VCR gas filtering gasket sealing joint device

Abstract

The utility model relates to the technical field of special gas systems, in particular to a VCR gas filter gasket sealing joint device which comprises a VCR outer ring, a VCR filter screen arranged in the VCR outer ring and a VCR connector inserted in the VCR outer ring, the VCR filter screen is used for filtering gas flowing into the VCR connector from the VCR outer ring, a first sealing ring is arranged on the inner side wall of the end, connected with the VCR connector, of the VCR outer ring, and a second sealing ring is arranged on the inner side wall of the end, connected with the VCR connector, of the VCR outer ring. A second sealing ring and a third sealing ring are arranged at the two ends of the VCR filter screen respectively, the side, away from the VCR filter screen, of the second sealing ring is tightly attached to the inner wall of the VCR outer ring, and the side, away from the VCR filter screen, of the third sealing ring is tightly attached to the side wall of the VCR connector. By the adoption of the technical scheme, the first sealing ring, the second sealing ring, the third sealing ring, the VCR connector and the VCR outer ring are matched with one another to press the VCR filter screen at the connector connecting position, the VCR filter screen cannot be separated from the working position and cannot deform to generate a gap under the condition that looseness and damage of the VCR filter screen do not occur, and the working life of the VCR filter screen under high strength is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of special gas systems, in particular to a VCR gas filter gasket sealing and joining device. Background Art

[0002] In many microelectronics industries, some special gases are used. The equipment used includes: organic chemical vapor deposition equipment, coating equipment, and special gases include: silane, ammonia, etc. These special gases are flammable, explosive, toxic and corrosive. Special gases are generally stored in cylinder containers and supplied to the equipment through a series of safe and effective gas supply equipment. The gas supply equipment includes: large flow supply equipment, diverter plate, purge plate, etc. In order to effectively respond to the expansion of later production equipment, expansion valve reservations will be installed in the gas supply equipment. The expansion valve reservations often have internal leakage, resulting in unusable. In the current many expansion port design and operation schemes, either the design is not standardized and fails to achieve the expected effect, or redundant measures are added to increase the cost. The fine filter gaskets of highly toxic and harmful special gases have a working pressure of up to 400 bar, which is the root cause of the leakage. Utility Model Content

[0003] The utility model aims to provide a VCR gas filter gasket sealing joint device to solve the problems existing in the above-mentioned prior art.

[0004] The above technical objectives of the utility model are achieved through the following technical solutions:

[0005] A VCR gas filter gasket sealing joint device comprises a VCR outer ring, a VCR filter screen arranged inside the VCR outer ring and a VCR joint plugged into the VCR outer ring, wherein the VCR filter screen is used to filter the gas flowing from the VCR outer ring into the VCR joint, a first sealing ring is arranged on the inner side wall of one end of the VCR outer ring connected to the VCR joint, a second sealing ring and a third sealing ring are arranged on both ends of the VCR filter screen, a side of the second sealing ring away from the VCR filter screen is tightly fitted with the inner wall of the VCR outer ring, and a side of the third sealing ring away from the VCR filter screen is tightly fitted with the side wall of the VCR joint.

[0006] By adopting the above technical solution, the first sealing ring, the second sealing ring and the third sealing ring cooperate with the VCR joint and the VCR outer ring to press the VCR filter at the interface connection. When there is no loosening or damage to the VCR filter, the VCR filter will not move away from the working position and will not deform or form gaps, thereby ensuring the working life of the VCR filter under high strength.

[0007] In a further embodiment, the VCR filter is arranged inside the VCR outer ring through a limiting device, and the limiting device includes a first sleeve and a second sleeve, the first sleeve is fixedly installed inside the VCR outer ring, and the second sleeve presses the VCR filter against the side wall of the first sleeve, and the first sleeve and the second sleeve are used to press the VCR filter to prevent the VCR filter from deforming when the VCR filter is impacted.

[0008] By adopting the above technical solution, the added first sleeve and the second sleeve further compress the periphery of the VCR filter, thereby avoiding the problem of leakage caused by gaps at the edge of the VCR filter caused by deformation of the VCR filter when it is impacted. This arrangement makes the installation of the VCR filter more secure, not only can it work under high pressure, but also can maintain the original surface finish of the gasket to ensure its use requirements in the semiconductor industry. The maximum filtration accuracy of the VCR filter can reach 0.3 microns.

