Cleaning equipment for high-precision metal mask after etching

Abstract

The utility model belongs to the technical field of cleaning equipment, and particularly relates to high-precision metal mask plate after-etching cleaning equipment which comprises a base, and a soaking box and a waste water collecting box are placed on the inner side of the base. A first supporting rod and a second supporting rod are installed at the upper end of the base, a moving assembly is installed between the first supporting rod and the second supporting rod, a hydraulic telescopic rod is installed on the moving assembly, a placing frame is installed at the lower end of the hydraulic telescopic rod, and a mask plate is placed on the placing frame. The device comprises a first threaded rod and a second threaded rod, driven gears are installed on the same sides of the first threaded rod and the second threaded rod, a driving gear is arranged between the two driven gears, and the driving gear is in meshed connection with the two driven gears; and the first moving blocks are installed at the side ends of the first threaded rod and the second threaded rod correspondingly, a water spraying head is fixedly installed at the lower end of each first moving block, and a water pipe is connected to the upper end of each water spraying head in a sealed mode.

Description

Technical Field

[0001] The utility model belongs to the technical field of cleaning equipment, in particular to a high-precision metal mask plate cleaning device after etching. Background Art

[0002] Photomask, also known as photomask, photomask, photolithography mask, mask plate, mask board, etc., is a graphic transfer tool or motherboard in the integrated circuit manufacturing process, that is, the motherboard of the semiconductor chip, which carries graphic information and process technology information. The function of the mask is to transfer the circuit pattern carried by it to the base material such as silicon wafer by exposure, so as to realize the mass production of integrated circuits. Masks are widely used in semiconductors, flat panel displays, circuit boards, touch screens and other fields.

[0003] When using a mask to prepare semiconductor chips, an etching solution is generally required to be coated on the mask. If the etching solution is not cleaned in time, the mask will be damaged to a certain extent. Once the etching solution solidifies, it will also affect subsequent use. At present, when cleaning a mask coated with etching solution, the mask is generally rinsed directly. The direct rinsing method will result in incomplete rinsing of the corners of the mask.

[0004] To this end, we propose a high-precision metal mask cleaning device. Utility Model Content

[0005] In view of the deficiencies in the prior art, the present invention aims to provide a high-precision metal mask post-etching cleaning device.

[0006] The purpose of this disclosure can be achieved through the following technical solutions:

[0007] A high-precision metal mask post-etching cleaning device, comprising:

[0008] A base, wherein a soaking tank and a wastewater collection tank are placed inside the base;

[0009] A first support rod and a second support rod are fixedly mounted on the upper end of the base, a moving assembly is mounted between the first support rod and the second support rod, a hydraulic telescopic rod is mounted on the moving assembly, a placing frame is mounted on the lower end of the hydraulic telescopic rod, and a mask is placed on the placing frame;

[0010] A first threaded rod and a second threaded rod, wherein the first threaded rod and the second threaded rod are arranged in a parallel state, and the first threaded rod and the second threaded rod are both located directly above the wastewater collection box, one end of the first threaded rod and the second threaded rod are mounted on the upper end of the first support rod through a fixing block, and the other end of the first threaded rod and the second threaded rod are mounted on the upper end of the second support rod through a fixing block, a driven gear is fixedly mounted on the same side of the first threaded rod and the second threaded rod, a driving gear is arranged between the two driven gears, the driving gear is meshedly connected with the two driven gears, the driving gear is fixedly mounted on the output shaft of the first drive motor, and the first drive motor is fixedly mounted on the upper end of the second support rod;

[0011] The first moving block, there are two of the first moving blocks, which are respectively installed on the side ends of the first threaded rod and the second threaded rod, and the first moving block is threadedly connected to the first threaded rod and the second threaded rod, and a water spray head is fixedly installed on the lower end of each of the first moving blocks, and a water pipe is sealed on the upper end of the water spray head.

