Elastic pressing mechanism for ion source device

Abstract

The utility model provides an elastic pressing and fixing mechanism for an ion source device. The elastic pressing and fixing mechanism comprises a supporting and assembling component, a matching and sealing component, a bearing and positioning component, a containing and covering component, an elastic stretching component, a switching and extending component and a pressing and positioning component, and the supporting and assembling component, the bearing and positioning component, the containing and covering component and the like of the pressing and fixing mechanism. A precise assembling and positioning environment is jointly provided for the arcing cavity, so that performance fluctuation caused by position deviation or instability is reduced, due to the design of the containing cover protection assembly and the elastic stretching assembly, the elastic stretching assembly is effectively shielded and protected when stretching action is conducted, interference with external equipment is avoided, and the service life of the arcing cavity is prolonged. The press-fit positioning assembly is connected with the arcing cavity through the elastic stretching assembly and the switching extension assembly, the arcing cavity is subjected to press-fit positioning through the elastic force of a stretching spring, the arcing cavity can be properly buffered and adjusted when subjected to pressure, and therefore stress concentration and unstable factors generated by rigid connection are reduced.

Description

Technical Field

[0001] The utility model relates to ion implantation equipment, in particular to an elastic pressing mechanism for an ion source device. Background Art

[0002] Patent document CN219575557U discloses an ion source device for an ion implanter, which is suitable for the ion source of the ion implanter. The ion source of the ion implanter includes a filament assembly, a cathode assembly, a semi-cylindrical arc-starting chamber assembly, a process gas inlet assembly, and a reflector assembly. The semi-cylindrical arc-starting chamber assembly adopts a semi-cylindrical chamber design, and the reflector assembly adopts a suspended reflector design. The arc-starting chamber structure is a semi-cylindrical arc-starting chamber, which simplifies the assembly and maintenance process of the ion source, can effectively extend the service life of the ion source, and improve the production capacity of the ion implanter. However, the pressing mechanism of this ion source device adopts a lateral stretching structure, which is easy to generate an outward pulling force on the outer wall of the ion source device, affecting the structural stability of the ion source device, and its position is fixed, it is difficult to adjust the position, and it is easy to interfere with the cleaning operation process of the arc-starting chamber. Therefore, it is necessary to optimize the structure of this pressing mechanism to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide an elastic pressing mechanism for an ion source device to improve the structural stability thereof and facilitate cleaning operations.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] An elastic pressing mechanism for an ion source device, comprising:

[0006] A support assembly component is installed in a frame of an ion implanter by using a connecting piece, and has an assembly space inside, and an arc starting chamber of an ion source device can be installed in the support assembly component;

[0007] A matching sealing component is installed in the supporting assembly component and cooperates with the frame to seal the matching portion between the supporting assembly component and the frame;

[0008] A load-bearing positioning component, which is installed in the supporting assembly component through a connecting piece and has a positioning space inside;

[0009] An accommodating cover guard assembly is installed in the bearing and positioning assembly through a deflection structure, can be deflected in the bearing and positioning assembly, and has an accommodating space inside;

[0010] An elastic stretching component, which is installed in the containment cover protection component through a deflection structure, can perform a stretching action in the containment cover protection component, and the containment cover protection component shields and protects the elastic stretching component to prevent the elastic stretching component from interfering with external equipment when performing the stretching action;

[0011] A transfer extension component, which is installed in the elastic stretching component through a deflection structure, and can perform a stretching operation on the elastic stretching component through the transfer extension component;

[0012] A pressing and positioning component is installed in the transfer extension component and cooperates with the arc starting chamber of the ion source device to press and position the arc starting chamber.

[0013] Specifically, the support assembly includes:

[0014] The supporting seat plate is made of a circular plate and is adapted to the shape of the matching part of the frame, and its edge is connected to the frame by connecting bolts;

[0015] The assembly core column is made of a cylindrical column, which is formed on the inner wall of the support base plate and protrudes toward the inner side of the support base plate. The arc starting cavity can be installed on the inner end of the assembly core column.

[0016] In one embodiment of the utility model, an assembly plane is provided on the outer wall of the assembly core column, and the power supply structure of the arc starting cavity can be installed on the assembly plane.

