Cartridge transfer device

Abstract

The cassette transfer device comprises: a base frame for accommodating a cassette on which a substrate is loaded; a transfer unit movable in a first direction along a transfer guide rail provided in advance, and including a support member provided below the base frame to support the base frame, and at least one duct provided below the support member to support the base frame; at least one duct for discharging an air flow formed with movement in the first direction from an internal space defined by the base frame and the support member; and an angle adjustment unit connected to the transfer unit and configured to adjust an inclination angle of the at least one duct with respect to the first direction based on an intensity of an air flow flowing from the internal space to the at least one duct.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of Korean Patent Application No. 10-2023-0113940 filed in the Korean Patent Office on August 29, 2023, and the entire contents of which are incorporated into this specification. Technical Field

[0003] The utility model relates to a box transfer device, and more specifically, to a box transfer device for transferring boxes containing various substrates in process equipment of a process line for manufacturing display devices and a transfer system comprising the box transfer device. Background Art

[0004] With the development of information technology, the importance of display devices as a connection medium between users and information has become increasingly prominent. Correspondingly, the use of display devices such as liquid crystal display devices and organic light emitting display devices is increasing.

[0005] A typical display device is produced through multiple manufacturing steps, each of which may be implemented in different places. In particular, in a manufacturing step consisting of unit processes, a cassette transfer device may be required to load multiple substrates completed in a certain process equipment into a cassette and then transfer them to another process equipment.

[0006] The above-mentioned records are only used to help understand the background technology of the technical concept of the utility model, and therefore it cannot be understood as the content corresponding to the prior art known to technicians in the technical field to which the utility model belongs. Utility Model Content

[0007] Embodiments of the present invention are intended to provide a box transfer device for producing a display device with improved reliability. For example, the present invention is intended to provide a box transfer device that can prevent contamination when transferring structural elements to be included in the display device in a manufacturing step.

[0008] The box transfer device of an embodiment of the utility model includes: a base frame for accommodating a box loaded with a substrate; a transfer unit, which can move in a first direction along a pre-set transfer guide rail and includes a supporting component and at least one pipe, wherein the supporting component is arranged below the base frame to support the base frame, and the at least one pipe is used to discharge an airflow formed as the movement in the first direction from an internal space defined by the base frame and the supporting component; and an angle adjustment unit, which is connected to the transfer unit and is used to adjust the inclination angle of the at least one pipe relative to the first direction based on the intensity of the airflow flowing into the at least one pipe from the internal space.

[0009] The transfer unit may further include a wind speed sensor attached to an inlet of the at least one duct and configured to measure the strength of the airflow flowing from the internal space into the at least one duct.

[0010] The angle adjustment unit may include a controller and an angle adjustment motor connected to the at least one duct, and the controller may be used to control the angle adjustment motor to adjust the inclination angle of the at least one duct relative to the first direction according to the intensity of the airflow received by the wind speed sensor.

[0011] The controller may be used to adjust an inclination angle of the at least one duct relative to the first direction to a reference angle corresponding to at least one range value of the intensity of the airflow measured by the wind speed sensor.

[0012] The controller may be used to adjust the inclination angle of the at least one duct relative to the first direction to a first angle when the intensity of the airflow measured by the wind speed sensor belongs to a first range, and to adjust the inclination angle of the at least one duct relative to the first direction to a second angle when the intensity of the airflow measured by the wind speed sensor belongs to a second range, and if the first range is greater than the second range, the first angle may be greater than the second angle.

[0013] The angle adjustment unit may be configured such that, as the intensity of the airflow measured by the wind speed sensor decreases, the controller adjusts the direction of the outlet through which the airflow is discharged from the at least one duct to be more inclined with respect to the first direction.

[0014] The at least one duct may have a tapered shape in which a cross-sectional area increases toward a direction opposite to the first direction in which the airflow is discharged.

[0015] The at least one pipe may have a rectangular cross-section and include a first surface as an upper end and a second surface as a lower end, the first surface and the second surface are opposite to each other, the first surface is parallel to the first direction, and the second surface is inclined relative to the first direction.

[0016] The second surface may be inclined at an angle of 15 to 30 degrees relative to the first direction.

[0017] The supporting member may include: a first vertical supporting member; a second vertical supporting member spaced apart from the first vertical supporting member in the first direction; and a horizontal supporting member supporting the first vertical supporting member and the second vertical supporting member, the internal space being defined by the base frame, the first vertical supporting member, the second vertical supporting member and the horizontal supporting member.

[0018] The at least one conduit may extend through the first vertical support member.

