Crucible and electron beam evaporation coating system

Abstract

The utility model discloses a crucible and an electron beam evaporation coating system. The crucible comprises a first split body and a second split body, the second split body is an electric conductor, and the first split body comprises a first annular piece for preventing the crucible from climbing; in the height direction of the crucible, the first annular piece is not lower than the second split body; and the first split body and the second split body are hot-pressed or sintered into a whole. In the electronic evaporation process, the liquid coating material makes contact with the second split body, current can be transmitted through the second split body, and charge gathering is avoided. Meanwhile, the first annular piece has the crucible climbing prevention performance, and the first annular piece is not lower than the second split body, so that in the process that the coating material in the crucible climbs along the side wall of the crucible, if the coating material overflows out of the crucible, the coating material can pass through the surface of the first annular piece inevitably, and due to the fact that the first annular piece has the crucible climbing prevention performance, the coating material cannot pass through the surface of the first annular piece. The coating material does not climb along the surface of the first annular piece or climbs along the first annular piece very slowly, so that the coating material can be prevented from overflowing out of the crucible.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a crucible and an electron beam evaporation film coating system. Background Art

[0002] Electron beam evaporation is a type of physical vapor deposition. Electron beam evaporation uses accelerated electrons to bombard the coating material. The kinetic energy of the electrons is converted into heat energy to heat and evaporate the coating material. After evaporation, the coating material adheres to the surface of the workpiece to form a film.

[0003] During the electron beam evaporation process, the coating material is generally placed in a crucible, which needs to have conductive and heat-resistant properties. However, some coating materials (such as metal aluminum) evaporate quickly in a conductive crucible and have good wettability, making it easy for the coating material to "climb the crucible", that is, the coating material climbs up along the crucible wall from a low level and eventually overflows the crucible. Utility Model Content

[0004] The purpose of the present application is to provide a crucible and an electron beam evaporation coating system to ensure the electrical conductivity of the crucible body while preventing the coating material from creeping to the outside of the crucible.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] A crucible, comprising:

[0007] The first sub-body and the second sub-body, the second sub-body is a conductor, the first sub-body comprises a first annular member to prevent the crucible from climbing; along the height direction of the crucible, the first annular member is not lower than the second sub-body;

[0008] The first sub-body and the second sub-body are hot pressed or sintered into a whole.

[0009] When the crucible provided by the utility model is used, the coating material is placed inside the crucible. During the electronic evaporation process, the liquid coating material contacts the second split body, and the current can be transmitted through the second split body to avoid charge accumulation. At the same time, since the first annular member has an anti-climbing crucible performance, that is, the coating material placed in the crucible has poor wettability or does not wet the surface of the first annular member. In addition, the first annular member is not lower than the second split body. In this way, during the process of the coating material in the crucible crawling along the side wall of the crucible, if the coating material overflows the crucible, it will inevitably pass through the surface of the first annular member. Since the first annular member has an anti-climbing crucible performance, the coating material does not crawl along the surface of the first annular member or the coating material crawls very slowly along the first annular member, thereby preventing the coating material from overflowing the crucible, solving the problem of coating material conductivity while solving the problem of pot climbing, thereby also improving the service life of the crucible and reducing costs.

[0010] In one implementation, the first sub-body and the second sub-body are sintered into an integral body. With this method, the first sub-body and the second sub-body are more firmly fixed, a gap is less likely to appear between the first sub-body and the second sub-body, and the sealing is better. Alternatively, the first sub-body and the second sub-body are separately processed and formed and then sintered into a whole. This method is simple to operate and convenient for processing and manufacturing.

[0011] In one implementation, the crucible is a round crucible, a square crucible or an oval crucible, and the crucible has a regular shape and is easy to process and manufacture; or,

[0012] The crucible is a variable diameter crucible, so that the opening area of ​​the crucible can be larger, which is convenient for pouring the coating material.

[0013] In one implementation, the second split body includes a bottom plate, and the first annular member is sintered and connected to the bottom plate. With this technical solution, the height of the first annular member accounts for a larger proportion of the overall height of the crucible. If the coating material in the crucible wants to overflow the crucible, it needs to crawl through a greater distance of the first annular member, which further prevents the coating material from overflowing the crucible; or,

[0014] The second split body includes an integrally connected second ring-shaped member and a bottom plate. The bottom end of the first ring-shaped member is sintered and connected to the top end of the second ring-shaped member. By adopting this technical solution, the contact area between the coating material and the second split body is larger, which improves the current transmission efficiency and can better avoid charge accumulation.

