Lifting device for MOCVD (Metal Organic Chemical Vapor Deposition) equipment

Abstract

The utility model discloses a lifting device for MOCVD (Metal Organic Chemical Vapor Deposition) equipment, which comprises a reaction chamber in which a graphite disc is arranged; the upper cover is arranged above the reaction chamber and is matched with the opening of the reaction chamber; the first lifting mechanism is connected with the graphite plate; the first lifting mechanism comprises a first motor which rotates in a first plane and provides lifting power; the first transmission assembly is respectively connected with the first motor and the graphite plate, and is used for converting the rotation of the first motor into axial movement in the direction vertical to the first plane and driving the graphite plate to lift so as to change the heating of the graphite plate; the second lifting mechanism is connected with the upper cover; the second lifting mechanism comprises a second motor which rotates in the first plane and provides lifting power; the second transmission assembly is connected with the second motor and the upper cover and converts rotation of the second motor into axial movement in the direction perpendicular to the first plane to drive the upper cover to ascend and descend. According to the utility model, a stable experimental environment is formed in the reaction chamber, so that the precision and the quality of the chip are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of MOCVD equipment manufacturing, in particular to a lifting device for MOCVD equipment. Background Art

[0002] MOCVD equipment is an important equipment widely used in semiconductor manufacturing. During the operation of MOCVD equipment, the lifting position and height of the equipment need to be accurately controlled to ensure that the process parameters in the manufacturing process are stable and consistent.

[0003] However, the lifting structure of existing MOCVD equipment usually adopts traditional transmission methods such as gears and chains, which have problems such as low lifting accuracy, unstable speed and high maintenance cost. These problems affect the manufacturing efficiency and product quality of MOCVD equipment, and a lifting device is urgently needed to lift smoothly. Utility Model Content

[0004] The utility model is proposed based on the above-mentioned demand of the prior art. The technical problem to be solved by the utility model is to provide a lifting device for MOCVD equipment to provide a stable experimental environment.

[0005] In order to solve the above problems, the technical solution provided by the utility model includes:

[0006] A lifting device for MOCVD equipment is provided, the lifting device comprising: a reaction chamber, wherein a graphite disk is arranged in the reaction chamber; an upper cover, which is arranged above the reaction chamber and is adapted to the opening of the reaction chamber; a first lifting mechanism, which is connected to the graphite disk to drive the graphite disk to move in a direction close to or away from a heating plate, the first lifting mechanism comprising: a first motor, which rotates in a first plane and provides lifting power; a first transmission assembly, which is respectively connected to the first motor and the graphite disk, converts the rotation of the first motor into an axial movement in a direction perpendicular to the first plane, drives the graphite disk to be lifted and lowered to change the heating of the graphite disk; a second lifting mechanism, which is connected to the upper cover to drive the upper cover to move in a direction close to or away from the reaction chamber, the second lifting mechanism comprising: a second motor, which rotates in the first plane and provides lifting power; a second transmission assembly, which is respectively connected to the second motor and the upper cover, converts the rotation of the second motor into an axial movement in a direction perpendicular to the first plane, drives the upper cover to be lifted and lowered.

[0007] The distance between the graphite plate and the heating sheet is adjusted by the first lifting mechanism, so as to control the reaction temperature of the chip in the graphite plate. The height of the graphite plate can be adjusted according to the temperature suitable for the reaction of different chips, so as to have wide applicability; the position of the upper cover is adjusted by the second lifting mechanism to improve the safety in the process of opening or closing the upper cover. By forming a stable experimental environment in the reaction chamber, it is conducive to the experiment and ensures the accuracy and quality of the chip.

[0008] Optionally, the first transmission assembly includes: a first shaft, which is connected to the first motor and has a spiral groove thereon; a moving part, which at least partially passes through the first shaft and is connected to the graphite disk; a first nut, whose inner wall has a first raceway and a first ball that are adapted to the spiral groove; the first raceway and the spiral groove form a closed track connected end to end, and when a plurality of the first balls continuously circulate in the space formed by the first raceway and the spiral groove, the first nut drives the moving part to move axially.