[0012] Furthermore, the moving assembly includes a third threaded rod, a sliding rod, a second moving block, a third moving block, a connecting rod and a second driving motor, the third threaded rod is installed in a accommodating cavity inside the first support rod, the second driving motor is fixedly installed at the side end of the first support rod, and the output shaft of the second driving motor is fixedly connected to one end of the third threaded rod, the second moving block is installed at the side end of the third threaded rod, and the second moving block is threadedly connected to the third threaded rod; the sliding rod is installed in the accommodating cavity of the second support rod, the third moving block is installed at the side end of the sliding rod, and the third moving block can slide freely at the side end of the sliding rod, the connecting rod is installed between the second moving block and the third moving block, and the two ends of the connecting rod are fixedly connected to the second moving block and the third moving block respectively; the hydraulic telescopic rod is fixedly installed on the connecting rod.

[0013] Furthermore, clamping assemblies are installed on both side ends of the placement rack, and the clamping assemblies include a clamping plate and a screw. A round block is fixedly installed on one end of the clamping plate close to the screw, and a round groove is opened in the round block. A round piece is fixedly installed on one end of the screw close to the clamping plate, and the round piece is located in the round groove. The clamping plate is rotatably connected to the screw.

[0014] Furthermore, the thread directions of the first threaded rod and the second threaded rod are opposite.

[0015] Furthermore, an initial position of the first moving block on the first threaded rod is close to the first support rod; and an initial position of the first moving block on the second threaded rod is close to the second support rod.

[0016] Furthermore, the water spray heads at the lower ends of the two first moving blocks are symmetrically arranged, the end of the lower end of the water spray head close to the outer side is a planar spray head, and the end of the lower end of the water spray head close to the inner side is an inclined spray head.

[0017] The nouns, conjunctions or adjectives involved in the above technical solution are explained as follows:

[0018] Fixed connection: refers to a connection in which parts or components are fixed without any relative movement. It is divided into detachable connection and non-detachable connection.

[0019] (1) Removable connection: The parts are fixed together by screws, splines, wedge pins, etc. This connection method can be disassembled for maintenance without damaging the parts. However, the specifications of the connectors used must be correct (such as the length of the bolts, keys, and wedge pins) and they must be properly tightened.

[0020] (2) Non-detachable connection: mainly refers to welding, riveting and tenoning. Since forging, sawing or oxygen cutting are required for disassembly during maintenance or replacement, spare parts generally cannot be reused. At the same time, attention should be paid to process quality, technical inspection and remedial measures (such as calibration, polishing, etc.) during connection.

[0021] Beneficial effects of the present disclosure:

[0022] 1. When cleaning the metal mask, the device can clean the metal mask by soaking it first and then rinsing it, and can clean the etching liquid on the surface of the metal mask;

[0023] 2. The device drives the first movable block at the side end of the first threaded rod and the second threaded rod to move through the first driving motor, thereby driving the water spray head to rinse the mask. Since the first movable block at the side end of the first threaded rod and the first movable block at the side end of the second threaded rod move in opposite directions, the water spray head at the lower end of the first movable block can repeatedly rinse the mask, making it easier to rinse the mask clean. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 It is a schematic diagram of the structure of the overall device of the embodiment of the utility model;

[0026] Figure 2 It is a top view of the overall device of the embodiment of the utility model;

[0027] Figure 3 It is a structural schematic diagram of the mobile assembly of an embodiment of the utility model;

[0028] Figure 4 It is a structural schematic diagram of the clamping assembly of an embodiment of the utility model;

[0029] Figure 5 This is a schematic diagram of the structure of the round block of the utility model embodiment;

[0030] Figure 6 This is a schematic diagram of the structure of the screw in the embodiment of the utility model;

[0031] Figure 7 It is a cross-sectional view of a water spray head according to an embodiment of the utility model.