[0015] In one implementation, the first split body further includes a first bottom plate fixedly connected to the first annular member, and the first bottom plate has a through hole penetrating the thickness;

[0016] The second split body includes a second bottom plate embedded in the through hole, and the first bottom plate is sintered and connected to the second bottom plate. With this technical solution, the contact area between the coating material in the crucible and the first annular member is larger, further preventing the coating material from overflowing the crucible.

[0017] In one implementation, a sintering agent is provided between adjacent sub-bodies;

[0018] The sintering agent includes alumina, silicate and / or phosphate. The above materials have a certain barrier / isolation effect on the infiltration of the coating material and are suitable for processing crucibles for electron beam evaporation coating process.

[0019] In one implementation, the mass of the second split body is 10%-90% of the mass of the entire crucible, ensuring that the contact area between the second split body and the coating material is not too small, thereby ensuring the current transmission efficiency.

[0020] In one implementation, the material of the second body includes conductive oxides, conductive carbides, conductive nitrides, conductive borides, conductive carbonitrides and / or conductive carborides; the above-mentioned various existing materials have good conductivity and mechanical properties and are suitable for producing the second body.

[0021] and / or,

[0022] The first body is an insulator; or, an insulating layer is provided on the surface of the first body; the insulating material has poor or no wettability with the coating material, which can prevent the coating material from creeping along the surface of the first body, and is particularly suitable for metal coating materials, such as aluminum.

[0023] The materials of the insulator or insulating layer include insulating carbides, insulating nitrides and / or insulating oxides; insulating oxides include magnesium oxide, aluminum oxide, zirconium oxide, calcium oxide, beryllium oxide and / or silicon oxide; insulating carbides include silicon carbide and / or chromium carbide; insulating nitrides include silicon nitride and / or boron nitride. The above materials have poor wettability or no wettability with the coating material and are suitable for producing the first sub-body.

[0024] In one implementation, a third sub-body is further provided between the first sub-body and the second sub-body;

[0025] The third sub-body is fixedly connected to the first sub-body and the second sub-body by hot pressing or sintering. The third sub-body can be made of a material with physical properties between the first sub-body and the second sub-body to buffer the thermal stress generated by the first sub-body and the second sub-body during sintering or hot pressing, so as to reduce the cracking of the first sub-body and the second sub-body due to thermal stress.

[0026] In one implementation, the conductivity of the third sub-body is lower than that of the second sub-body; or, the mass ratio of the conductive material in the third sub-body is lower than that in the second sub-body. The conductivity of the third sub-body is higher than that of the first sub-body and lower than that of the second sub-body, so that the proportion of the conductive material doped in the third sub-body is lower than that of the conductive material doped in the second sub-body, and the physical properties of the third sub-body are between those of the first sub-body and the second sub-body.

[0027] An electron beam evaporation coating system comprises any of the above crucibles. Compared with the prior art, the electron beam evaporation coating system provided by the utility model embodiment has the same beneficial effects as the above crucibles, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0029] Figure 1A cross-sectional view of a crucible is provided for Example 1 of the present application;

[0030] Figure 2 A cross-sectional view of a crucible is provided for Example 2 of the present application;

[0031] Figure 3 A cross-sectional view of a crucible is provided for Example 3 of the present application;

[0032] Figure 4 A cross-sectional view of a crucible is provided for Example 4 of the present application;

[0033] Figure 5 A cross-sectional view of a crucible is provided for Example 5 of the present application;

[0034] Figure 6 A cross-sectional view of a crucible is provided for Example 6 of the present application.

[0035] Reference numerals:

[0036] 1-first split body, 1a-first annular member, 1b-first bottom plate, 2-second split body, 2a-second annular member, 2b-bottom plate, 2c-second bottom plate, 3-third split body. DETAILED DESCRIPTION

[0037] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0038] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0040] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", etc., indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present application.

[0041] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] At present, during the electron beam evaporation process, the coating material is placed in a crucible, and the crucible needs to have conductive and heat-resistant properties. However, generally, conductive crucible materials have good wettability with coating materials, and liquid coating materials tend to climb up from the bottom of the crucible, resulting in a "climbing crucible" phenomenon. If you want to avoid the "climbing crucible" phenomenon, you need to choose a material that is both conductive and has poor wettability with the coating material to prepare the crucible. At the same time, the crucible material also needs to have heat resistance, which limits the choice of crucible materials, and places higher requirements on the crucible preparation process and higher costs.

