Photomask box purification device and purification inflation system

Abstract

The utility model provides a photomask box purification device and a purification inflation system, and is applied to the technical field of photomask box purification, each carrier disc is configured to be pushed and pulled between a first position and a second position, the first position is located in a cabinet body, the second position is located outside the cabinet body, and the first position and the second position are located on a straight line where the width direction of the cabinet body is located. When the carrying discs are in the moving state and the static state, the flexible pipes keep the purification pipeline assemblies on the carrying discs to be communicated with the air supply pipeline. The carrying disc is pushed and pulled to move between the first position and the second position inside and outside the cabinet body, the carrying disc is moved out of the cabinet body, the photomask box is convenient to take and place, and a hand does not need to stretch into the cabinet body to take and place the photomask box. In addition, each purification pipeline assembly is communicated with the air supply pipeline through a flexible pipe, so that the purification pipeline assembly on the carrying disc is communicated with the air supply pipeline, and the photomask box can be conveniently and continuously inflated.

Description

Technical Field

[0001] The present application relates to the technical field of mask box purification, and in particular to a mask box purification device and a purification and inflation system. Background Art

[0002] The photomask, also known as the mask, is an important part of the photolithography production in the manufacturing process of semiconductor chip products. A higher level of clean environment is required during the production of photomasks. The mask box is an important tool for storing and transporting the mask. The clean environment of the mask box is one of the important factors affecting the production yield of the product. The mask box purification system is an important means to improve the cleanliness of the mask box.

[0003] The related technology discloses a pneumatic mask box cleaning system, including a cabinet, multiple carriers and an air charging pipeline; the multiple carriers are fixedly arranged in the cabinet, and multiple storage positions for placing mask boxes are arranged on the carriers. The air inlet end of the air charging pipeline is used to connect to the air source system to obtain purified gas in the air source system, and the air outlet end of the air charging pipeline is connected to the purified gas nozzle on the carrier to charge the mask box on the storage position with purified gas.

[0004] In view of the above-mentioned related technologies, the applicant believes that a plurality of mask boxes are placed on the storage position of the carrier, and the carrier is fixed in the cabinet, and it is inconvenient to reach into the cabinet to take and place the mask boxes.

[0005] Based on this, a new technical solution is needed. Utility Model Content

[0006] In view of this, the embodiments of the present specification provide a mask box purification device and a purification and inflation system.

[0007] The embodiments of this specification provide the following technical solutions:

[0008] The embodiment of the present specification provides a photomask box purification device, which is used to store and clean photomask sheets in a semiconductor manufacturing process, including:

[0009] Cabinet;

[0010] A plurality of carriers are arranged in the cabinet, each of the carriers having at least one storage position for placing a mask box;

[0011] A gas supply pipeline for connecting to a gas source system;

[0012] A purification pipeline assembly disposed on the carrier plate for charging the reticle box with purified gas;

[0013] Each of the carriers is configured to be pushed and pulled between a first position and a second position along the width direction of the cabinet; the first position is located in the cabinet, and is configured so that the carrier is located in the cabinet when it is in the first position; the second position is partially or completely located outside the cabinet, and is configured so that the carrier is partially or completely located outside the cabinet when it is in the second position;

[0014] A flexible tube is connected between each of the purification pipeline components and the air supply pipeline, and the flexible tube is configured to maintain communication between the purification pipeline components on each of the carriers and the air supply pipeline when each of the carriers is in a moving state and a stationary state.

[0015] Preferably, a linear guide rail is provided between the carrier and the cabinet, and when the carrier moves between the first position and the second position, the carrier slides and pushes with the cabinet through the linear guide rail.

[0016] Preferably, the cabinet includes at least one layer of a carrying area, and each layer of the carrying area is provided with at least one carrying tray;

[0017] There are multiple storage locations on each of the carriers, and the storage locations are arranged in multiple groups along the width direction of the cabinet, and the number of storage locations in each group of storage locations is at least one in the length direction of the cabinet.

[0018] Preferably, a detection sensor is provided in the cabinet to detect whether the carrier is pushed back into place;

[0019] The carrier plate is provided with a trigger sensing element which cooperates with the detection sensor to realize contact detection.

[0020] Preferably, a drag chain is also installed on the carrier, the flexible tube runs through the drag chain, a fixing plate for placing the drag chain is fixed in the cabinet, and the fixing plate is located below the carrier, and is configured so that the drag chain running through the flexible tube moves synchronously with the carrier when it moves along the width direction of the cabinet.

[0021] Preferably, the storage position is provided with an anti-stuck pin for preventing the mask box from being placed upside down;

[0022] The storage position is provided with a plurality of positioning members for limiting the position of the photomask box;

[0023] The storage position is provided with a seating sensor for detecting whether the mask box is placed;

[0024] A plurality of dust removal holes are provided on the storage position.

[0025] Preferably, the carrier is provided with an information identifier for identifying the ID information of the mask box; or, an independent carrier is provided on the side of the cabinet, and the independent carrier is provided with an information identifier for identifying the ID information of the mask box;

[0026] A display screen is embedded on the outer surface of the cabinet, and the display information configured on the display screen includes the ID information of the mask box, the storage status of the mask box, the number of mask boxes stored in the cabinet, and the storage distribution of the mask boxes in the cabinet.