[0019] The transfer unit may include a plurality of transfer rollers installed on the transfer rail and capable of being rotationally driven.

[0020] A transfer system of another embodiment of the utility model may include a transfer rail extending in a first direction and a plurality of box transfer devices moving along the transfer rail, the plurality of box transfer devices respectively including: a base frame for accommodating a box loaded with a substrate; a transfer unit movable in the first direction along the transfer rail and including a supporting component and at least one pipe, the supporting component being arranged below the base frame to support the base frame, the at least one pipe being used to discharge an airflow formed as the movement in the first direction from an internal space defined by the base frame and the supporting component; and an angle adjustment unit connected to the transfer unit and used to adjust an inclination angle of the at least one pipe relative to the first direction based on the strength of the airflow flowing into the at least one pipe from the internal space.

[0021] The transfer unit may further include a wind speed sensor attached to an inlet of the at least one duct and configured to measure the strength of the airflow flowing from the internal space into the at least one duct.

[0022] The angle adjustment unit may include a controller and an angle adjustment motor connected to the at least one duct, and the controller may be used to control the angle adjustment motor to adjust the inclination angle of the at least one duct relative to the first direction according to the intensity of the airflow received from the wind speed sensor.

[0023] The angle adjustment unit may be configured such that, as the intensity of the airflow measured by the wind speed sensor decreases, the controller adjusts the direction of the outlet through which the airflow is discharged from the at least one duct to be more inclined with respect to the first direction.

[0024] The at least one duct may have a tapered shape in which a cross-sectional area increases toward a direction opposite to the first direction in which the airflow is discharged.

[0025] The at least one pipe may have a rectangular cross-section and include a first surface as an upper end and a second surface as a lower end, the first surface and the second surface are opposite to each other, the first surface is parallel to the first direction, and the second surface is inclined relative to the first direction.

[0026] According to an embodiment of the utility model, a box transfer device for producing a display device with improved reliability is provided.

[0027] The effects of the embodiment are not limited to the above-exemplified contents, and more effects are included in this specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a perspective view showing a box transfer device according to an embodiment of the present invention.

[0029] Figure 2 is along Figure 1 A cross-sectional view of the line I-I'.

[0030] Figure 3 Yes means Figure 2 A perspective view of an embodiment of a pipeline in FIG.

[0031] Figure 4 It means control Figure 2 A block diagram of an embodiment of a controller for a mid-box transfer device.

[0032] Figure 5 1 is a diagram showing an example of duct angles at different airflow intensities.

[0033] Figure 6 and Figure 7 It is used to explain the adjustment according to the airflow strength. Figure 2 Figure 2 shows an embodiment of the angle of the pipe.

[0034] Figure 8 Yes means including Figure 1 A cross-sectional view of an embodiment of a transfer system of a middle box transfer device. DETAILED DESCRIPTION

[0035] Below, the preferred embodiments of the utility model are described in detail with reference to the accompanying drawings. Please note that in the following description, only the parts required for understanding the operation of the utility model are described, and the description of other parts is omitted to avoid blurring the main points of the utility model. In addition, the utility model is not limited to the embodiments described here, and can also be embodied in other forms. However, the embodiments described here are provided for the purpose of providing a detailed description to enable a technician in the technical field to which the utility model belongs to easily implement the technical idea of ​​the utility model.

[0036] Throughout the specification, when a part is "connected" to other parts, this includes not only the case of "direct connection", but also the case of "indirect connection" when other elements are provided in the middle. The terms used herein are used to illustrate specific embodiments and are not used to limit the present invention. Throughout the specification, when a part "includes" a certain structural element, unless there is a special record to the contrary, this means that other structural elements are not excluded, but other structural elements may be further included. "At least one of X, Y and Z" and "at least one selected from the group consisting of X, Y and Z" can be interpreted as only X, only Y, only Z or any combination of two or more of X, Y and Z (for example, XYZ, XYY, YZ, ZZ). Here, "and / or" includes all combinations of one or more of the corresponding structures.

[0037] Here, the terms "first", "second", etc. may be used to describe a variety of structural elements, but such structural elements are not limited to such terms. Such terms are used to distinguish one structural element from other structural elements. Therefore, within the scope of the contents disclosed herein, the first structural element may refer to the second structural element.

[0038] Figure 1 It is a perspective view showing a box transfer device according to an embodiment of the present invention.

[0039] Reference Figure 1 , the box transfer device TD may include a base frame 100 , a transfer unit 200 , and an angle adjustment unit connected to the transfer unit 200 .

