Furnace door adjusting mechanism and furnace door opening and closing mechanism

Abstract

The utility model relates to the technical field of semiconductors, in particular to a furnace door adjusting mechanism and a furnace door opening and closing mechanism, and solves the problem that a furnace door is difficult to adjust in the prior art. The furnace door opening and closing mechanism comprises a cantilever and a driving structure, the first end of the cantilever is connected with the driving structure, and the second end of the cantilever is connected with the furnace door through a furnace door adjusting mechanism. The furnace door adjusting mechanism comprises a first connecting piece, a second connecting piece and an adjusting assembly. The first connecting piece is connected with the second end of the cantilever, the second connecting piece is connected with the furnace door, and the adjusting assembly is connected with the first connecting piece and the second connecting piece and can adjust the distance between the first connecting piece and the second connecting piece so as to adjust the distance between the furnace door and the cantilever. The furnace door adjusting mechanism is arranged at the joint of the cantilever and the furnace door, the torque borne by the furnace door adjusting mechanism is reduced, and therefore the adjusting difficulty of the furnace door is reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular to a furnace door adjustment mechanism and a furnace door opening and closing mechanism. Background Art

[0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Some processing processes of semiconductor or photovoltaic materials need to be carried out in specific manufacturing equipment. At present, there are many kinds of manufacturing equipment, such as diffusion furnaces, oxidation furnaces, annealing furnaces, plasma enhanced chemical vapor deposition (PECVD) equipment and low-pressure chemical vapor deposition (LPCVD) equipment. The above-mentioned manufacturing equipment is equipped with a furnace cabinet assembly. The furnace cabinet assembly includes a furnace door, a furnace door adjustment mechanism and a drive structure. The drive structure and the furnace door adjustment structure are connected to the furnace door through a cantilever. The furnace door adjustment mechanism adjusts the furnace door up and down or left and right to align the furnace door with respect to the center of the furnace body, and the furnace door is driven by the drive structure to open and close.

[0003] In the related art, the furnace door is generally adjusted up and down by pulling up the bolts or the other end of the lower cantilever. Since the furnace door is too heavy, the bolts are prone to jamming, slipping, breaking, etc. during the adjustment process. Therefore, other auxiliary tools (such as jacks) are often needed to support the furnace door for adjustment. In addition, the space for the entire operation is limited, making it difficult to adjust the furnace door. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a furnace door adjustment mechanism and a furnace door opening and closing mechanism, which solve the problem of difficulty in adjusting the furnace door in the related art.

[0005] In a first aspect, an embodiment of the present disclosure provides a furnace door adjustment mechanism, which is applied to a furnace door opening and closing mechanism, wherein the furnace door opening and closing mechanism comprises a cantilever and a driving structure, wherein the first end of the cantilever is connected to the driving structure, and the second end of the cantilever is connected to the furnace door through the furnace door adjustment mechanism; wherein the furnace door adjustment mechanism comprises: a first connecting member connected to the second end of the cantilever; a second connecting member connected to the furnace door; and an adjustment component connecting the first connecting member and the second connecting member and capable of adjusting the distance between the first connecting member and the second connecting member.

[0006] In some embodiments, the second connecting member is located above the first connecting member, and the second connecting member has a first threaded hole arranged perpendicular to the horizontal direction; the adjustment assembly includes: an adjusting member, which is threadedly connected to the first threaded hole and abuts against the upper surface of the first connecting member.

[0007] In some embodiments, the adjustment assembly also includes: a first locking member, having at least one long hole, and the extension direction of the long hole is parallel to the first threaded hole; at least one first bolt; wherein the second connecting member also has a second threaded hole arranged perpendicular to the vertical direction, the first bolt passes through the long hole and is threadedly connected to the second threaded hole, and the first locking member is connected to the first connecting member; or, the first connecting member has a third threaded hole arranged perpendicular to the vertical direction, the first bolt passes through the long hole and is threadedly connected to the third threaded hole, and the first locking member is connected to the second connecting member.

[0008] In some embodiments, the furnace door adjustment mechanism further includes: a second locking member, which contacts the upper surface of the second connecting member and is threadedly connected to the adjustment member.

[0009] In some embodiments, the furnace door adjustment mechanism further includes: a friction plate, which is disposed on the upper surface of the first connecting member, so that the adjustment member abuts against the upper surface of the first connecting member through the friction plate.

[0010] In some embodiments, the second connecting member further has at least one guide hole parallel to the first threaded hole; the furnace door adjustment mechanism further includes: at least one guide column connected to the first connecting member and inserted into the guide hole.

[0011] In some embodiments, the number of the guide holes is multiple, and the multiple guide holes are symmetrically arranged relative to the first threaded hole.

[0012] In some embodiments, the furnace door adjustment mechanism further includes: a copper sleeve, which is arranged between the guide hole and the guide column, so that the guide column is slidably connected relative to the copper sleeve.

