Single crystal furnace

Abstract

The present application relates to a single crystal furnace, comprising: a main furnace chamber; the furnace cover is arranged at the upper end of the main furnace chamber to open and close the main furnace chamber; the auxiliary chamber is arranged above the furnace cover; and the alarm module is arranged at the position of a crystal taking opening of the first layer of the operation table and is used for giving an alarm prompt under the condition that the auxiliary chamber is unscrewed to trigger an alarm. According to the application, the alarm module is additionally arranged at the crystal taking opening of the first layer of the operation table, and the alarm module is used for alarming when the auxiliary chamber is unscrewed to trigger the alarm, so that the problem that the working personnel on the first layer of the operation table cannot easily find the action of the single crystal furnace and the great potential safety hazard exists can be solved.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon preparation, and in particular to a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment and uses the Czochralski method to grow single crystals without dislocation. Existing single crystal furnaces mainly include a main furnace chamber and a sub-chamber. The sub-chamber is usually connected to the furnace cover of the main furnace chamber. During the production process, the crystal pulling mechanism passes through the sub-chamber into the main furnace chamber to pull the seed crystal to generate a single crystal silicon rod. After the silicon rod is completed, it is pulled into the sub-chamber. The sub-chamber is then rotated from the top of the main furnace chamber to open the bottom of the sub-chamber. Then the crystal pulling mechanism descends, gradually lowers the single crystal silicon rod, and places it on the rod retrieval vehicle to realize the rod retrieval operation.

[0003] At present, in the production process of single crystal furnaces, in order to meet production needs, the auxiliary chamber needs to be frequently rotated to the crystal taking port on the side of the single crystal furnace to add materials, take crystal rods, clean the auxiliary chamber, etc. Since the height between the first and second floors of the operating table is relatively high, generally 6 meters, the staff on the first floor of the operating table cannot timely understand the working status of the single crystal furnace on the second floor of the operating table. If the crystal rod falls, the material block falls, or the cleaning tool of the auxiliary chamber is put down to the first floor of the operating table when cleaning the auxiliary chamber, it may cause harm to the staff on the first floor of the operating table, posing a great safety hazard.

[0004] Therefore, there is an urgent need to provide a single crystal furnace to solve the above-mentioned technical problems. Utility Model Content

[0005] Based on this, a single crystal furnace is provided. Under the premise of not affecting the operation of the single crystal furnace, before taking out the crystal rod, cleaning the auxiliary chamber or adding materials in the single crystal furnace, the personnel on the first floor of the operating table are warned to stay away to avoid causing harm to the personnel and eliminate the safety hazards here. At the same time, it does not affect the normal operation of the single crystal furnace and standardizes the operation site.

[0006] On the one hand, a single crystal furnace is provided, comprising: a main furnace chamber; a furnace cover, arranged at the upper end of the main furnace chamber to open and close the main furnace chamber; a sub-chamber, arranged above the furnace cover; an alarm module, the alarm module being arranged at the crystal taking port position on the first layer of an operating table, for giving an alarm prompt when the sub-chamber is turned open and an alarm is triggered.

[0007] Furthermore, it also includes a locking mechanism, which is used to lock and connect the auxiliary chamber and the furnace cover; when the locking mechanism is disconnected, the auxiliary chamber and the furnace cover are in a separated state; when the locking mechanism is closed, the auxiliary chamber and the furnace cover are in a connected state.

[0008] Furthermore, it also includes a switching circuit, which includes a first circuit and a first switch located on the first circuit, a second circuit and a second switch located on the second circuit, and the front ends of the first circuit and the second circuit are connected in parallel, and the rear signal is connected to the feedback module of the locking mechanism, and the alarm module signal is connected to the rear end of the first circuit; when the locking mechanism is disconnected, the feedback module is triggered and generates a first signal, the first switch is turned on according to the first signal, and the alarm module is powered on to alarm; when the locking mechanism is closed, the feedback module is triggered and generates a second signal, the second switch is turned on according to the second signal, and the alarm module is powered off.

[0009] Furthermore, the alarm module includes an alarm light and a power line; one end of the power line is connected to the alarm light, and the other end is connected to the rear end of the first line.

[0010] Furthermore, a fuse module is provided between the warning light and the first circuit.