[0009] Through the matching relationship between the first raceway, the first ball and the spiral groove, the friction loss of converting the rotational motion into the axial motion is reduced, and at the same time, the rotation amount output by the first motor to the first shaft is transmitted to the moving part with high efficiency and high precision, driving the graphite disk to reach the target position.

[0010] Optionally, the second transmission assembly includes: multiple second shafts, one of which is connected to the second motor and rotates with the second motor, and drives the other second shafts to rotate at the same frequency through the moving wheel assembly; a screw, which is correspondingly connected to the multiple second shafts and rotates with the second shafts at the same time; a moving part, which is sleeved on the screw through a sleeve part, and the sleeve part has a second raceway and a second ball that are adapted to the thread on the screw; the second raceway and the thread on the screw form a closed track connected end to end, and when the multiple second balls continuously circulate in the space formed by the second raceway and the thread on the screw, the moving part moves along the extension direction of the screw; a bearing part, which is respectively connected to the moving part and the upper cover, and adjusts the position of the upper cover with the moving part.

[0011] Since the rolling friction between the second raceway, the second ball and the thread on the screw has less resistance and better sensitivity than sliding friction, the rotation of the screw can be more efficiently converted into the axial movement of the moving part, thereby driving the bearing part and the upper cover to move axially at the same speed and direction. And through the connection between the second shaft and the screw, the rotation of the second motor can be transmitted over a long distance.

[0012] Optionally, the second transmission assembly also includes a slide rail, which includes: a groove-shaped space, in which the screw is accommodated; a track, which is protrudingly arranged on both sides of the groove-shaped space; the moving part includes a support portion, which is arranged on both sides of the bottom of the moving part, and the support portion is recessed away from the track; the support portion is adapted to the track.

[0013] By setting a slide rail to provide a moving path for the moving part, the moving part only moves along the axial movement direction of the screw, reducing energy loss; and the moving part is stably set on the track through the support part to improve stability during movement. In addition, the space setting of the above structure is reasonable, which can improve space utilization to a certain extent.

[0014] Optionally, the lifting device also includes a mounting plate, which includes: a first mounting plate connected to one end of the first axis; a second mounting plate arranged above the first mounting plate and connected to the other end of the first axis; a third mounting plate supporting the reaction chamber; and support columns are provided between the first mounting plate, the second mounting plate and the third mounting plate.

[0015] With this arrangement, the first shaft is stably arranged between the first mounting plate and the second mounting plate, thereby stably transmitting the rotation output by the first motor; and through a layered arrangement, each component is reasonably arranged and arranged on each mounting plate. In addition, each mounting plate can provide necessary support for each component arranged thereon, thereby reducing the bearing force between each component and extending the service life.

[0016] Optionally, the moving part includes: a first plate, the first plate is provided with a first opening, the first nut at least partially passes through the first opening and is fixed relative to the first plate; a first rod, one end of the first rod is connected to the first plate; a second plate, arranged between the second mounting plate and the third mounting plate, and the second plate is connected to the other end of the first rod; a second rod, the second rod is fixed relative to the second plate and connected to the graphite disk.

[0017] Since the end away from the input motion may deviate when the shaft moves, in order to prevent the shaft from moving in a direction deviating from the expected direction, a first plate, a second plate and a first rod are provided to achieve long-distance stable axial movement.

[0018] Optionally, the lifting device for MOCVD equipment includes a driven wheel assembly, the driven wheel assembly includes a first driven wheel assembly and a second driven wheel assembly, the first driven wheel assembly includes a first driving wheel and a first driven wheel, the first driving wheel is connected to a first motor, and the first driven wheel is connected to the first driving wheel through a first synchronous belt; the second driven wheel assembly includes a second driving wheel and a second driven wheel, the second driving wheel is connected to a second motor, and the second driven wheel is connected to the second driving wheel through a second synchronous belt; the first transmission assembly is connected to the first motor through the first driven wheel assembly, and the second transmission assembly is connected to the second motor through the second driven wheel assembly.

[0019] With this arrangement, the structure is simple, load impact is mitigated, adjustment is convenient, and the rotation amount of the first motor and the second motor is transmitted smoothly.

