Rotating device
By designing a stable negative pressure space and positive pressure gas path in the rotating device of the semiconductor processing equipment, and using a vacuum-breaking nozzle and dust removal structure, the problems of low absorption efficiency and dust pollution of semiconductor devices are solved, and more efficient semiconductor processing is achieved.
Patent Information
- Application Number
- CN202420416275.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-05
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-03-05
AI Technical Summary
In the existing semiconductor processing equipment, the turntable device is inefficient when absorbing semiconductor devices, and it is easy to cause drop of the suction nozzle and dust contamination.
A rotating device is designed, including a rotating dial, a plurality of suction nozzles that rotate with the rotating dial, a rotating cover and a negative pressure air nozzle. By forming a stable negative pressure space in the rotating device, using a vacuum-breaking nozzle in conjunction with the positive pressure gas circuit, and setting a dust removal structure in the annular frame, the problem of dust pollution caused by winding and friction of the traditional gas circuit gas circuit is solved.
It realizes the stable adsorption and vacuum breaking capability during high-speed rotation, reduces the risk of semiconductor devices falling, avoids dust pollution, and improves the efficiency of semiconductor processing.
Smart Images

Figure CN222600953U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, in particular to a rotating device. Background Art
[0002] At present, semiconductor sorting equipment is mainly used to test and classify semiconductor products. All kinds of semiconductor devices need to go through the steps of direction identification, reversal, electrical parameter testing, surface marking, visual pin detection, classified storage, etc. before being loaded into the carrier. At present, a sorting machine is generally used to complete the above processes. A turntable device is installed in the center of the workbench of the sorting machine. The turntable device is mainly used to place semiconductor devices on the above-mentioned stations for corresponding operations. After the operation of each station is completed, the turntable device picks up the semiconductor device and then places it at the next station to continue the next process. The turntable device absorbs the semiconductor device through vacuum adsorption and then releases it by breaking the vacuum. However, there are the following problems in the process of picking up semiconductor devices with traditional turntable devices:
[0003] 1. The bottom layer and the turntable rotate synchronously, and the negative pressure chamber is a non-connected structure. The air holes of the turntable and the top plate will not be connected to each other. At this time, the negative pressure state of the nozzle cannot be guaranteed, and there is a risk of the nozzle dropping the chip;
[0004] 2. A large amount of friction dust will be generated during the relative rotation between the top gas distribution plate and the middle gas distribution plate, which will pollute the machine and even the chip;
[0005] 3. The upper and lower end surfaces of the first annular negative pressure space are sealed with sealed bearings. The bearing sealing effect cannot guarantee the negative pressure value at the nozzle end, and there is also a greater risk of material falling. Summary of the invention
[0006] The purpose of the utility model is to provide a rotating device and a sorting machine, which have the ability to maintain stable adsorption and vacuum breaking of the rotating device while rotating at high speed, meet the material suction and discharge needs of a multi-station test sorting machine, and at least solve the problem of low suction efficiency in the existing semiconductor processing process.
[0007] In order to solve the above technical problems, the utility model provides a rotating device, comprising a rotating disk, a plurality of suction nozzles fixed to the outer edge of the rotating disk and rotating with the rotating disk, a rotating cover fixed to the rotating center of the rotating disk, a plurality of negative pressure air nozzles are arranged on the side wall of the rotating cover, and the plurality of negative pressure air nozzles are respectively connected to the plurality of suction nozzles through air pipes;
[0008] A first air path component, one end of which is fixed to the rotating cover, the other end of which is connected to a negative pressure source, and a plurality of negative pressure holes are provided on a side wall of the fixed end to connect the interior of the first air path component and the rotating cover;
[0009] The second air circuit assembly is movably mounted on the outside of the first air circuit assembly in a vertical direction, and an annular frame is connected to the upper end of the second air circuit assembly. When the second air circuit assembly moves to the first state, the annular frame covers the rotating cover to form a negative pressure chamber in the rotating cover, and the multiple suction nozzles maintain a negative pressure state.
[0010] Optionally, in the rotating device, the upper end of the rotating cover is fixedly connected to the turntable, and the lower end is connected to the side wall to extend inwardly to reveal a partial annular bottom surface, and the annular bottom surface is provided with a plurality of air holes corresponding to the negative pressure air nozzle, and a vacuum breaking suction nozzle is provided in each of the plurality of air holes, and each of the vacuum breaking suction nozzles is respectively aligned with each of the negative pressure air nozzles.
[0011] Optionally, in the rotating device, the second air path assembly includes a fixing seat and a plurality of positive pressure channels arranged in the fixing seat, and the plurality of positive pressure channels correspond one-to-one to a plurality of negative pressure air nozzles respectively.
