Spray head and air gun

Abstract

The utility model provides a spray head and an air gun. The spray head comprises a connecting part and a rotating part, the connecting part comprises an air inlet end and an air outlet end, the air inlet end is provided with a connecting structure used for being connected with the gun body, the air outlet end is provided with more than two air outlets, and the air outlets are communicated with the air inlet end; the rotating part is connected with the air outlet end and can rotate relative to the air outlet end; a long-strip-shaped through hole is formed in the rotating part; when the rotating part rotates relative to the air outlet end, the number of the air outlet holes communicated with the through hole is switched from M to N, both M and N are integers larger than or equal to 1, and M is larger than N. The number of the air outlet holes communicated with the through hole can be rapidly switched by rotating the rotating part, and when the number of particles on the photomask or the component to be cleaned is large and the distribution area is large, the M air outlet holes can be used for rapidly cleaning the particles, so that the cleaning efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a spray head and an air gun. Background Art

[0002] Particles are generated during the semiconductor manufacturing process. After the particles fall on the surface of the mask, an air gun is needed to blow away the particles on the surface of the mask in order to clean the mask. Figure 1 As shown, the air gun includes a nozzle and a gun body, the nozzle includes an air inlet end 1 and an air outlet end 2, the air inlet end 1 is connected to the gun body, and an air outlet hole 3 is arranged on the air outlet end 2. The gas output from the gun body enters from the air inlet end 1 of the nozzle and is discharged from the air outlet hole 3.

[0003] However, for an air gun with a single air outlet, the blowing area of ​​the air outlet is small. When the number of particles on the mask is small, this type of air gun can clean the particles on the mask quickly; but when the number of particles on the mask is large and the distribution area is large, it takes a long time to clean the particles on the mask, and the cleaning efficiency is low. Utility Model Content

[0004] The utility model provides a spray head and an air gun, so as to solve the technical problem that the cleaning efficiency of an air gun with a single air outlet is low when the number of particles is large and the distribution area is large.

[0005] In order to solve the above technical problems, the utility model provides a nozzle, comprising a connecting part and a rotating part; the connecting part comprises an air inlet end and an air outlet end, the air inlet end is provided with a connecting structure for connecting a gun body, the air outlet end is provided with two or more air outlet holes, and the air outlet holes are connected to the air inlet end;

[0006] The rotating part is connected to the air outlet end, and the rotating part is rotatable relative to the air outlet end; a long strip-shaped through hole is provided on the rotating part; when the rotating part rotates relative to the air outlet end, the number of the air outlet holes connected to the through hole switches from M to N, wherein M and N are both integers greater than or equal to 1, and M is greater than N.

[0007] Optionally, the end surface of the gas outlet end is circular, and the two or more gas outlet holes are distributed along the diameter direction of the end surface of the gas outlet end.

[0008] Optionally, the total number of the air outlet holes is an odd number, one of the air outlet holes is coaxially arranged with the end face of the air outlet end, and the other air outlet holes are symmetrically distributed about the center of the end face of the air outlet end.

[0009] Optionally, M is greater than or equal to 5, and N is equal to 1.

[0010] Optionally, the contour shape of the connecting portion is cylindrical.

[0011] Optionally, the contour shape of the connecting portion is a truncated cone, and the diameter of the end surface of the air inlet end is greater than the diameter of the end surface of the air outlet end.

[0012] Optionally, the rotating portion is connected to the air outlet end via threads.

[0013] Optionally, the air outlet end is provided with a circular groove, the edge of the rotating part is stuck in the groove, and the end surface of the rotating part and the end surface of the air outlet end are in contact with each other.

[0014] Optionally, the connection structure is a thread.

[0015] The utility model also provides an air gun, comprising a gun body and a nozzle as described in any one of the above items, wherein an air inlet end of the nozzle is connected to the gun body.

[0016] The utility model provides a nozzle and an air gun, comprising a connecting part and a rotating part. By rotating the rotating part, the number of air outlets connected to the through hole can be quickly switched. When the number of particles on the photomask or the part to be cleaned is small, N air outlets can be used to quickly clean the particles; when the number of particles on the photomask or the part to be cleaned is large and the distribution area is large, M air outlets can be used to quickly clean the light particles. The unexpected effect of the nozzle is that the number of air outlets and the sweeping area can be quickly switched by rotating the rotating part, thereby improving the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a nozzle in the prior art.