[0040] The box transfer device TD may include a base frame 100 for accommodating a box 110 loaded with a substrate. The base frame 100 may be constructed to include an upper plate 101, a lower plate 102, and a plurality of connecting parts 103 supported between the upper plate 101 and the lower plate 102. The upper plate 101 and the lower plate 102 may be rectangular shapes defined by a first direction DR1 and a second direction DR2. The upper plate 101 and the lower plate 102 may be spaced apart and parallel to each other in a third direction DR3. The second direction DR2 intersects with the first direction DR1, and the third direction DR3 intersects with the first direction DR1 and the second direction DR2.

[0041] Also, a plurality of connection members 103 may connect the upper plate 101 and the lower plate 102. The plurality of connection members 103 may be supported to maintain a predetermined interval between the upper plate 101 and the lower plate 102. The plurality of connection members 103 may extend along the third direction DR3 and be arranged at predetermined intervals from each other.

[0042] The base frame 100 can store the cassette 110 using the inner space supported by the plurality of connection members 103. Since the base frame 100 can store the cassette 110 horizontally, substrates loaded in the cassette 110 can be loaded layer by layer along the third direction DR3.

[0043] The cassette transfer device TD may include a transfer unit 200 that moves along the transfer rail TR. The transfer unit 200 may be configured to include a support member 210 that supports the base frame 100 and a plurality of transfer rollers 230 (see FIG. Figure 2 ). The support member 210 may be disposed below the base frame 100 and support the lower surface of the base frame 100. The support member 210 may include a first vertical support member 211 and a second vertical support member 212 spaced apart from the first vertical support member 211 in the first direction DR1. In addition, the support member 210 may include a horizontal support member 213 supporting the first vertical support member 211 and the second vertical support member 212.

[0044] A plurality of transfer rollers 230 may be installed on the inner side of the transfer rail TR and may be rotationally driven. That is, the plurality of transfer rollers 230 may be substantially a structure for transferring the box 110. Here, the transfer rail TR may be pre-set on the ceiling or floor of the clean room along the moving path of the transfer unit 200. The transfer rail TR may be a pair of rectangular metal rails extending in parallel along the first direction DR1, and may be used to support the plurality of transfer rollers 230. The transfer rail TR may install the plurality of transfer rollers 230 in the guide groove formed on the inner side, and prevent the plurality of transfer rollers 230 from escaping to the outside while guiding the moving path.

[0045] As the transfer unit 200 moves in the first direction DR1, air flowing in from the front of the transfer unit 200 may flow backward, thereby forming an airflow in the internal space 220. The transfer unit 200 may include at least one duct 300 penetrating the first vertical support member 211. The transfer unit 200 may discharge the airflow formed in the internal space 220 to the rear, which is a direction opposite to the first direction DR1, through the at least one duct 300. Here, the internal space 220 may be defined by the base frame 100 and the support member 210. More specifically, the internal space 220 may be defined by the base frame 100, the first vertical support member 211, the second vertical support member 212, and the horizontal support member 213.

[0046] In this way, the at least one duct 300 discharges the airflow formed in the internal space 220 to the rear, thereby suppressing the vortex generated to fill the remaining space as the box transfer device TD moves.

[0047] Although in Figure 1 The at least one pipe 300 is shown as three pipes 300 arranged in a row in the second direction DR2, but the number of the pipes 300 is not limited thereto. For example, there may be one pipe 300.

[0048] Figure 2 is along Figure 1 A cross-sectional view of the line I-I'.

[0049] Reference Figure 2 , the transfer unit 200 of the box transfer device TD may include a wind speed sensor 310 attached to an inlet of at least one duct 300 .

[0050] The direction of the outlet of at least one duct 300 can be adjusted within a specified angle according to the strength of the airflow measured by the wind speed sensor 310. For example, the wind speed sensor 310 can be attached to the inlet of at least one duct 300 and used to measure the strength of the airflow flowing from the internal space 220. In addition, the angle adjustment motor 330 (specific structure not shown, reference numerals are shown in FIG. 1 ) can be used to adjust the direction of the outlet of at least one duct 300 within a specified angle according to the strength of the airflow measured by the wind speed sensor 310. Figure 4 ) to adjust the direction of the outlet of at least one pipe 300.