[0043] The crucible provided in the embodiment of the present application includes a first sub-body 1 and a second sub-body 2, wherein the second sub-body 2 is a conductor, and the current can be transmitted to the outside of the crucible through the second sub-body 2 to avoid charge accumulation. The first sub-body 1 includes a first annular member 1a for preventing the crucible from climbing, that is, the first annular member 1a has an anti-climbing crucible performance, and the coating material contained in the crucible has poor wettability or does not wet the surface of the first annular member 1a. The first annular member 1a is not lower than the second sub-body 2. Specifically, the first annular member 1a can be arranged higher than the second sub-body 2, and the bottom end of the first annular member 1a is fixedly connected to the top end of the second sub-body 2. Alternatively, the top end of the first annular member 1a is arranged flush with the top end of the second sub-body 2, and the first annular member 1a is nested on the inner side or outer side of the second sub-body 2. Or, the top end of the first annular member 1a is higher than the top end of the second sub-body 2, and the bottom end of the first annular member 1a is nested on the inner side or outer side of the second sub-body 2, etc.

[0044] The first sub-body 1 and the second sub-body 2 can be fixed by hot pressing. Specifically, the first sub-body 1 and the second sub-body 2 can be integrally formed by hot pressing, that is, first put the powder or slurry used to form the second sub-body 2 into the mold, and then put the powder or slurry used to form the first sub-body 1, and then hot press the first sub-body 1 and the second sub-body 2 into one piece. Alternatively, the first sub-body 1 and the second sub-body 2 are processed separately first, and then the first sub-body 1 and the second sub-body 2 are fixed to each other by hot pressing after they are formed. In addition, the first sub-body 1 and the second sub-body 2 can also be sintered into a whole, and the first sub-body 1 and the second sub-body 2 are fixed together by sintering.

[0045] When the crucible provided by the utility model is used, the coating material is placed inside the crucible. During the electronic evaporation process, the liquid coating material contacts the second split body 2, and the current can be transmitted through the second split body 2 to avoid charge accumulation. At the same time, since the first ring-shaped part 1a has an anti-climbing crucible performance, that is, the coating material placed in the crucible has poor wettability or does not wet the surface of the first ring-shaped part 1a. In addition, the first ring-shaped part 1a is not lower than the second split body 2. In this way, when the coating material in the crucible crawls along the side wall of the crucible, if the coating material overflows the crucible, it will inevitably pass through the surface of the first ring-shaped part 1a. Since the first ring-shaped part 1a has an anti-climbing crucible performance, the coating material does not crawl along the surface of the first ring-shaped part 1a or the coating material crawls very slowly along the first ring-shaped part 1a, thereby preventing the coating material from overflowing the crucible.

[0046] The first sub-body 1 and the second sub-body 2 can be sintered into a whole. Specifically, the powder or slurry used to form the second sub-body 2 can be placed in the mold first, and then the powder or slurry used to form the first sub-body 1 can be placed in the mold, and then the first sub-body 1 and the second sub-body 2 can be formed into a whole by sintering. With this method, the first sub-body 1 and the second sub-body 2 are more firmly fixed, and it is not easy to have a gap between the first sub-body 1 and the second sub-body 2, and the sealing is better. Alternatively, the first sub-body 1 and the second sub-body 2 are processed and formed separately and then sintered into a whole, that is, the first sub-body 1 and the second sub-body 2 are processed separately first, and the first sub-body 1 and the second sub-body 2 are fixed to each other by sintering after they are formed. This method is simple to operate and convenient for processing and manufacturing.

[0047] In a specific embodiment, the crucible is a round crucible, a square crucible or an elliptical crucible. Specifically, the cross section of the crucible cut along a plane perpendicular to its height direction is round, square or elliptical, so that the crucible has a regular shape and is easy to process and manufacture. Of course, the crucible can also be other shapes, such as a polygonal crucible, a triangular crucible, etc.

[0048] In addition, the crucible can be a variable diameter crucible, and illustratively, the diameter of the crucible gradually increases or decreases along the height direction of the crucible. Of course, a crucible with a constant diameter along the height direction of the crucible is also within the protection scope of the present application.