[0011] Furthermore, the warning light includes a warning light body and a buzzer arranged in the warning light body.

[0012] Furthermore, a plurality of light sources for displaying different colors may be arranged in the warning light body.

[0013] Furthermore, the alarm light is installed on the side just below the crystal extraction port on the first layer of the operating table.

[0014] Beneficial effects:

[0015] The above-mentioned single crystal furnace, by installing an alarm module at the crystal taking port position on the first layer of the operating table, can warn personnel on the first layer of the operating table to stay away before taking crystal rods, cleaning the auxiliary chamber or adding materials in the single crystal furnace, so as to avoid harm to personnel; and the original line is modified to ensure the stability and aesthetics of the line to the greatest extent. Even if a problem occurs in this line during the normal operation of the single crystal furnace, it will not cause any impact on the normal operation of the single crystal furnace. It not only ensures the stable operation of the single crystal furnace, but also serves as a safety warning to nearby personnel on the first layer of the operating table, thereby greatly reducing the probability of accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the structure of a single crystal furnace in one embodiment;

[0017] Figure 2 It is a schematic diagram of the structure of the auxiliary chamber with the furnace cover lifted in one embodiment;

[0018] Figure 3 Figure 1 A magnified view of part A in FIG.

[0019] Figure 4 A schematic plan view of an alarm module and a wafer extraction port position in one embodiment;

[0020] Figure 5 The figure is a schematic diagram of the connection between the warning light and the switching circuit in one embodiment.

[0021] Figure numerals: 1. main furnace chamber; 2. furnace cover; 3. auxiliary chamber; 4. alarm module; 41. alarm light; 42. power cord; 51. first layer of operating table; 52. second layer of operating table; 6. crystal extraction port; 7. locking mechanism; 81. first circuit; 811. first switch; 82. second circuit; 821. second switch; 9. fuse module. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0023] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present application in a schematic manner, and therefore the drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0024] The structures, proportions, sizes, etc. illustrated in the drawings of this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with this technology. They are not used to limit the conditions under which this application can be implemented, and therefore have no substantive technical significance. Any structural modification, change in proportion or adjustment of size, without affecting the effects and purposes that can be achieved by this application, should still fall within the scope of the technical contents disclosed in this application.

[0025] The directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "middle", "longitudinal", "lateral", "horizontal", "inner", "outer", "radial", "circumferential" and the like in this specification are based on the directions or positional relationships shown in the drawings and are only for the convenience of simplifying the description. They do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present application. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0026] The embodiment of the present application provides a single crystal furnace, which mainly solves the problem that the single crystal furnace is difficult for personnel at the operating table to find when it is in operation, posing a great safety hazard.

[0027] The following is a detailed description of a single crystal furnace provided in this embodiment. Figure 1-Figure 4 As shown, it includes a main furnace chamber 1, a furnace cover 2, a sub-chamber 3 and an alarm module 4. The furnace cover 2 is arranged at the upper end of the main furnace chamber 1 to open and close the main furnace chamber 1, the sub-chamber 3 is arranged above the furnace cover 2, and the alarm module 4 is arranged at the crystal taking port 6 on the first layer 51 of the operating table, that is, the position directly below the bottom opening of one side of the main furnace chamber 1 when the sub-chamber 3 is rotated to the main furnace chamber 1, and is used for giving an alarm prompt when the sub-chamber 3 is rotated to trigger the alarm.

[0028] In this embodiment, an alarm module 4 is installed at the crystal extraction port 6 near the first layer 51 of the operating table, and an alarm prompt is given when the auxiliary chamber 3 is turned open to trigger the alarm, thereby warning people on the first layer 51 of the operating table to stay away and not get close, so as to avoid single crystals falling and hitting people, causing casualties, and eliminating safety hazards here.

[0029] Please continue to refer to Figure 1-Figure 4 As shown, in this embodiment, it should be noted that the single crystal furnace further includes a locking mechanism 7, which is used to connect the auxiliary chamber 3 and the furnace cover 2. When the locking mechanism 7 is disconnected, the auxiliary chamber 3 and the furnace cover 2 are in a separated state, and the auxiliary chamber 3 can be independently rotated to one side of the main furnace chamber 1; when the locking mechanism 7 is closed, the auxiliary chamber 3 and the furnace cover 2 are in a connected state, and the auxiliary chamber 3 can be lifted with the furnace cover 2. The locking mechanism 7 used to realize the interlocking function between the auxiliary chamber 3 and the furnace cover 2 in the field of single crystal furnaces is already a relatively mature technology, and will not be described in detail here.