[0020] Optionally, the moving part also includes: a second nut, the second nut is provided with a first through hole, the first through hole is adapted to the first rod; a groove and a ball are provided in the first through hole, the groove extends in the direction extending along the first rod, and a plurality of grooves are symmetrically distributed on the inner wall of the first through hole; a plurality of balls are provided in the groove and adapted to the groove; when the moving part moves, the ball rolls in the groove in the direction opposite to the moving direction of the first rod.

[0021] By arranging the grooves and the balls, the first rod is pushed to perform axial movement, so that the movement is smoother and the transmission accuracy is improved.

[0022] Optionally, the second driven wheel has a center hole, and a slot is provided on the inner wall of the center hole; the second shaft passes through the center hole, and a protrusion is provided on the second shaft, and the protrusion is matched with the slot, so that the second shaft rotates with the second driven wheel.

[0023] The above arrangement facilitates driving the second shaft to rotate according to the required rotation amount, and reduces errors and losses during the rotation process.

[0024] Optionally, the second lifting mechanism also includes: a coupling, one end of which has a first recess that cooperates with the second shaft, and the other end of which has a second recess that cooperates with the screw, the first recess and the second recess are relatively fixed; the first recess and the second shaft, and the second recess and the screw are relatively fixed by a plurality of fasteners so that the screw rotates with the second shaft.

[0025] Through the coupling, the screw rod can stably follow the rotation of the second axis, so that the second lifting mechanism can be lifted and lowered stably over a long distance.

[0026] Compared with the prior art, the first lifting mechanism is used to stably adjust the distance between the graphite disk and the heating sheet by precisely controlling the rotation direction and speed of the motor, thereby regulating the reaction temperature of the chip in the graphite disk; the second lifting mechanism is used to stably adjust the position of the upper cover to improve the safety during the process of opening or closing the upper cover. By forming a stable experimental environment in the reaction chamber, it is conducive to the conduct of the experiment and ensures the accuracy and quality of the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of this specification or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the embodiments of this specification. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0028] Figure 1 This is a front view of a lifting device for MOCVD equipment provided in this embodiment;

[0029] Figure 2 is a rear view of a lifting device for MOCVD equipment provided in this embodiment;

[0030] Figure 3-Figure 4 is a three-dimensional diagram of a lifting device for MOCVD equipment provided in this embodiment;

[0031] Figure 5 This is a schematic diagram of a first partial structure of a lifting device for MOCVD equipment provided in this embodiment;

[0032] Figure 6 is a schematic diagram of the connection between the moving part provided in this embodiment and the first shaft, the second mounting plate and the graphite disk respectively;

[0033] Figure 7 This is a schematic diagram of a second partial structure of a lifting device for MOCVD equipment provided in this embodiment;

[0034] Figure 8 This is a schematic diagram of a third partial structure of a lifting device for MOCVD equipment provided in this embodiment;

[0035] Fig. 9 It is a structural schematic diagram of a second nut in a lifting device for MOCVD equipment provided in this embodiment.

[0036] Reference numerals:

[0037] 1-first mounting plate; 2-second mounting plate; 3-third mounting plate; 4-first support column; 5-second support column; 6-first motor; 7-first moving wheel assembly; 700-first driving wheel; 701-first driven wheel; 8-first shaft; 9-first plate; 10-first rod; 11-first nut; 110-first part; 111-second part; 12-second plate; 13-second rod; 14-reaction chamber; 15-second motor; 1 6-second moving wheel assembly; 160-second driving wheel; 161-second driven wheel; 17-second shaft; 18-track; 19-moving member; 20-screw; 21-base plate; 22-sleeve portion; 23-support portion; 24-coupling; 25-bearing member; 26-upper cover; 27-graphite disk; 28-second nut; 280-third part; 281-fourth part; 29-groove space; 30-first perforation; 300-ball. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0039] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the term "connected" should be understood in a broad sense, for example, it can be a fixed connection, or a detachable connection, or an integral connection can be a mechanical connection, or an electrical connection can be a direct connection, or it can be indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0040] The terms "top", "bottom", "above", "lower", and "on" used throughout the description are relative to the relative positions of components of a device, such as the relative positions of the top and bottom substrates within a device. It is understood that devices are multifunctional regardless of their orientation in space.