[0032] Figure numerals: 1, base; 2, immersion tank; 3, wastewater collection tank; 4, first support rod; 5, second support rod; 6, moving assembly; 7, hydraulic telescopic rod; 8, placement rack; 9, clamping assembly; 10, mask; 11, first threaded rod; 12, second threaded rod; 13, fixed block; 14, driven gear; 15, driving gear; 16, first drive motor; 17, first moving block; 18, water spray head; 19, third threaded rod; 20, sliding rod; 21, second moving block; 22, third moving block; 23, connecting rod; 24, second drive motor; 25, clamping plate; 26, screw; 27, round block; 28, round groove; 29, round piece; 30, water pipe. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0034] A high-precision metal mask post-etching cleaning device, such as Figure 1 to Figure 7 As shown, including:

[0035] A base 1 is provided with a soaking box 2 and a wastewater collection box 3 inside the base 1; in the device, the soaking box 2 contains a chemical solution for reacting with the etching solution, and the wastewater collection box 3 is used to collect the wastewater after flushing.

[0036] A first support rod 4 and a second support rod 5 are fixedly installed on the upper end of the base 1, a moving assembly 6 is installed between the first support rod 4 and the second support rod 5, a hydraulic telescopic rod 7 is installed on the moving assembly 6, a placement rack 8 is installed on the lower end of the hydraulic telescopic rod 7, and a mask 10 is placed on the placement rack 8; the placement rack 8 is used to install the mask 10, the moving assembly 6 is used to control the lateral movement of the mask 10, and the hydraulic telescopic rod 7 is used to control the placement rack 8 to rise or fall.

[0037] A first threaded rod 11 and a second threaded rod 12, wherein the first threaded rod 11 and the second threaded rod 12 are arranged in a parallel state, and the first threaded rod 11 and the second threaded rod 12 are both located directly above the wastewater collection tank 3, one end of the first threaded rod 11 and the second threaded rod 12 are mounted on the upper end of the first support rod 4 through a fixing block 13, and the other end of the first threaded rod 11 and the second threaded rod 12 are mounted on the upper end of the second support rod 5 through a fixing block 13, a driven gear 14 is fixedly mounted on the same side of the first threaded rod 11 and the second threaded rod 12, a driving gear 15 is arranged between the two driven gears 14, the driving gear 15 is meshedly connected with the two driven gears 14, and the driving gear 15 is fixedly mounted on the output shaft of the first drive motor 16, and the first drive motor 16 is fixedly mounted on the upper end of the second support rod 5;

[0038] The first moving block 17 includes two first moving blocks 17, which are respectively mounted on the side ends of the first threaded rod 11 and the second threaded rod 12, and the first moving block 17 is threadedly connected to the first threaded rod 11 and the second threaded rod 12. A water spray head 18 is fixedly mounted on the lower end of each first moving block 17, and a water pipe 30 is sealed on the upper end of the water spray head 18;

[0039] The first driving motor 16 is configured to control the rotation of the first threaded rod 11 and the second threaded rod 12, thereby driving the first moving block 17 on the first threaded rod 11 and the first moving block 17 on the second threaded rod 12 to move, thereby driving the water spray head 18 on the first moving block 17 to flush the mask 10, and the water pipe 30 is used to connect to an external water pump to provide the required water source for flushing.

[0040] As a preferred embodiment of the present invention, Figure 3As shown, the moving assembly 6 includes a third threaded rod 19, a sliding rod 20, a second moving block 21, a third moving block 22, a connecting rod 23 and a second driving motor 24, the third threaded rod 19 is installed in the accommodating cavity inside the first support rod 4, the second driving motor 24 is fixedly installed on the side end of the first support rod 4, and the output shaft of the second driving motor 24 is fixedly connected to one end of the third threaded rod 19, the second moving block 21 is installed on the side end of the third threaded rod 19, and the second moving block 21 is threadedly connected to the third threaded rod 19; the sliding rod 20 is installed in the accommodating cavity of the second support rod 5, and the third moving block 22 is installed in the accommodating cavity of the second support rod 5 It is installed on the side end of the slide rod 20, and the third moving block 22 can slide freely at the side end of the slide rod 20, the connecting rod 23 is installed between the second moving block 21 and the third moving block 22, and the two ends of the connecting rod 23 are fixedly connected to the second moving block 21 and the third moving block 22 respectively; the hydraulic telescopic rod 7 is fixedly installed on the connecting rod 23; the moving component 6 is set to drive the placement rack 8 to move, so that after the mask 10 is soaked, the placement rack 8 with the mask 10 installed can be moved to the top of the wastewater treatment tank through the moving component 6, so that the mask 10 on the placement rack 8 can be washed through the water spray head 18.