[0012] Optionally, in the rotating device, the annular frame includes a friction base and a dust ring, a detachable friction ring is provided on the friction base, the dust ring is located above the friction base and surrounds the friction ring to form a dust storage cavity, when the second air path assembly moves to the first state, the friction base contacts and closes with the annular bottom surface to form an enclosed negative pressure space, and the dust ring surrounds part of the side wall of the rotating cover.
[0013] Optionally, in the rotating device, the friction base and the friction ring are respectively provided with connecting holes corresponding to the multiple positive pressure channels, and an air pipe joint is provided in the connecting hole of the friction base, and one end of the multiple positive pressure channels is connected to the vacuum breaking nozzle through the air pipe joint.
[0014] Optionally, in the rotating device, a second positive-pressure air nozzle and a second negative-pressure air nozzle are provided on the side wall of the dustproof ring for discharging dust in the dustproof ring out of the dust storage cavity.
[0015] Optionally, in the rotating device, a plurality of elastic members are connected between the friction base and the fixed seat, and the annular frame and the rotating cover are switched between the first state or the second state through the elastic members.
[0016] Optionally, in the rotating device, the outer side wall of the rotating cover is provided with a first alignment line, and the side wall of the dust ring is provided with a second alignment line, and the first alignment line is aligned with the second alignment line for debugging the initial position of the device.
[0017] Optionally, the rotating device further includes a driving assembly, which is fixed above the turntable. The driving assembly includes a main shaft and a plurality of longitudinal driving members arranged around the outside of the main shaft. An output shaft is provided at the lower end of the longitudinal driving member. The output shaft is made of radially brittle material and breaks when impacted.
[0018] Optionally, in the rotating device, a calibration block is provided on the turntable, the calibration block is located below any one of the suction nozzles, and the calibration block is fixedly connected to the suction nozzle for calibrating the position of the suction nozzle.
[0019] Optionally, in the rotating device, the suction nozzle includes a fixed shell, a positioning shell and a movable part, one end of the fixed shell is fixed to the turntable, and the other end extends out of the turntable along the diameter direction of the turntable, the positioning shell is located below one side of the extended end of the fixed shell, the suction piece passes through and is fixed to the fixed shell and the positioning shell in sequence, the movable part includes a fixed piece and a detachable suction piece, a positioning groove is provided on the surface of the suction piece, the positioning shell is provided with a positioning piece, and the positioning piece cooperates with the positioning groove to install and position the suction nozzle.
[0020] The rotating device provided by the utility model solves the problem of entanglement of the air pipe of the traditional air path during the rotating action and the problem of dust pollution caused by friction by forming a stable negative pressure space in the device, cooperating with the positive pressure air path to break the vacuum in the suction nozzle, and arranging a dust removal structure in the movable annular frame. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 A schematic diagram of the structure of the rotating device provided in this embodiment in the second state;
[0022] Figure 2 A schematic diagram of the overall exploded structure of the rotating device provided in this embodiment;
[0023] Figure 3 A schematic structural diagram of a first gas path component and a second gas path component in a second state of the rotating device provided in this embodiment;
[0024] Figure 4 A schematic cross-sectional view of a first gas path component and a second gas path component in a first state of the rotating device provided in this embodiment;
[0025] Figure 5 A schematic diagram of the turntable structure provided in this embodiment;
[0026] Figure 6 This is a schematic diagram of the suction nozzle structure provided in this embodiment.
[0027] The symbols in the figure are described as follows:
[0028] 10-turntable; 20-suction nozzle; 30-rotating cover; 40-first gas path assembly; 50-second gas path assembly; 60-ring frame; 70-driving assembly;
[0029] 110-calibration block; 201-negative pressure air nozzle; 202-air pipe; 210-fixed shell; 220-positioning shell; 221-first positioning part; 222-second positioning part; 231-fixing member; 232-suction member; 301-air hole; 310-first alignment line; 401-negative pressure hole; 510-fixing seat; 520-positive pressure channel; 530-elastic member; 610-friction base; 612-air pipe joint; 620-dustproof ring; 621-second positive pressure air nozzle; 622-second negative pressure air nozzle; 630-second alignment line; 720-longitudinal drive member; 721-longitudinal drive shaft. DETAILED DESCRIPTION
[0030] The following is a further detailed description of the rotating device and the sorting machine proposed by the utility model in combination with the accompanying drawings and specific embodiments. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the accompanying drawings is often a part of the actual structure. In particular, the emphasis of each accompanying drawing is different, and sometimes different proportions are used.