[0030] When the auxiliary chamber 3 needs to be unscrewed for taking out crystal rods, cleaning the auxiliary chamber 3 or adding materials in the single crystal furnace, the locking mechanism 7 is disconnected, so that the auxiliary chamber 3 and the furnace cover 2 are in a separated state. At this time, the auxiliary chamber 3 can be unscrewed alone to perform crystal taking or material adding operations. In this case, an alarm is required to prevent the crystal rods and material blocks from falling and causing injuries to the staff on the first layer 51 of the operating table; when the single crystal furnace undergoes multiple crystal rod taking operations and the main furnace chamber 1 needs to be cleaned, the control switches the locking mechanism 7 to close, so that the auxiliary chamber 3 and the furnace cover 2 are in a connected state. At this time, the auxiliary chamber 3 can be lifted with the furnace cover 2, and then the main furnace chamber 1 is opened to facilitate the cleaning of the main furnace chamber 1. In this case, no alarm is required.

[0031] Please refer to Figure 2 , Figure 3 as well as Figure 5As shown, in this embodiment, it is also necessary to explain that the single crystal furnace also includes a switching circuit, the switching circuit includes a first circuit 81 and a second circuit 82, a first switch 811 is arranged on the first circuit 81, and a second switch 821 is arranged on the second circuit 82, the first circuit 81 and the second circuit 82 are arranged in parallel, and the front ends of the two are connected in parallel, and the signal is connected to the feedback module of the locking mechanism 7, and the alarm module 4 is connected to the first circuit 81 at the rear end of the first switch 811. Therefore, when the locking mechanism 7 is disconnected, the auxiliary chamber 3 and the furnace cover 2 are in a separated state, and the auxiliary chamber 3 can be unscrewed separately, and the feedback module triggers and generates a first signal, the first switch 811 is turned on according to the first signal, and the alarm module 4 is powered on to alarm, and then the alarm module 4 is used to alarm and warn the personnel on the first floor 51 of the operating table to stay away when the auxiliary chamber 3 is unscrewed; when the locking mechanism 7 is closed, the auxiliary chamber 3 and the furnace cover 2 are in a connected state, and the auxiliary chamber 3 can be lifted with the furnace cover 2, and the feedback module triggers and generates a second signal, and the second switch 821 is turned on according to the second signal, and the alarm module 4 is powered off. It can be understood that when the first switch 811 is turned on, the second switch 821 is turned off, and when the second switch 821 is turned on, the first switch 811 is turned off.

[0032] Please refer to Figure 2 , Figure 4 as well as Figure 5 As shown, in an achievable manner, the alarm module 4 includes an alarm light 41 and a power cord 42. The alarm light 41 is installed on the side of the operating table layer 51 directly below the crystal extraction port 6. Preferably, the alarm light 41 is not damaged by the rod falling and is not directly in contact with the furnace body. One end of the power cord 42 is connected to the alarm light 41, and the other end is connected to the first circuit 81. Since the auxiliary chamber 3 is unscrewed alone or lifted with the furnace cover 2, it is controlled and switched by the switching circuit. Therefore, it is selected to make changes to the original circuit and connect the power cord 42 to the first circuit 81 of the switching circuit to maximize the stability and beauty of the circuit. Preferably, the alarm light is a strobe light, which can flash to effectively remind the staff to respond in time.

[0033] In another achievable manner, a fuse module 9 is further provided between the warning light 41 and the first line 81. By providing the fuse module 9, the warning light 41 is prevented from short-circuiting and causing an impact on the single crystal furnace. Preferably, the fuse module 9 is a fuse.

[0034] It should also be noted that the warning light 41 includes a warning light body and a buzzer disposed in the warning light body. The buzzer can generate a siren sound, thereby warning the personnel on the first floor 51 of the operating table to stay away. Preferably, the warning light body can be provided with a plurality of light sources for displaying different colors, such as the light source can be displayed in red to indicate an alarm, in green to indicate safety, and in yellow to indicate equipment maintenance.