[0051] The wind speed sensor 310 can measure the strength (or speed) of the airflow flowing in from the inlet of at least one duct 300 in real time and / or periodically. For example, the wind speed sensor 310 can be a hot wire wind speed sensor that uses the temperature change of the hot wire to measure the airflow strength. Alternatively, the wind speed sensor 310 can be a Bain wind speed sensor that uses the rotation speed of the propeller, a wind pressure wind speed sensor that uses the pressure change, an ultrasonic wind speed sensor that uses the ultrasonic passage time, etc. However, the wind speed sensor 310 is not limited thereto as long as it can measure the airflow strength.

[0052] The wind speed sensor 310 may include a communication module for sending the measured airflow intensity (or speed) to the angle adjustment unit. Thus, the angle adjustment unit can adjust the inclination angle of at least one duct 300 relative to the first direction DR1 (hereinafter referred to as "the angle of the duct 300") based on the airflow intensity received from the wind speed sensor 310. The details of adjusting the angle according to the airflow intensity will be referred to later. Figure 6 and Figure 7 Give a description.

[0053] The lower surface of the horizontal support member 213 of the transfer unit 200 may be combined with a plurality of transfer rollers 230. The plurality of transfer rollers 230 may be provided at a predetermined interval from the lower surface of the horizontal support member 213 so that the lower surface of the horizontal support member 213 does not contact the transfer rail TR.

[0054] As the plurality of transfer rollers 230 are mounted to the transfer rail TR and driven to rotate, the transfer unit 200 can move in the first direction DR1 along the extension direction of the transfer rail TR. In addition, the plurality of transfer rollers 230 are respectively coupled to the rotation shafts of the transfer rollers 230 and rotate together, and can be connected to a drive motor that provides a rotational force to the rotation shaft. The plurality of transfer rollers 230 can also be driven all at once or individually. The plurality of transfer rollers 230 can be protected by a housing, and the drive motor can be disposed inside the housing.

[0055] Figure 3 Yes means Figure 2 A perspective view of an embodiment of a pipeline in FIG.

[0056] Reference Figure 2 and Figure 3 The transfer unit 200 may include at least one duct 300 for discharging airflow formed in the internal space 220 as the transfer unit 200 moves. The at least one duct 300 may include an inlet ES into which airflow flows from the internal space 220 and an outlet OS for discharging airflow to the outside.

[0057] At least one duct 300 may extend from the inside of the transfer unit 200 to the outside along the first direction DR1 through the first vertical support member 211. Also, at least one duct 300 may be disposed perpendicular to the first vertical support member 211. At this time, at least one duct 300 may have a rectangular cross section based on a plane defined by the second direction DR2 and the third direction DR3. However, at least one duct 300 is not limited thereto, and may also have a circular, square, or any other suitable cross section.

[0058] like Figure 3 As shown, in the case where at least one pipe 300 has a rectangular cross section with respect to a plane defined by the second direction DR2 and the third direction DR3 as a reference, the at least one pipe 300 may include a first surface 410 as an upper end and a second surface 420 as a lower end, and the first surface 410 and the second surface 420 are opposite to each other. The first surface 410 may be parallel to the first direction DR1, and the second surface 420 may be inclined relative to the first direction DR1. The at least one pipe 300 may have a tapered shape by the inclined second surface 420. For example, the inclination angle S1 of the second surface 420 relative to the first direction DR1 may be an angle of 15 to 30 degrees. However, the inclination angle S1 of the second surface 420 is described as an example and is not limited thereto.

[0059] In this way, the at least one duct 300 may have a tapered shape in which the cross-sectional area increases as it approaches the direction opposite to the first direction DR1. For example, the area of ​​the inlet ES opened to the inner side of the transfer unit 200 in the at least one duct 300 may be smaller than the area of ​​the outlet OS opened to the outer side. That is, the cross-sectional area of ​​the at least one duct 300 increases as it approaches the outlet OS from the inlet ES. In this way, as the cross-sectional area of ​​the at least one duct 300 gradually increases, a diffusion phenomenon of the airflow can be generated, thereby efficiently discharging the airflow.

[0060] Figure 4 It is used to control Figure 2 A block diagram of an embodiment of a controller for a mid-box transfer device.

[0061] Reference Figure 2 and Figure 4 , the box transfer device TD may include an angle adjustment unit, and the angle adjustment unit may include a controller 500 and an angle adjustment motor 330 connected to at least one pipe 300. The controller 500 may receive and process data, and control structural elements of the box transfer device TD.

[0062] The controller 500 may be composed of a master controller 510 and a slave controller 520, and the master controller 510 and the slave controller 520 may be connected by wireless communication such as controller area network (CAN) communication. For example, the master controller 510 may be separated from the box transfer device TD and set at a location convenient for the administrator to operate. The slave controllers 520 may be mounted on the box transfer device TD, respectively, and transmit and receive signals with the master controller 510.