[0017] The mating seal assembly includes:

[0018] A sealing ring is located on the inner side of the supporting seat plate. An embedded ring groove is provided on the inner wall of the supporting seat plate. The embedded ring groove extends along the circumference of the supporting seat plate and is recessed axially toward the inside of the supporting seat plate. The sealing ring is embedded in the embedded ring groove and protrudes toward the outside of the supporting seat plate, so as to seal the mating portion between the supporting seat plate and the frame.

[0019] The load-bearing positioning components include:

[0020] A bearing seat body, which is provided with a group, each bearing seat body is respectively installed on the inner wall of the supporting seat plate by connecting bolts, and is arranged in sequence along the circumference of the supporting seat plate;

[0021] A positioning pull ring is provided in a group, each positioning pull ring is formed on the bearing seat body and protrudes to the outside of the bearing seat body.

[0022] The containment cover assembly includes:

[0023] A cover casing shell is provided with a group of accommodating casing shells, each accommodating casing shell corresponds to the position of the bearing seat body, and is made of a cylindrical pipe fitting, with an inner end open and an outer end closed, forming an accommodating space inside the accommodating casing shell. The outer end of the cover casing shell is engaged with a positioning pull ring and can be deflected on the positioning pull ring.

[0024] The elastic stretch components include:

[0025] A stretching spring, wherein a group of the stretching springs are provided, each of which is located in the cover casing shell, and its axis coincides with the axis of the cover casing shell, and can perform a stretching action in the cover casing shell;

[0026] A stretching end plate is provided with a group of stretching end plates, each stretching end plate is respectively located in the cover casing shell, one end of the stretching spring is engaged with the outer end of the cover casing shell, and the other end is engaged with the stretching end plate, which can move with the stretching action of the stretching spring, and each stretching end plate has a pair of guide flanges on the edge, each guide flange protrudes outward along the radial direction of the stretching end plate, and each cover casing shell side wall is respectively provided with a pair of guide grooves adapted to the shape of the guide flanges, and the guide grooves extend along the axial direction of the cover casing shell, and the guide flanges extend into the guide grooves, which can guide the movement process of the stretching end plates.

[0027] The adapter extension kit includes:

[0028] A transfer rod is provided in a group, and the outer ends of each transfer rod extend into the interior of the cover casing shell respectively, and are connected to the stretching end plate through a deflection structure. The outer ends are exposed to the outside of the cover casing shell, extend to the arc starting cavity, and bend toward the inside of the arc starting cavity.

[0029] The press-fit positioning assembly includes:

[0030] A group of press-fit end columns are provided, each of which is respectively connected to the outer end of the transfer pull rod, and its shape is adapted to the positioning recess in the arc starting cavity. The press-fit end column extends into the positioning recess, and the arc starting cavity is pressed and positioned by the elastic force of the tension spring.

[0031] In one embodiment of the utility model, a positioning opening is provided inside the pressed-fit end column, and the pressed-fit end column and the arc starting chamber can be fixedly connected by a locking bolt adapted thereto.

[0032] The advantages of the utility model are:

[0033] The supporting assembly component, bearing positioning component and accommodating cover protection component of the pressing mechanism together provide a precise assembly and positioning environment for the arc starting cavity. The assembly core column, positioning pull ring and other structures ensure the accurate position of the arc starting cavity in the mechanism, thereby reducing the performance fluctuation caused by position offset or instability. The design of the accommodating cover protection component and the elastic stretching component enables the elastic stretching component to be effectively shielded when performing the stretching action, avoiding interference with external equipment, thereby improving the overall stability of the mechanism. The pressing and positioning component is connected to the arc starting cavity through the elastic stretching component and the transfer extension component. Cavity connection, using the elastic force of the tension spring to press and position the arc starting cavity, the force direction is not easy to deviate, so that the arc starting cavity can be properly buffered and adjusted when under pressure, thereby reducing the stress concentration and instability factors caused by the rigid connection; when cleaning the arc starting cavity, the cover casing shell can also be deflected outward to make the transfer rod and the pressing end column away from the arc starting cavity to avoid interference with the cleaning process. The design of the entire mechanism takes into account the structural strength and stability, and through reasonable structural layout and connection method, the mechanism can maintain good stability and reliability when subjected to external force or vibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a structural schematic diagram of the elastic pressing mechanism for the ion source device proposed by the utility model;