[0031] It should be noted that the terms "first", "second", etc. in the specification, claims and drawings of the present invention are used to distinguish similar objects in order to describe the embodiments of the present invention, rather than to describe a specific order or sequence. It should be understood that the structures used in this way can be interchanged under appropriate circumstances. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.
[0032] For the IC chip sorting and testing process, a high-speed and high-precision handling structure is required, and a translational handling module or a turret handling module is generally used, among which the turret handling module has a higher handling efficiency, a more compact structure, and a wider range of application scenarios. In this embodiment, a rotating device is provided by taking a turret handling module as an example, including a turntable and a plurality of suction nozzles arranged at intervals on the circumference of the turntable. The suction nozzles are mainly used to place semiconductor devices on each workstation for corresponding operations. After the operation of each workstation is completed, the suction nozzles suck the semiconductor devices and place them on the next workstation to continue the next process. During the high-speed rotation process, the turret handling module forms a stable and continuous negative pressure cavity inside the rotating device to ensure that each suction nozzle is in a real-time negative pressure environment. When the semiconductor device needs to be released, the positive pressure is released at the negative pressure hole of the corresponding suction nozzle to neutralize the negative pressure environment in the negative pressure hole, thereby releasing the semiconductor device. This structure can maintain the high-speed rotation work without negative pressure interruption due to the mismatch between the air cavity and the air hole, effectively avoiding the situation where the semiconductor device falls during the processing. At the same time, the lower negative pressure chamber in the rotating device can be movably released, a dustproof ring is provided on the outer ring of the lower negative pressure chamber, and a detachable friction ring is provided in the lower negative pressure chamber to collect, clean and replace the internal friction dust, thereby solving the problems of friction dust polluting the environment during the rotating processing process, thinning of the friction pair due to long-term friction, and reduction of the negative pressure value of the negative pressure environment, thereby improving work efficiency.
[0033] Specifically, Figures 1 to 6As shown, the rotating device includes a turntable 10, a plurality of suction nozzles 20 fixed to the outer edge of the turntable 10 and rotating with the turntable 10, a rotating cover 30 fixed to the rotation center of the turntable 10, a plurality of negative pressure air nozzles 201 are arranged on the side wall of the rotating cover 30, and the plurality of negative pressure air nozzles 201 are respectively connected to the plurality of suction nozzles 20 through air pipes 202; a first air circuit component 40, one end of the first air circuit component 40 is fixed to the rotating cover 30, and the other end is connected to the negative pressure source, and a plurality of negative pressure holes 401 are arranged on the side wall of the fixed end to connect the interior of the first air circuit component 40 and the rotating cover 30; a second air circuit component 50, the second air circuit component 50 is movably sleeved on the outside of the first air circuit component 40 in the vertical direction, and the upper end of the second air circuit component 50 is connected to an annular frame 60, when the second air circuit component 50 moves to the first state, the annular frame 60 covers the rotating cover 30, a negative pressure cavity is formed in the rotating cover 30, and a negative pressure state is maintained in the plurality of suction nozzles 20. When the second air circuit assembly 50 moves to the first state, the annular frame 60 completely covers the rotating cover 30, forming a closed space inside the rotating cover. There is no line connection between the negative pressure air nozzle 201 and the first air circuit assembly 40. The first air circuit assembly 40 provides a stable negative pressure from the negative pressure hole 401 to the rotating cover 30, and is connected to the multiple suction nozzles 20 through the negative pressure air nozzle 201. The multiple suction nozzles 20 are always in a negative pressure state. Since the interior of the rotating cover 30 is an overall closed negative pressure space, when the rotating device rotates, the negative pressure air nozzle 201 will not be blocked, thereby affecting the stopping of the negative pressure in the suction nozzle 20, which effectively reduces the risk of chips falling.
[0034] In this embodiment, the first air circuit assembly 40 is a hollow columnar structure, one end of which is fixed to the upper cover inside the rotating cover 30, and the other end is connected to the negative pressure source. A plurality of negative pressure holes 401 are opened on the side wall of the fixed end, and the plurality of negative pressure holes 401 are located in the internal space of the rotating cover 30. The interior of the first air circuit assembly 40 is connected to the rotating cover 30 through the plurality of negative pressure holes 401, and then connected to the plurality of suction nozzles 20 through the negative pressure nozzle 201 of the rotating cover 30, so that the plurality of suction nozzles 20 are always kept in a negative pressure state.
