the X-axis moving component, the Y-axis moving component and the Z-axis moving component move along the X-axis, the Y-axis and the Z-axis respectively; a boat moving component, which is connected to the Z-axis moving component, and the boat moving component is used to clamp the quartz boat, and the three-axis moving mechanism is used to drive the boat moving component to move; the boat moving component comprises a mounting frame and a plurality of clamping components, the mounting frame is connected to the Z-axis moving component, the plurality of clamping components are arranged in a row on the mounting frame, and the quartz boat is clamped between the plurality of clamping components.

[0007] In one embodiment of the utility model, the clamping assembly includes a mounting plate, a clamping cylinder 1, a clamping cylinder 2, a clamping jaw 1 and a clamping jaw 2, the mounting plate and the mounting frame are fixedly connected, the clamping cylinder 1 and the clamping cylinder 2 are relatively arranged on the mounting plate, the upper end of the clamping jaw 1 is connected to the clamping cylinder 1, the upper end of the clamping jaw 2 is connected to the clamping cylinder 2, and the clamping jaw 1 and the clamping jaw 2 are relatively arranged, and a quartz boat is clamped between the clamping jaw 1 and the clamping jaw 2.

[0008] In one embodiment of the utility model, the lower end of the clamping jaw 1 is connected to the clamping block 1, the lower end of the clamping jaw 2 is connected to the clamping block 2, the upper end surface of the clamping block 1 is provided with a U-shaped groove 1, the upper end surface of the clamping block 2 is provided with a U-shaped groove 2, and the two sides of the quartz boat are clamped in the U-shaped groove 1 and the U-shaped groove 2.

[0009] In one embodiment of the utility model, a linear guide rail 1 and a linear guide rail 2 are provided on the mounting plate, a slider 1 is connected to the clamp 1, a slider 2 is connected to the clamp 2, the slider 1 is slidably connected to the linear guide rail 1, and the slider 2 is slidably connected to the linear guide rail 2.

[0010] In one embodiment of the utility model, the X-axis moving assembly includes an X-axis motor, an X-axis transmission shaft, two symmetrically arranged transmission assemblies, an X-axis guide rail, an X-axis slider and an X-axis moving plate, the X-axis motor is connected to the X-axis transmission shaft, both ends of the X-axis transmission shaft are connected to two symmetrically arranged transmission assemblies, the X-axis guide rail is arranged on an extension frame, the X-axis moving plate is connected to two symmetrically arranged transmission assemblies, and X-axis sliders are provided at both ends of the X-axis moving plate, the X-axis slider is slidably connected to the X-axis guide rail, and the Y-axis moving assembly is arranged on the X-axis moving plate.

[0011] In one embodiment of the utility model, the transmission assembly includes an X-axis driving wheel, an X-axis gear belt, an X-axis driven wheel and an X-axis gear belt clamp plate, the X-axis driving wheel is connected to the X-axis transmission shaft, the X-axis gear belt is sleeved on the X-axis driving wheel and the X-axis driven wheel, and the X-axis movable plate is connected to the X-axis gear belt through the X-axis gear belt clamp plate.

[0012] In one embodiment of the utility model, the Y-axis moving assembly includes a Y-axis motor, a Y-axis driving wheel, a Y-axis gear belt, a Y-axis driven wheel, a Y-axis moving frame and a Y-axis gear belt clamp plate. The Y-axis motor is connected to the Y-axis driving wheel, the Y-axis gear belt is sleeved on the Y-axis driving wheel and the Y-axis driven wheel, the Y-axis moving frame is connected to the Y-axis gear belt through the Y-axis gear belt clamp plate and the Y-axis gear belt, and the Y-axis moving frame is slidably connected to the X-axis moving plate.

[0013] In one embodiment of the utility model, the X-axis moving plate is provided with a Y-axis linear guide rail, the Y-axis moving frame is provided with a Y-axis slider, and the Y-axis slider is slidably connected to the Y-axis linear guide rail.

