Integrated external ignition device suitable for diffusion furnace

Abstract

The utility model relates to the technical field, and discloses an integrated external ignition device suitable for a diffusion furnace, one end of a pipe opening of a quartz bubble is provided with an ignition mechanism penetrating through a sealing cover in a conducting mode, the other end of the pipe opening of the quartz bubble is provided with a quartz pipe penetrating through the sealing cover in a conducting mode, and a cooling coil pipe is wound on the outer side of a bubble body of the quartz bubble. And a cavity of the sealing cover is filled with a sealing packing pad for packing the ignition mechanism, the quartz tube, the quartz bulb and the cooling coil. According to the utility model, through the conduction combination of the quartz bulb, the ignition mechanism and the quartz tube and the spiral wrapping of the cooling coil on the quartz bulb, good integrated assembly performance is achieved, then under the sealing cover combined by the sealing cover and the sealing wrapping pad, the modular assembly work of tight joint closing is achieved, the integrated packaging is perfect, the occupied space is small, and the cost is low. Moreover, the external nodes are less exposed, the safety and stability are better, and the interference of the external environment can be reduced to the greatest extent.

Description

Technical Field

[0001] The utility model relates to the technical field, in particular to an integrated external ignition device suitable for a diffusion furnace. Background Art

[0002] The diffusion furnace is one of the important process equipment in the front process of the semiconductor production line. It is used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. In the diffusion process, hydrogen-oxygen combustion is required for wet oxygen oxidation, which is usually implemented by an external ignition device, as shown in the existing patent technology: After searching, the China Patent Network discloses an integrated external ignition device suitable for a diffusion furnace (public announcement number CN206637655U). When such a device is assembled and used, the combination of the quartz tube and the S-bend tube is connected to the quartz bulb, and the S-bend tube and the quartz bulb are designed to be an integrated structure, and then the combination of the straight tube and the small furnace body is connected to the quartz bulb, so that the injector is inserted into the straight tube and connected to the quartz bulb cavity to complete its integrated assembly work. By improving the connection method between quartz and quartz, and integrating the split structure of the quartz bulb and the S-bend into an integrated structure, it effectively reduces gas leakage during the process and increases parameter stability.

[0003] However, there are still some shortcomings in the above-mentioned public patents and the diffusion furnace external ignition device adopted in the existing market: the existing way of connecting the conductive components to form an integrated structure has many connection nodes, the integrated modular performance is poor, the connection nodes are easily disturbed by external factors, resulting in cracks and leakage, and the integrated module has poor self-protection performance. To this end, those skilled in the art provide an integrated external ignition device suitable for a diffusion furnace to solve the problems raised in the above-mentioned background technology. Utility Model Content

[0004] The main purpose of the utility model is to provide an integrated external ignition device suitable for a diffusion furnace, which can effectively solve the problems of insufficient integrated modularization and poor self-protection performance of the existing diffusion furnace external ignition device in the background technology.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: an integrated external ignition device suitable for a diffusion furnace, comprising two sets of sealing covers in the form of abutting sealing covers;

[0006] A quartz bulb is arranged in the middle of the cover body of the sealing cover, one end of the tube mouth of the quartz bulb is connected to an ignition mechanism penetrating the sealing cover, and the other end of the tube mouth of the quartz bulb is connected to a quartz tube penetrating the sealing cover;

[0007] The outer side of the quartz bulb is surrounded by a cooling coil;

[0008] The chamber of the sealing cover is filled with a sealing packing of an ignition mechanism, a quartz tube, a quartz bulb and a cooling coil.

[0009] As a further solution of the utility model: the ignition mechanism and the air duct of the quartz tube are both inserted into the bulb body cavity of the quartz bulb.

[0010] As a further solution of the utility model: an inner groove matched with a cooling coil is provided on the outer side of the quartz bulb, and the cooling coil is a spiral tube structure.

[0011] As a further solution of the utility model: the sealing pad is one of rock wool board material, polyurethane foam material and ceramic fiber material.

