CVD (Chemical Vapor Deposition) heating disc

Abstract

The utility model discloses a CVD (chemical vapor deposition) heating disc, which comprises a heating disc body, a heating component and a protective shell, the heating disc body comprises a lower plate, a middle plate is mounted on the lower plate, an upper plate is mounted on the middle plate, an electric heating tube mounting groove is formed in the middle plate, a thermocouple mounting groove is formed in the upper plate, and a thermocouple is mounted in the thermocouple mounting groove. The heating assembly comprises an electric heating pipe and thermocouples, the electric heating pipe is installed in the electric heating pipe installation groove, input ends are integrally formed at the two ends of the electric heating pipe, the number of the thermocouples is one pair, the upper ends of the pair of thermocouples are both installed in the thermocouple installation groove, and the protective shell is arranged below the lower plate. According to the utility model, the heating plate body adopts a layered design, so that the thermocouple and the heating pipe are respectively positioned on different metal layers and do not have a communicated structure, and the feedback temperature of the thermocouple is ensured to be closer to the actual temperature of the heating plate.

Description

Technical Field

[0001] The utility model belongs to the technical field of CVD heating disks, and in particular relates to a CVD heating disk. Background Art

[0002] CVD refers to a gas phase reaction at high temperature, such as the thermal decomposition of metal halides, organic metals, hydrocarbons, etc., hydrogen reduction or a method of causing its mixed gas to undergo chemical reactions at high temperatures to precipitate inorganic materials such as metals, oxides, and carbides. This technology was originally developed as a coating method, but it is not only used for coatings of heat-resistant materials, but also for the refining of high-purity metals, powder synthesis, semiconductor films, etc. It is a very characteristic technical field. The CVD process mainly completes the film deposition by diffusing chemical source gases on the surface of the wafer and relying on the heat brought to the wafer by the heating plate.

[0003] However, the existing CVD heating plate has the following problems when used:

[0004] 1. The thermocouple and the electric heating tube are not physically isolated, and the thermocouple and the electric heating tube wire groove structure are connected, causing the heat of the electric heating tube to radiate directly to the thermocouple, and the thermocouple temperature measurement is inaccurate;

[0005] 2. The thermocouple temperature measuring layer adopts a deep groove structure, which reduces the structural strength of the disk surface. After heating, the disk surface is more likely to deform and the hot strength is lower;

[0006] 3. The whole disk surface is made of friction welding. The upper and lower plates are connected only by an annular weld. The middle part is spliced, which causes bulging and deformation in the middle after heating.

[0007] 4. Each area has only one thermocouple as a measurement and control feedback element. Once the thermocouple is damaged, temperature feedback and control of the corresponding area cannot be achieved.

[0008] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0009] The utility model aims to provide a CVD heating plate, which can solve the problems of inaccurate thermocouple measurement and easy deformation of the heating plate when the existing heating plate is used.

[0010] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0011] A CVD heating plate, comprising:

[0012] A heating plate body, the heating plate body comprising a lower plate, a middle plate mounted on the lower plate, an upper plate mounted on the middle plate, an electric heating pipe mounting groove on the middle plate, and a thermocouple mounting groove on the upper plate; the lower plate, the middle plate and the upper plate are used to separate the heating plate base into different metal layers;

[0013] A heating component, wherein the heating component comprises an electric heating tube and a thermocouple, wherein the electric heating tube is installed in an electric heating tube installation groove, input ends are integrally formed at both ends of the electric heating tube, and a pair of thermocouples are provided, and upper ends of the pair of thermocouples are both installed in the thermocouple installation groove; the electric heating tube is installed in the middle plate through the electric heating tube installation groove, and the thermocouple is installed in the upper plate through the thermocouple installation groove, so that a physical barrier is formed between the electric heating tube and the thermocouple through the middle plate and the upper plate to avoid communication, thereby improving the temperature measurement accuracy of the thermocouple;

[0014] A protective shell is arranged below the lower plate.

[0015] In one or more embodiments of the utility model, the lower plate and the middle plate, and the middle plate and the upper plate are connected by surface-to-surface brazing, and the joint surfaces within the circular surface are all welding surfaces. By adopting the surface-to-surface brazing connection method, the bonding strength is improved and the phenomenon of bulging and deformation after heating is effectively reduced.

[0016] In one or more embodiments of the utility model, the thermocouple installation groove is opened by a separate milling groove. The thermocouple installation groove is milled separately, so that the thermocouple installation groove does not have a deep groove structure, and the strength of the metal plate is not significantly weakened, thereby improving the overall structural strength of the upper plate.

[0017] In one or more embodiments of the utility model, a first mounting hole is opened at the center of the lower plate, and the lower end of the input end passes through the lower plate through the first mounting hole and is placed below the lower plate. The first mounting hole facilitates the installation of the electric heating tube and the input end.

[0018] In one or more embodiments of the present invention, the lower end of the thermocouple passes through the lower plate through the first mounting hole and is placed under the lower plate, and a connection end is provided at one end of the thermocouple placed under the lower plate.

