Water-cooling rotating shaft for crucible
By designing a water-cooled rotary shaft of the first sealing ring directly connected to the protective sleeve, the problem of water-cooled rotary shaft in the prior art caused by wear of the sealing ring is solved, and the cost-reducing effect is achieved.
Patent Information
- Application Number
- CN202420644051.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-03-29
AI Technical Summary
When the existing silicon carbide crystals grow crystals in the crucible, the water-cooled rotary shaft leaks due to wear of the sealing ring and the rotary shaft, and the water-cooled rotary shaft needs to be replaced, which is relatively expensive.
A water-cooled rotating shaft for crucibles is designed, including a rotating shaft, a protective sleeve and a housing. The first sealing ring is directly connected to the protective sleeve, rather than to the rotating shaft, so as to avoid wear of the rotating shaft due to the rotation of the sealing ring.
It effectively avoids wear of the rotating shaft and can only be replaced when the protective sleeve is worn, reducing the cost of replacing the rotating shaft.
Smart Images
Figure CN222613546U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide, in particular to a water-cooled rotating shaft of a crucible. Background Art
[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances.
[0003] The inventors have found that when the existing silicon carbide crystal grows in a crucible, the crucible will rotate under the drive of the rotary drive device. Since the crucible temperature is too high, a water-cooled structure is usually required for the rotating shaft connected to the crucible. The water-cooled rotating shaft rotates with the sealing ring. After running for a period of time, the sealing ring and the water-cooled rotating shaft will wear out, causing water leakage in the water-cooled structure. At this time, the water-cooled rotating shaft needs to be replaced, which is costly. Utility Model Content
[0004] The utility model aims to provide a water-cooled rotating shaft for a crucible, which can avoid the wear of the rotating shaft and thus reduce the cost.
[0005] The embodiment of the utility model is achieved as follows:
[0006] In a first aspect, the utility model provides a crucible with a water-cooled rotating shaft, comprising:
[0007] A rotating shaft, one end of which is connected to a driving member, and the driving member is used to drive the rotating shaft to rotate along its own axis;
[0008] A protective sleeve, which is sleeved on the rotating shaft and is detachably connected to the rotating shaft;
[0009] The outer shell is sleeved on the protective sleeve, the outer shell is provided with a plurality of first annular grooves spaced along its own axial direction, a first sealing ring is arranged in the first annular groove, the outer shell, the protective sleeve and any two adjacent first sealing rings jointly define a water cooling cavity, and the protective sleeve can rotate relative to the outer shell along with the rotating shaft.
[0010] In an optional embodiment, the first sealing ring is a Gly Ring.
[0011] In an optional embodiment, the protective sleeve is positioned and connected to the rotating shaft via a positioning pin.
[0012] In an optional embodiment, the protective sleeve is engaged with the rotating shaft.
[0013] In an optional embodiment, a bearing is further provided between the protective sleeve and the housing.
[0014] In an optional embodiment, the number of bearings is two and the two bearings are spaced apart along the axial direction of the protective sleeve, the two bearings are respectively located at two ends of the protective sleeve in the axial direction, and the two bearings are both located outside the water-cooling cavity.
[0015] In an optional embodiment, the shell is further provided with a second annular groove, the second annular groove is axially spaced apart from the first annular groove, a second sealing ring is installed in the second annular groove, and the second annular groove is located outside the water cooling cavity.
[0016] In an optional embodiment, the number of the second sealing ring and the number of the second annular grooves are both two and they are spaced apart along the axial direction of the housing, and the plurality of first annular grooves are located between the two second annular grooves.
[0017] In an optional embodiment, the protective cover is in the shape of a hollow cylinder, and the protective cover is exposed at both ends of the rotating shaft.
[0018] In an optional embodiment, a closed water cavity is opened in the rotating shaft, and a water inlet and a water outlet are provided on the outer wall of the outer shell. The water inlet and the water outlet are respectively connected to two water-cooling cavities located at both ends in the axial direction. A plurality of first through holes arranged at intervals are opened on the outer wall of the rotating shaft, and a plurality of second through holes arranged at intervals are opened on the outer wall of the protective cover. Each water-cooling cavity is connected to the closed water cavity through a first through hole and a second through hole.