[0027] Preferably, the gas supply pipeline is detachably connected to the cabinet;

[0028] The gas supply pipeline includes a gas supply main pipe and a plurality of gas supply branches for connecting to the gas source system, and the plurality of gas supply branches are arranged one by one in correspondence with the multi-layer bearing area, the gas supply main pipe is respectively connected to the plurality of gas supply branches, and the gas supply branches are respectively connected to the flexible pipes, and are configured so that the purified gas in the gas source system flows to the flexible pipe through the gas supply main pipe and the gas supply branch pipe in sequence;

[0029] The gas supply branch pipes are provided with flow sensors for detecting the flow of purified gas in each load-bearing area;

[0030] The gas supply main pipe is provided with a connector for connecting to the gas source system;

[0031] The gas supply main is provided with a pressure regulating valve for controlling the purified gas flowing out from the gas source system;

[0032] The gas supply main pipe is provided with a filter for filtering the purified gas flowing out from the gas source;

[0033] The gas supply branches are all provided with switch valves for controlling the flow of purified gas in each layer of the load-bearing area.

[0034] Preferably, the purification pipeline assembly includes a purification pipeline and a gas nozzle assembly for filling the reticle box with purification gas; the gas nozzle assembly passes through the carrier plate;

[0035] The purification pipeline includes a purification main pipe and a plurality of purification branches for connecting the flexible pipe, and the purification branches are arranged in a one-to-one correspondence with the storage positions; the purification main pipe is respectively connected to the plurality of purification branches; the purification branches are respectively connected to the gas nozzle assembly, and the purification gas at the flexible pipe is configured to be filled into the photomask box through the purification main pipe, the purification branch pipe and the gas nozzle assembly in sequence;

[0036] The purification branch pipe is provided with a throttle valve for controlling the flow of purified gas at the corresponding storage position.

[0037] According to an embodiment of the present specification, a purification and inflation system is provided, comprising any of the above-mentioned mask box purification devices and an air source system;

[0038] The gas supply pipeline is connected to the gas source system through a joint, and is configured so that the purified gas in the gas source system is filled into the photomask box through the gas supply pipeline, the flexible pipe and the purification pipeline assembly in sequence.

[0039] Compared with the prior art, the at least one technical solution adopted in the embodiments of this specification can achieve the following beneficial effects:

[0040] 1. The carrier of the present application is pushed and pulled between a first position and a second position inside and outside the cabinet, and the carrier is moved outside the cabinet, which is convenient for taking and placing the mask box, without having to reach into the cabinet to take and place the mask box. In addition, a flexible pipe is connected between each purification pipeline assembly and the air supply pipeline. When each carrier is in a moving state and a stationary state, the purification pipeline assembly on the carrier is kept connected with the air supply pipeline, which is convenient for continuously inflating the mask box;

[0041] 2. In the present application, since the carrier and the cabinet are connected by push-pull movement, multiple groups of storage positions can be arranged in the width direction of the cabinet. This increases the storage capacity of the carrier for the mask box without increasing the carrier height and ensuring that the mask box is easy to take and put. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 It is a schematic diagram of the overall structure of the photomask box purification device in this application;

[0044] Figure 2 It is a schematic diagram of the overall structure of the photomask box purification device in the present application in which a carrier plate is pulled out;

[0045] Figure 3 is a front view of the photomask box purification device in the present application;

[0046] Figure 4 is a back view of the photomask box purification device in the present application;

[0047] Figure 5 is a back view of the photomask box purification device in the present application with the cover plate removed;

[0048] Figure 6 is a bottom view of the photomask box purification device in the present application;

[0049] Figure 7 A schematic diagram of placing a mask box on a carrier plate in this application;

[0050] Figure 8 A top view of placing a mask box on a carrier plate in this application;

[0051] Fig. 9A right side view of placing the mask box on the carrier plate in this application;

[0052] Fig.10 for Figure 8 A cross-sectional view taken along the CC direction;

[0053] Fig.11 A partial cross-sectional view of the present application highlighting the nozzle and the gas nozzle mounting seat;

[0054] Fig.12 A bottom view of the carrier plate without the dust removal holes in this application;

[0055] Fig.13 It is an overall schematic diagram of the photomask box purification device in this application in which the information identifier is placed on the carrier;

[0056] Fig.14 It is a front view of the photomask box purification device in this application in which the information identifier is placed on the carrier plate;

[0057] Fig.15 A top view of the photomask box purification device in the present application in which the information identifier is placed on the carrier;

[0058] Fig.16 A schematic diagram of a carrier plate containing an information identifier in the present application;

[0059] Fig.17 A bottom view of a carrier plate containing an information identifier in the present application;

[0060] Fig.18 A front view of a carrier plate containing an information identifier in the present application;

[0061] Fig.19 It is a right side view of the carrier plate containing the information identifier in the present application;

[0062] Fig. 20 It is a schematic diagram of a carrier plate containing dust removal holes and an information identifier in this application.

[0063] 1. Cabinet; 2. Display screen; 3. Alarm light; 4. Carrier; 5. Information identifier; 6. PCB motherboard; 7. Flow sensor; 8. Switch valve; 9. Filter; 10. Drag chain; 11. Anti-stupid pin; 12. Seat sensor; 13. Nozzle; 14. Positioning piece; 15. Flexible tube; 16. Trigger sensing element; 17. Air nozzle mounting seat; 18. Linear guide; 19. Throttle valve; 20. Air pipe joint; 21. Pressure regulating valve; 22. Shockproof component; 23. Fixing plate; 24. Dust removal hole; 25. Air supply main pipe; 26. Air supply branch pipe; 27. Emergency stop button; 28. Keyboard seat; 29. ​​Purification main pipe; 30. Purification branch pipe; 31. Cover plate; 32. Push-pull handle; 33. Ventilation port; 34. Roller; 35. Main switch; 36. Limit plate. DETAILED DESCRIPTION

[0064] The embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0065] The following describes the implementation methods of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.