[0009] In a further embodiment, an annular groove for accommodating a sealing ring is provided on the outer walls of the first sleeve and the second sleeve, a plurality of sealing rings are provided in the annular groove, a step surface is provided on the outer walls of the first sleeve and the second sleeve, a fifth sealing ring is sleeved on the first sleeve and the second sleeve, and the fifth sealing ring fits tightly with the step surfaces of the first sleeve and the second sleeve.

[0010] In a further embodiment, a receiving ring and a quick connector are provided on the outer wall of the VCR connector, and a sixth sealing ring is provided inside the receiving ring.

[0011] In a further embodiment, a connecting sleeve is sleeved on the VCR joint, and one end of the connecting sleeve extends to the inside of the VCR outer ring and fits tightly with the inner wall of the VCR outer ring.

[0012] In a further embodiment, a seventh sealing ring is sleeved on the connecting sleeve.

[0013] In summary, the utility model has the following beneficial effects:

[0014] 1. The first sealing ring, the second sealing ring and the third sealing ring cooperate with the VCR joint and the VCR outer ring to press the VCR filter at the interface connection. In the case of no loosening or damage to the VCR filter, the VCR filter will not leave the working position and will not deform or have gaps, thus ensuring the working life of the VCR filter under high strength;

[0015] 2. The periphery of the VCR filter is further compressed by adding the first sleeve and the second sleeve, thereby avoiding the problem of leakage caused by gaps at the edge of the VCR filter caused by deformation when the VCR filter is impacted. This setting makes the installation of the VCR filter more secure, not only can it work under high pressure, but also can maintain the original surface finish of the gasket to ensure its use requirements in the semiconductor industry. The maximum filtration accuracy of the VCR filter can reach 0.3 microns. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0017] In the figure, 1, VCR outer ring; 2, VCR filter; 3, VCR joint; 4, first sealing ring; 5, second sealing ring; 6, third sealing ring; 7, first sleeve; 8, second sleeve; 9, sealing ring; 10, fifth sealing ring; 11, sixth sealing ring; 12, seventh sealing ring. DETAILED DESCRIPTION

[0018] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0019] The same parts are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached Figure 1 In the description of this specification, the words "bottom" and "top", "inside" and "outside" refer to directions toward or away from a particular component geometry, respectively. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this specification, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0020] Embodiment 1:

[0021] like Figure 1As shown, a VCR gas filter gasket sealing joint device comprises a VCR outer ring 1, a VCR filter screen 2 arranged inside the VCR outer ring 1 and a VCR joint 3 inserted in the VCR outer ring 1, the VCR filter screen 2 is arranged inside the VCR outer ring 1 through a limiting device, the limiting device comprises a first sleeve 7 and a second sleeve 8, the first sleeve 7 is fixedly installed inside the VCR outer ring 1, the second sleeve 8 presses the VCR filter screen 2 on the side wall of the first sleeve 7, the first sleeve 7 and the second sleeve 8 are used to press the VCR filter screen 2 to prevent the VCR filter screen 2 from deforming when impacted, the VCR filter screen 2 is used to filter the gas flowing from the VCR outer ring 1 to the VCR joint 3, the inner side wall of the end of the VCR outer ring 1 connected to the VCR joint 3 is provided with a first sealing ring 4, the two ends of the VCR filter screen 2 are respectively provided with a second sealing ring 5 and a third sealing ring 6, the second sealing ring 7 and the third sealing ring 6 are respectively provided with a first sealing ring 4 and a second sealing ring 5. The side of the sealing ring 5 away from the VCR filter 2 is tightly fitted with the inner wall of the VCR outer ring 1, the side of the third sealing ring 6 away from the VCR filter 2 is tightly fitted with the side wall of the VCR joint 3, the outer walls of the first sleeve 7 and the second sleeve 8 are both provided with annular grooves for accommodating the sealing ring 9, and multiple sealing rings 9 are arranged in the annular grooves, the outer walls of the first sleeve 7 and the second sleeve 8 are provided with step surfaces, the first sleeve 7 and the second sleeve 8 are sleeved with a fifth sealing ring 10, and the fifth sealing ring 10 is tightly fitted with the step surfaces of the first sleeve 7 and the second sleeve 8, the outer wall of the VCR joint 3 is provided with an accommodating ring and a quick connector, the accommodating ring is provided with a sixth sealing ring 11, the VCR joint 3 is sleeved with a connecting sleeve, one end of the connecting sleeve extends to the inside of the VCR outer ring 1 and is tightly fitted with the inner wall of the VCR outer ring 1, and the connecting sleeve is sleeved with a seventh sealing ring 12.