[0041] To facilitate the understanding of the embodiments of the present application, the following will further explain and illustrate specific embodiments in conjunction with the accompanying drawings. The embodiments do not constitute a limitation of the present invention.

[0042] This embodiment provides a lifting device for MOCVD equipment, such as Figure 1-Figure 9 As shown, including:

[0043] The mounting plate is made of a high temperature resistant material and has good load-bearing capacity and stability. The mounting plate extends along a first direction and is preferably rectangular in shape. The mounting plate includes a first mounting plate 1, a second mounting plate 2, and a third mounting plate 3 that are arranged in parallel from bottom to top.

[0044] A support column, the support column extends along a second direction, the second direction is perpendicular to the first direction, the support column includes a first support column 4 and a second support column 5, the first support column 4 is arranged between the first mounting plate 1 and the second mounting plate 2, and the two ends of the first support column 4 are respectively connected to the first mounting plate 1 and the second mounting plate 2, so as to stably set the second mounting plate 2 on the first mounting plate 1. The number of the first support column 4 can be multiple, and one end of the first support column 4 is installed at each vertex close to the second mounting plate 2. Similarly, the second support column 5 is arranged between the second mounting plate 2 and the third mounting plate 3, and the two ends of the second support column 5 are respectively connected to the second mounting plate 2 and the third mounting plate 3, so as to stably set the third mounting plate 3 on the second mounting plate 2, preferably at each vertex close to the third mounting plate 3.

[0045] The first lifting mechanism includes a first motor 6 and a first transmission assembly.

[0046] The first motor 6 rotates in the first plane and provides lifting power; the first motor 6 is vertically inserted on the first mounting plate 1, and the rotation axis of the first motor 6 is perpendicular to the first direction.

[0047] The first transmission assembly converts the rotation of the first motor 6 into axial motion in a direction perpendicular to the first plane. Specifically, the first transmission assembly includes a first shaft 8, a moving part and a first nut 11; the moving part includes a first plate 9, a first rod 10, a second plate 12, a second rod 13 and a second nut 28.

[0048] The lifting device further comprises a moving wheel assembly, and the moving wheel assembly comprises a first moving wheel assembly 7 .

[0049] The first driven wheel assembly 7 is arranged below the first mounting plate 1. The first driven wheel assembly 7 includes a first driving wheel 700 and a first driven wheel 701. The first driving wheel 700 is connected to the first motor 6. When the first motor 6 rotates, the first driving wheel 700 is driven to rotate at the same amount. The first driving wheel 700 and the first driven wheel 701 are connected through a first synchronous belt. When the first driving wheel 700 rotates, the first driven wheel 701 is driven to rotate at the same amount.

[0050] The first shaft 8 is vertically arranged between the first mounting plate 1 and the second mounting plate 2, and one end of the first shaft 8 passes through the first mounting plate 1 and is connected to the bearing of the first driven wheel 701, so that the first driven wheel 701 drives the first shaft 8 to rotate; the rotation speed and direction of the first shaft 8 are the same as those of the first driven wheel 701. The first shaft 8 is also sleeved with a first bearing seat, which is relatively fixedly arranged on the first mounting plate 1 to provide support and guidance for the first shaft 8, so as to ensure that the driven wheel and the first shaft 8 can rotate smoothly. The other end of the first shaft 8 is connected to the second mounting plate 2. The surface of the first shaft 8 is provided with a spiral groove.