[0035] Figure 2 It is a schematic diagram of the cross-sectional structure of the elastic top pressing mechanism. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0037] like Figure 1 , Figure 2As shown, the elastic pressing mechanism for the ion source device proposed by the utility model includes a supporting assembly component, a matching sealing component, a bearing positioning component, a accommodating shield component, an elastic stretching component, a transition extension component and a pressing positioning component. The supporting assembly component is installed in the frame of the ion implanter by a connecting piece, and has an assembly space inside. The arc starting chamber of the ion source device can be installed in the supporting assembly component, the matching sealing component is installed in the supporting assembly component and cooperates with the frame to seal the matching part of the supporting assembly component and the frame, and the bearing positioning component is installed in the supporting assembly component by a connecting piece, and has a positioning space inside. The accommodating shield component The component is installed in the load-bearing positioning component through the deflection structure, and can be deflected in the load-bearing positioning component, which has a containing space inside. The elastic stretching component is installed in the containing cover protection component through the deflection structure, and can perform a stretching action in the containing cover protection component. The containing cover protection component shields the elastic stretching component to avoid interference with external equipment when the elastic stretching component performs a stretching action. The transfer extension component is installed in the elastic stretching component through the deflection structure, and the elastic stretching component can be stretched through the transfer extension component. The pressing and positioning component is installed in the transfer extension component and cooperates with the arc starting chamber of the ion source device to press and position the arc starting chamber.

[0038] In Example 1, the supporting assembly component includes a supporting base plate 110 and an assembly core column 120. The supporting base plate is made of a circular plate and is adapted to the shape of the mating part of the frame. Its edge is connected to the frame by connecting bolts. The assembly core column is made of a cylindrical column, which is formed on the inner wall of the supporting base plate and protrudes toward the inner side of the supporting base plate. The arc starting cavity can be installed at the inner end of the assembly core column.

[0039] In this embodiment, an assembly carrier plate is provided at the inner end of the assembly core column, and the arc starting cavity is installed on the assembly carrier plate.

[0040] The matching sealing assembly includes a sealing ring 200, which is located on the inner side of the supporting seat plate. An embedded ring groove is provided on the inner wall of the supporting seat plate. The embedded ring groove extends along the circumference of the supporting seat plate and is recessed axially toward the inside of the supporting seat plate. The sealing ring is embedded in the embedded ring groove and protrudes toward the outside of the supporting seat plate, so as to seal the matching portion between the supporting seat plate and the frame.

[0041] The bearing and positioning assembly includes a bearing seat body 310 and a positioning pull ring 320. The bearing seat body is provided with a group, and each bearing seat body is installed on the inner wall of the supporting seat plate through connecting bolts and arranged sequentially along the circumference of the supporting seat plate. The positioning pull ring is provided with a group, and each positioning pull ring is formed on the bearing seat body and protrudes to the outside of the bearing seat body.

[0042] The accommodating cover shield assembly includes a cover shield shell 400, and a group of cover shield shells are provided. Each accommodating shell corresponds to the position of the bearing seat body. It is made of a cylindrical pipe and has an open inner end and a closed outer end. A accommodating space is formed inside the accommodating shell. The outer end of the cover shield shell is engaged with a positioning pull ring and can be deflected on the positioning pull ring.

[0043] The elastic stretching component includes a stretching spring 510 and a stretching end plate 520. A group of stretching springs are provided, and each stretching spring is respectively located in the cover casing shell. The axis of the stretching spring coincides with the axis of the cover casing shell, and the stretching action can be performed in the cover casing shell. A group of stretching end plates are provided, and each stretching end plate is respectively located in the cover casing shell. One end of the stretching spring is engaged with the outer end of the cover casing shell, and the other end is engaged with the stretching end plate, and can move with the stretching action of the stretching spring. A pair of guide flanges 521 are respectively provided on the edge of each stretching end plate, and each guide flange protrudes outward along the radial direction of the stretching end plate. A pair of guide grooves 410 adapted to the shape of the guide flanges are respectively opened on the side walls of each cover casing shell, and the guide grooves extend along the axial direction of the cover casing shell. The guide flanges extend into the guide grooves, and the movement process of the stretching end plates can be guided.

[0044] The transfer extension assembly includes a transfer rod 600, and a group of transfer rods are provided. The outer ends of the transfer rods extend into the interior of the cover casing shell and are connected to the stretching end plate through a deflection structure. The outer ends are exposed to the outside of the cover casing shell, extend to the arc starting cavity, and bend toward the inside of the arc starting cavity.