[0018] Figure 2 It is an exploded schematic diagram of a nozzle provided by an embodiment of the utility model.

[0019] Figure 3 yes Figure 2 Schematic diagram of the right side view of the nozzle after assembly.

[0020] Figure 4 yes Figure 3 Schematic diagram of the rotating part after rotating 90°.

[0021] [Description of reference numerals is as follows]:

[0022] Figure 1 : Inlet end-1, outlet end-2, outlet hole-3;

[0023] Figure 2-Figure 4 : Connecting part-11, rotating part-12;

[0024] Air inlet end-111, air outlet end-112;

[0025] Vent-1121;

[0026] Via-121. DETAILED DESCRIPTION

[0027] In order to make the purpose, advantages and features of the utility model clearer, a spray head and an air gun proposed by the utility model are further described in detail below with reference to the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0028] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0029] like Figure 2-Figure 4 As shown, this embodiment provides a nozzle, including a connecting part 11 and a rotating part 12; the connecting part 11 includes an air inlet end 111 and an air outlet end 112, the air inlet end 111 is provided with a connecting structure for connecting to a gun body, the air outlet end 112 is provided with more than two air outlet holes 1121, and the air outlet holes 1121 are connected to the air inlet end 111; the rotating part 12 is connected to the air outlet end 112, and the rotating part 12 is rotatable relative to the air outlet end 112; the rotating part 12 is provided with a long strip through hole 121; when the rotating part 12 rotates relative to the air outlet end 112, the number of the air outlet holes 1121 connected to the through hole 121 switches from M to N, wherein both M and N are integers greater than or equal to 1, and M is greater than N. The nozzle can be used in an air gun or a water gun to spray gas or liquid.

[0030] The embodiment provides a nozzle, including a connecting portion 11 and a rotating portion 12. The number of air outlets 1121 connected to the through hole 121 can be quickly switched by rotating the rotating portion 12. When the number of particles on the photomask or the part to be cleaned is small, N air outlets 1121 can be used to quickly clean the particles; when the number of particles on the photomask or the part to be cleaned is large and the distribution area is large, M air outlets 1121 can be used to quickly clean the particles. The unexpected effect of the nozzle is that the number of air outlets 1121 and the sweeping area can be quickly switched by rotating the rotating portion 12, thereby improving the cleaning efficiency.

[0031] Optional, such as Figure 2 and Figure 3As shown, the end surface of the gas outlet end 112 is circular, and the two or more gas outlet holes 1121 are distributed along the diameter direction of the end surface of the gas outlet end 112, so that it is convenient to process and form the gas outlet holes 1121. In other embodiments, the two or more gas outlet holes 1121 can be irregularly distributed on the end surface of the gas outlet end 112.

[0032] Optional, such as Figure 2 and Figure 3 As shown, the total number of the air outlet holes 1121 is an odd number, one of the air outlet holes 1121 is coaxially arranged with the end face of the air outlet end 112, and the other air outlet holes 1121 are symmetrically distributed about the center of the end face of the air outlet end 112, so that the air outlet holes 1121 can be easily processed and formed, and the number of the air outlet holes 1121 can be easily switched.

[0033] Optional, such as Figure 3 and Figure 4 As shown, M is greater than or equal to 5, and N is equal to 1. Figure 3 As shown, the total number of the air outlets 1121 may be 5 or 7. When the rotating portion 12 rotates to a certain angle, all the air outlets 1121 may exhaust air outwards. Figure 4 As shown, when the rotating part 12 rotates to another angle, only one of the air outlet holes 1121 can exhaust air outwards. In other embodiments, M can be equal to 6, and N can be equal to 2.

[0034] Optional, such as Figure 2 As shown, the contour shape of the connecting portion 11 is cylindrical, which makes it convenient to process and form the connecting portion 11.

[0035] Optional, reference Figure 2 As shown, the contour shape of the connecting portion 11 is a truncated cone, and the diameter of the end face of the air inlet end 111 is larger than the diameter of the end face of the air outlet end 112, so that the air pressure inside the air outlet end 112 can be increased, so that the air pressure output by the air outlet 1121 is higher.