[0035] Among them, the upper end of the rotating cover 30 is fixedly connected to the turntable 10 so that the rotating cover 30 can rotate with the turntable 10; the lower end and the side wall connection extend inwardly to form a partial annular bottom surface, and the annular bottom surface is provided with a plurality of air holes 301 corresponding to the negative pressure air nozzle 201, and the plurality of air holes 301 are respectively provided with vacuum breaking air nozzles (not shown in the figure), and the vacuum breaking air nozzles are respectively aligned with each of the negative pressure air nozzles 201. When the suction nozzle 20 needs to perform the discharge process, the positive pressure gas quickly enters the vacuum breaking air nozzle along the air holes 301, and the vacuum breaking air nozzle releases the positive pressure gas to the corresponding negative pressure air nozzle 201, reducing the negative pressure value in the suction nozzle, thereby releasing the sucked chip to realize the discharge action of the suction nozzle. After the chip is released, the positive pressure gas is stopped from being filled. Since the first gas circuit component 40 continuously generates a negative pressure environment, after the positive pressure gas stops being supplied, the suction nozzle 20 quickly restores the initial negative pressure value and continues to maintain the negative pressure state. When the turntable 10 rotates, the negative pressure of the suction nozzle 20 is adsorbed on the positive pressure vacuum air path to solve the problem of entanglement of the air pipe in the traditional air path during the rotation process.
[0036] Further, such as Figure 3 As shown, the second air circuit assembly 50 is movably sleeved on the outer periphery of the first air circuit assembly 40 in the vertical direction, and the second air circuit assembly 50 includes a fixing seat 510 and a plurality of positive pressure channels 520 arranged in the fixing seat 510, and the plurality of positive pressure channels 520 correspond to the plurality of negative pressure air nozzles 201 one by one. The upper end of the second air circuit assembly 50 is fixedly connected with an annular frame 60. When the second air circuit assembly 50 moves to the first state, the annular frame 60 is buckled with the rotating cover 30, and the interior of the rotating cover 30 is a closed negative pressure chamber, and the plurality of suction nozzles 20 are all kept in a stable negative pressure state. At this time, the plurality of positive pressure channels 520 are connected to the plurality of negative pressure air nozzles 201 through the annular frame 60. When the turntable 10 rotates to the next workstation, positive-pressure gas is filled into the positive-pressure channel 520 below the required release suction, and the positive-pressure gas is blown into the corresponding negative-pressure gas nozzle 201 through the vacuum air nozzle. After the suction nozzle 20 releases the chip to the corresponding workstation, the positive-pressure gas is stopped from being filled, or the positive-pressure gas filling time or the filling speed or filling pressure of the positive-pressure gas and other parameters are controlled according to a preset program to ensure different processing requirements of different devices.
[0037] Specifically, the annular frame 60 includes a friction base 610 and a dust ring 620. A detachable friction ring 611 is provided on the friction base 610. The dust ring 620 is located above the friction base 620 and surrounds the friction ring 611 to form a dust storage cavity. When the second air circuit assembly 50 moves to the first state, the friction base 620 contacts and closes with the annular bottom surface to form a closed negative pressure space, and the dust ring 620 surrounds part of the side wall of the rotating cover 30. During operation, the annular bottom surface rotates with the turntable 10, and is tightly pressed with the friction base 620 to form a sealed cavity in the rotating cover 30. A friction pair is formed between the annular bottom surface and the friction ring 611, and the two rotate relative to each other. When the device performs high-speed and high-frequency rotation, the friction ring 611 in the friction base 610 rotates and rubs with the rotating cover 30 to generate friction dust, which is collected in the dust ring 620 to prevent the friction dust generated during operation from polluting the environment or the machine.
[0038] The friction base 610 and the friction ring 611 are respectively provided with connecting holes corresponding to the plurality of positive pressure channels 520. An air pipe joint 612 is provided in the connecting hole of the friction base 610. One end of the plurality of positive pressure channels 520 is connected to the vacuum breaking suction nozzle through the air pipe joint 612, and the other end is connected to the positive pressure source. When the suction nozzle 20 needs to release the chip, the second air path assembly 50 is in the first state at this time, the connecting hole of the friction ring 611 corresponds to the air hole 301 on the annular bottom surface of the rotating cover 30 one by one, and positive pressure gas is introduced into the positive pressure channel 520. The positive pressure gas directly enters the air hole 301 through the connecting hole, and then blows air to the negative pressure air nozzle 201 through the vacuum breaking suction nozzle in the air hole 301, offsetting part of the negative pressure state so as to realize the discharge action of the suction nozzle. The combination of the negative pressure adsorption of the rotating device and the positive pressure vacuum breaking structure solves the problem of the traditional air path air pipe being entangled during the rotation process.