[0063] The main controller 510 can monitor and control the operation of multiple box transfer devices included in the box transfer system as a whole. The main controller 510 can be composed of a control server and controlled by an administrator. For example, the main controller 510 can receive and store control information and sensor information of the slave controller 520. The main controller 510 can predict the generation of eddy currents and / or the intensity of eddy currents based on the airflow intensity received by the slave controller 520. According to the predicted eddy currents, the defect of the substrate can be predicted. In addition, the main controller 510 can transmit the received control information and sensor information to the administrator.

[0064] The slave controller 520 may include an operation program for controlling the operation of the driving motor 240 and the angle adjustment motor 330. For example, the slave controller 520 may operate the driving motor 240 and the angle adjustment motor 330 through a control signal generated by the operation program. The slave controller 520 may precisely control the operation of the driving motor 240 and the angle adjustment motor 330 through a sensing signal of the wind speed sensor 310.

[0065] The slave controller 520 can control the drive motor 240, which is used to drive the plurality of transfer rollers 230 of the transfer unit 200. The slave controller 520 can be connected to the drive motor 240 by wired or wireless communication to transmit the motor control signal MCS. For example, after the box 110 is stored in the base frame 100, the slave controller 520 can input the motor control signal MCS to the drive motor 240 to move the transfer unit 200 to a specific location. And, after reaching the specific location, the slave controller 520 can input the motor control signal MCS to the drive motor 240 to stop the transfer unit 200.

[0066] The slave controller 520 can control the angle adjustment motor 330, which is used to adjust the angle of at least one pipeline 300. The slave controller 520 can be connected to the angle adjustment motor 330 through wired or wireless communication to transmit the angle control signal ACS. For example, the angle adjustment motor 330 can be connected to the rotating shaft of the pipeline 300. Thus, the angle adjustment motor 330 can receive the angle control signal ACS transmitted by the slave controller 520 to adjust the speed (rmp) of the angle adjustment motor 330 or / and the angle of the rotating shaft of the pipeline 300.

[0067] The slave controller 520 may receive the airflow data AFD measured by the wind speed sensor 310. The airflow data AFD may be real-time information measuring the strength of the airflow flowing from the internal space 220 into the at least one duct 300. For example, the airflow data AFD may be a digital signal obtained by converting the analog signal measured by the wind speed sensor 310 in a manner that can be transmitted to the outside.

[0068] The slave controller 520 can be directly connected to the wind speed sensor 310 and operate the angle adjustment motor 330 based on the airflow data AFD. Thus, the slave controller 520 can adjust the angle of the duct 300 based on the airflow data AFD measured in real time. For example, the slave controller 520 can control the angle adjustment motor 330 according to the airflow data AFD measured in real time, so as to adjust the angle of at least one duct 300 to a preset reference angle. Here, the preset reference angle can correspond to at least one range value of the airflow intensity, and is the angle at which the outlet OS direction of at least one duct 300 is inclined. The detailed description of the reference angle corresponding to the range value of the airflow intensity will be referred to later. Figure 7 Give a description.

[0069] In addition, the slave controller 520 can operate the angle adjustment motor 330 of at least one duct 300 based on the motor control signal MCS that controls the drive motor 240. For example, when the transfer unit 200 is traveling, the airflow intensity may change according to acceleration and deceleration. Thus, the transfer unit 200 can determine a reference angle corresponding to the motor control signal MCS that accelerates and decelerates the drive motor 240. The slave controller 520 can adjust the angle of at least one duct 300 according to the reference angle.

[0070] like Figure 4 As shown, the master controller 510 and the slave controller 520 may be provided as separate structural elements, but the embodiment is not limited thereto. The master controller 510 may also perform the functions of the slave controller 520 as required. For example, in the case of a single box transfer device TD, the master controller 510 may perform the functions of the slave controller 520.

[0071] Figure 5 1 is a diagram showing an example of duct angles at different airflow intensities.

[0072] Reference Figure 4 and Figure 5 ,for Figure 2 The at least one pipe 300 can adjust the angle of the at least one pipe 300 to a preset reference angle according to the airflow intensity.

[0073] The slave controller 520 may include a memory storing a reference angle for controlling the angle adjustment motor 330 according to a range of values ​​of the airflow intensity. Also, one or more reference angles may be stored in the memory in the form of a lookup table (LUT).

[0074] like Figure 5 As shown, the lookup table (LUT) may store reference angles AOD1-AODn according to the range of airflow intensity.