[0066] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.

[0067] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0068] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.

[0069] The technical solutions provided by various embodiments of the present application are described below in conjunction with the accompanying drawings.

[0070] The embodiment of this specification proposes a photomask box purification device, which is used to store and clean photomask sheets in the semiconductor manufacturing process: Figure 1 , Figure 2 and Figure 3 As shown, it includes a cabinet 1; a plurality of carriers 4 arranged in the cabinet 1, each carrier 4 having at least one storage position for placing a mask box.

[0071] Each carrier 4 is configured to be pushed and pulled between a first position and a second position along the width direction of the cabinet 1. The first position is located inside the cabinet 1, and the carrier 4 is configured to be located inside the cabinet 1 when it is in the first position; the second position is partially or completely located outside the cabinet 1, and the carrier 4 is configured to be partially or completely located outside the cabinet 1 when it is in the second position. Figure 1 The X-axis direction of the coordinate axis shown. Specifically, the first position can be the original position of the carrier 4 in the cabinet 1, that is, the position when the detection sensor described later is triggered; the second position can be located outside the cabinet 1 when the carrier 4 is pulled out of the cabinet 1 to different degrees, such as the position where multiple groups of storage locations on the carrier 4 described later are completely pulled out of the cabinet 1, or the position where some storage locations on the carrier 4 are pulled out of the cabinet 1. The width direction of the cabinet 1 is also the push-pull direction of the carrier 4.

[0072] The carrier tray 4 is used as a drawer and is connected to the cabinet 1 by pulling. When the carrier tray 4 is located inside the cabinet 1, the carrier tray 4 is pulled out of the cabinet 1 by applying a pulling force to the push-pull handle 32. When the carrier tray 4 is located outside the cabinet 1, the carrier tray 4 is pushed into the cabinet 1 by applying a pushing force to the push-pull handle 32.

[0073] A frame partition structure is formed in the cabinet 1, and a plurality of push-pull openings are formed on the surface of the cabinet 1. The push-pull openings are arranged one by one corresponding to the carrier 4. The first position and the second position are respectively located on both sides of the push-pull opening, and the carrier 4 moves between the first position and the second position through the push-pull opening. By arranging a frame structure in the cabinet 1 and fixing a plurality of push-pull openings on the frame structure, the two opposite sides of each carrier 4 are respectively connected to the push-pull openings, ensuring that the carrier 4 can be smoothly pulled out relative to the frame.

[0074] In one embodiment, if Figure 7 and Figure 8 As shown, the cabinet 1 includes at least one layer of loading area, each layer of loading area is provided with at least one loading tray 4; there are multiple storage locations on each loading tray 4, and the storage locations are arranged in multiple groups along the width direction of the cabinet 1, and the number of storage locations in each group of storage locations is at least one in the length direction of the cabinet 1. Figure 1 The Y-axis direction in the coordinate axis shown.

[0075] Specifically, the carrier plate 4 is arranged in multiple layers along the height direction of the cabinet 1 as a load-bearing area; the number of the carrier plates 4 in each load-bearing area is at least one along the length direction of the cabinet 1; wherein the height direction of the cabinet 1 is as follows Figure 1 The Z-axis direction of the coordinate axis shown. For example, the carrier plate 4 can be arranged in seven layers along the height direction of the cabinet 1, and the carrier plate 4 in each layer of the load-bearing area can be arranged in a plurality along the length direction of the cabinet 1, for example, the carrier plate 4 in each layer of the load-bearing area can be arranged in two layers, and the carrier plate 4 in each layer of the load-bearing area is symmetrically arranged in the cabinet 1, and the carrier plate 4 is distributed in a 2*7 array.

[0076] For example, in order to store more mask boxes, each carrier 4 is provided with two groups of inner and outer storage positions. When the carrier 4 is pulled out to a specific position, the mask boxes can be taken out and placed in the inner storage position, that is, the storage capacity of the carrier 4 for the mask boxes can be increased without increasing the height of the carrying area where the carrier 4 is located, and while ensuring the convenience of taking and placing the mask boxes. For example, the storage positions on each carrier 4 are divided into two groups along the width direction of the cabinet 1, and the number of storage positions in each group of storage positions is set to three along the length direction of the cabinet 1, and the storage positions on each carrier 4 are distributed in a 2*3 array. In another embodiment, the storage positions are set as one group in the push-pull direction of the carrier 4.

[0077] In one embodiment, six storage positions for mask boxes are arranged on each carrier tray 4, two adjacent carrier trays 4 are arranged on each layer of the carrying area along the length direction of the cabinet 1, and the cabinet 1 is provided with 7 layers of carrying areas along its height direction, that is, 14 carrier trays 4, with a total of 6*2*7=84 storage positions.

[0078] like Figure 5 , Figure 6 as well as Fig.12As shown, the mask box purification assembly also includes an air supply pipeline arranged on the cabinet 1 for connecting to the air source system; and a purification pipeline assembly arranged on the carrier 4 for filling the mask box with purified gas. A flexible tube 15 is respectively connected between each purification pipeline assembly and the air supply pipeline, and the flexible tube 15 is configured to keep the purification pipeline assembly on the carrier 4 connected to the air supply pipeline when each carrier 4 is in a moving state and a stationary state. The flexible tube 15 uses its own flexibility to follow the push-pull movement of the carrier 4, and the purified gas in the air source system is continuously filled into the mask box through the air supply pipeline, the flexible tube 15 and the purification pipeline assembly in turn. The flexible tube 15 is, for example, a hose. The air inlet end of the air supply pipeline is used to connect to the air source system, the air outlet end of the air supply pipeline is connected to the air inlet end of the flexible tube 15, the air outlet end of the flexible tube 15 is connected to the air inlet end of the purification pipeline assembly, and the air outlet end of the purification pipeline assembly is used to fill the mask box with purified gas. The purification pipeline assembly can be installed below the carrier 4. As shown Figure 4 and Figure 5 As shown, a cover plate 31 is provided at the back of the cabinet 1 , and a placement space for placing an air supply pipeline is formed at the back of the cabinet 1 , and the air supply pipeline is covered by the cover plate 31 .