[0013] In some embodiments, the guide hole is a through hole, and the upper surface of the second connecting member also has a fourth threaded hole, the copper sleeve includes a guide portion and a limiting portion, the guide portion is arranged in the guide hole, and the limiting portion is arranged on the upper surface of the second connecting member; the furnace door adjustment mechanism also includes: a second bolt, including a bolt head and a stud connected to each other, the stud is threadedly connected to the fourth threaded hole, the bolt head is located above the second connecting member, and presses the limiting portion downward.

[0014] In a second aspect, an embodiment of the present disclosure provides a furnace door opening and closing mechanism, which is configured to drive the furnace door to open and close; wherein the furnace door opening and closing mechanism includes: a driving structure, configured to provide a driving force; a cantilever, a first end of the cantilever being connected to the driving structure; a furnace door adjustment mechanism as described in the first aspect, connected to the second end of the cantilever; and a furnace door, connected to the furnace door adjustment mechanism, so as to utilize the furnace door adjustment mechanism to adjust the distance between the furnace door and the cantilever.

[0015] A furnace door adjustment mechanism provided by an embodiment of the present disclosure is applied to a furnace door opening and closing mechanism. The furnace door opening and closing mechanism includes a cantilever and a driving structure, the first end of the cantilever is connected to the driving structure, and the second end of the cantilever is connected to the furnace door through a furnace door adjustment mechanism. The furnace door adjustment mechanism includes: a first connecting member, a second connecting member and an adjustment assembly. The first connecting member is connected to the second end of the cantilever, the second connecting member is connected to the furnace door, the adjustment assembly connects the first connecting member and the second connecting member, and can adjust the distance between the first connecting member and the second connecting member to adjust the distance between the furnace door and the cantilever. The furnace door adjustment mechanism is arranged at the connection between the cantilever and the furnace door, which reduces the torque borne by the furnace door adjustment mechanism, thereby reducing the difficulty of adjusting the furnace door. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic structural diagram of a furnace door opening and closing mechanism provided in one embodiment of the present disclosure.

[0017] Figure 2 Shown is a schematic structural diagram of a furnace door adjustment mechanism provided in one embodiment of the present disclosure.

[0018] Figure 3 Shown is a schematic structural diagram of a second connecting member provided in an embodiment of the present disclosure.

[0019] Figure 4 Shown is a schematic structural diagram of a copper sleeve provided in an embodiment of the present disclosure.

[0020] Reference numerals:

[0021] 1. Furnace door opening and closing mechanism; 10. Furnace door adjustment mechanism; 100. First connecting member; 110. Upper surface of first connecting member; 200. Second connecting member; 210. First threaded hole; 220. Second threaded hole; 230. Upper surface of second connecting member; 240. Guide hole; 250. Fourth threaded hole; 300. Adjustment assembly; 310. Adjustment member; 320. First locking member; 330. First bolt; 3210. Long hole; 400. Second locking member; 500. Friction plate; 510. Upper surface of friction plate; 600. Guide column; 700. Copper sleeve; 710. Guide part; 720. Limiting part; 800. Second bolt; 810. Bolt head; 820. Stud; 20. Cantilever; 201. First end of cantilever; 202. Second end of cantilever; 30. Driving structure; 40. Furnace door. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0023] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Some processing processes of semiconductor or photovoltaic materials need to be carried out in specific manufacturing equipment. At present, there are many kinds of manufacturing equipment, such as diffusion furnaces, oxidation furnaces, annealing furnaces, plasma enhanced chemical vapor deposition (PECVD) equipment and low-pressure chemical vapor deposition (LPCVD) equipment. The above-mentioned manufacturing equipment is equipped with a furnace cabinet assembly. The furnace cabinet assembly includes a furnace door, a furnace door adjustment mechanism and a drive structure. The drive structure and the furnace door adjustment structure are connected to the furnace door through a cantilever. The furnace door adjustment mechanism adjusts the furnace door up and down or left and right so that the furnace door can be centered relative to the furnace body, and the furnace door is driven by the drive structure to open and close.

[0024] In the related art, the furnace door is generally adjusted up and down by pulling the bolts up or the other end of the lower cantilever. Since the furnace door is too heavy, the bolts bear a large torque, and the bolts are prone to jamming, slipping, breaking, etc. during the adjustment process. Therefore, other auxiliary tools (such as jacks) are often needed to support the furnace door for adjustment. In addition, the entire operating space is limited, which ultimately makes it difficult to adjust the furnace door.

[0025] In view of the above problems, an embodiment of the present disclosure provides a furnace door adjustment mechanism, which is applied to the furnace door opening and closing mechanism. The furnace door opening and closing mechanism includes a cantilever and a driving structure, the first end of the cantilever is connected to the driving structure, and the second end of the cantilever is connected to the furnace door through the furnace door adjustment mechanism. Among them, the furnace door adjustment mechanism includes: a first connecting member, a second connecting member and an adjustment assembly. The first connecting member is connected to the second end of the cantilever, the second connecting member is connected to the furnace door, the adjustment assembly connects the first connecting member and the second connecting member, and can adjust the distance between the first connecting member and the second connecting member to adjust the distance between the furnace door and the cantilever. The furnace door adjustment mechanism is arranged at the connection between the cantilever and the furnace door, which reduces the torque borne by the furnace door adjustment mechanism, thereby reducing the difficulty of adjusting the furnace door.