[0075] According to one embodiment, the lookup table (LUT) may include a first reference angle to an nth reference angle AOD1 to AODn corresponding to the first range to the nth range AFR1 to AFRn values ​​of airflow intensity, respectively. In an embodiment, the first range to the nth range AFR1 to AFRn values ​​of airflow intensity are the intensity of the airflow flowing into at least one pipe 300, which can be determined within the range of 0m / min to 120m / min. For example, the first range AFR1 of airflow intensity can be greater than 80m / min and less than 120m / min, and the second range AFR2 of airflow intensity can be greater than 50m / min and less than 80m / min. In addition, the third range AFR3 of airflow intensity can be greater than 20m / min and less than 50m / min, and the fourth range AFR4 of airflow intensity can be greater than 0m / min and less than 20m / min. However, this illustrates an example of dividing the range value of airflow intensity, and the range value of airflow intensity can be determined at a smaller interval.

[0076] In addition, the first reference angle to the nth reference angle AOD1~AODn can be values ​​determined by experiments according to the first range to the nth range AFR1~AFRn values ​​of one or more airflow intensities. For example, the first reference angle to the nth reference angle AOD1~AODn can be the angles of at least one duct 300 that can minimize the height of the vortex generated at the rear according to the airflow intensity measured by the wind speed sensor 310. For example, the first reference angle AOD1 corresponds to the first range AFR1 of airflow intensity and can be 165 degrees. The second reference angle AOD2 corresponds to the second range AFR2 of airflow intensity and can be 155 degrees. The third reference angle AOD3 corresponds to the third range AFR3 of airflow intensity and can be 145 degrees. In addition, the fourth reference angle AOD4 corresponds to the fourth range AFR4 of airflow intensity and can be 135 degrees.

[0077] According to one embodiment, when the airflow intensity measured by the wind speed sensor 310 belongs to the first range AFR1, the preset reference angle may be the first reference angle AOD1. And, when the airflow intensity measured by the wind speed sensor 310 belongs to the second range AFR2, the preset reference angle may be the second reference angle AOD2. Here, if the value of the first range AFR1 is greater than the value of the second range AFR2, the first reference angle AOD1 may be greater than the second reference angle AOD2.

[0078] According to the first reference angle to the nth reference angle AOD1-AODn, at least one pipe 300 can be adjusted to be inclined relative to the first direction DR1. In addition, the first reference angle to the nth reference angle AOD1-AODn can be defined by an obtuse angle formed by a horizontal plane extending along the first direction DR1 and a plane extending along the direction of the outlet OS. At this time, the direction of the outlet OS can be understood as being in contact with the lower surface 420 (refer to Figure 3 Alternatively, the direction of the outlet OS can be understood as being parallel to the upper surface 410 (refer to Figure 3 ) direction. For the sake of convenience, the direction of the outlet OS is defined as the direction parallel to the lower surface 420 (refer to Figure 3 ) direction parallel to the

[0079] Figure 6 and Figure 7 It is used to explain the adjustment according to the airflow strength. Figure 2 FIG. 1 is a diagram of an embodiment of the angle of the pipeline. Figure 2 The part denoted by reference numeral 10 will be described.

[0080] Reference Figure 6 and Figure 7 , the box transfer device TD may generate an eddy current EF at the rear due to the rear structure and empty space caused by the movement. Therefore, the box transfer device TD can suppress the generation of the eddy current EF by ensuring the channel of the discharged airflow AF. For example, the airflow AF discharged through at least one pipe 300 may generate an eddy current EF between the transfer guide TR extending in the first direction DR1 at the rear and the discharge port OS of at least one pipe 300. The eddy current EF may appear as an updraft. Therefore, the particles accumulated on the floor of the transfer guide TR may be suspended and attached to the substrate loaded in the box 110 due to the eddy current EF as the updraft.

[0081] When the box transfer device TD decelerates, the particles may rise due to the eddy current EF generated at the rear. And the diffusion speed of the rising particles may catch up with the speed of the box transfer device TD. Furthermore, when the box transfer device TD decelerates and stops, the particles rising at the rear due to the eddy current EF may flow into the interior of the box 110 and adhere to the substrate. In this way, the particles attached to the surface of the substrate may cause product defects as defects.

[0082] In order to reduce particles attached to the substrate and suppress the influence of the eddy current EF generated at the rear, the box transfer device TD may adjust the direction of the air flow AF discharged through at least one duct 300 .