[0036] Optional, reference Figure 2 As shown, the rotating part 12 is connected to the air outlet end 112 via threads, which makes it easy to install and disassemble the rotating part 12.

[0037] Optional, reference Figure 2 As shown, the air outlet 112 is provided with a circular groove, the edge of the rotating part 12 is stuck in the groove, and the end surface of the rotating part 12 fits with the end surface of the air outlet 112, so that the rotating part 12 is easy to install and rotate.

[0038] Optional, reference Figure 2As shown, the connection structure is a thread, which facilitates the installation and removal of the connection part 11. In other embodiments, the connection part 11 can be connected to the gun body through a slot.

[0039] refer to Figure 2 As shown, based on the same technical concept as the above-mentioned nozzle, this embodiment provides an air gun, including a gun body and a nozzle as described in any one of the above items, and the air inlet end 111 of the nozzle is connected to the gun body.

[0040] The present embodiment provides an air gun including a nozzle, which includes a connecting portion 11 and a rotating portion 12. The number of air outlets 1121 connected to the through hole 121 can be quickly switched by rotating the rotating portion 12. When the number of particles on the photomask or the part to be cleaned is small, N air outlets 1121 can be used to quickly clean the particles; when the number of particles on the photomask or the part to be cleaned is large and the distribution area is large, M air outlets 1121 can be used to quickly clean the particles. The unexpected effect of the nozzle is that the number of air outlets 1121 and the sweeping area can be quickly switched by rotating the rotating portion 12, thereby improving the cleaning efficiency.

[0041] In summary, the utility model provides a nozzle and an air gun, including a connecting portion 11 and a rotating portion 12. By rotating the rotating portion 12, the number of air outlets 1121 connected to the through hole 121 can be quickly switched. When the number of particles on the photomask or the part to be cleaned is small, N air outlets 1121 can be used to quickly clean the particles; when the number of particles on the photomask or the part to be cleaned is large and the distribution area is large, M air outlets 1121 can be used to quickly clean the particles. The unexpected effect of the nozzle is that the number of air outlets 1121 and the sweeping area can be quickly switched by rotating the rotating portion 12, thereby improving the cleaning efficiency.

[0042] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A nozzle, characterized in that: It comprises a connecting part and a rotating part; the connecting part comprises an air inlet end and an air outlet end, the air inlet end is provided with a connecting structure for connecting to a gun body, the air outlet end is provided with two or more air outlet holes, and the air outlet holes are connected to the air inlet end; The rotating part is connected to the air outlet end, and the rotating part is rotatable relative to the air outlet end; a long strip-shaped through hole is provided on the rotating part; when the rotating part rotates relative to the air outlet end, the number of the air outlet holes connected to the through hole switches from M to N, wherein M and N are both integers greater than or equal to 1, and M is greater than N.

2. A nozzle as claimed in claim 1, characterized in that: The end surface of the gas outlet end is circular, and the two or more gas outlet holes are distributed along the diameter direction of the end surface of the gas outlet end.

3. A nozzle as claimed in claim 2, characterized in that: The total number of the air outlet holes is an odd number, one of the air outlet holes is coaxially arranged with the end face of the air outlet end, and the other air outlet holes are symmetrically distributed about the center of the end face of the air outlet end.

4. A nozzle as claimed in claim 3, characterized in that: The M is greater than or equal to 5, and the N is equal to 1.

5. A nozzle as claimed in claim 1, characterized in that: The connecting portion has a cylindrical outline.

6. A nozzle as claimed in claim 1, characterized in that: The contour shape of the connecting portion is a truncated cone, and the diameter of the end surface of the air inlet end is greater than the diameter of the end surface of the air outlet end.

7. A nozzle as claimed in claim 5 or 6, characterized in that: The rotating part is connected to the air outlet end via threads.

8. A nozzle as claimed in claim 5 or 6, characterized in that: The air outlet end is provided with a circular groove, the edge of the rotating part is stuck in the groove, and the end surface of the rotating part is in contact with the end surface of the air outlet end.

9. A nozzle as claimed in claim 1, characterized in that: The connecting structure is a thread.

10. An air gun, characterized in that: It comprises a gun body and a nozzle as claimed in any one of claims 1 to 9, wherein an air inlet end of the nozzle is connected to the gun body.

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