[0014] In one embodiment of the utility model, the Z-axis moving assembly includes a Z-axis motor, a Z-axis gear, a Z-axis rack and a Z-axis moving plate, the Z-axis motor is connected to the Z-axis gear, and the Z-axis motor is fixedly set on the Y-axis moving frame, the Z-axis gear and the Z-axis rack are meshed, the Z-axis rack is fixedly set on the Z-axis moving plate, the Z-axis moving plate and the Y-axis moving frame are slidably connected, and the lower end of the Z-axis moving plate is fixedly connected to the mounting frame.

[0015] In one embodiment of the utility model, a Z-axis linear guide is provided on the Z-axis moving plate, a Z-axis slider is provided on the Y-axis moving frame, and the Z-axis slider is slidably connected to the Z-axis linear guide.

[0016] The above technical solution of the utility model has the following beneficial effects compared with the prior art:

[0017] The automatic boat moving device for annealing quartz boat described in the utility model comprises three parts, a frame, a three-axis lifting mechanism and a boat grabbing mechanism. The three-axis lifting mechanism includes three-directional movements, which can reduce the positioning accuracy of the boat during transmission; the stroke is increased by extending the frame, and the boat can be directly placed on the docking equipment without overlapping with the docking equipment frame, which effectively shortens the width of the equipment, makes full use of the upper space, has a compact structure, improves the equipment space utilization rate, and is conducive to optimizing the plant layout. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the content of the utility model easier to understand, the utility model is further described in detail according to the specific embodiments of the utility model in combination with the accompanying drawings, wherein

[0019] Figure 1 This is a schematic structural diagram of an automatic boat moving device for annealing quartz boats in a preferred embodiment of the utility model;

[0020] Figure 2 This is a structural schematic diagram of a three-axis moving mechanism in a preferred embodiment of the utility model;

[0021] Figure 3 This is a structural schematic diagram of a boat moving assembly in a preferred embodiment of the utility model;

[0022] Figure 4 This is a schematic diagram of the structure of the clamping assembly in the preferred embodiment of the utility model;

[0023] Figure 5 The structure of the X-axis moving assembly in the preferred embodiment of the utility model is shown in FIG. Figure 1 ;

[0024] Figure 6 The structure of the X-axis moving assembly in the preferred embodiment of the utility model is shown in FIG. Figure 2 ;

[0025] Figure 7 This is a schematic diagram of the structure of the transmission assembly in the preferred embodiment of the utility model;

[0026] Figure 8 The structure diagram of the Y-axis moving assembly in the preferred embodiment of the utility model is shown in FIG. Figure 1 ;

[0027] Fig. 9 The structure diagram of the Y-axis moving assembly in the preferred embodiment of the utility model is shown in FIG. Figure 2 ;

[0028] Fig.10 It is a schematic diagram of the structure of the Z-axis moving component in the preferred embodiment of the utility model.

[0029] Description of the accompanying drawings in the specification: extension frame 1, three-axis moving mechanism 2, X-axis moving assembly 21, X-axis motor 211, X-axis transmission shaft 212, two symmetrically arranged transmission assemblies 213, X-axis driving wheel 2131, X-axis gear belt 2132, X-axis driven wheel 2133, X-axis gear belt clamping plate 2134, X-axis guide rail 214, X-axis slider 215, X-axis moving plate 216, Y-axis moving assembly 22, Y-axis motor 221, Y-axis driving wheel 222, Y-axis gear belt 223, Y-axis driven wheel 224, Y-axis moving frame 225, Y-axis gear belt clamping plate 226, Y-axis linear guide 227, Y-axis slider 228, Z-axis moving assembly 23, Z-axis motor 231, Z-axis gear 232, Z-axis rack 233, Z-axis moving plate 234, Z-axis linear guide 235, Z-axis slider 236, boat moving assembly 3, mounting frame 31, clamping assembly 32, mounting plate 321, linear guide one 3211, linear guide two 3212, clamping cylinder one 322, clamping cylinder two 323, clamping claw one 324, slider one 3241, clamping claw two 325, slider two 3251, clamping block one 326, U-shaped slot one 3261, clamping block two 327, U-shaped slot two 3271. DETAILED DESCRIPTION