[0045] The pressing and positioning assembly includes a pressing and positioning end column 700, which is provided with a group. Each pressing and positioning end column is respectively connected to the outer end of the transfer pull rod, and its shape is adapted to the positioning recess in the arc starting cavity. The pressing and positioning end column extends into the positioning recess, and the arc starting cavity is pressed and positioned by the elastic force of the tension spring.

[0046] In Example 2, the supporting assembly component includes a supporting seat plate 110 and an assembly core column 120. The supporting seat plate is made of a circular plate and is adapted to the shape of the mating part of the frame. Its edge is connected to the frame by connecting bolts. The assembly core column is made of a cylindrical column, which is formed on the inner wall of the supporting seat plate and protrudes toward the inner side of the supporting seat plate. The arc starting cavity can be installed at the inner end of the assembly core column.

[0047] In this embodiment, an assembly plane 121 is provided on the outer wall of the assembly core column, and the power inlet structure of the arc starting chamber can be installed on the assembly plane.

[0048] The matching sealing assembly includes a sealing ring 200, which is located on the inner side of the supporting seat plate. An embedded ring groove is provided on the inner wall of the supporting seat plate. The embedded ring groove extends along the circumference of the supporting seat plate and is recessed axially toward the inside of the supporting seat plate. The sealing ring is embedded in the embedded ring groove and protrudes toward the outside of the supporting seat plate, so as to seal the matching portion between the supporting seat plate and the frame.

[0049] The bearing and positioning assembly includes a bearing seat body 310 and a positioning pull ring 320. The bearing seat body is provided with a group, and each bearing seat body is installed on the inner wall of the supporting seat plate through connecting bolts and arranged sequentially along the circumference of the supporting seat plate. The positioning pull ring is provided with a group, and each positioning pull ring is formed on the bearing seat body and protrudes to the outside of the bearing seat body.

[0050] The accommodating cover shield assembly includes a cover shield shell 400, and a group of cover shield shells are provided. Each accommodating shell corresponds to the position of the bearing seat body. It is made of a cylindrical pipe and has an open inner end and a closed outer end. A accommodating space is formed inside the accommodating shell. The outer end of the cover shield shell is engaged with a positioning pull ring and can be deflected on the positioning pull ring.

[0051] The elastic stretching component includes a stretching spring 510 and a stretching end plate 520. A group of stretching springs are provided, and each stretching spring is respectively located in the cover casing shell. The axis of the stretching spring coincides with the axis of the cover casing shell, and the stretching action can be performed in the cover casing shell. A group of stretching end plates are provided, and each stretching end plate is respectively located in the cover casing shell. One end of the stretching spring is engaged with the outer end of the cover casing shell, and the other end is engaged with the stretching end plate, and can move with the stretching action of the stretching spring. A pair of guide flanges 521 are respectively provided on the edge of each stretching end plate, and each guide flange protrudes outward along the radial direction of the stretching end plate. A pair of guide grooves 410 adapted to the shape of the guide flanges are respectively opened on the side walls of each cover casing shell, and the guide grooves extend along the axial direction of the cover casing shell. The guide flanges extend into the guide grooves, and the movement process of the stretching end plates can be guided.

[0052] The transfer extension assembly includes a transfer rod 600, and a group of transfer rods are provided. The outer ends of the transfer rods extend into the interior of the cover casing shell and are connected to the stretching end plate through a deflection structure. The outer ends are exposed to the outside of the cover casing shell, extend to the arc starting cavity, and bend toward the inside of the arc starting cavity.

[0053] The pressing and positioning assembly includes a pressing and positioning end column 700, which is provided with a group. Each pressing and positioning end column is respectively connected to the outer end of the transfer pull rod, and its shape is adapted to the positioning recess in the arc starting cavity. The pressing and positioning end column extends into the positioning recess, and the arc starting cavity is pressed and positioned by the elastic force of the tension spring.

[0054] In this embodiment, a positioning opening is opened inside the pressed-fit end column, and the pressed-fit end column and the arc starting chamber can be fixedly connected by a locking bolt adapted thereto.