[0012] As a further solution of the utility model: the ignition mechanism includes a hydrogen ring pipe and an oxygen ring pipe arranged in parallel with the hydrogen ring pipe, one side of the pipeline of the hydrogen ring pipe is conductively connected to the hydrogen main pipe, and the inner pipe of the hydrogen ring pipe is circumferentially arranged with a plurality of hydrogen nozzles extending into the interior of the oxygen ring pipe pipeline, one side of the pipeline of the oxygen ring pipe is conductively connected to the oxygen main pipe, and the inner wall of the pipeline of the oxygen ring pipe is circumferentially arranged with a plurality of oxygen nozzles.

[0013] As a further solution of the utility model: the plurality of groups of hydrogen nozzles and the plurality of groups of oxygen nozzles are arranged symmetrically in a ring shape.

[0014] As a further solution of the utility model: a first air pressure valve is installed on one side of the pipeline of the hydrogen ring pipe, and a second air pressure valve is installed on one side of the pipeline of the oxygen ring pipe.

[0015] Compared with the prior art, the utility model has the following beneficial effects:

[0016] 1. The utility model has good integrated assembly performance by utilizing the conductive combination of the quartz bulb, the ignition mechanism, and the quartz tube, and the spiral sheathing of the quartz bulb by the cooling coil. Then, under the sealed cover of the sealing cover and the sealing pad combination, it has a tightly sealed modular assembly work, a perfect integrated package, and occupies a small space. In addition, its external nodes are less exposed, and the safety and stability are better. It can minimize the interference of the external environment and ensure the stability and accuracy of its working operation.

[0017] 2. The utility model utilizes a parallel combination of a hydrogen ring tube and an oxygen ring tube in the ignition mechanism. Under the horizontal spraying of the hydrogen nozzle and the vertical spraying of the oxygen nozzle, oxygen and hydrogen can be kept in vertical impact convection mixing, so as to ensure the uniformity of the hydrogen and oxygen mixture and improve the sufficiency of gas combustion in the diffusion furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a structural schematic diagram of an integrated external ignition device suitable for a diffusion furnace according to the utility model;

[0019] Figure 2 It is a partial cross-sectional view of an integrated external ignition device suitable for a diffusion furnace according to the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of a quartz bulb in an integrated external ignition device suitable for a diffusion furnace according to the utility model;

[0021] Figure 4 This is a structural schematic diagram of an ignition mechanism in an integrated external ignition device suitable for a diffusion furnace according to the utility model;

[0022] Figure 5 It is a left view of an ignition mechanism in an integrated external ignition device suitable for a diffusion furnace according to the utility model.

[0023] In the figure: 1. sealing cover; 2. ignition mechanism; 21. hydrogen ring pipe; 22. oxygen ring pipe; 23. first air pressure valve; 24. second air pressure valve; 25. hydrogen main pipe; 26. oxygen main pipe; 27. hydrogen nozzle; 28. oxygen nozzle; 3. quartz tube; 4. quartz bulb; 5. cooling coil; 6. sealing pad. DETAILED DESCRIPTION

[0024] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0025] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] Please refer to Figure 1-5 As shown, an integrated external ignition device suitable for a diffusion furnace includes two sets of sealing covers 1 that are sealed together, a quartz bulb 4 is arranged in the middle of the cover body of the sealing cover 1, an ignition mechanism 2 that passes through the sealing cover 1 is arranged at one end of the pipe mouth of the quartz bulb 4, and a quartz tube 3 that passes through the sealing cover 1 is arranged at the other end of the pipe mouth of the quartz bulb 4, and the air ducts of the ignition mechanism 2 and the quartz tube 3 are both inserted into the bubble body cavity of the quartz bulb 4. By extending the air ducts of the ignition mechanism 2 and the quartz tube 3 to the interior of the quartz bulb 4 cavity, on the one hand, the integrated assembly performance between the components can be improved and the overall space occupancy performance can be reduced, and on the other hand, the contact area between the components can be increased, further improving the contact sealing of the node.