[0079] In one embodiment, if Figure 5 and Figure 6 As shown, the gas supply pipeline includes a gas supply main pipe 25 for connecting to the gas source system and a plurality of gas supply branch pipes 26, and the plurality of gas supply branch pipes 26 are arranged one-to-one with the multi-layer bearing area; the gas supply main pipe 25 is respectively connected to the plurality of gas supply branch pipes 26, and the gas supply branch pipes 26 are respectively connected to the flexible pipe 15, and are configured so that the purified gas in the gas source system flows to the flexible pipe 15 through the gas supply main pipe 25 and the gas supply branch pipe 26 in sequence; that is, the gas inlet end of the gas supply main pipe 25 serves as the gas inlet end of the gas supply pipeline; the gas outlet end of the gas supply main pipe 25 corresponds to the gas inlet end connected to the gas supply branch pipe 26; the gas outlet end of the gas supply main pipe 25 is arranged one-to-one with the gas supply branch pipe 26. The gas outlet end of the gas supply branch pipe 26 serves as the gas outlet end of the gas supply pipeline. As shown Figure 3 and Fig.12 As shown, the carrier plate 4, the purification pipeline assembly, the flexible tube 15 and the gas outlet end of the gas supply branch pipe 26 are arranged one by one.

[0080] In one embodiment, if Figure 5 As shown, a flow sensor 7 for detecting the flow rate of purified gas in each layer of the loading area is provided on the gas supply branch pipe 26. For example, the flow sensor 7 is provided at the air inlet end of the gas supply branch pipe 26. The flow sensor 7 can be a digital flow switch, which is used to monitor the size of the gas flow rate of the carrier plate 4 in each layer of the loading area.

[0081] In one embodiment, if Figure 5As shown, a joint for connecting to the gas source system is provided at the gas inlet end of the gas supply main pipe 25; the gas supply main pipe 25 is provided with a pressure regulating valve 21 for controlling the purified gas flowing out of the gas source system. The pressure regulating valve 21 can be a pressure reducing valve. The gas supply main pipe 25 is provided with a filter 9 for filtering the purified gas flowing out of the gas source; the gas supply branch pipes 26 are each provided with a switch valve 8 for controlling the flow of purified gas at the gas inlet end of the gas supply branch pipe 26, such as a ball valve.

[0082] In one embodiment, if Figure 5 As shown, the gas supply pipeline is detachably connected to the cabinet 1. For example, the gas supply pipeline can be fixed in the placement space of the cabinet 1 by buckles, so that the gas supply pipeline can be assembled first and then installed in the placement space of the cabinet 1.

[0083] The connector for docking with the gas source system is located outside the cabinet 1. The components of the gas supply pipeline, such as the pressure regulating valve 21, the filter 9, the stainless steel pipeline, the pipe joint, the switch valve 8, the flow sensor 7, etc., are arranged in the placement space on the back of the cabinet 1. The gas supply pipeline regulates the pressure and filters the purified gas provided by the gas source system, and then transmits it to each carrier 4 through the switch valve 8 and the flow sensor 7.

[0084] In one embodiment, if Fig.11 and Fig.12 As shown, the purification pipeline assembly includes a purification pipeline and a gas nozzle assembly for filling the photomask box with purification gas; the gas nozzle assembly runs through the carrier 4; the purification pipeline includes a purification main pipe 29 for connecting the flexible pipe 15 and a plurality of purification branches 30, and the purification branches 30 are arranged in a one-to-one correspondence with the storage positions; the purification main pipe 29 is respectively connected to the plurality of purification branches 30; the purification branches 30 are respectively connected to the gas nozzle assembly, and the purified gas at the flexible pipe 15 is configured to be filled into the photomask box through the purification main pipe 29, the purification branch pipe 30 and the gas nozzle assembly in sequence. The air inlet end of the purification main pipe 29 serves as the air inlet end of the purification pipeline; the air outlet end of the purification main pipe 29 corresponds to the air inlet end connected to the purification branch pipe 30; the air outlet end of the purification branch pipe 30 serves as the air outlet end of the purification pipeline. The air outlet end of the purification main pipe 29 is arranged in a one-to-one correspondence with the purification branch pipe 30. The purification branch pipe 30 is formed by connecting three pipes through a three-way pipe joint, wherein one pipe port serves as the air inlet end of the purification branch pipe 30 ; and the other two pipe ports serve as the air outlet ends of the purification branch pipe 30 .

[0085] The air nozzle assembly includes an integrated nozzle 13 and an air nozzle mounting seat 17. The air nozzle mounting seat 17 is fixed below the carrier plate 4. The air nozzle mounting seat 17 and the nozzle 13 penetrate the carrier plate 4 together, and the nozzle 13 is used to fill the reticle box with purified gas; each storage position is correspondingly provided with two nozzles 13; the nozzle 13 can be a silicone air nozzle. The upper surface of the nozzle 13 is connected to the charging nozzle of the reticle box. The air nozzle assembly is connected to the purification branch pipe 30 through the air pipe joint 20.