[0049] like Figure 1 As shown, in some embodiments, the second split 2 includes a bottom plate 2b, and the first annular member 1a is sintered and connected to the bottom plate 2b. In this scheme, the first annular member 1a is a side plate of the crucible, the bottom plate 2b is a flat plate, and the bottom end of the first annular member 1a is fixed to the upper surface of the bottom plate 2b, or the bottom end of the first annular member 1a is fixed to the outer side wall of the bottom plate 2b. Specifically, the bottom plate 2b and the first annular member 1a can be sintered and formed as a whole, or the bottom plate 2b and the first annular member 1a are separately processed and formed and then sintered into a whole. With this technical solution, the height of the first annular member 1a accounts for a larger proportion of the overall height of the crucible, and the coating material in the crucible needs to crawl through the first annular member 1a if it wants to overflow the crucible. A greater distance is required, which further prevents the coating material from overflowing the crucible. Of course, the first annular member 1a and the bottom plate 2b can also be fixedly connected by an integrated hot pressing method, or the first annular member 1a and the bottom plate 2b can also be separately processed and formed and then hot pressed and fixed.

[0050] like Figure 2 As shown, in some embodiments, the second split 2 includes a second ring 2a and a bottom plate 2b, the bottom plate 2b is a flat plate, and the second ring 2a and the bottom plate 2b are connected as one piece, that is, the second ring 2a and the bottom plate 2b are an integral structure. The first ring 1a is located on the upper side of the second ring 2a, and the bottom end of the first ring 1a is sintered and connected to the top of the second ring 2a. Specifically, the first ring 1a, the second ring 2a and the bottom plate 2b can be formed by sintering as one piece. Alternatively, the second split 2 and the first ring 1a are separately processed and formed, and then a sintering agent is set between the bottom end of the first ring 1a and the top of the second ring 2a, and the bottom end of the first ring 1a and the top of the second ring 2a are fixed together by sintering. With this technical solution, the contact area between the coating material and the second split 2 is larger, which improves the transmission efficiency of the current. Of course, the first annular member 1a, the second annular member 2a and the bottom plate 2b can also be fixedly connected by integral hot pressing, or the second split body 2 and the first annular member 1a can also be separately processed and formed and then fixed by hot pressing.

[0051] like Figure 3As shown, in some embodiments, the first body 1 further includes a first bottom plate 1b. In this solution, the first body 1 includes a first bottom plate 1b and a first annular member 1a, and the first bottom plate 1b and the first annular member 1a are fixedly connected. Preferably, the first bottom plate 1b and the first annular member 1a can be an integral structure. Of course, the first bottom plate 1b and the first annular member 1a are fixed by hot pressing or sintering, which is also within the scope of protection of this application. The bottom end of the first annular member 1a is fixed to the upper surface of the first bottom plate 1b, or the bottom end of the first annular member 1a is fixed to the side wall of the first bottom plate 1b. The first bottom plate 1b has a through hole that penetrates the thickness, that is, the first bottom plate 1b is provided with a through hole, and the through hole can be any shape such as circular, square, elliptical, etc. The second body 2 includes a second bottom plate 2c embedded in the through hole, and the first bottom plate 1b and the second bottom plate 2c are both flat plates, and the first bottom plate 1b and the second bottom plate 2c can be arranged flush to ensure that the inner bottom wall of the crucible is a plane. The first bottom plate 1b is sintered and connected with the second bottom plate 2c. In this solution, the first annular member 1a, the first bottom plate 1b and the second bottom plate 2c can be formed by integral sintering, or the first sub-body 1 and the second bottom plate 2c can be separately processed first, and then a sintering agent is set on the first bottom plate 1b and the second bottom plate 2c, and the two are fixed together by sintering. With this technical solution, the contact area between the coating material in the crucible and the first annular member 1a is larger, which further prevents the coating material from overflowing the crucible. Of course, the first bottom plate 1b and the second bottom plate 2c can also be fixedly connected by integral hot pressing, or the first sub-body 1 and the second bottom plate 2c can also be separately processed and formed and then fixed by hot pressing.

[0052] It should be noted that, in order to prevent leakage of the coating material, two adjacent split bodies need to be fixed and sealed to prevent leakage of the coating material from the gap between the split bodies.

[0053] In each of the above embodiments, a sintering agent is provided between adjacent sub-bodies, and the two adjacent sub-bodies are fixed and sealed by sintering. The sintering agent can be alumina, silicate and / or phosphate in the prior art. The above materials have a certain blocking / isolating effect on the infiltration of the coating material, and are suitable for processing crucibles for electron beam evaporation coating processes. In addition, when adjacent sub-bodies are formed by integral sintering, there is no need to provide a sintering agent between the two adjacent sub-bodies, that is, after the powder or slurry for forming the first sub-body 1 and the powder or slurry for forming the second sub-body 2 are poured into the mold, the first sub-body 1 and the second sub-body 2 are integrally formed by sintering. In this solution, there is no need to provide a sintering agent between the first sub-body 1 and the second sub-body 2.