[0019] In one or more embodiments of the utility model, a second mounting hole is provided at the center of the middle plate, and the lower end of the thermocouple passes through the middle plate through the second mounting hole. The second mounting hole is provided to facilitate the installation of the thermocouple.

[0020] In one or more embodiments of the present invention, a supporting protrusion is integrally formed at the lower end of the lower plate, and the upper end of the protective shell is arranged on the lower side wall of the supporting protrusion.

[0021] In one or more embodiments of the utility model, a through hole is provided in the protective housing, and the input end and the lower end of the thermocouple pass through the protective housing through the through hole and are placed below the protective housing. The protective housing is used to protect the input end and the lower end of the thermocouple.

[0022] Compared with the prior art, the utility model has the following advantages:

[0023] 1. The heating plate body adopts a layered design, so that the thermocouple and the heating tube are located in different metal layers respectively, and there is no interconnected structure between the two, ensuring that the thermocouple feedback temperature is closer to the actual temperature of the heating plate;

[0024] 2. Thermocouples are layered and milled separately, there is no deep groove structure, the strength of the metal plate is not significantly weakened, and the overall structural strength is improved;

[0025] 3. The upper and lower plates are connected by surface brazing. The joint surfaces within the circular surface are all welding surfaces, which improves the bonding strength and effectively reduces the phenomenon of bulging and deformation after heating;

[0026] 4. Set up a pair of thermocouples, one for temperature measurement and the other for temperature control. When one thermocouple is damaged, the other thermocouple can be used for temperature measurement and control to avoid the abnormal situation that the heating plate cannot continue to work due to damage to the thermocouple. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 This is a front view of a CVD heating plate in one embodiment of the utility model;

[0029] Figure 2 A three-dimensional diagram of a CVD heating plate in an embodiment of the utility model;

[0030] Figure 3 A cross-sectional view of a CVD heating plate in one embodiment of the utility model;

[0031] Figure 4 This is a schematic diagram of the installation of an electric heating plate in one embodiment of the utility model;

[0032] Figure 5 This is a schematic diagram of an intermediate plate in an embodiment of the utility model;

[0033] Figure 6This is a schematic diagram of the installation of a thermocouple in one embodiment of the utility model.

[0034] Description of main reference numerals:

[0035] 1-heating plate body, 11-lower plate, 12-middle plate, 13-upper plate, 14-first mounting hole, 15-electric heating tube mounting groove, 16-second mounting hole, 17-thermocouple mounting groove, 18-support protrusion, 2-heating component, 21-electric heating tube, 22-input end, 23-thermocouple, 24-connection end, 3-protective shell. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0037] like Figure 1 to Figure 3 As shown, a CVD heating plate in an embodiment of the utility model includes a heating plate body 1, a heating component 2 and a protective shell 3.

[0038] like Figure 1 to Figure 6 As shown, the heating plate body 1 includes a lower plate 11, an intermediate plate 12 is mounted on the lower plate 11, an upper plate 13 is mounted on the intermediate plate 12, an electric heating pipe mounting groove 15 is provided on the intermediate plate 12, and a thermocouple mounting groove 17 is provided on the upper plate 13. The heating plate base is divided into different metal layers by the lower plate 11, the intermediate plate 12 and the upper plate 13, and an electric heating pipe mounting groove 15 is provided on the intermediate plate 12, and a thermocouple mounting groove 17 is provided on the upper plate 13. The electric heating pipe mounting groove 15 and the thermocouple mounting groove 17 are used for installing the heating assembly 2.

[0039] Preferably, the lower plate 11 and the middle plate 12, and the middle plate 12 and the upper plate 13 are connected by surface brazing, and the joint surfaces within the circular surface are all welding surfaces. By adopting the surface brazing connection method, the bonding strength is improved, and the phenomenon of bulging and deformation of the heating plate after heating is effectively reduced.

[0040] like Figure 1 to Figure 6As shown, the heating assembly 2 includes an electric heating tube 21 and a thermocouple 23. The electric heating tube 21 is installed in the electric heating tube installation groove 15. The two ends of the electric heating tube 21 are integrally formed with input ends 22. A pair of thermocouples 23 are provided, and the upper ends of the pair of thermocouples 23 are installed in the thermocouple installation groove 17. The electric heating tube 21 is installed in the middle plate 12 through the electric heating tube installation groove 15, and the thermocouple 23 is installed in the upper plate 13 through the thermocouple installation groove 17, so that a physical barrier is formed between the electric heating tube 21 and the thermocouple 23 through the middle plate 12 and the upper plate 13 to avoid communication, thereby improving the accuracy of temperature measurement by the thermocouple 23.