[0039] Furthermore, the side wall of the dustproof ring 620 is provided with a second positive pressure air nozzle 621 and a second negative pressure air nozzle 622. When the device rotates, dust is generated in real time due to the friction between the friction ring 611 and the rotating cover 30. The second positive pressure air nozzle 621 is opened to blow positive pressure gas into the inside of the rotating cover 30, and the second negative pressure air nozzle 622 extracts the gas, and blows the gas with dust out of the rotating cover 30. In this embodiment, the second positive pressure air nozzle 621 and the second negative pressure air nozzle 622 are positioned opposite to each other. The second positive pressure air nozzle 621 blows positive pressure gas on one side, and the second negative pressure air nozzle 622 extracts gas outward on the other side, and the dust is taken out by the air flow direction. The number of the second positive pressure air nozzle 621 and the second negative pressure air nozzle 622 can be set to multiple, and the positive pressure intake flow and pressure can be adjusted in real time, as well as the negative pressure exhaust flow and pressure value can be adjusted in real time, and the best dust removal effect can be achieved through the coordination between the inlet and outlet air flow and pressure. Among them, regulating the positive pressure air intake flow and pressure includes controlling a single second positive pressure air nozzle 621 to blow air inwards, controlling multiple second positive pressure air nozzles 621 to blow air into the rotating cover 30 at the same time, or controlling the opening of some second positive pressure air nozzles 621 to exhaust air inwards according to the amount of dust in the device, and the same applies to the second negative pressure air nozzle 611. Here, it should be noted that the position, number, ventilation flow and pressure of the second positive pressure air nozzle 621 and the second negative pressure air nozzle 622 are not specifically limited and are all within the protection scope of this application.
[0040] Furthermore, a plurality of elastic members 530 are connected between the friction base 610 and the fixed seat 510, and the second gas circuit assembly 50 moves toward and away from the turntable 10 through the elastic members 530, and the annular frame 60 and the rotating cover 30 switch the first state or the second state through the elastic members 530. When the second gas circuit assembly 50 is in the first state, the elastic member 530 releases elastic force to push the annular frame 60 and the rotating cover 30 to close, and generates a certain elastic force in the direction close to the turntable 10, and presses the annular frame 60 and the rotating cover 30 tightly. At this time, the positive pressure channel 520 is connected with the air hole 301 through the annular frame 60, and a closed negative pressure space is formed inside the rotating cover 30; when the elastic member 530 is compressed, the annular frame 60 is separated from the rotating cover 30, and the lower end of the rotating cover 30 is in a non-closed state, and the inside of the annular frame 60 is released, and it is the second state at this time, and the negative pressure chamber is divided into an upper negative pressure chamber (rotating cover) and a lower negative pressure chamber (annular frame). That is, when the second air circuit assembly 50 is in the first state, the upper and lower negative pressure chambers are in a closed state, and when the second air circuit assembly 50 is in the second state, the upper and lower negative pressure chambers are in a separated state. In this embodiment, the elastic members 530 are multiple and evenly arranged around the outer ring of the multiple positive pressure channels 520, and the second air circuit assembly 50 can evenly generate upward power, so that the annular frame 60 and the rotating cover 30 can be completely fitted in the first state, ensuring the negative pressure environment in the rotating cover 30.
[0041] Since the friction pair will produce a certain amount of wear and tear after a long period of rotation, a detachable friction ring 611 is provided above the friction base 610. The upper and lower negative pressure chambers frictionally consume the friction ring 611 during relative rotation. When the friction ring 611 reaches its service life after being used for a certain period of time, the second air path assembly 50 is controlled to move downward to expose the friction ring 611 and the dust ring 620, so as to facilitate manual replacement of the internal friction ring 611 and clean and maintain the environment inside the dust ring 620, thereby extending the overall service life of the fuselage. In this embodiment, the friction surfaces between the friction pairs have a certain inclination angle, which increases the friction pair area compared to the inclined surface of the planar structure and improves the sealing effect. Of course, the friction pair can be other special-shaped structures, which are also not specifically limited here. During the normal rotation of the device, friction will continue to be generated on the friction pair, which will become thinner due to friction over time, affecting the overall negative pressure environment. The elastic member 530 will continuously generate a certain upward thrust on the annular frame 60. When the friction ring becomes thinner due to long-term friction, the elastic member 530 will push the annular frame 60 to make a slight adjustment upward, which can compensate for the thinning distance of the friction pair and ensure the negative pressure environment in the rotating cover 30 again.