[0054] In another preferred embodiment, the mass of the second body 2 is 10%-90% of the mass of the entire crucible, ensuring that the contact area between the second body 2 and the coating material is not too small, thereby improving the current transmission efficiency. Exemplarily, the mass of the second body 2 is 10%, 20%, 30%, 40%, 50%, 60%, 70%, 80% or 90% of the mass of the entire crucible, preferably 20%-50%.

[0055] In one embodiment, the material of the second body 2 includes conductive oxide, conductive carbide, conductive nitride, conductive boride, conductive carbonitride and / or conductive carboboride. Alternatively, the material of the second body 2 includes at least one of conductive oxide, conductive carbide, conductive nitride, conductive boride, conductive carbonitride and conductive carboboride mixed with an insulating material.

[0056] In the above embodiments, the conductive oxide includes titanium oxide. The conductive boride includes titanium boride, zirconium boride, calcium boride and / or boron carbide. The conductive carbide includes tungsten carbide and / or titanium carbide. The conductive nitride includes titanium nitride and / or zirconium nitride. The insulating material includes insulating nitride, insulating carbide, insulating boride and / or insulating oxide. The above materials have good electrical conductivity and good mechanical properties, and are suitable for producing the second split 2.

[0057] Preferably, the material of the second body 2 includes at least one of boron nitride, silicon nitride and magnesium oxide mixed with at least one of titanium boride, zirconium boride, carbide, titanium oxide and titanium nitride. Among them, boron nitride, silicon nitride and magnesium oxide have high thermal conductivity, which is convenient for extracting heat from the crucible and is conducive to heat dissipation. Titanium boride, zirconium boride, carbide, titanium oxide and titanium nitride have excellent high-temperature mechanical properties and are suitable for producing crucibles.

[0058] In the above embodiments, the surface of the first body 1 is insulated; or, the first body 1 is an insulator; or, an insulating layer is provided on the surface of the first body 1, and the insulating layer can be provided on the surface of the first body 1 by coating, spraying, etc., to ensure the surface insulation of the first body 1. The insulating material has poor or no wettability with the coating material, which can prevent the coating material from creeping along the surface of the first body 1, and is particularly suitable for metal coating materials, such as aluminum.

[0059] Specifically, the material of the insulator or insulating layer includes insulating carbide, insulating nitride and / or insulating oxide. Insulating oxides include magnesium oxide, aluminum oxide, zirconium oxide, calcium oxide, beryllium oxide and / or silicon oxide. Insulating carbides include silicon carbide and / or chromium carbide. Insulating nitrides include silicon nitride and / or boron nitride. The material of the above-mentioned insulator or insulating layer may include one or more of magnesium oxide, aluminum oxide, zirconium oxide, calcium oxide, beryllium oxide, silicon oxide, silicon carbide, chromium carbide, silicon nitride and boron nitride. The above-mentioned various materials have poor wettability or no wettability with the coating material, and are suitable for producing the first sub-body 1.

[0060] In view of the large difference in physical properties between the first sub-body 1 and the second sub-body 2, the first sub-body 1 and the second sub-body 2 may easily crack due to thermal stress during sintering or hot pressing. Figure 4-Figure 6 As shown, in this technical solution, a third sub-body 3 is further arranged between the first sub-body 1 and the second sub-body 2, and the third sub-body 3 is formed into a whole with the first sub-body 1 and the second sub-body 2 by hot pressing or sintering. The third sub-body 3 can be made of a material with physical properties between the first sub-body 1 and the second sub-body 2, so as to buffer the thermal stress generated by the first sub-body 1 and the second sub-body 2 during the sintering or hot pressing process, so as to reduce the cracking of the first sub-body 1 and the second sub-body 2 due to the thermal stress.