[0083] In an embodiment, the controller 500 (see Figure 4 ) The direction CA of the outlet OS of at least one duct 300 that discharges the airflow AF to the outside can be adjusted to be inclined relative to the first direction DR1 according to the airflow strength. At this time, the direction CA of the outlet OS can be defined as the second surface 420 of the duct 300 (refer to Figure 3 ) extending in the direction of the outlet OS. For example, the controller 500 may obtain the strength of the airflow flowing from the internal space 220 into the at least one duct 300 through the wind speed sensor 310. The controller 500 may calculate a reference angle corresponding to the range value of the airflow strength. Then, the controller 500 may control the angle adjustment motor 330 to adjust the obtuse angle formed by the direction CA of the outlet OS and the horizontal plane HP extending along the first direction DR1 to the reference angle.

[0084] Reference Figure 2 and Figure 6 , the airflow intensity measured by the wind speed sensor 310 in the initial state where at least one duct 300 is arranged parallel to the horizontal plane HP may be 110 m / min. In this case, the controller 500 may calculate the airflow intensity within the first range AFR1 (refer to Figure 5 ) The controller 500 may adjust the inclination of at least one duct 300 in such a manner that the obtuse angle formed by the direction CA of the outlet OS and the horizontal plane HP becomes 165 degrees as the first reference angle AOD1. That is, the controller 500 may adjust the inclination of at least one duct 300 in such a manner that the height of the outlet OS is lower than the height of the inlet ES.

[0085] Reference Figure 2 and Figure 7 , the airflow intensity measured by the wind speed sensor 310 may be 30 m / min in the initial state where at least one duct 300 is arranged parallel to the horizontal plane HP. In this case, the controller 500 may calculate the third range AFR3 (refer to Figure 5 ) The controller 500 may adjust the inclination of the at least one duct 300 in such a manner that the obtuse angle formed by the direction CA of the outlet OS and the horizontal plane HP becomes 145 degrees as the third reference angle AOD3. That is, the controller 500 may adjust the inclination of the at least one duct 300 in such a manner that the height of the outlet OS is further lower than the height of the inlet ES as the airflow intensity decreases.

[0086] In this way, the box transfer device TD can reduce the vortex EF generated at the rear by adjusting the angle of at least one duct 300 in a manner linked to the airflow intensity that changes due to acceleration and deceleration during movement. For example, when the airflow intensity is large, the direction CA of the outlet OS of at least one duct 300 can be adjusted to be horizontal to prevent the bumping phenomenon caused by the discharged airflow AF. On the contrary, when the airflow intensity is small, the direction CA of the outlet OS of at least one duct 300 can be adjusted to be inclined toward the lower surface 420 to reduce the height of the vortex EF caused by the discharged airflow AF.

[0087] Figure 8 Yes means including Figure 1 A cross-sectional view of an embodiment of a transfer system of a middle box transfer device.

[0088] Reference Figure 8 The box transfer system TS may include a transfer rail TR and box transfer devices TD1 and TD2. The structures of the box transfer devices TD1 and TD2 may be respectively the same as those of the reference Figures 1 to 7 The structure of the box transfer device TD described is the same. Therefore, repeated description of the same structure will be omitted.

[0089] The box transfer system TS can be applied to the manufacturing process implemented in a clean room equipped with an equipment fan unit EFU (Equipment Fan Unit). The box transfer system TS can move the box transfer devices TD1 and TD2 loaded with the box 110 along the transfer rails TR provided on the ceiling or floor in the clean room. The box 110 containing the substrate can be moved to each process equipment by the box transfer devices TD1 and TD2 and the process can be performed.

[0090] At this time, in the box transfer system TS, the box transfer devices TD1 and TD2 can move sequentially along the transfer rail TR extending in the first direction DR1. From the characteristics of the box transfer system TS moving sequentially along the transfer rail TR, the eddy current EF generated behind the first box transfer device TD1 may affect the second box transfer device TD2.

[0091] According to one embodiment, the box transfer devices TD1 and TD2 may include ducts 301 and 302 for discharging the airflow AF formed in the internal space 220 due to the movement. The ducts 301 and 302 may pass through the rear of each transfer unit 201 and 202, and the direction of the discharge port may be adjusted within a specified angle.

[0092] The ducts 301 and 302 may have a tapered shape in which the cross-sectional area increases as it approaches a certain direction. For example, the cross-sectional area of ​​the ducts 301 and 302 may gradually increase from the inlet where the airflow AF flows in to the outlet where the airflow AF flows out. In particular, the ducts 301 and 302 may have a tapered shape by having a lower surface inclined relative to the first direction DR1.