[0042] like Figure 3As shown, the outer wall of the rotating cover 30 is provided with a first alignment line 310, and the side wall of the dust ring 620 is provided with a second alignment line 630. When the first alignment line 301 is aligned with the second alignment line 621, the multiple connecting holes on the friction ring 611 correspond to the air holes 301 respectively. By setting the alignment lines on the outer walls of the rotating cover 30 and the dust ring 620, the initial position of the device can be intuitively and quickly debugged. There is no specific limit on the number of the first alignment lines 310 and the second alignment lines 630, as long as the alignment of the two meets the position condition.
[0043] like Figure 2 As shown, the turntable device also includes a drive assembly 70, and the drive assembly 70 is fixed above the turntable 10. The drive assembly 70, the turntable 10, the first gas circuit assembly 40, and the second gas circuit assembly 50 are coaxially arranged. The drive assembly 70 is fixed to the center of the turntable 10 by flange bolts, and rotates synchronously with the turntable 10 along the axis. The drive assembly 70 includes a main shaft and a plurality of longitudinal drive members 720 arranged around the outside of the main shaft. The longitudinal drive member 720 is located above the suction nozzle 20, and is used to control the suction nozzle 20 to move up and down in the longitudinal direction to suck or take materials. A plurality of fixing plates are fixed to the periphery of the main shaft by bolts, and the longitudinal drive member 720 includes a motor and a motor base for mounting and fixing the motor, and the motor base and the fixing plate are adapted to each other. When the device is working, the turntable 10 and the suction nozzle 20 rotate together, and the suction nozzle 20 realizes vertical linear reciprocating motion through the longitudinal driving member 720 directly above the suction nozzle 20. The vertical reciprocating motion of the longitudinal driving member 720 acts on the suction nozzle 20 to realize the vertical reciprocating motion of the suction nozzle 20. Specifically, the longitudinal driving member 720 is not limited to a servo motor, a linear motor, a voice coil motor or other pneumatic components, and it only needs to be able to realize the vertical reciprocating motion function. The fixing plate can adapt to the motor bases of different longitudinal driving members 720 to fix and install different longitudinal driving members 720.
[0044] Furthermore, the longitudinal drive member 720 includes a longitudinal output shaft 721, and the longitudinal output shaft 721 is located at the lowermost end of the longitudinal drive member 720, and contacts the suction nozzle 20 to provide axial downward pressure to the suction nozzle 20, thereby driving the suction nozzle 20 to move up and down to pick up and put materials. In traditional devices, the longitudinal output material is generally harder. When the suction nozzle 20 is too close to the longitudinal drive shaft 721, interference and collision are easily caused between the suction nozzle 20 and the longitudinal drive shaft 721, resulting in damage to the suction nozzle 20 or the motor. In this embodiment, the output end of the longitudinal output shaft 721 includes an anti-collision head. The anti-collision head is a brittle material that is thin in the middle and thick at both ends, and has extremely poor radial load capacity. When the longitudinal output shaft 721 is hit, the anti-collision head can break quickly, forming mechanical protection for other components such as the suction nozzle or the motor. After the anti-collision head breaks, a new anti-collision head can be replaced. Further, if Figure 4 As shown, the turntable is provided with a calibration block 110, and the calibration block 110 is located on the turntable 10 and below any one of the suction nozzles 20. The calibration block 110 connects the turntable 10 and the suction nozzle 20, and is used to calibrate the position accuracy of the suction nozzle 20 to prevent the suction nozzle 20 from having a slight displacement during rotation, resulting in a decrease in processing accuracy.
[0045] like Figure 6 As shown, the suction nozzle 20 includes a fixed shell 210, a positioning shell 220 and a movable part. One end of the fixed shell 210 is fixed to the turntable 10, and the other end extends out of the turntable along the diameter direction of the turntable 10. The positioning shell 220 is located below one side of the extended end of the fixed shell 210, and the movable part is sleeved on the extended end of the fixed shell and fixed to the positioning shell. The moving part includes a fixing member 231 and a suction member 232, and the suction member 232 is located below the fixing member 231 for sucking chips; the fixing member 231 is fixedly installed on the fixing shell 210 and the positioning shell 220, and the first end of the fixing member 231 extends out of the fixing shell 210, and the second end is located in the positioning shell 220 and abuts against the suction member 232; the first end of the fixing member 231 extends out of the outer ring of the fixing shell 210 and is connected to a second elastic member. When the device needs to take materials, the longitudinal driving member 720 drives the longitudinal output shaft 721 to move downward and contact the first end of the fixing member 231 and drive the suction nozzle 20 to move downward. At this time, the second elastic member is in a compressed state; when the suction nozzle 20 finishes taking materials, the longitudinal driving member 720 drives the longitudinal output shaft 721 to move upward, and the second elastic member releases the elastic force to drive the suction nozzle to move upward. When the turntable reaches the next workstation, the longitudinal driving member 720 is driven downward again to drive the suction nozzle 20 to move downward, so as to reciprocate and realize the suction nozzle's material taking and placing action.