[0061] In the above embodiment, the first sub-body 1 and the second sub-body 2 are not in direct contact, but the first sub-body 1 is in contact with and fixedly connected to the third sub-body 3, and the second sub-body 2 is also in contact with and fixedly connected to the third sub-body 3, thereby achieving the overall fixation of the third sub-body 3, the first sub-body 1 and the second sub-body 2. Specifically, as Figure 4 As shown, in some embodiments, the third split body 3 includes a third annular member, and the third annular member is located between the first annular member 1a and the bottom plate 2b. Figure 5 As shown, in some embodiments, the third split body 3 includes a third annular member, and the third annular member is located between the first annular member 1a and the second annular member 2a. Figure 6 As shown, in some embodiments, the third split body 3 includes a third bottom plate, which is located between the first bottom plate 1b and the second bottom plate 2c. The third bottom plate is a flat plate, and the first bottom plate 1b, the second bottom plate 2c and the third bottom plate are arranged flush.

[0062] In the above embodiment, the third body 3, the first body 1 and the second body 2 can be formed by integrated hot pressing or integrated sintering, that is, firstly pour the powder or slurry for forming the second body 2, the powder or slurry for forming the third body 3 and the powder or slurry for forming the first body 1 into the mold, and then form them as one piece by hot pressing or sintering. Alternatively, the embryos of the third body 3, the first body 1 and the second body 2 are first separately processed and formed, and then the embryos of the third body 3, the first body 1 and the second body 2 are fixedly connected by hot pressing or sintering. In addition, the embryos of the third body 3, the first body 1 and the second body 2 can be separately processed by dry pressing, cold isostatic pressing, hot isostatic pressing and the like.

[0063] Preferably, the conductivity of the third sub-body 3 is lower than that of the second sub-body 2, or the mass ratio of the conductive material in the third sub-body 3 is lower than that in the second sub-body 2. In this technical solution, the conductivity of the third sub-body 3 is higher than that of the first sub-body 1 and lower than that of the second sub-body 2, so that the proportion of the conductive material doped in the third sub-body 3 is lower than that of the conductive material doped in the second sub-body 2, and the physical properties of the third sub-body 3 are between those of the first sub-body 1 and the second sub-body 2.

[0064] In addition, the embodiment of the utility model further provides an electron beam evaporation coating system, which includes the crucible provided by any of the above embodiments. Compared with the prior art, the beneficial effects of the electron beam evaporation coating system provided by the embodiment of the utility model are the same as the beneficial effects of the above crucible, which will not be described in detail here.

[0065] In the description of the above embodiments, specific features, structures, materials or characteristics may be combined in a suitable manner in any one or more embodiments or examples.

[0066] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A crucible, characterized in that: include: A first split body and a second split body, wherein the second split body is a conductor, and the first split body comprises a first annular member for preventing crucible creeping; Along the height direction of the crucible, the first annular member is not lower than the second split body; The first sub-body and the second sub-body are hot pressed or sintered into a whole.

2. The crucible according to claim 1, characterized in that The first sub-body and the second sub-body are sintered into an integral body; or, the first sub-body and the second sub-body are processed and formed separately and then sintered into an integral body.

3. The crucible according to claim 1, characterized in that The crucible is a round crucible, a square crucible or an oval crucible; or, The crucible is a variable diameter crucible.

4. The crucible according to claim 1, characterized in that The second split body includes a bottom plate, and the first annular member is sintered and connected to the bottom plate; or, The second split body includes a second annular member and a bottom plate which are integrally connected, and the bottom end of the first annular member is sintered to the top end of the second annular member.

5. The crucible according to claim 1, characterized in that The first split body further comprises a first bottom plate fixedly connected to the first annular member, and the first bottom plate has a through hole penetrating the thickness; The second split body includes a second bottom plate embedded in the through hole, and the first bottom plate and the second bottom plate are sintered to each other.

6. The crucible according to any one of claims 1 to 5, characterized in that A sintering agent is arranged between adjacent sub-bodies.

7. The crucible according to claim 1, characterized in that The mass of the second split body is 10%-90% of the mass of the entire crucible.

8. The crucible according to claim 1, characterized in that The first body is an insulator; or an insulating layer is disposed on the surface of the first body.

9. The crucible according to any one of claims 1 to 5 and 7 to 8, characterized in that: A third split body is also provided between the first split body and the second split body; The third sub-body is fixedly connected to the first sub-body and the second sub-body by hot pressing or sintering.

10. The crucible according to claim 9, characterized in that The conductivity of the third sub-body is lower than that of the second sub-body; or, the mass proportion of the conductive material in the third sub-body is lower than the mass proportion of the conductive material in the second sub-body.

11. An electron beam evaporation coating system, characterized in that: Comprising the crucible according to any one of claims 1-10.

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