[0041] As a preferred embodiment of the present invention, Figures 4 to 6 As shown, clamping assemblies 9 are installed on both side ends of the placement rack 8, and the clamping assemblies 9 include a clamping plate 25 and a screw 26. A round block 27 is fixedly installed on one end of the clamping plate 25 close to the screw 26, and a round groove 28 is opened in the round block 27. A round piece 29 is fixedly installed on one end of the screw 26 close to the clamping plate 25, and the round piece 29 is located in the round groove 28. The clamping plate 25 is rotatably connected to the screw 26; the clamping assembly 9 is used to clamp the mask 10 on the placement rack 8, so as to clamp the mask 10 to prevent the mask 10 from falling off from the placement rack 8 during the immersion process or when the placement rack 8 is moved.

[0042] As a preferred embodiment of the present invention, Figure 2 As shown, the thread directions of the first threaded rod 11 and the second threaded rod 12 are opposite; the thread directions of the first threaded rod 11 and the second threaded rod 12 are opposite so that when the first drive motor 16 is started, the first moving block 17 on the first threaded rod 11 and the first moving block 17 on the second threaded rod 12 move in opposite directions, that is, when the first moving block 17 on the first threaded rod 11 moves from the first support rod 4 to the second support rod 5, the first moving block 17 on the second threaded rod 12 will move from the second support rod 5 to the first support rod 4, so that the water spray head 18 at the lower end of the first moving block 17 can rinse the mask 10 twice.

[0043] As a preferred embodiment of the present invention, Figure 1 As shown, the initial position of the first moving block 17 on the first threaded rod 11 is close to the first support rod 4 ; the initial position of the first moving block 17 on the second threaded rod 12 is close to the second support rod 5 .

[0044] As a preferred embodiment of the present invention, Figure 7 As shown, the water spray heads 18 at the lower ends of the two first movable blocks 17 are symmetrically arranged, the end of the lower end of the water spray head 18 close to the outer side is a flat spray head, and the end of the lower end of the water spray head 18 close to the inner side is an inclined spray head; the water spray head 18 is arranged in this shape so that the spraying range of the water spray head 18 is larger.

[0045] The working principle and use process of this utility model:

[0046] When the device is used to clean the etched mask 10, the mask 10 is first placed on the placement rack 8 and fixed by the clamping assembly 9. The mask 10 is then controlled by the hydraulic telescopic rod 7 to sink into the chemical solution in the immersion tank 2 for immersion, so that the chemical solution reacts with the etching solution. After the immersion is completed, the mask 10 is controlled to rise by the hydraulic telescopic rod 7. The mask 10 is then moved to the top of the wastewater collection tank 3 by the moving assembly 6, and the second drive motor 24 is started. At the same time, the water pipe 30 on the water spray head 18 is connected to the external water pump. After the second drive motor 24 is started, it will drive the driving gear 15 to rotate, thereby driving the two driven gears 14 to rotate, thereby rotating the first threaded rod 11 and the second threaded rod 12, thereby driving the first moving block 17 on the first threaded rod 11 and the first moving block 17 on the second threaded rod 12 to move, so that the water spray head 18 can rinse the mask 10.

[0047] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0048] The above shows and describes the basic principles, main features and advantages of the present disclosure. Those skilled in the art should understand that the present disclosure is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present disclosure. Without departing from the spirit and scope of the present disclosure, the present disclosure may have various changes and improvements, and these changes and improvements fall within the scope of the present disclosure to be protected.