[0093] The ducts 301, 302 may include respective wind speed sensors 311, 312 attached to the inlet into which the air flow AF flows from the internal space 220. The angles of the ducts 301, 302 may be adjusted according to the air flow strength measured by the respective wind speed sensors 311, 312. For example, the first box transfer device TD1 may adjust the angle in a manner that tilts the discharge direction of the first duct 301 according to the air flow strength measured by the first wind speed sensor 311. At the same time, the second box transfer device TD2 may adjust the angle in a manner that tilts the discharge direction of the second duct 302 according to the air flow strength measured by the second wind speed sensor 312. The first box transfer device TD1 and the second box transfer device TD2 may travel at different accelerations and decelerations from each other, and the air flow strengths measured by the first wind speed sensor 311 and the second wind speed sensor 312 may also be different. Therefore, the angle of the first duct 301 and the angle of the second duct 302 may be adjusted to different angles from each other.

[0094] In this way, the box transfer devices TD1 and TD2 can adjust the angles of the ducts 301 and 302 in a manner linked to the airflow intensity that changes due to acceleration and deceleration during movement. As a result, the eddy current EF generated behind the box transfer devices TD1 and TD2 can be reduced. In particular, the height of the eddy current EF generated between the first box transfer device TD1 and the second box transfer device TD2 can be reduced by adjusting the angle of the first duct 301 included in the first box transfer device TD1. This can reduce defects caused by particles flowing into the inside of the box 110 loaded in the first box transfer device TD1 and the second box transfer device TD2 and prevent product defects.

[0095] Although specific embodiments and application examples are described herein, other embodiments and variations can be derived from the above description. Therefore, the concept of the present invention is not limited to such embodiments, but also involves the claims, various obvious variations and equivalents.

Claims

1. A box transfer device, characterized in that: include: A base frame for receiving a box loaded with a substrate; a transfer unit that is movable in a first direction along a pre-set transfer guide rail and includes a support component and at least one duct, wherein the support component is disposed below the base frame to support the base frame, and the at least one duct is used to discharge an airflow formed along with movement in the first direction from an internal space defined by the base frame and the support component; as well as An angle adjustment unit is connected to the transfer unit and is used to adjust an inclination angle of the at least one duct relative to the first direction based on the strength of the airflow flowing from the internal space into the at least one duct.

2. The box transfer device according to claim 1, characterized in that The transfer unit further includes a wind speed sensor attached to an inlet of the at least one duct and configured to measure the strength of the airflow flowing from the inner space into the at least one duct.

3. The box transfer device according to claim 2, characterized in that: The angle adjustment unit includes a controller and an angle adjustment motor connected to the at least one duct, the controller being configured to control the angle adjustment motor to adjust an inclination angle of the at least one duct relative to the first direction according to the strength of the airflow received from the wind speed sensor.

4. The box transfer device according to claim 3, characterized in that: The controller is used to adjust the inclination angle of the at least one duct relative to the first direction to a reference angle corresponding to at least one range value of the intensity of the airflow measured by the wind speed sensor.

5. The box transfer device according to claim 3, characterized in that: The controller is used to adjust the inclination angle of the at least one duct relative to the first direction to a first angle when the intensity of the airflow measured by the wind speed sensor belongs to a first range, and to adjust the inclination angle of the at least one duct relative to the first direction to a second angle when the intensity of the airflow measured by the wind speed sensor belongs to a second range, If the first range is greater than the second range, the first angle is greater than the second angle.

6. The box transfer device according to claim 3, characterized in that: The angle adjustment unit is configured so that, as the intensity of the airflow measured by the wind speed sensor decreases, the controller adjusts the direction of the outlet through which the airflow is discharged from the at least one duct to be more inclined with respect to the first direction.

7. The box transfer device according to claim 1, characterized in that: The at least one duct has a tapered shape in which a cross-sectional area increases toward a direction opposite to the first direction in which the airflow is discharged.

8. The box transfer device according to claim 1, characterized in that: The at least one pipe has a rectangular cross section and includes a first face as an upper end and a second face as a lower end, the first face and the second face being opposite to each other, The first surface is parallel to the first direction, The second surface is inclined relative to the first direction.

9. The box transfer device according to claim 1, characterized in that: The supporting member comprises: a first vertical support member; a second vertical support member spaced apart from the first vertical support member in the first direction; and a horizontal support member, supporting the first vertical support member and the second vertical support member, The inner space is defined by the base frame, the first vertical support member, the second vertical support member, and the horizontal support member.

10. The box transfer device according to claim 9, characterized in that: The at least one conduit extends through the first vertical support member.

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