[0051] The first plate 9 is arranged along the first direction, and a first opening is arranged on the first plate 9, specifically, the first opening is arranged at the center of the first plate 9. The first nut 11 at least partially passes through the first opening and is fixed relative to the first plate 9. Specifically, the first nut 11 includes a first portion 110 and a second portion 111, the first portion 110 is a side close to the first mounting plate 1, the second portion 111 is a side close to the second mounting plate 2, the cross-sectional area of ​​the first portion 110 along the first direction is larger than the cross-sectional area of ​​the second portion 111, the first opening is matched with the second portion 111, and the side of the first portion 110 away from the first mounting plate 1 is against the side of the first plate 9 close to the first mounting plate 1. The first nut 11 has a second opening extending along the second direction inside, and the second opening is matched with the spiral groove of the first shaft 8. Specifically, the second opening is provided with a first raceway and a first ball matched with the spiral groove of the first shaft 8, and the first raceway and the spiral groove form a closed track 18 connected end to end. When the first shaft 8 rotates relative to the first nut 11, a plurality of the first balls continuously circulate in the space formed by the first raceway and the spiral groove, pushing the first nut 11 to move axially, thereby driving the first plate 9 to move along the second direction.

[0052] The second plate 12 is arranged along the first direction, and the second plate 12 is arranged between the second mounting plate 2 and the third mounting plate 3 .

[0053] The second plate 12 is connected to the first plate 9. Specifically, the second plate 12 and the first plate 9 are connected via a first rod 10. One end of the first rod 10 is connected to the second plate 12, and the other end is connected to the first plate 9. The first rod 10 passes through the second mounting plate 2 along the second direction. The first plate 9 moves up and down, which is driven by the first rod 10, and drives the second plate 12 to move up and down as well. In this embodiment, two first rods 10 are configured, which are respectively arranged on both sides of the first shaft 8 to balance the force.

[0054] The second mounting plate 2 is provided with a third opening, and the second nut 28 at least partially passes through the third opening. The second nut 28 includes a third part 280 and a fourth part 281. The third part 280 is a side close to the third mounting plate 3, and the fourth part 281 is a side close to the first mounting plate 1. The cross-sectional area of ​​the third part 280 along the first direction is greater than the cross-sectional area of ​​the fourth part 281. The third opening is adapted to the fourth part 281, and the third part 280 and a side close to the second mounting plate 2 are in contact with the upper surface of the second mounting plate 2. The second nut 28 has a first through hole 30 extending along the second direction inside, and the first through hole 30 is adapted to the first rod 10. A groove and a round ball 300 are provided inside the first through hole 30, and the groove extends along the second direction. A plurality of the grooves are symmetrically distributed on the inner wall of the first through hole 30. A plurality of the balls 300 are arranged in the groove and matched with the groove. The balls 300 are arranged in contact with each other in the groove along the second direction, and the balls 300 at the head and tail are respectively connected with the side walls of the groove. When the first rod 10 moves in the second direction relative to the second nut 28, the balls 300 roll in the first groove, reducing the friction resistance of the axial movement of the first rod 10, so that the movement of the first rod 10 is smoother.

[0055] The second rod 13 extends along the second direction. The second rod 13 is fixedly arranged relative to the second plate 12 to move with the movement of the second plate 12. The second rod 13 also passes through the third mounting plate 3 and is connected to the graphite disk 27 arranged on the third mounting plate 3. The second rod 13 moves to adjust the position of the graphite disk 27 so as to change the heating temperature of the graphite disk 27.

[0056] Furthermore, a second through hole is provided on the second plate 12, and the second through hole is provided at the center of the second plate 12. The second rod 13 at least partially passes through the second through hole.

[0057] The second rod 13 includes an upper section and a lower section, the upper section is a side close to the third mounting plate 3, and the lower section is a side away from the third mounting plate 3, the cross-sectional area of ​​the upper section along the first direction is larger than the cross-sectional area of ​​the lower section, the second through-hole is adapted to the lower section, the lower end passes through the second through-hole, and a side of the upper section away from the third mounting plate 3 abuts against a side of the second plate 12 close to the third mounting plate 3.

[0058] The upper portion of the second rod 13 is connected to the graphite disk 27 . When the second plate 12 moves up and down along with the first plate 9 , the second rod 13 will drive the graphite disk 27 to move up and down.

[0059] The graphite disk 27 is arranged in the reaction chamber 14, and the reaction chamber 14 also includes a cavity and a heating element. The cavity has an upward opening for accommodating the graphite disk 27 and the heating element. The graphite disk 27 is made of quartz or graphite and has a plurality of grooves for placing substrates. The heating element is located below the graphite disk 27, and the second rod 13 moves along the second direction to change the distance between the graphite disk 27 and the heating element, thereby controlling the heating temperature of the graphite disk 27.