Claims

1. A high-precision metal mask post-etching cleaning device, characterized in that: include: A base (1), wherein a soaking box (2) and a wastewater collection box (3) are placed inside the base (1); A first support rod (4) and a second support rod (5) are fixedly mounted on the upper end of the base (1); a moving assembly (6) is mounted between the first support rod (4) and the second support rod (5); a hydraulic telescopic rod (7) is mounted on the moving assembly (6); a placement rack (8) is mounted on the lower end of the hydraulic telescopic rod (7); and a mask (10) is placed on the placement rack (8); A first threaded rod (11) and a second threaded rod (12), wherein the first threaded rod (11) and the second threaded rod (12) are arranged in a parallel state, and the first threaded rod (11) and the second threaded rod (12) are both located directly above the wastewater collection box (3); one end of the first threaded rod (11) and the second threaded rod (12) are mounted on the upper end of the first support rod (4) through a fixing block (13); the other end of the first threaded rod (11) and the second threaded rod (12) are mounted on the upper end of the second support rod (5) through a fixing block (13); a driven gear (14) is fixedly mounted on the same side of the first threaded rod (11) and the second threaded rod (12); a driving gear (15) is arranged between the two driven gears (14); the driving gear (15) is meshedly connected with the two driven gears (14); the driving gear (15) is fixedly mounted on the output shaft of a first drive motor (16); and the first drive motor (16) is fixedly mounted on the upper end of the second support rod (5); The first moving block (17) is two in number and is respectively mounted on the side ends of the first threaded rod (11) and the second threaded rod (12). The first moving block (17) is threadedly connected to the first threaded rod (11) and the second threaded rod (12). A water spray head (18) is fixedly mounted on the lower end of each of the first moving blocks (17), and a water pipe (30) is sealed on the upper end of the water spray head (18).

2. The high-precision metal mask post-etching cleaning device according to claim 1, characterized in that: The moving assembly (6) comprises a third threaded rod (19), a sliding rod (20), a second moving block (21), a third moving block (22), a connecting rod (23) and a second driving motor (24); the third threaded rod (19) is installed in a receiving cavity inside the first support rod (4); the second driving motor (24) is fixedly installed at a side end of the first support rod (4); and an output shaft of the second driving motor (24) is fixedly connected to one end of the third threaded rod (19); the second moving block (21) is installed at a side end of the third threaded rod (19); and the second driving motor (24) is fixedly connected to a side end of the third threaded rod (19). The block (21) is threadedly connected to the third threaded rod (19); the sliding rod (20) is installed in the accommodating cavity of the second support rod (5); the third moving block (22) is installed at the side end of the sliding rod (20), and the third moving block (22) can slide freely on the side end of the sliding rod (20); the connecting rod (23) is installed between the second moving block (21) and the third moving block (22), and the two ends of the connecting rod (23) are fixedly connected to the second moving block (21) and the third moving block (22) respectively; the hydraulic telescopic rod (7) is fixedly installed on the connecting rod (23).

3. The high-precision metal mask post-etching cleaning equipment according to claim 1, characterized in that: A clamping assembly (9) is installed on both side ends of the placement frame (8), and the clamping assembly (9) includes a clamping plate (25) and a screw (26). A round block (27) is fixedly installed on one end of the clamping plate (25) close to the screw (26), and a round groove (28) is provided in the round block (27). A round piece (29) is fixedly installed on one end of the screw (26) close to the clamping plate (25), and the round piece (29) is located in the round groove (28). The clamping plate (25) is rotatably connected to the screw (26).

4. The high-precision metal mask post-etching cleaning device according to claim 1, characterized in that: The thread directions of the first threaded rod (11) and the second threaded rod (12) are opposite.

5. The high-precision metal mask post-etching cleaning device according to claim 1, characterized in that: The initial position of the first moving block (17) on the first threaded rod (11) is close to the first support rod (4); the initial position of the first moving block (17) on the second threaded rod (12) is close to the second support rod (5).

6. The high-precision metal mask post-etching cleaning equipment according to claim 1, characterized in that: The water spray heads (18) at the lower ends of the two first movable blocks (17) are symmetrically arranged, the end of the lower end of the water spray head (18) close to the outer side is a planar spray head, and the end of the lower end of the water spray head (18) close to the inner side is an inclined spray head.

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