[0022] Specific implementation process: the VCR filter 2 is pressed between the first sleeve 7 and the second sleeve 8, and then the sealing ring 9 and the fifth sealing ring 10 are sleeved on the first sleeve 7 and the second sleeve 8, and finally the second sealing ring 5 and the third sealing ring 6 are sleeved on the outer walls of the first sleeve 7 and the second sleeve 8, and then the entire first sleeve 7 and the second sleeve 8 are embedded in the interior of the VCR outer ring. At this time, the VCR filter 2 is pressed by the first sleeve 7 and the second sleeve 8 and cannot move and deform freely. In addition, a sealing structure is provided on all the side walls of the first sleeve 7 and the second sleeve 8 that are in contact with the VCR outer ring, which further avoids the leakage of special gases. The periphery of the VCR filter 2 is further compressed by adding the first sleeve 7 and the second sleeve 8, thereby avoiding the problem of leakage caused by gaps at the edge of the VCR filter 2 due to deformation of the VCR filter 2 when it is impacted. This arrangement makes the installation of the VCR filter 2 more secure, not only can it work under high pressure, but also can maintain the original surface finish of the gasket to ensure its use requirements in the semiconductor industry. The maximum filtering accuracy of the VCR filter can reach 0.3 microns.

[0023] In the embodiments disclosed in the present invention, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the embodiments disclosed in the present invention can be understood according to specific circumstances.

[0024] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A VCR gas filter gasket sealing joint device, comprising a VCR outer ring (1), a VCR filter screen (2) arranged inside the VCR outer ring (1), and a VCR joint (3) plugged into the VCR outer ring (1), wherein the VCR filter screen (2) is used to filter the gas flowing from the VCR outer ring (1) into the VCR joint (3), and is characterized in that: A first sealing ring (4) is provided on the inner side wall of one end of the VCR outer ring (1) connected to the VCR joint (3), and a second sealing ring (5) and a third sealing ring (6) are provided at both ends of the VCR filter screen (2), respectively. The side of the second sealing ring (5) away from the VCR filter screen (2) is tightly fitted with the inner wall of the VCR outer ring (1), and the side of the third sealing ring (6) away from the VCR filter screen (2) is tightly fitted with the side wall of the VCR joint (3).

2. A VCR gas filter gasket sealing and joining device according to claim 1, characterized in that: The VCR filter (2) is arranged inside the VCR outer ring (1) through a limiting device, and the limiting device comprises a first sleeve (7) and a second sleeve (8), the first sleeve (7) is fixedly installed inside the VCR outer ring (1), and the second sleeve (8) presses the VCR filter (2) against the side wall of the first sleeve (7), and the first sleeve (7) and the second sleeve (8) are used to press the VCR filter (2) to prevent the VCR filter (2) from deforming when it is impacted.

3. A VCR gas filter gasket sealing and joining device according to claim 2, characterized in that: The outer walls of the first sleeve (7) and the second sleeve (8) are both provided with an annular groove for accommodating a sealing ring (9), and a plurality of sealing rings (9) are arranged in the annular groove. The outer walls of the first sleeve (7) and the second sleeve (8) are provided with a step surface, and the first sleeve (7) and the second sleeve (8) are sleeved with a fifth sealing ring (10), and the fifth sealing ring (10) is tightly fitted with the step surfaces of the first sleeve (7) and the second sleeve (8).

4. A VCR gas filter gasket sealing and joining device according to claim 1, characterized in that: An accommodating ring and a quick-connector are arranged on the outer wall of the VCR joint (3), and a sixth sealing ring (11) is arranged inside the accommodating ring.

5. A VCR gas filter gasket sealing and joining device according to claim 1, characterized in that: The VCR joint (3) is sleeved with a connecting sleeve, one end of which extends to the inside of the VCR outer ring (1) and fits tightly with the inner wall of the VCR outer ring (1).

6. A VCR gas filter gasket sealing and joining device according to claim 5, characterized in that: A seventh sealing ring (12) is sleeved on the connecting sleeve.

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