[0035] The implementation principle of this embodiment: Due to the high height between the first layer 51 and the second layer 52 of the operating table, the staff on the first layer 51 of the operating table cannot timely understand the working status of the single crystal furnace on the second layer 52 of the operating table. If the crystal rod or the material block falls at this time, it may cause harm to the staff on the first layer 51 of the operating table, which poses a great safety hazard. Therefore, in this embodiment, the alarm light 41 is fixedly installed on the lower right position of the first layer 51 of the operating table near the crystal taking port 6. When the auxiliary chamber 3 is unscrewed, the locking mechanism 7 must be in the disconnected state. Therefore, the power line 42 of the alarm light 41 is connected to the first line 81 of the switching circuit. Therefore, in the process of taking a single crystal or adding materials, the locking mechanism 7 is controlled. The locking mechanism 7 is disconnected, at this time the auxiliary chamber 3 and the furnace cover 2 are in a separated state, the auxiliary chamber 3 can be unscrewed separately, and at the same time the feedback module is triggered and generates a first signal, the first switch 811 is turned on according to the first signal, and the alarm light 41 is powered on to warn the personnel on the first layer 51 of the operating table to stay away; when the locking mechanism 7 is switched to closed, the auxiliary chamber 3 and the furnace cover 2 are in a connected state, the auxiliary chamber 3 can be lifted with the furnace cover 2, and at the same time the feedback module is triggered and generates a second signal, the second switch 821 is turned on according to the second signal, and the alarm light 41 is powered off; thereby, through the above-mentioned operation, the alarm light 41 can serve as a safety warning to the personnel near the first layer 51 of the operating table, thereby greatly reducing the probability of accidents.

[0036] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0037] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A single crystal furnace, characterized in that: include: Main furnace chamber (1); A furnace cover (2) is arranged at the upper end of the main furnace chamber (1) to open and close the main furnace chamber (1); A secondary chamber (3) is arranged above the furnace cover (2); An alarm module (4) is arranged at the crystal extraction port (6) of the first layer (51) of the operating table, and is used to give an alarm prompt when the auxiliary chamber (3) is opened and an alarm is triggered.

2. The single crystal furnace according to claim 1, characterized in that: It also comprises a locking mechanism (7), wherein the locking mechanism (7) is used to lock and connect the auxiliary chamber (3) and the furnace cover (2); When the locking mechanism (7) is disconnected, the auxiliary chamber (3) and the furnace cover (2) are in a separated state; When the locking mechanism (7) is closed, the auxiliary chamber (3) and the furnace cover (2) are in a connected state.

3. The single crystal furnace according to claim 2, characterized in that: It also includes a switching circuit, the switching circuit including a first circuit (81) and a first switch (811) located on the first circuit (81), a second circuit (82) and a second switch (821) located on the second circuit (82), the front ends of the first circuit (81) and the second circuit (82) being connected in parallel and then being signal-connected to a feedback module of the locking mechanism (7), and the alarm module (4) being signal-connected to a rear end of the first circuit (81); When the locking mechanism (7) is disconnected, the feedback module is triggered and generates a first signal, the first switch (811) is turned on according to the first signal, and the alarm module (4) is powered on to sound an alarm; When the locking mechanism (7) is closed, the feedback module is triggered and generates a second signal, the second switch (821) is turned on according to the second signal, and the alarm module (4) is powered off.

4. The single crystal furnace according to claim 3, characterized in that: The alarm module (4) comprises an alarm light (41) and a power line (42); One end of the power line (42) is connected to the warning light (41), and the other end is connected to the rear end of the first line (81).

5. The single crystal furnace according to claim 4, characterized in that: A fuse module (9) is also provided between the warning light (41) and the first circuit (81).

6. The single crystal furnace according to claim 4 or 5, characterized in that: The warning light (41) comprises a warning light body and a buzzer arranged in the warning light body.

7. The single crystal furnace according to claim 6, characterized in that: A plurality of light sources for displaying different colors may be arranged in the main body of the warning light.

8. The single crystal furnace according to claim 4, characterized in that: The warning light (41) is installed on the side of the first layer (51) of the operating table, just below the crystal extraction port (6).

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