[0030] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0031] Reference Figure 1 , 2As shown, the automatic boat moving device for annealing quartz boat of the utility model comprises three main parts: an extension frame 1, a three-axis moving mechanism 2 and a boat moving assembly 3; the extension frame 1 is arranged on the annealing device, and one end of the extension frame 1 extends out of the annealing device; the three-axis moving mechanism 2 is arranged on the extension frame 1, and the three-axis moving mechanism 2 comprises an X-axis moving assembly 21, a Y-axis moving assembly 22 and a Z-axis moving assembly 23, the X-axis moving assembly 21 is arranged on the extension frame 1, the Y-axis moving assembly 22 is arranged on the X-axis moving assembly 21, and the Z-axis moving assembly 23 It is arranged on the Y-axis moving component 22, and the X-axis moving component 21, the Y-axis moving component 22 and the Z-axis moving component 23 move along the X-axis, the Y-axis and the Z-axis respectively; the boat moving component 3 is connected to the Z-axis moving component 23, and the boat moving component 3 is used to clamp the quartz boat, and the three-axis moving mechanism 2 is used to drive the boat moving component 3 to move; the boat moving component 3 includes a mounting frame 31 and a plurality of clamping components 32, the mounting frame 31 is connected to the Z-axis moving component 23, and the plurality of clamping components 32 are arranged in a row on the mounting frame 31, and the quartz boat is clamped between the plurality of clamping components 32.

[0032] Reference Figure 3 , 4 As shown, the clamping assembly 32 includes a mounting plate 321, a clamping cylinder 1 322, a clamping cylinder 2 323, a clamping jaw 1 324 and a clamping jaw 2 325. The mounting plate 321 is fixedly connected to the mounting frame 31. The clamping cylinder 1 322 and the clamping cylinder 2 323 are relatively arranged on the mounting plate 321. The upper end of the clamping jaw 1 324 is connected to the clamping cylinder 1 322, and the upper end of the clamping jaw 2 325 is connected to the clamping cylinder 2 323. The clamping jaw 1 324 and the clamping jaw 2 325 are relatively arranged, and the quartz boat is clamped between the clamping jaw 1 324 and the clamping jaw 2 325. The lower end of the clamping jaw 1 324 is connected to a clamping block 1 326, the lower end of the clamping jaw 2 325 is connected to a clamping block 2 327, the upper end surface of the clamping block 1 326 is provided with a U-shaped card slot 1 3261, the upper end surface of the clamping block 2 327 is provided with a U-shaped card slot 2 3271, and the two sides of the quartz boat are clamped in the U-shaped card slot 1 3261 and the U-shaped card slot 2 3271. The mounting plate 321 is provided with a linear guide rail 1 3211 and a linear guide rail 2 3212, the clamping jaw 1 324 is connected to a slider 1 3241, the clamping jaw 2 325 is connected to a slider 2 3251, the slider 1 3241 is slidably connected to the linear guide rail 1 3211, and the slider 2 3251 is slidably connected to the linear guide rail 2 3212.

[0033] Reference Figure 5-7As shown, the X-axis moving component 21 includes an X-axis motor 211, an X-axis transmission shaft 212, two symmetrically arranged transmission components 213, an X-axis guide rail 214, an X-axis slider 215 and an X-axis moving plate 216, the X-axis motor 211 is connected to the X-axis transmission shaft 212, both ends of the X-axis transmission shaft 212 are connected to two symmetrically arranged transmission components 213, the X-axis guide rail 214 is arranged on the extension frame 1, the X-axis moving plate 216 is connected to the two symmetrically arranged transmission components 213, and both ends of the X-axis moving plate 216 are provided with X-axis sliders 215, the X-axis slider 215 is slidably connected to the X-axis guide rail 214, and the Y-axis moving component 22 is arranged on the X-axis moving plate 216. The transmission assembly 213 includes an X-axis driving wheel 2131, an X-axis gear belt 2132, an X-axis driven wheel 2133 and an X-axis gear belt clamping plate 2134. The X-axis driving wheel 2131 is connected to the X-axis transmission shaft 212, and the X-axis gear belt 2132 is sleeved on the X-axis driving wheel 2131 and the X-axis driven wheel 2133. The X-axis moving plate 216 is connected to the X-axis gear belt clamping plate 2134 and the X-axis gear belt 2132.