[0019] The beneficial effects of the embodiments of the utility model are as follows: the embodiments of the utility model provide a water-cooled rotating shaft for a crucible, including a rotating shaft, a protective sleeve and an outer shell. One end of the rotating shaft is used to connect with a driving member, and the driving member is used to drive the rotating shaft to rotate along its own axis. The protective sleeve is sleeved on the rotating shaft and is detachably connected to the rotating shaft, and the outer shell is sleeved on the protective sleeve. The outer shell is provided with a plurality of first annular grooves spaced along its own axial direction, and a first sealing ring is arranged in the first annular groove. The outer shell, the protective sleeve and any two adjacent first sealing rings jointly define a water-cooling cavity, and the protective sleeve can rotate relative to the outer shell along with the rotating shaft. The first sealing ring is directly connected to the protective sleeve instead of the rotating shaft, so that the relative rotation of the rotating shaft with the first sealing ring can be effectively avoided, thereby effectively avoiding the wear of the rotating shaft caused by the relative rotation of the rotating shaft with the first sealing ring. After the protective sleeve is worn, only the protective sleeve needs to be replaced, avoiding the direct replacement of the rotating shaft, thereby effectively reducing the cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0021] Figure 1 A schematic structural diagram of a water-cooled rotating shaft for a crucible provided in an embodiment of the utility model.
[0022] Icons: 1- water-cooled rotating shaft of crucible; 100- rotating shaft; 110- first through hole; 120- closed water cavity; 200- protective cover; 210- second through hole; 300- housing; 310- first sealing ring; 320- second sealing ring; 330- water-cooling cavity; 340- water inlet; 350- water outlet; 400- bearing. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.
[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0026] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.
[0027] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0028] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0029] The specific structure of a water-cooled rotating shaft for a crucible provided by an embodiment of the utility model and the corresponding technical effects thereof are described in detail below in conjunction with the patent drawings.
[0030] Please refer to Figure 1 The embodiment of the utility model provides a water-cooled rotating shaft 1 for a crucible, which includes a rotating shaft 100 , a protective cover 200 and a housing 300 .
[0031] One end of the rotating shaft 100 is used to connect with a driving member (not shown in the figure), and the driving member is used to drive the rotating shaft 100 to rotate along its own axis. It can be understood that the other end of the rotating shaft 100 is a mounting end, which is used to connect with the crucible to drive the crucible to rotate.
[0032] The protective sleeve 200 is sleeved on the rotating shaft 100 and is detachably connected to the rotating shaft 100. It should be noted that the protective sleeve 200 can rotate with the rotating shaft 100. The outer shell 300 is sleeved on the protective sleeve 200. The outer shell 300 is provided with a plurality of first annular grooves spaced along its axial direction. The first annular grooves are provided with first sealing rings 310. The outer shell 300, the protective sleeve 200 and any two adjacent first sealing rings 310 jointly define a water cooling chamber 330. The protective sleeve 200 can rotate relative to the outer shell 300 along with the rotating shaft 100.
[0033] It should be noted that the housing 300 is connected to an external structure (not shown in the figure) to ensure that it is fixed and does not rotate with the protective cover 200.
[0034] It can be understood that since the protective cover 200 is provided in this embodiment, the first sealing ring 310 is directly connected to the protective cover 200 instead of being connected to the rotating shaft 100. Therefore, it is possible to effectively avoid the relative rotation of the rotating shaft 100 and the first sealing ring 310, which would cause wear of the rotating shaft 100. After the protective cover 200 is worn, it is sufficient to replace the protective cover 200, thereby avoiding direct replacement of the rotating shaft 100, thereby effectively reducing costs.
[0035] In detail, in this embodiment, the first sealing ring 310 is a Gly ring. It can be understood that the Gly ring is composed of an O-ring and polytetrafluoroethylene, and the Gly ring can achieve bidirectional sealing. Regardless of whether the pressure comes from the inside (axial pressure) or the outside (cavity pressure), the Gly ring can effectively prevent leakage of the fluid medium.
[0036] The Gly ring also has low friction performance. The addition of PTFE slip ring significantly reduces the friction of the sealing surface, making the operation smoother and reducing energy consumption under dynamic conditions, while reducing the aging of seals caused by friction heat.
[0037] In addition, the Glyd ring is easy to install. The Glyd ring is compact in design and only needs to be simply placed in the sealing groove during installation. No complicated pre-pressing or adjustment is required, which simplifies the assembly process.
[0038] Of course, in some other embodiments, the first sealing ring 310 may also be other commonly used sealing rings, and the first sealing ring 310 is not limited to a Gley ring.