[0086] The pipelines of the air supply pipeline and the purification pipeline are connected by pipe joints, preferably stainless steel pipelines. The air supply pipeline and the purification pipeline constitute a clean air circuit system. Preferably, the nozzle 13 is made of silicone, and there are two nozzles 13. The positions of the two nozzles 13 can be selected according to different needs. Any setting position scheme that can meet the set requirements should be within the scope of protection of this application. Preferably, the connecting pipelines of the air supply pipeline and the purification pipeline are composed of PFA material and EP grade 316 stainless steel pipe.

[0087] In one embodiment, if Fig.12 As shown, a throttle valve 19 for controlling the flow of the purified gas at each storage position is provided on the purification branch pipe 30. The throttle valve 19 is also provided below the carrier plate 4. The flow rate adjustment function of the clean gas source entering the photomask box can be realized by controlling the throttle valve 19, so that the embodiment can adjust the flow rate of the required gas source according to the size of different photomask boxes to avoid energy waste.

[0088] When the cleaning gas path system is working, the purified gas of the gas source system passes through the joint of the gas supply main pipe 25, and in turn passes through the pressure regulating valve 21, the filter 9, the switch valve 8 or the manual switch, the digital flow switch, the purification main pipe 29, the throttle valve 19, and the air nozzle assembly, and is filled into the mask box. During the flow of gas, it is pressure-regulated, filtered and throttled, and is filled into the mask box according to the rated pressure and flow rate, and the humidity inside the mask box is reduced to the set value within a predetermined time, so as to achieve the purpose of improving the clean yield rate of the illumination box, preventing contamination of the mask sheet, maintaining the accuracy of the mask sheet, and extending the service life of the mask sheet.

[0089] In one embodiment, if Figure 2 and Figure 7 As shown, a linear guide 18 is provided between the carrier 4 and the cabinet 1, and the carrier 4 and the cabinet 1 are connected in a push-pull manner through the linear guide 18. When the carrier 4 is pushed and pulled between the first position and the second position, the carrier 4 slides and pushes with the cabinet 1 through the linear guide 18. For example, slide rails are provided on both sides of the carrier 4, and a slider groove for matching the slider with the slide rail is provided on the frame of the cabinet 1, so as to realize the push and pull of the carrier 4 relative to the cabinet 1. By using a drawer-type carrier 4 with a linear guide 18, more storage positions for cleaning photomask boxes can be provided on the carrier 4 along the width direction of the cabinet 1, so as to achieve the purpose of purifying up to 84 photomask boxes at the same time, thereby improving the overall working efficiency of the system. Moreover, the storage positions of each photomask box are independent individuals, and the internal gas flow rate can be adjusted separately through the throttle valve 19, so as to increase the adaptability range of the system, so as to achieve the purpose of cleaning multiple photomask boxes of different models in the same system. Each carrier plate 4 of the mask box is equipped with two linear guide rails 18 to ensure good balance, good bearing capacity and smooth opening and closing capabilities.

[0090] In one embodiment, if Fig. 9 and Fig.10 As shown, a drag chain 10 is also installed on the carrier 4, and the drag chain 10 moves synchronously when the carrier 4 moves along the width direction of the cabinet 1; a fixed plate 23 for placing the drag chain 10 is fixed in the cabinet 1, and the fixed plate 23 is located below the carrier 4; the flexible tube 15 runs through the drag chain 10, and the drag chain 10 is configured to follow the push-pull movement of the carrier 4 with the flexible tube 15 running through it, which can keep the purified gas in the flexible tube 15 flowing continuously on the one hand, and protect and guide the flexible tube 15 to follow the push-pull movement of the carrier 4 according to the minimum bending path on the other hand, wherein the minimum bending path can be achieved by adjusting the upper and lower distances between the fixed plate 23 and the carrier 4. A limit plate 36 is provided on the fixed plate 23 to limit the two sides of the drag chain 10. For example, the drag chain 10 can be set in a U-shaped bend. For another example, one end of the drag chain 10 can be set on the carrier 4, and the other end of the drag chain 10 is fixedly connected or slidably connected to the fixed plate 23; when the drag chain 10 is slidably connected to the fixed plate 23, the push-pull direction of the carrier 4 is set opposite to the sliding direction of the other end of the drag chain 10. The carrier 4 is also provided with a perforation for facilitating the flexible tube 15 to move between the purification pipeline assembly and one end of the drag chain 10. The air outlet end of the flexible tube 15 is on the same side as the end of the drag chain 10 installed on the carrier 4, and the air inlet end of the flexible tube 15 is on the same side as the other end of the drag chain 10 located on the fixed plate 23. Therefore, the flexible tube 15 runs through the drag chain 10 in such a way that the air outlet end of the flexible tube 15 is first connected to the air inlet end of the purification pipeline assembly, and the air inlet end of the flexible tube 15 first enters the drag chain 10 from the end of the drag chain 10 installed on the carrier 4, and comes out from the other end of the drag chain 10 located on the fixed plate 23, and then the air inlet end of the flexible tube 15 is connected to the air outlet end of the air supply pipeline. Likewise, the air inlet end of the flexible tube 15 can be connected to the air outlet end of the air supply pipeline first. A dust-free drag chain 10 is arranged on the inner side of the carrier 4. The connection cables of the purification pipeline and the micro switch under the carrier 4 are connected to the electrical control system through the drag chain 10, thereby realizing various capabilities of the equipment. In addition, each carrier 4 is an independent unit component. During assembly and maintenance, parts can be exchanged more quickly, which greatly improves the convenience of equipment assembly and maintenance.