[0034] Reference Figure 8 , 9 As shown, the Y-axis moving assembly 22 includes a Y-axis motor 221, a Y-axis driving wheel 222, a Y-axis gear belt 223, a Y-axis driven wheel 224, a Y-axis moving frame 225 and a Y-axis gear belt clamping plate 226. The Y-axis motor 221 is connected to the Y-axis driving wheel 222, the Y-axis gear belt 223 is sleeved on the Y-axis driving wheel 222 and the Y-axis driven wheel 224, the Y-axis moving frame 225 is connected to the Y-axis gear belt 223 through the Y-axis gear belt clamping plate 226, and the Y-axis moving frame 225 is slidably connected to the X-axis moving plate 216. The X-axis moving plate 216 is provided with a Y-axis linear guide 227, the Y-axis moving frame 225 is provided with a Y-axis slider 228, and the Y-axis slider 228 is slidably connected to the Y-axis linear guide 227.

[0035] Reference Fig.10 As shown, the Z-axis moving assembly 23 includes a Z-axis motor 231, a Z-axis gear 232, a Z-axis rack 233 and a Z-axis moving plate 234, wherein the Z-axis motor 231 is connected to the Z-axis gear 232, and the Z-axis motor 231 is fixedly arranged on the Y-axis moving frame 225, wherein the Z-axis gear 232 is meshed with the Z-axis rack 233, wherein the Z-axis rack 233 is fixedly arranged on the Z-axis moving plate 234, wherein the Z-axis moving plate 234 is slidably connected to the Y-axis moving frame 225, and wherein the lower end of the Z-axis moving plate 234 is fixedly connected to the mounting frame 31. A Z-axis linear guide 235 is arranged on the Z-axis moving plate 234, and a Z-axis slider 236 is arranged on the Y-axis moving frame 225, wherein the Z-axis slider 236 is slidably connected to the Z-axis linear guide 235.

[0036] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the invention of the utility model.

Claims

1. An automatic boat moving device for annealing quartz boat, characterized in that: include, An extension frame, which is arranged on the annealing device, and one end of the extension frame extends out of the annealing device; A three-axis moving mechanism is arranged on the extension frame, and the three-axis moving mechanism includes an X-axis moving component, a Y-axis moving component and a Z-axis moving component. The X-axis moving component is arranged on the extension frame, the Y-axis moving component is arranged on the X-axis moving component, and the Z-axis moving component is arranged on the Y-axis moving component. The X-axis moving component, the Y-axis moving component and the Z-axis moving component move along the X-axis, the Y-axis and the Z-axis respectively; A boat moving assembly is connected to the Z-axis moving assembly, and the boat moving assembly is used to clamp the quartz boat, and the three-axis moving mechanism is used to drive the boat moving assembly to move; The boat moving assembly comprises a mounting frame and a plurality of clamping assemblies, wherein the mounting frame is connected to a Z-axis moving assembly, the plurality of clamping assemblies are arranged in a row on the mounting frame, and a quartz boat is clamped between the plurality of clamping assemblies.

2. The automatic boat moving device for annealing quartz boat according to claim 1, characterized in that: The clamping assembly includes a mounting plate, a clamping cylinder 1, a clamping cylinder 2, a clamping jaw 1 and a clamping jaw 2. The mounting plate is fixedly connected to the mounting frame. The clamping cylinder 1 and the clamping cylinder 2 are relatively arranged on the mounting plate. The upper end of the clamping jaw 1 is connected to the clamping cylinder 1, and the upper end of the clamping jaw 2 is connected to the clamping cylinder 2. The clamping jaw 1 and the clamping jaw 2 are relatively arranged, and a quartz boat is clamped between the clamping jaw 1 and the clamping jaw 2.