[0046] The positioning housing 220 includes a first positioning portion 221 and a second positioning portion 222, wherein the first positioning portion 221 and the second positioning portion 222 are integrally arranged, and the first positioning portion 221 is connected to the fixed housing 210 via a guide rod. The suction member 232 is located in the second positioning portion 222, wherein the side wall of the second positioning portion 222 is provided with an opening, and a locking member is inserted into the opening to clamp and fix the suction member 232 in the second positioning portion 222. When the suction member 232 needs to be replaced due to other reasons such as long-term operation or damage, the locking member is released to remove and replace the suction member 232, and the entire suction nozzle does not need to be replaced when the suction member is damaged, thereby saving costs and improving processing efficiency. In this embodiment, the locking member is a pin, and the openings are symmetrically arranged on both sides of the second positioning portion 222, and pins are inserted into the openings to clamp and fix both sides of the suction member to the second positioning portion. Of course, in other embodiments, the suction member 232 can be fixed to the second positioning portion 222 in other ways, or can be directly detachably fixed in the positioning housing, and the fixing method and connection relationship are not specifically limited here. The surface of the suction member 232 is provided with a positioning groove, and the side wall of the second positioning portion 222 is provided with a positioning member corresponding to the positioning groove. When the suction member 232 is replaced and reinstalled, the positioning groove cooperates with the positioning member to install and position, so that the suction member 232 can be installed and the installation direction can be quickly determined at the same time.
[0047] Furthermore, a limiting member is provided above the first positioning portion 221. When the longitudinal driving member 720 is driven upward, the elastic member 530 releases elastic force to drive the suction member 232 to move upward, and the limiting member abuts against the fixed housing 210, and the suction member 232 stops moving. The rising distance of the suction nozzle is determined according to the thickness of the limiting member, and the height of the suction nozzle when it moves up and down is limited to improve the processing accuracy. The thickness of the limiting member can be adjusted according to different moving positions to achieve different limiting heights.
[0048] The utility model provides a rotating device, in which a negative pressure environment is maintained in real time in the suction nozzle of the rotating device, and combined with a positive pressure air circuit, the material picking and discharging of the suction nozzle is realized, wherein the beneficial effects are:
[0049] 1. When the spindle is rotating at high speed, in the first state, a stable negative pressure cavity is formed inside the rotating cover, and a negative pressure environment is formed in real time inside the suction nozzle. Each suction nozzle is provided with a separate positive pressure channel, and the positive pressure channel is connected to the negative pressure cavity. When the vacuum needs to be broken, positive pressure gas is filled into the negative pressure gas nozzle in the negative pressure cavity to offset part of the negative pressure and achieve vacuum breaking. The negative pressure adsorption of the turret suction nozzle is combined with the positive pressure vacuum breaking air path to solve the entanglement problem of the traditional air path air pipe during the rotation action. At the same time, the real-time negative pressure generated in the suction nozzle can improve the handling efficiency of the suction nozzle.
[0050] 2. The negative pressure and positive pressure gas path structure forms a negative pressure sealed cavity through the upper and lower friction pairs. During the rotation of the main shaft, the upper and lower negative pressure cavities can be tightly squeezed together to form a sealed cavity while rotating relatively, ensuring that the negative pressure environment in the negative pressure cavity is not affected by the pressure drop caused by the thinning of the friction pair.
[0051] 3. The second air circuit component is movablely sleeved on the outside of the first air circuit component, and the annular frame and the rotating cover can be detachably arranged. In order to solve the problem of dust pollution caused by friction, a dustproof ring is arranged on the friction surfaces of the upper and lower negative pressure chambers, and the dust generated by friction is isolated in the dustproof ring; a second positive pressure air nozzle and a second negative pressure air nozzle are arranged on the outer wall of the dustproof ring, and the dust isolated in the dustproof ring is carried away by the negative pressure airflow, so that the dust does not leak out, thereby solving the problem of polluting the machine and the product; the second positive pressure air nozzle and the second negative pressure air nozzle cooperate to realize real-time adjustment of positive pressure or negative pressure to achieve the best dust suction and dust removal effect. When the second air circuit component moves to the second state, it is convenient to clean the environment inside the dustproof ring.
[0052] 4. The friction pair of the upper and lower negative pressure chambers will produce certain wear and thinning during the friction process, affecting the air pressure environment of the negative pressure chamber. A detachable friction ring is provided so that the friction ring is consumed when the upper and lower negative pressure chambers rotate relative to each other. When the friction ring reaches a certain life, the second air path assembly moves to the second state, which is convenient for replacing the friction ring and protecting the main components of the upper and lower negative pressure chambers. Daily maintenance of the friction ring only needs to be carried out regularly.