[0041] Furthermore, since the thermocouple 23 is used to measure the heating temperature in the heating plate, a pair of thermocouples 23 is provided in the heating plate, that is, two sets of thermocouples 23 are arranged in each area, one for temperature measurement and one for temperature control, and as a redundant design, each thermocouple can simultaneously realize the temperature measurement and temperature control functions. When one thermocouple 23 is damaged, another thermocouple 23 can be enabled for temperature measurement and control, avoiding the abnormal situation that the heating plate cannot continue to work due to the damage of the thermocouple 23.

[0042] Preferably, the thermocouple 23 is installed in the upper plate 13 through the thermocouple mounting groove 17. Since an intermediate plate 12 is arranged below the upper plate 13, the thermocouple 23 in the upper plate 13 is layered separately through the intermediate plate 12, and the thermocouple mounting groove 17 is milled separately, so that there is no deep groove structure in the thermocouple mounting groove 17, and the strength of the metal plate is not significantly weakened, so that the overall structural strength of the upper plate 13 is improved.

[0043] like Figure 3 As shown, a first mounting hole 14 is opened at the center of the lower plate 11, and the lower end of the input end 22 passes through the lower plate 11 through the first mounting hole 14 and is placed below the lower plate 11. The first mounting hole 14 facilitates the installation of the electric heating tube 21 and the input end 22.

[0044] like Figure 3 As shown, the lower end of the thermocouple 23 passes through the lower plate 11 through the first mounting hole 14 and is placed below the lower plate 11 . A connection end 24 is provided at one end of the thermocouple 23 placed below the lower plate 11 .

[0045] like Figure 3 and Figure 5 As shown, a second mounting hole 16 is provided at the center of the middle plate 12, and the lower end of the thermocouple 23 passes through the middle plate 12 through the second mounting hole 16. The second mounting hole 16 is provided to facilitate the installation of the thermocouple 23.

[0046] like Figure 1 As shown, a support protrusion 18 is integrally formed at the lower end of the lower plate 11 , and the upper end of the protective shell 3 is arranged on the lower side wall of the support protrusion 18 .

[0047] like Figure 1 to Figure 3 As shown, the protective housing 3 is disposed below the lower plate 11, and a through hole is provided in the protective housing 3. The input end 22 and the lower end of the thermocouple 23 pass through the protective housing 3 through the through hole and are placed below the protective housing 3. The protective housing 3 is used to protect the input end 22 and the lower end of the thermocouple 23.

[0048] Working principle: the upper plate 13 serves as the working surface of the heating plate and is located at the uppermost layer; the middle plate 12 serves as the cover plate of the thermocouple 23, and an electric heating pipe installation groove 15 is provided on the lower side for embedding the electric heating pipe 21, which is physically isolated from the layer where the electric heating pipe 21 is located to avoid connection and improve the temperature measurement accuracy of the thermocouple 23; the lower plate 11 serves as the cover plate of the electric heating pipe 21 and is located at the lowermost layer; by setting a pair of thermocouples 23, a pair of thermocouples 23 are arranged in each area, one for temperature measurement and the other for temperature control. At the same time, as a redundant design, each thermocouple can realize temperature measurement and temperature control functions at the same time.

[0049] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0050] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A CVD heating plate, characterized in that: include: A heating plate body, the heating plate body comprising a lower plate, a middle plate mounted on the lower plate, an upper plate mounted on the middle plate, an electric heating pipe mounting groove formed on the middle plate, and a thermocouple mounting groove formed on the upper plate; A heating component, the heating component comprising an electric heating tube and a thermocouple, the electric heating tube being installed in an electric heating tube installation groove, both ends of the electric heating tube being integrally formed with input ends, a pair of the thermocouples being provided, and the upper ends of the pair of the thermocouples being installed in the thermocouple installation groove; A protective shell is arranged below the lower plate.

2. A CVD heating plate according to claim 1, characterized in that: The lower plate and the middle plate, and the middle plate and the upper plate are connected by surface-to-surface brazing, and the joint surfaces within the circular surface are all welding surfaces.

3. A CVD heating plate according to claim 1, characterized in that: The thermocouple installation groove is formed by a separate milling method.

4. A CVD heating plate according to claim 1, characterized in that: A first mounting hole is opened at the center of the lower plate, and the lower end of the input end passes through the lower plate through the first mounting hole and is placed below the lower plate.

5. A CVD heating plate according to claim 4, characterized in that: The lower end of the thermocouple passes through the lower plate through the first mounting hole and is placed below the lower plate. The end of the thermocouple placed below the lower plate is provided with a connection end.

6. A CVD heating plate according to claim 5, characterized in that: A second mounting hole is opened at the center of the middle plate, and the lower end of the thermocouple passes through the middle plate through the second mounting hole.

7. The CVD heating plate according to claim 1, characterized in that: A supporting protrusion is integrally formed at the lower end of the lower plate, and the upper end of the protective shell is arranged on the lower side wall of the supporting protrusion.

8. A CVD heating plate according to claim 7, characterized in that: A through hole is provided in the protective shell, and the input end and the lower end of the thermocouple pass through the protective shell through the through hole and are placed below the protective shell.

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