[0060] The second lifting mechanism includes a second motor 15 and a second transmission assembly; the second transmission assembly includes a second shaft 17, a screw rod 20, a moving member 19, a bearing member 25 and a slide rail.

[0061] The second motor 15 is vertically interlaced and arranged on a surface of the second mounting plate 2 close to the first mounting plate 1 , and the rotation axis of the second motor 15 is perpendicular to the first direction.

[0062] The second bearing seat includes an upper part and a lower part, the cross-sectional area of ​​the upper part along the first direction is smaller than the cross-sectional area of ​​the lower part, the upper part is adapted to the second through hole on the second mounting plate 2, and the lower part is fixedly connected to the second mounting plate 2 by bolts, welding or other means.

[0063] The driven wheel assembly also includes a second driven wheel assembly 16, which is arranged above the second mounting plate 2. The second driven wheel assembly 16 includes a second driving wheel 160 and a second driven wheel 161. The second driving wheel 160 is connected to the second motor 15, and the second driving wheel 160 and the second motor 15 are respectively arranged on both sides of the second mounting plate 2. When the second motor 15 rotates, it drives the second driving wheel 160 to rotate with the same rotation amount. The second driven wheel 161 and the second driving wheel 160 are arranged on the same surface of the second mounting plate 2 and fixed at the same height. There are three second driven wheels 161, one of which is symmetrically arranged with the second driving wheel 160 relative to the second plate 12, and the other two driven wheels are symmetrically arranged on both sides of the line connecting the known driven wheel and the second driving wheel 160, and the second driving wheel 160 and the second driven wheel 161 in the second driven wheel assembly 16 are arranged in a central symmetrical manner. The second driving wheel 160 is connected to the second driven wheel 161 via a second synchronous belt, and the second synchronous belt surrounds the periphery of the driving wheel and the driven wheel. When the second driving wheel 160 rotates, the second driven wheel 161 is driven to rotate with the same rotation amount.

[0064] The second driven wheel 161 has a central hole, and the second shaft 17 extending along the second direction into the second bearing seat is passed through the central hole. A clamping groove is provided on the inner wall of the central hole, and a protrusion is provided at a corresponding position of the second shaft 17, and the clamping groove is matched with the protrusion to relatively fix the second shaft 17 and the second driven wheel 161 in the rotation direction.

[0065] The second shaft 17, one end of the second shaft 17 is connected to the second mounting plate 2, and the other end passes through the third mounting plate 3 and is connected to the screw 20 set on the third mounting plate 3. The second driven wheel 161 rotates and drives the second shaft 17 to rotate, thereby causing the screw 20 to rotate with the same amount of rotation.

[0066] The screw rod 20 is disposed in the track 18 and extends along the second direction. One end of the screw rod 20 is connected to the second shaft 17 via a coupling 24 , and the other end of the screw rod 20 is connected to the top end of the track 18 .

[0067] The coupling 24 passes through the third mounting plate 3, and has a first recess at one end thereof that matches the second shaft 17, and a second recess at the other end thereof that matches the screw 20, and the first recess and the second recess are relatively fixed. The first recess and the second shaft 17, and the second recess and the screw 20 are relatively fixed by a plurality of fasteners so that the screw 20 rotates with the second shaft 17.

[0068] The slide rail is arranged on the third mounting plate 3 and symmetrically arranged on both sides of the reaction chamber 14. The slide rail extends along the second direction and has a groove-shaped space 29, and the screw 20 is accommodated in the groove-shaped space 29; the slide rail also includes a track 18, and the track 18 is protrudingly arranged on both sides of the groove-shaped space 29; the slide rail is provided with a third through hole at the bottom near the third mounting plate 3, for the coupling 24 to pass through and extend into the groove-shaped space 29.