[0091] In one embodiment, if Figure 7 and Figure 8As shown, a seating sensor 12 for detecting whether a mask box is placed is provided on the storage position. The seating sensor 12 may be a micro switch. The micro switch is fixed at a specific position below the mask box, that is, the micro switch is fixed at a specific position of the carrier 4, and the upper surface of the micro switch can abut against the lower surface of the mask box. After the mask box is seated, the micro switch probe is compressed, that is, it can be detected that the placement of the mask box is completed. Setting the micro switch can determine whether the mask box is placed on the carrier 4 by triggering the micro switch. When the mask box is placed on the carrier 4, its lower surface will press the button of the micro switch, thereby triggering the micro switch, causing it to send a corresponding sensing signal to the control component to perform subsequent inflation tasks.

[0092] A PCB sub-board connected to the micro switch is also provided below the carrier 4, and the micro switch and the PCB sub-board are provided in a one-to-one correspondence. Figure 5 As shown, the placement space of the cabinet 1 is provided with a plurality of PCB motherboards 6 for connecting the PCB daughter boards on the carrier 4 , and a plurality of PCB daughter boards on a layer of the bearing area correspond to one PCB motherboard 6 .

[0093] In one embodiment, if Figure 7 As shown, the storage positions are respectively provided with anti-fool pins 11 for preventing the mask box from being placed in the reverse direction. The anti-fool pins 11 are plugged into the holes of the mask box. The anti-fool pins 11 for preventing reverse placement are made of metal material. By being inserted into the holes below the mask box, it is identified whether the placement direction of the mask box is correct. If the placement direction is incorrect, that is, when the mask box is placed in the wrong direction, the mask box cannot be placed on the corner block, and the bottom plate of the mask box is lifted up, and the micro switch cannot be triggered, and the device alarm prompts.

[0094] In one embodiment, if Figure 7 and Figure 8 As shown, the storage positions are respectively provided with a plurality of dust removal holes 24. The plurality of dust removal holes 24 are arranged in an array on the storage positions.

[0095] In one embodiment, if Figure 7 and Figure 8 As shown, a plurality of positioning members 14 for positioning the mask box are arranged on the storage position. The positioning members 14 may be corner blocks, which correspond to the four corners of the mask box, and are distributed in a rectangular shape on the storage position as the mask box positioning parts. For example, each storage position of the mask box is provided with a micro switch, an anti-stuck pin 11 to prevent reverse placement, four corner blocks for positioning the mask box, and two silicone air nozzles for inflating the mask box.

[0096] In one embodiment, if Figure 2 and Figure 7 As shown, the carrier plate 4 is provided with a push-pull handle 32 for easy pushing and pulling.

[0097] In one embodiment, if Figure 2 and Fig.16 As shown, an information identifier 5 for identifying the ID information of the mask box is arranged in the carrier 4; or, an independent carrier is arranged outside the cabinet 1, and the independent carrier can be fixedly connected to the side of the cabinet 1 or connected to the side of the cabinet 1 through a multi-axis robotic arm, and an information identifier 5 for identifying the ID information of the mask box is arranged in the independent carrier; a display screen 2 is embedded in the outer surface of the cabinet 1, and the display information of the display screen 2 includes information such as the ID information of the mask box, the storage status of the mask box, the number of mask boxes stored in the cabinet 1, and the storage distribution of the mask boxes in the cabinet 1.

[0098] like Figure 2 As shown, for example, the information identifier 5 is arranged on an independent carrier outside the cabinet 1, and there is a keyboard seat 28 below the independent carrier, and the keyboard and mouse can be placed on the keyboard seat 28. The independent carrier is also provided with four corner blocks for positioning the mask box. By placing the mask box on the independent carrier, the information identifier 5 can transmit the ID information of the mask box to the display screen 2 for display. The mask box is first placed on the independent carrier, and the mask box information is read by the information identifier 5, and then the mask box is placed on the carrier 4 after reading. The placement position information of the mask box will be displayed on the display screen 2. For example, an independent carrier is fixed on the outside of the cabinet 1, and the ID information of the mask box is identified by the information identifier 5. The display screen 2 is arranged above the cabinet 1. Before the mask box is stored in the storage position in the cabinet 1, 84 storage positions are preferably arranged in the cabinet 1. It is necessary to first read the ID information of the mask box through the information identifier 5. After the information is read successfully, a prompt will be displayed on the display screen 2 on the upper right front of the cabinet 1. After the prompt that the ID is read successfully, the mask box can be stored in any storage position of the cabinet 1. When the mask box is taken out, there is no need to read the ID information of the mask box.

[0099] In one embodiment, if Fig.13 and Fig.16 As shown, the information identifier 5 is set in the storage position of the carrier 4, and the information identifier 5 is set in a one-to-one correspondence with the storage position. When the mask box is placed in the storage position, the information identifier 5 directly reads the placement information of the mask box, and the placement position information of the mask box is transmitted to the display screen 2 for display. Fig.14 and Fig.15 As shown, the front view and top view of the mask box purification device when the information identifier 5 is embedded in the carrier 4 are shown. Fig.17 , Fig.18 and Fig.19 As shown, a bottom view, a front view and a right view of the carrier 4 containing the information identifier 5 are shown. Fig. 20 As shown, a carrier plate 4 having both an information identifier 5 and a dust removal hole 24 is shown. In some embodiments, the carrier plate 4 may not be provided with a dust removal hole 24.