[0053] 5. The friction surface of the friction pair is set to an inclined structure to increase the friction area and improve the sealing effect.
[0054] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other. In addition, the different parts between the various embodiments can also be used in combination with each other, and the present invention is not limited to this.
[0055] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.
Claims
1. A rotating device, characterized in that: include: A turntable, a plurality of suction nozzles fixed to the outer edge of the turntable and rotating with the turntable, a rotating cover fixed to the rotation center of the turntable, a plurality of negative pressure air nozzles provided on the side wall of the rotating cover, and the plurality of negative pressure air nozzles are respectively connected to the plurality of suction nozzles through air pipes; A first air path component, one end of which is fixed to the rotating cover, the other end of which is connected to a negative pressure source, and a plurality of negative pressure holes are provided on a side wall of the fixed end to connect the interior of the first air path component and the rotating cover; The second air circuit assembly is movably mounted on the outside of the first air circuit assembly in a vertical direction, and an annular frame is connected to the upper end of the second air circuit assembly. When the second air circuit assembly moves to the first state, the annular frame covers the rotating cover to form a negative pressure chamber in the rotating cover, and the multiple suction nozzles maintain a negative pressure state.
2. The rotating device according to claim 1, characterized in that: The upper end of the rotating cover is fixedly connected to the turntable, and the lower end is connected to the side wall to extend inwardly to form a partial annular bottom surface. The annular bottom surface is provided with multiple air holes corresponding to the negative pressure air nozzle, and vacuum breaking suction nozzles are arranged in the multiple air holes, and each of the vacuum breaking suction nozzles is respectively aligned with each of the negative pressure air nozzles.
3. The rotating device according to claim 2, characterized in that: The second air path assembly includes a fixing seat and a plurality of positive pressure channels arranged in the fixing seat, and the plurality of positive pressure channels correspond one-to-one to a plurality of negative pressure air nozzles respectively.
4. The rotating device according to claim 3, characterized in that: The annular frame includes a friction base and a dust ring. A detachable friction ring is provided on the friction base. The dust ring is located above the friction base and surrounds the friction ring to form a dust storage cavity. When the second air path assembly moves to the first state, the friction base contacts and closes with the annular bottom surface to form a closed negative pressure space, and the dust ring surrounds part of the side wall of the rotating cover.
5. The rotating device according to claim 4, characterized in that: The friction base and the friction ring are respectively provided with connecting holes corresponding to the plurality of positive pressure channels, and an air pipe joint is arranged in the connecting hole of the friction base, and one end of the plurality of positive pressure channels is connected to the vacuum breaking nozzle through the air pipe joint.
6. The rotating device according to claim 4, characterized in that: The side wall of the dustproof ring is provided with a second positive pressure air nozzle and a second negative pressure air nozzle, which are used to discharge the dust in the dustproof ring out of the dust storage cavity.
7. The rotating device according to claim 4, characterized in that: A plurality of elastic members are connected between the friction base and the fixing seat, and the annular frame and the rotating cover are switched between the first state and the second state through the elastic members.
8. The rotating device according to claim 4, characterized in that: The outer side wall of the rotating cover is provided with a first alignment line, and the side wall of the dustproof ring is provided with a second alignment line. The first alignment line is aligned with the second alignment line for debugging the initial position of the device.
9. The rotating device according to claim 1, characterized in that: It also includes a driving assembly, which is fixed above the turntable. The driving assembly includes a main shaft and a plurality of longitudinal driving members arranged around the outside of the main shaft. An output shaft is provided at the lower end of the longitudinal driving member. The output shaft is made of radially brittle material and breaks when hit.
10. The rotating device according to claim 1, characterized in that The turntable is provided with a calibration block, the calibration block is located below any of the suction nozzles, and the calibration block is fixedly connected to the suction nozzle for calibrating the position of the suction nozzle.
11. The rotating device according to claim 1, characterized in that: The suction nozzle includes a fixed shell, a positioning shell and a moving part. One end of the fixed shell is fixed to the turntable, and the other end extends out of the turntable along the diameter direction of the turntable. The positioning shell is located below one side of the extended end of the fixed shell. The suction piece passes through and is fixed to the fixed shell and the positioning shell in sequence. The moving part includes a fixed piece and a detachable suction piece. A positioning groove is provided on the surface of the suction piece. The positioning shell is provided with a positioning piece. The positioning piece cooperates with the positioning groove to install and position the suction nozzle.