[0028] A cooling coil 5 surrounds the outside of the quartz bulb 4, and an inner groove matched with the cooling coil 5 is opened on the outside of the quartz bulb 4. The cooling coil 5 is a spiral tube structure. By opening an inner groove matched with the cooling coil 5 in an inwardly concave form on the outside of the quartz bulb 4, the cooling coil 5 can be kept at the same horizontal plane as the quartz bulb 4 when it surrounds the quartz bulb 4, so as to reduce the additional space occupied. The spiral winding of the cooling coil 5 can be used to uniformly cool the quartz bulb 4 later.

[0029] The chamber of the sealing cover 1 is filled with a sealing pad 6 that encapsulates the ignition mechanism 2, the quartz tube 3, the quartz bulb 4, and the cooling coil 5. The sealing pad 6 is a kind of rock wool board material, polyurethane foam material, and ceramic fiber material. After the assembly of the ignition mechanism 2, the quartz tube 3, the quartz bulb 4, and the cooling coil 5 is completed, the two sets of sealing covers 1 can be matched to cover the outside of each component, and the sealing pad 6 inside can be used. The sealing and wrapping of each component, on the one hand, plays a role of modular assembly with tight seams, and the integrated packaging is perfect, which occupies a small space, and its external nodes are less exposed, and the safety and stability are better, which can minimize the interference of the external environment and ensure the stability and accuracy of its working operation. On the other hand, it has good sealing, heat insulation, and wrapping padding functions, which can isolate the interference of external environmental factors, ensure the connection stability between the components, and the high efficiency of heat transfer.

[0030] The ignition mechanism 2 includes a hydrogen ring tube 21 and an oxygen ring tube 22 arranged in parallel with the hydrogen ring tube 21. One side of the pipeline of the hydrogen ring tube 21 is connected to a hydrogen main pipe 25, and the inner tube of the hydrogen ring tube 21 is provided with a plurality of hydrogen nozzles 27 extending to the inside of the pipeline of the oxygen ring tube 22 along its circumferential direction. One side of the pipeline of the oxygen ring tube 22 is connected to an oxygen main pipe 26, and the inner wall of the pipeline of the oxygen ring tube 22 is provided with a plurality of oxygen spray holes 28 arranged along its circumferential direction. The plurality of hydrogen nozzles 27 and the plurality of oxygen spray holes 28 are connected to each other. The gas injection holes 28 are arranged symmetrically in a ring shape. When ignition is performed, hydrogen is supplied to the hydrogen ring pipe 21 through the hydrogen main pipe 25, and is ejected in a horizontal spraying manner by utilizing the conduction and diversion of the hydrogen injection pipe 27. At the same time, oxygen is supplied to the oxygen ring pipe 22 through the oxygen main pipe 26, and is ejected in a vertical spraying manner by utilizing the conduction and diversion of the oxygen injection holes 28, and is mixed with the horizontally ejected hydrogen by counter-convection, so as to ensure the uniformity of the hydrogen-oxygen mixture and improve the sufficiency of its combustion in the diffusion furnace.

[0031] A first air pressure valve 23 is installed on one side of the pipeline of the hydrogen ring pipe 21, and a second air pressure valve 24 is installed on one side of the pipeline of the oxygen ring pipe 22. By arranging the first air pressure valve 23 on one side of the hydrogen ring pipe 21 and the second air pressure valve 24 on one side of the oxygen ring pipe 22, the supply pressures of hydrogen and oxygen can be monitored in real time to ensure the accuracy of the gas supply.