[0100] In one embodiment, if Figure 1As shown, an electrical box for storing an industrial computer, a power module and a signal light control board is also provided in the cabinet 1. The electrical box is located at the upper part of the cabinet 1, and the carrying area for placing the carrier 4 is located at the lower part of the cabinet 1. The display screen 2 can be located outside the electrical box. An emergency stop button 27 and an alarm light 3 are also provided outside the electrical box. A main switch 35 for controlling the power supply is also provided on the outside of the cabinet 1. That is, electrical components such as the industrial computer, the power module, and the signal light control board are located above the area where the carrier 4 is placed, which is also the rear space of the display screen 2.

[0101] In one embodiment, a detection sensor is provided in the cabinet 1 to detect whether the carrier plate 4 is pushed back into place; Fig.12 As shown, the carrier plate 4 is provided with a trigger sensing element 16 for contact detection with a detection sensor (not shown), such as a contact head, a stylus, a contact point, a contact sheet, a sensing sheet, etc. The detection sensor and the carrier plate 4 are provided one by one.

[0102] After the placement and taking is completed, the carrier 4 is completely retracted into the cabinet 1. For example, after the carrier 4 is pulled out and the mask box is placed in the corresponding position of the carrier 4, the carrier 4 is pushed back to completely enter the cabinet 1. For example, after the carrier 4 is pulled out and the mask box is removed from the carrier 4, the carrier 4 is pushed back to completely enter the cabinet 1. At this time, the detection sensor at the recovery position of the carrier 4 contacts the trigger sensing element 16, and the detection sensor sends a closing signal to the controller in the electrical box. After analyzing the closing signal, the controller determines that the current carrier 4 is pushed back into place, that is, the recovery is successful. In addition, the controller in the electrical box can set and control the number of carriers 4 pulled out at the same time. When it is detected that the number of carriers 4 pulled out reaches the set value, the remaining carriers 4 in the cabinet 1 are locked to prevent the cabinet 1 from tilting. In one embodiment, Figure 1 As shown, a cooling fan is arranged inside the electrical box, and a vent 33 is arranged outside the electrical box.

[0103] In one embodiment, if Figure 1 As shown, the cabinet 1 is provided with a plurality of rollers 34 for easy movement at the bottom, and the rollers 34 are preferably casters or universal wheels. For example, when the cabinet 1 has universal wheels at the bottom, it only plays a role of movement. When the cabinet 1 has casters at the bottom, the wheels of the casters work when moving, and the supporting feet of the casters work when fixed at a specified position.

[0104] In one embodiment, if Figure 1As shown, the cabinet 1 is provided with a shockproof component 22 for fixing and supporting the cabinet 1. The shockproof component 22 is L-shaped and is respectively arranged on both sides of the cabinet 1. The side panel of the shockproof component 22 contacting the cabinet 1 is provided with a waist-shaped hole. The waist-shaped hole on the side panel is penetrated by bolts and other fixing parts, and the shockproof component 22 can be fixedly connected with the cabinet 1. At the same time, due to the waist-shaped hole on the side panel, the shockproof component 22 moves up and down relative to the cabinet 1. The bottom plate of the shockproof component 22 is also provided with a waist-shaped hole. The waist-shaped hole on the bottom plate is penetrated by bolts and other fixing parts, and the shockproof component 22 can be fixedly connected with the ground such as an elevated floor. Reinforcing ribs are arranged between the side plate and the bottom plate of the shockproof component 22. When the cabinet 1 needs to be moved, the bolts and other fixing parts on the side plate are disassembled, and the shockproof component 22 is loosened or removed. When the cabinet 1 is moved to the specified position, the fixing parts on the bottom plate are fixed to the specified position of the elevated floor, and then the fixing parts on the side plate are fixed to the cabinet 1 to prevent the cabinet 1 from moving or tipping over when it is vibrated.

[0105] The embodiment of the present specification also provides a purification and inflation system, comprising the mask box purification device and the gas source system described in any of the above embodiments. The gas supply pipeline is connected to the gas source system through a joint, and is configured so that the purified gas in the gas source system is sequentially filled into the mask box through the gas supply pipeline, the flexible tube 15 and the purification pipeline assembly.

[0106] According to the present application, after the carrier 4 is pulled out of the cabinet 1 through the push-pull opening, the mask box is placed on the storage position of the carrier 4, and then the carrier 4 is pushed into the cabinet 1, and the purified gas flows out through the gas source system, and then the purified gas flows out through the gas supply pipeline, the flexible tube 15 and the purification pipeline assembly to fill the mask box in turn. At the same time, the mask box can be easily removed from the carrier 4 by pushing and pulling the cabinet 1 and the carrier 4, without having to reach into the cabinet 1 to take and place the mask box, which is convenient for taking and placing the mask box. In addition, the purification pipeline assembly is connected to the gas supply pipeline through the flexible tube 15, so that the purification pipeline assembly and the gas supply pipeline are always connected during the pushing and pulling process, so as to continuously inflate the mask box.

[0107] The present application is applicable to a photomask box purification device in the semiconductor field. The present application overcomes the problem of poor environment of the existing photomask box, prevents the contamination of the photomask sheet, maintains the accuracy of the photomask sheet, and prolongs the service life of the photomask sheet. The present application uses a drawer-type carrier 4, and then the storage position can be set in multiple groups in the width direction of the cabinet 1. On the basis of not increasing the height of the carrier 4, and ensuring the convenience of taking and placing the photomask box, the storage capacity of the photomask box is increased, and the connection between the air supply pipeline and the purification pipeline is ensured by the form of a drag chain 10. By setting a dedicated photomask box ID reading storage position, the number of information identifiers 5 used is reduced (such as 84 becomes 1), and an anti-stuck pin 11 is set on the carrier 4 to prevent reverse placement. The photomask box is filled with purified gas through the photomask box purification device, and the humidity inside the photomask box body can be reduced in a short time (such as to below 10%, and finally the humidity can be reduced to below 1%), thereby improving the clean yield of the illumination box, preventing the contamination of the photomask sheet, maintaining the accuracy of the photomask sheet, and prolonging the service life of the photomask sheet.