[0039] Optionally, the protective cover 200 is positioned and connected to the rotating shaft 100 via a positioning pin (not shown in the figure), that is, after the protective cover 200 is sleeved on the rotating shaft 100, it can be sequentially plugged into the protective cover 200 and the rotating shaft 100 via the positioning pin. In other words, the protective cover 200 and the rotating shaft 100 are provided with corresponding connecting holes (not shown in the figure), and can be sequentially plugged into via the positioning pin to achieve a pin-positioned connection between the protective cover 200 and the rotating shaft 100, thereby ensuring that the protective cover 200 does not rotate relative to the rotating shaft 100.
[0040] In some other embodiments, the protective cover 200 is snap-fitted with the rotating shaft 100. For example, the protective cover 200 is provided with a snap-fitting portion, and the rotating shaft 100 is provided with a matching portion snap-fitted with the snap-fitting portion. For example, the snap-fitting portion and the matching portion are mutually snap-fitted hook structures to ensure that the protective cover 200 does not rotate relative to the rotating shaft 100.
[0041] Alternatively, in some other embodiments, a slot is provided in the protective cover 200 , and a snap-fitting protrusion is provided on the outer wall of the rotating shaft 100 , and the protective cover 200 is snap-fitted with the snap-fitting protrusion of the rotating shaft 100 through the slot.
[0042] Alternatively, a clamping protrusion may be provided on the inner wall of the protective sleeve 200 , and a clamping groove that is clamped and matched with the clamping protrusion may be provided on the outer wall of the rotating shaft 100 .
[0043] Of course, in some other embodiments, the protective cover 200 is provided with a connecting hole, and the rotating shaft 100 is provided with a threaded hole, and the protective cover 200 and the rotating shaft 100 can also be connected by threaded fasteners.
[0044] It should be noted that in order to ensure that both ends of the rotating shaft 100 are exposed to facilitate the assembly of the rotating shaft 100 with the crucible or the cooperation with the driving member, in this embodiment, the protective cover 200 is hollow cylindrical and both ends of the rotating shaft 100 are exposed.
[0045] Optionally, in order to further seal the water-cooling chamber 330 and prevent water leakage in the water-cooling chamber 330, the outer shell 300 is also provided with a second annular groove, the second annular groove is axially spaced from the first annular groove, a second sealing ring 320 is installed in the second annular groove, and the second annular groove is located outside the water-cooling chamber 330.
[0046] There are two second sealing rings 320 and two second annular grooves, which are spaced apart along the axial direction of the housing 300. The plurality of first annular grooves are located between the two second annular grooves. That is to say, the two second sealing members are auxiliary seals, thereby preventing water leakage in the water-cooling cavity 330 on both sides in the axial direction. It is understandable that the two second sealing rings 320 may also be Gray rings.
[0047] In this embodiment, a closed water chamber 120 is opened in the rotating shaft 100, and a water inlet 340 and a water outlet 350 are provided on the outer wall of the outer shell 300. The water inlet 340 and the water outlet 350 are respectively connected to two water-cooling chambers 330 located at both ends in the axial direction. A plurality of first through holes 110 are opened on the outer wall of the rotating shaft 100, and a plurality of second through holes 210 are opened on the outer wall of the protective cover 200. Each water-cooling chamber 330 is connected to the closed water chamber 120 through a first through hole 110 and a second through hole 210.
[0048] In detail, in the present embodiment, the number of the first annular groove and the first sealing ring 310 is three, that is, the number of the water-cooling chamber 330 and the water opening is two, and the two water-cooling chambers 330 are divided into the first water-cooling chamber 330 and the second water-cooling chamber 330. Therefore, external cooling water can flow into the annular first water-cooling chamber 330 through the water inlet 340, and flow into the closed water chamber 120. The water in the closed water chamber 120 will rise from low to high. When it rises to the height corresponding to the second water-cooling chamber 330, it will flow into the second water-cooling chamber 330 from the first through hole 110 and the second through hole 210, and flow out from the water outlet 350, thereby achieving cooling of the rotating shaft 100.
[0049] Of course, in some other embodiments, the number of the water-cooling chambers 330 is not limited to two, but may be multiple, such as three, four or five.
[0050] In order to ensure that the protective sleeve 200 can smoothly rotate along with the rotating shaft 100 relative to the first sealing ring 310 and the housing 300, in this embodiment, a bearing 400 is further disposed between the protective sleeve 200 and the housing 300.