[0069] A moving part 19 is arranged on the slide rail. The moving part 19 includes a base plate 21, a support portion 23 and a sleeve portion 22. The base plate 21 extends along the second direction and can be of any shape. In this embodiment, it is set to be a rectangle. The support portion 23 and the sleeve portion 22 are relatively fixed on the side of the base plate 21 close to the track 18. The support portion 23 is arranged on both sides of the bottom of the moving part 19, and the support portion 23 is recessed away from the track 18; the support portion 23 is adapted to the track 18 so that the moving part 19 can move on the track 18. In order to improve the stability of the moving part 19, the number of the support portions 23 in this embodiment is set to four, which are symmetrically distributed on the base plate 21. The sleeve portion 22 is arranged in the groove-shaped space 29 and sleeved with the screw rod 20, and has a fourth through hole extending along the second direction inside, and the fourth through hole is adapted to the thread arranged on the screw rod 20. Specifically, a second raceway and a second ball matched with the thread of the screw 20 are provided in the fourth through hole, and the second raceway and the thread on the screw 20 form a closed track 18 connected end to end. When a plurality of the second balls continuously circulate in the space formed by the second raceway and the thread on the screw 20, the moving member 19 moves along the extension direction of the screw 20.

[0070] The carrier 25 is fixedly arranged on the side of the movable member 19 away from the track 18. The carrier 25 includes two fixed plates arranged opposite to each other and parallel to the third mounting plate 3 to form a accommodating space, and the accommodating space is used to accommodate the upper cover 26 covering the reaction chamber 14, and the two sides of the upper cover 26 are respectively in contact with the two fixed plates. When the movable member 19 moves along the second direction, the carrier 25 and the upper cover 26 placed in the accommodating space are driven to move together. The upper cover 26 will move along the second direction toward or away from the reaction chamber 14 to realize the opening and closing of the reaction chamber 14. When the upper cover 26 is away, experimental raw materials are placed or experimental finished products are output; when the upper cover 26 is close to and closed with the reaction chamber 14, an experimental environment for the reaction is provided.

[0071] Compared with the prior art, this embodiment provides a lifting device for MOCVD equipment. Compared with the prior art, by precisely controlling the rotation direction and speed of the motor, the first lifting mechanism is used to stably adjust the distance between the graphite disk and the heating sheet, thereby regulating the reaction temperature of the chip in the graphite disk; the second lifting mechanism is used to stably adjust the position of the upper cover to improve the safety during the process of opening or closing the upper cover. By forming a stable experimental environment in the reaction chamber, it is conducive to the conduct of the experiment and ensures the accuracy and quality of the chip.

[0072] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the present application in detail. It should be understood that the above description is only the specific implementation method of the present application and is not intended to limit the scope of protection of the present application. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A lifting device for MOCVD equipment, characterized in that: include: A reaction chamber, wherein a graphite disk is arranged in the reaction chamber; An upper cover, arranged above the reaction chamber and adapted to the opening of the reaction chamber; A first lifting mechanism is connected to the graphite disk to drive the graphite disk to move in a direction close to or away from the heating plate, and the first lifting mechanism includes a first motor that rotates in a first plane and provides lifting power; a first transmission assembly is respectively connected to the first motor and the graphite disk, and converts the rotation of the first motor into an axial movement in a direction perpendicular to the first plane, driving the graphite disk to move up and down to change the heating of the graphite disk; A second lifting mechanism connected to the upper cover to drive the upper cover to move in a direction close to or away from the reaction chamber, the second lifting mechanism comprising a second motor that rotates in the first plane and provides lifting power; The second transmission assembly is connected to the second motor and the upper cover respectively, and converts the rotation of the second motor into an axial motion in a direction perpendicular to the first plane, thereby driving the upper cover to rise and fall.

2. A lifting device for MOCVD equipment according to claim 1, characterized in that: The first transmission assembly comprises: A first shaft, the first shaft is connected to the first motor and has a spiral groove thereon; a moving part, the moving part at least partially passing through the first shaft and connected to the graphite disk; The first nut, the inner wall of the first nut has a first raceway and a first ball matched with the spiral groove; the first raceway and the spiral groove form a closed track connected end to end, when the plurality of the first balls continuously circulate in the space formed by the first raceway and the spiral groove, the first nut drives the moving part to move axially.