[0055] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. An elastic pressing mechanism for an ion source device, characterized in that: include: A support assembly component is installed in a frame of an ion implanter by using a connecting piece, and has an assembly space inside, and an arc starting chamber of an ion source device can be installed in the support assembly component; A matching sealing component is installed in the supporting assembly component and cooperates with the frame to seal the matching portion between the supporting assembly component and the frame; A load-bearing positioning component, which is installed in the supporting assembly component through a connecting piece and has a positioning space inside; An accommodating cover guard assembly is installed in the bearing and positioning assembly through a deflection structure, can be deflected in the bearing and positioning assembly, and has an accommodating space inside; An elastic stretching component, which is installed in the containment cover protection component through a deflection structure, can perform a stretching action in the containment cover protection component, and the containment cover protection component shields and protects the elastic stretching component to prevent the elastic stretching component from interfering with external equipment when performing the stretching action; A transfer extension component, which is installed in the elastic stretching component through a deflection structure, and can perform a stretching operation on the elastic stretching component through the transfer extension component; A pressing and positioning component is installed in the transfer extension component and cooperates with the arc starting chamber of the ion source device to press and position the arc starting chamber.

2. The elastic pressing mechanism for an ion source device according to claim 1, characterized in that: The support assembly includes: The supporting seat plate is made of a circular plate and is adapted to the shape of the matching part of the frame, and its edge is connected to the frame by connecting bolts; The assembly core column is made of a cylindrical column, which is formed on the inner wall of the support seat plate and protrudes toward the inner side of the support seat plate.

3. The elastic pressing mechanism for an ion source device according to claim 2, characterized in that: The mating seal assembly includes: A sealing ring is located on the inner side of the support seat plate. An embedded ring groove is provided on the inner wall of the support seat plate. The embedded ring groove extends along the circumference of the support seat plate and is recessed axially toward the inside of the support seat plate. The sealing ring is embedded in the embedded ring groove and protrudes toward the outside of the support seat plate.

4. The elastic pressing mechanism for an ion source device according to claim 2, characterized in that: The load-bearing positioning components include: A bearing seat body, which is provided with a group, each bearing seat body is respectively installed on the inner wall of the supporting seat plate by connecting bolts, and is arranged in sequence along the circumference of the supporting seat plate; A positioning pull ring is provided in a group, each positioning pull ring is formed on the bearing seat body and protrudes to the outside of the bearing seat body.

5. The elastic pressing mechanism for an ion source device according to claim 4, characterized in that: The containment cover assembly includes: A cover casing shell is provided with a group, each containing casing shell corresponds to the position of the bearing seat body, and is made of a cylindrical pipe fitting, with an inner end open and an outer end closed to form a containing space inside the containing casing shell, and the outer end of the cover casing shell is engaged with a positioning pull ring.

6. The elastic pressing mechanism for an ion source device according to claim 5, characterized in that: The elastic stretch components include: A tension spring, wherein the tension spring is provided in a group, each tension spring is located in the cover casing shell, and its axis coincides with the axis of the cover casing shell; A stretching end plate is provided with a group of stretching end plates, each stretching end plate is respectively located in the cover casing shell, one end of the stretching spring is engaged with the outer end of the cover casing shell, and the other end is engaged with the stretching end plate, which can move together with the stretching action of the stretching spring, and each stretching end plate edge is respectively provided with a pair of guide flanges, each guide flange protrudes outward along the radial direction of the stretching end plate, and each cover casing shell side wall is respectively provided with a pair of guide grooves adapted to the shape of the guide flanges, the guide grooves extend along the axial direction of the cover casing shell, and the guide flanges extend into the guide grooves.

7. The elastic pressing mechanism for an ion source device according to claim 6, characterized in that: The adapter extension kit includes: A transfer rod is provided in a group, and the outer ends of each transfer rod extend into the interior of the cover casing shell respectively, and are connected to the stretching end plate through a deflection structure. The outer ends are exposed to the outside of the cover casing shell, extend to the arc starting cavity, and bend toward the inside of the arc starting cavity.

8. The elastic pressing mechanism for an ion source device according to claim 7, characterized in that: The press-fit positioning assembly includes: A group of press-fit end columns are provided, each of which is respectively connected to the outer end of the transfer pull rod, and its shape is adapted to the positioning recess in the arc starting cavity. The press-fit end column extends into the positioning recess, and the arc starting cavity is pressed and positioned by the elastic force of the tension spring.

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