[0051] Optionally, there are two bearings 400, which are spaced apart along the axial direction of the protective sleeve 200. The two bearings 400 are respectively located at two ends of the axial direction of the protective sleeve 200. Both bearings 400 are located outside the water-cooling chamber 330. In detail, the two second sealing rings 320 mentioned above are located between the two bearings 400.
[0052] In summary, a water-cooled rotating shaft 1 for a crucible provided in an embodiment of the utility model comprises a rotating shaft 100, a protective sleeve 200 and a shell 300. One end of the rotating shaft 100 is used to be connected to a driving member, and the driving member is used to drive the rotating shaft 100 to rotate along its own axis. The protective sleeve 200 is sleeved on the rotating shaft 100 and is detachably connected to the rotating shaft 100. The shell 300 is sleeved on the protective sleeve 200. The shell 300 is provided with a plurality of first annular grooves spaced along its own axial direction. A first sealing ring 310 is provided in the first annular groove. The shell 300, the protective sleeve 200 and any two adjacent first sealing rings 310 jointly define a water-cooling chamber 330. The protective sleeve 200 can rotate relative to the shell 300 along with the rotating shaft 100. The first sealing ring 310 is directly connected to the protective cover 200 instead of the rotating shaft 100, so it can effectively prevent the rotating shaft 100 from being worn due to the relative rotation between the first sealing ring 310 and the rotating shaft 100. After the protective cover 200 is worn, only the protective cover 200 needs to be replaced, avoiding the direct replacement of the rotating shaft 100, thereby effectively reducing costs.
[0053] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A crucible with a water-cooled rotating shaft, characterized in that: include: A rotating shaft (100), one end of the rotating shaft (100) being connected to a driving member, the driving member being used to drive the rotating shaft (100) to rotate along its own axis; A protective sleeve (200), the protective sleeve (200) being sleeved on the rotating shaft (100) and being detachably connected to the rotating shaft (100); A shell (300), wherein the shell (300) is sleeved on the protective sleeve (200), the shell (300) is provided with a plurality of first annular grooves spaced apart along its own axial direction, a first sealing ring (310) is arranged in the first annular groove, the shell (300), the protective sleeve (200) and any two adjacent first sealing rings (310) jointly define a water cooling chamber (330), and the protective sleeve (200) can rotate relative to the shell (300) along with the rotating shaft (100).
2. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: The first sealing ring (310) is a Gley ring.
3. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: The protective sleeve (200) is positioned and connected to the rotating shaft (100) via a positioning pin.
4. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: The protective sleeve (200) is clamped with the rotating shaft (100).
5. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: A bearing (400) is also provided between the protective sleeve (200) and the housing (300).
6. The crucible according to claim 5 has a water-cooled rotating shaft, characterized in that: The number of the bearings (400) is two, and the two bearings (400) are spaced apart along the axial direction of the protective sleeve (200). The two bearings (400) are respectively located at two ends of the axial direction of the protective sleeve (200), and the two bearings (400) are both located outside the water-cooling chamber (330).
7. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: The housing (300) is further provided with a second annular groove, the second annular groove being spaced apart from the first annular groove in the axial direction, a second sealing ring (320) being installed in the second annular groove, and the second annular groove being located outside the water cooling cavity (330).
8. The crucible according to claim 7 has a water-cooled rotating shaft, characterized in that: The number of the second sealing ring (320) and the number of the second annular groove are both two and they are arranged at intervals along the axial direction of the housing (300), and a plurality of the first annular grooves are located between the two second annular grooves.
9. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: The protective cover (200) is in the shape of a hollow cylinder, and both ends of the rotating shaft (100) are exposed from the protective cover (200).
10. The crucible according to claim 1 has a water-cooled rotating shaft, characterized in that: A closed water cavity (120) is provided in the rotating shaft (100); a water inlet (340) and a water outlet (350) are provided on the outer wall of the housing (300); the water inlet (340) and the water outlet (350) are respectively connected to two water cooling cavities (330) located at two ends in the axial direction; a plurality of first through holes (110) arranged at intervals are provided on the outer wall of the rotating shaft (100); a plurality of second through holes (210) arranged at intervals are provided on the outer wall of the protective sleeve (200); each of the water cooling cavities (330) is connected to the closed water cavity (120) via one of the first through holes (110) and one of the second through holes (210).