3. The lifting device for MOCVD equipment according to claim 1, characterized in that: The second transmission assembly comprises: A plurality of second shafts, one of which is connected to the second motor and rotates with the second motor, and drives the other second shafts to rotate at the same frequency through the moving wheel assembly; A screw rod is connected to the plurality of second shafts correspondingly and rotates along with the second shafts; The moving member is sleeved on the screw rod through a sleeve portion, and the sleeve portion has a second raceway and a second ball matched with the thread on the screw rod; the second raceway and the thread on the screw rod form a closed track connected end to end, and when a plurality of the second balls continuously circulate in a space formed by the second raceway and the thread on the screw rod, the moving member moves along the extension direction of the screw rod; The bearing member is connected to the moving member and the upper cover respectively, and adjusts the position of the upper cover along with the moving member.

4. A lifting device for MOCVD equipment according to claim 3, characterized in that: The second transmission assembly further includes a slide rail, and the slide rail includes: A groove-shaped space, wherein the screw is accommodated in the groove-shaped space; Tracks are protrudingly arranged on both sides of the groove-shaped space; The moving member includes a supporting portion, the supporting portion is arranged on both sides of the bottom of the moving member, and the supporting portion is recessed in a direction away from the track; The support portion is adapted to the track.

5. The lifting device for MOCVD equipment according to claim 2, characterized in that: The lifting device also includes a mounting plate, and the mounting plate includes: a first mounting plate connected to one end of the first shaft; A second mounting plate, disposed above the first mounting plate and connected to the other end of the first shaft; a third mounting plate, carrying the reaction chamber; Support columns are provided between the first mounting plate, the second mounting plate and the third mounting plate.

6. A lifting device for MOCVD equipment according to claim 5, characterized in that: The sports unit includes: A first plate, wherein the first plate is provided with a first opening, and the first nut at least partially passes through the first opening and is fixed relative to the first plate; a first rod, one end of which is connected to the first plate; A second plate is disposed between the second mounting plate and the third mounting plate, and the second plate is connected to the other end of the first rod; The second rod is fixedly arranged relative to the second plate and connected to the graphite disk.

7. The lifting device for MOCVD equipment according to claim 3, characterized in that: The lifting device for MOCVD equipment includes a moving wheel assembly, wherein the moving wheel assembly includes a first moving wheel assembly and a second moving wheel assembly. The first driven wheel assembly includes a first driving wheel and a first driven wheel, the first driving wheel is connected to the first motor, and the first driven wheel is connected to the first driving wheel through a first synchronous belt; The second driven wheel assembly includes a second driving wheel and a second driven wheel, the second driving wheel is connected to the second motor, and the second driven wheel is connected to the second driving wheel through a second synchronous belt; The first transmission assembly is connected to the first motor via the first moving wheel assembly, and the second transmission assembly is connected to the second motor via the second moving wheel assembly.

8. The lifting device for MOCVD equipment according to claim 2, characterized in that: The sports unit also includes: A second nut, wherein the second nut is provided with a first through hole, and the first through hole is adapted to fit the first rod; The first through hole is provided with a groove and a round ball, the groove extends in the direction extending with the first rod, and a plurality of grooves are symmetrically distributed on the inner wall of the first through hole; a plurality of round balls are arranged in the groove and matched with the groove; When the moving part moves, the ball rolls in the groove in a direction opposite to the moving direction of the first rod.

9. The lifting device for MOCVD equipment according to claim 7, characterized in that: The second driven wheel has a central hole, and the inner wall of the central hole is provided with a slot; The second shaft passes through the central hole, and a protrusion is arranged on the second shaft, and the protrusion is matched with the slot, so that the second shaft rotates with the second driven wheel.

10. The lifting device for MOCVD equipment according to claim 3, characterized in that: The second lifting mechanism also includes: A coupling, one end of which has a first recess that matches the second shaft, and the other end of which has a second recess that matches the screw, the first recess and the second recess are relatively fixed; the first recess and the second shaft, the second recess and the screw are relatively fixed by a plurality of fasteners, so that the screw rotates with the second shaft.

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