3. The automatic boat moving device for annealing quartz boat according to claim 2, characterized in that: The lower end of the clamping jaw 1 is connected to the clamping block 1, the lower end of the clamping jaw 2 is connected to the clamping block 2, the upper end surface of the clamping block 1 is provided with a U-shaped slot 1, the upper end surface of the clamping block 2 is provided with a U-shaped slot 2, and the two sides of the quartz boat are clamped in the U-shaped slot 1 and the U-shaped slot 2.

4. The automatic boat moving device for annealing quartz boat according to claim 2, characterized in that: The mounting plate is provided with a linear guide rail 1 and a linear guide rail 2, the clamping jaw 1 is connected with a slider 1, the clamping jaw 2 is connected with a slider 2, the slider 1 is slidably connected to the linear guide rail 1, and the slider 2 is slidably connected to the linear guide rail 2.

5. The automatic boat moving device for annealing quartz boat according to claim 1, characterized in that: The X-axis moving assembly includes an X-axis motor, an X-axis transmission shaft, two symmetrically arranged transmission assemblies, an X-axis guide rail, an X-axis slider and an X-axis moving plate, the X-axis motor is connected to the X-axis transmission shaft, both ends of the X-axis transmission shaft are connected to two symmetrically arranged transmission assemblies, the X-axis guide rail is arranged on an extension frame, the X-axis moving plate is connected to two symmetrically arranged transmission assemblies, and X-axis sliders are provided at both ends of the X-axis moving plate, the X-axis slider is slidably connected to the X-axis guide rail, and the Y-axis moving assembly is arranged on the X-axis moving plate.

6. The automatic boat moving device for annealing quartz boat according to claim 5, characterized in that: The transmission assembly includes an X-axis driving wheel, an X-axis gear belt, an X-axis driven wheel and an X-axis gear belt clamp plate. The X-axis driving wheel is connected to the X-axis transmission shaft, the X-axis gear belt is sleeved on the X-axis driving wheel and the X-axis driven wheel, and the X-axis moving plate is connected to the X-axis gear belt through the X-axis gear belt clamp plate.

7. The automatic boat moving device for annealing quartz boat according to claim 5, characterized in that: The Y-axis moving assembly includes a Y-axis motor, a Y-axis driving wheel, a Y-axis gear belt, a Y-axis driven wheel, a Y-axis moving frame and a Y-axis gear belt clamp plate. The Y-axis motor is connected to the Y-axis driving wheel, the Y-axis gear belt is sleeved on the Y-axis driving wheel and the Y-axis driven wheel, the Y-axis moving frame is connected to the Y-axis gear belt through the Y-axis gear belt clamp plate, and the Y-axis moving frame is slidably connected to the X-axis moving plate.

8. The automatic boat moving device for annealing quartz boat according to claim 7, characterized in that: The X-axis moving plate is provided with a Y-axis linear guide rail, the Y-axis moving frame is provided with a Y-axis slider, and the Y-axis slider is slidably connected to the Y-axis linear guide rail.

9. The automatic boat moving device for annealing quartz boat according to claim 7, characterized in that: The Z-axis moving assembly includes a Z-axis motor, a Z-axis gear, a Z-axis rack and a Z-axis moving plate. The Z-axis motor is connected to the Z-axis gear, and the Z-axis motor is fixedly set on the Y-axis moving frame. The Z-axis gear is meshed with the Z-axis rack, and the Z-axis rack is fixedly set on the Z-axis moving plate. The Z-axis moving plate is slidably connected to the Y-axis moving frame, and the lower end of the Z-axis moving plate is fixedly connected to the mounting frame.

10. The automatic boat moving device for annealing quartz boat according to claim 9, characterized in that: The Z-axis moving plate is provided with a Z-axis linear guide rail, the Y-axis moving frame is provided with a Z-axis slider, and the Z-axis slider is slidably connected to the Z-axis linear guide rail.

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