[0108] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the partial description of the previous embodiments.

[0109] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A mask box purification device, used for storing and cleaning mask sheets in semiconductor manufacturing process, characterized in that: include: Cabinet; A plurality of carriers are arranged in the cabinet, each of the carriers having at least one storage position for placing a mask box; A gas supply pipeline for connecting to a gas source system; A purification pipeline assembly disposed on the carrier plate for charging the reticle box with purified gas; Each of the carriers is configured to be pushed and pulled between a first position and a second position along the width direction of the cabinet; the first position is located in the cabinet, and is configured so that the carrier is located in the cabinet when it is in the first position; the second position is partially or completely located outside the cabinet, and is configured so that the carrier is partially or completely located outside the cabinet when it is in the second position; A flexible tube is connected between each of the purification pipeline components and the air supply pipeline, and the flexible tube is configured to maintain communication between the purification pipeline components on each of the carriers and the air supply pipeline when each of the carriers is in a moving state and a stationary state.

2. The reticle box cleaning device according to claim 1, characterized in that: A linear guide rail is provided between the carrier and the cabinet. When the carrier moves between the first position and the second position, the carrier slides and pushes with the cabinet through the linear guide rail.

3. The reticle box cleaning device according to claim 1, characterized in that: The cabinet comprises at least one layer of a carrying area, and each layer of the carrying area is provided with at least one carrying tray; There are multiple storage locations on each of the carriers, and the storage locations are arranged in multiple groups along the width direction of the cabinet, and the number of storage locations in each group of storage locations is at least one in the length direction of the cabinet.

4. The reticle box cleaning device according to claim 1, characterized in that: The cabinet is provided with a detection sensor for detecting whether the carrier plate is pushed back into place; The carrier plate is provided with a trigger sensing element which cooperates with the detection sensor to realize contact detection.

5. The reticle box cleaning device according to claim 1, characterized in that: A drag chain is also installed on the carrier, and the flexible tube runs through the drag chain. A fixing plate for placing the drag chain is fixed in the cabinet, and the fixing plate is located below the carrier. The drag chain running through the flexible tube is configured to move synchronously with the carrier when it moves along the width direction of the cabinet.

6. The reticle box cleaning device according to claim 1, characterized in that: The storage position is provided with an anti-stuck pin for preventing the mask box from being placed upside down; The storage position is provided with a plurality of positioning members for limiting the position of the photomask box; The storage position is provided with a seating sensor for detecting whether the mask box is placed; A plurality of dust removal holes are provided on the storage position.

7. The reticle box cleaning device according to claim 1, characterized in that: The carrier is provided with an information identifier for identifying the ID information of the mask box; or, an independent carrier is provided on the side of the cabinet, and the independent carrier is provided with an information identifier for identifying the ID information of the mask box; A display screen is embedded on the outer surface of the cabinet, and the display information configured on the display screen includes the ID information of the mask box, the storage status of the mask box, the number of mask boxes stored in the cabinet, and the storage distribution of the mask boxes in the cabinet.

8. The reticle box cleaning device according to claim 1, characterized in that: The gas supply pipeline is detachably connected to the cabinet; The gas supply pipeline includes a gas supply main pipe and a plurality of gas supply branches for connecting to the gas source system, and the plurality of gas supply branches are arranged one by one in correspondence with the multi-layer bearing area, the gas supply main pipe is respectively connected to the plurality of gas supply branches, and the gas supply branches are respectively connected to the flexible pipes, and are configured so that the purified gas in the gas source system flows to the flexible pipe through the gas supply main pipe and the gas supply branch pipe in sequence; The gas supply branch pipes are provided with flow sensors for detecting the flow of purified gas in each load-bearing area; The gas supply main pipe is provided with a connector for connecting to the gas source system; The gas supply main is provided with a pressure regulating valve for controlling the purified gas flowing out from the gas source system; The gas supply main pipe is provided with a filter for filtering the purified gas flowing out from the gas source; The gas supply branches are all provided with switch valves for controlling the flow of purified gas in each layer of the load-bearing area.

9. The reticle box cleaning device according to claim 1, characterized in that: The purification pipeline assembly includes a purification pipeline and a gas nozzle assembly for filling the reticle box with purification gas; the gas nozzle assembly passes through the carrier plate; The purification pipeline includes a purification main pipe and a plurality of purification branches for connecting the flexible pipe, and the purification branches are arranged in a one-to-one correspondence with the storage positions; the purification main pipe is respectively connected to the plurality of purification branches; the purification branches are respectively connected to the gas nozzle assembly, and the purification gas at the flexible pipe is configured to be filled into the photomask box through the purification main pipe, the purification branch pipe and the gas nozzle assembly in sequence; The purification branch pipe is provided with a throttle valve for controlling the flow of purified gas at the corresponding storage position.

10. A purification and inflation system, characterized in that: A photomask box purification device and an air source system comprising any one of claims 1 to 9; The gas supply pipeline is connected to the gas source system through a joint, and is configured so that the purified gas in the gas source system is filled into the photomask box through the gas supply pipeline, the flexible pipe and the purification pipeline assembly in sequence.

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