[0032] The working principle of the utility model is as follows: when the external ignition device is produced and assembled, the ignition mechanism 2 and the wind duct of the quartz tube 3 are inserted and extended to the inside of the quartz bulb 4 chamber, so as to improve the integrated assembly performance of the various components, reduce the contact area between the components, strengthen the contact sealing of the nodes, and synchronously coil the cooling coil 5 inside the groove of the quartz bulb 4 so that the two are kept at the same horizontal plane to reduce the additional space occupied. Subsequently, the spiral winding of the cooling coil 5 can be used to evenly cool the quartz bulb 4. Subsequently, the two sets of sealing covers 1 are sealed on the outside of the components in a matching manner, and the sealing pads 6 inside the sealing covers are used to seal and wrap the components, which plays a role on the one hand. The tightly jointed modular assembly has less exposed external nodes and better safety and stability. On the other hand, it has good sealing, heat insulation and wrapping cushioning functions, which can isolate the interference of external environmental factors. In the subsequent ignition work, hydrogen is supplied to the hydrogen ring tube 21 through the hydrogen main pipe 25, and is sprayed out in a horizontal spraying manner by utilizing the conduction and diversion of the hydrogen nozzle 27. At the same time, oxygen is supplied to the oxygen ring tube 22 through the oxygen main pipe 26, and is sprayed out in a vertical spraying manner by utilizing the conduction and diversion of the oxygen nozzle hole 28, and is mixed with the horizontally sprayed hydrogen by counter-convection, so that the hydrogen and oxygen combustion combination is fully burned in the diffusion furnace under the conduction and transportation of the quartz bulb 4 and the quartz tube 3.

[0033] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. An integrated external ignition device suitable for a diffusion furnace, characterized in that: It comprises two sets of sealing covers (1) in the form of abutting sealing covers; A quartz bulb (4) is arranged in the middle of the cover body of the sealing cover (1); one end of the pipe mouth of the quartz bulb (4) is connected to an ignition mechanism (2) penetrating the sealing cover (1), and the other end of the pipe mouth of the quartz bulb (4) is connected to a quartz tube (3) penetrating the sealing cover (1); The outer side of the quartz bulb (4) is surrounded by a cooling coil (5); The interior of the chamber of the sealing cover (1) is filled with a sealing packing (6) of a sheathed ignition mechanism (2), a quartz tube (3), a quartz bulb (4), and a cooling coil (5).

2. The integrated external ignition device suitable for a diffusion furnace according to claim 1, characterized in that: The ignition mechanism (2) and the wind pipe of the quartz tube (3) are both inserted into the bulb cavity of the quartz bulb (4).

3. The integrated external ignition device suitable for a diffusion furnace according to claim 1, characterized in that: An inner groove matching the cooling coil (5) is provided on the outer side of the quartz bulb (4), and the cooling coil (5) is a spiral tube structure.

4. The integrated external ignition device suitable for a diffusion furnace according to claim 1, characterized in that: The sealing pad (6) is made of a rock wool board material, a polyurethane foam material, or a ceramic fiber material.

5. The integrated external ignition device suitable for a diffusion furnace according to claim 1, characterized in that: The ignition mechanism (2) comprises a hydrogen ring pipe (21) and an oxygen ring pipe (22) arranged in parallel with the hydrogen ring pipe (21); one side of the pipe of the hydrogen ring pipe (21) is conductively connected to a hydrogen main pipe (25); the inner pipe of the hydrogen ring pipe (21) is provided with a plurality of groups of hydrogen nozzles (27) extending into the inner pipe of the oxygen ring pipe (22) arranged along its circumference; one side of the pipe of the oxygen ring pipe (22) is conductively connected to an oxygen main pipe (26); and the inner wall of the pipe of the oxygen ring pipe (22) is provided with a plurality of groups of oxygen nozzles (28) arranged along its circumference.

6. The integrated external ignition device suitable for a diffusion furnace according to claim 5, characterized in that: The plurality of groups of hydrogen spray pipes (27) and the plurality of groups of oxygen spray holes (28) are arranged symmetrically in a ring shape.

7. The integrated external ignition device suitable for a diffusion furnace according to claim 5, characterized in that: A first air pressure valve (23) is installed on one side of the pipeline of the hydrogen ring pipe (21), and a second air pressure valve (24) is installed on one side of the pipeline of the oxygen ring pipe (22).

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