[0026] The specific structure of the furnace door adjustment mechanism is described below in conjunction with the embodiments.

[0027] Figure 1 Shown is a schematic structural diagram of a furnace door opening and closing mechanism provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic structural diagram of a furnace door adjustment mechanism provided in one embodiment of the present disclosure. Figure 3 FIG. 1 is a schematic diagram of the structure of a second connecting member provided by an embodiment of the present disclosure. Figures 1 to 3 As shown, the furnace door adjustment mechanism 10 is applied to the furnace door opening and closing mechanism 1. The furnace door opening and closing mechanism 1 includes a cantilever 20 and a driving structure 30, the first end 201 of the cantilever 20 is connected to the driving structure 30, and the second end 202 of the cantilever 20 is connected to the furnace door 40 through the furnace door adjustment mechanism 10. The furnace door adjustment mechanism 10 includes: a first connecting member 100, a second connecting member 200 and an adjustment assembly 300. The first connecting member 100 is connected to the second end 202 of the cantilever 20. The second connecting member 200 is connected to the furnace door 40. The adjustment assembly 300 connects the first connecting member 100 and the second connecting member 200, and can adjust the distance between the first connecting member 100 and the second connecting member 200 to adjust the distance between the furnace door and the cantilever. The furnace door adjustment mechanism 10 is arranged at the connection between the cantilever 20 and the furnace door 40, which reduces the torque borne by the furnace door adjustment mechanism 10, thereby reducing the difficulty of adjusting the furnace door 40. In addition, the space at the connection between the cantilever 20 and the furnace door 40 is relatively large, which increases the operating space of the furnace door adjustment mechanism 10 , thereby further reducing the difficulty of adjusting the furnace door 40 .

[0028] The first end 201 of the cantilever 20 is fixedly connected to the driving structure 30. The first end 201 of the cantilever 20 can be non-detachably connected to the driving structure 30 by welding, bonding, etc., or the first end 201 of the cantilever 20 can be detachably connected to the driving structure 30 by bolts, nuts, screws, snaps, magnetism, etc.

[0029] The first connector 100 is fixedly connected to the second end 202 of the cantilever 20. The first connector 100 may be non-detachably connected to the second end 202 of the cantilever 20 by welding, bonding, etc., or the first connector 100 may be detachably connected to the second end 202 of the cantilever 20 by bolts, nuts, screws, buckles, magnetic attraction, etc. The shape of the first connector 100 may be a rectangle, a trapezoid, or other irregular shapes, which are not specifically limited in the present disclosure. In this embodiment, the shape of the first connector 100 is a rectangle.

[0030] The second connecting member 200 is fixedly connected to the furnace door 40. The second connecting member 200 can be non-detachably connected to the furnace door 40 by welding, bonding, etc., or the second connecting member 200 can be detachably connected to the furnace door 40 by bolts, nuts, screws, buckles, magnetic attraction, etc. The shape of the second connecting member 200 can be rectangular, trapezoidal, or other irregular shapes, which are not specifically limited in the present disclosure. In this embodiment, the shape of the second connecting member 200 is rectangular.

[0031] The adjustment component 300 can be a bolt, a telescopic rod, or other structures. As long as the adjustment component 300 can connect the first connecting member 100 and the second connecting member 200 and can adjust the distance between the first connecting member 100 and the second connecting member 200, the present disclosure does not make any specific limitations.

[0032] The adjustment component 300 can be fixedly connected to the first connecting member 100. The adjustment component 300 can be non-detachably connected to the first connecting member 100 by welding, bonding, etc., or the adjustment component 300 can be detachably connected to the first connecting member 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0033] The adjustment component 300 can be fixedly connected to the second connecting member 200. The adjustment component 300 can be non-detachably connected to the second connecting member 200 by welding, bonding, etc., or the adjustment component 300 can be detachably connected to the second connecting member 200 by bolts, nuts, screws, snaps, magnetism, etc.

[0034] The furnace door adjustment mechanism 10 provided in the embodiment of the present disclosure is applied to the furnace door opening and closing mechanism 1. The furnace door opening and closing mechanism 1 includes a cantilever 20 and a driving structure 30, wherein the first end 201 of the cantilever 20 is connected to the driving structure 30, and the second end 202 of the cantilever 20 is connected to the furnace door 40 through the furnace door adjustment mechanism 10. The furnace door adjustment mechanism 10 includes: a first connecting member 100, a second connecting member 200 and an adjustment assembly 300. The first connecting member 100 is connected to the second end 202 of the cantilever 20. The second connecting member 200 is connected to the furnace door 40. The adjustment assembly 300 connects the first connecting member 100 and the second connecting member 200, and can adjust the distance between the first connecting member 100 and the second connecting member 200 to adjust the distance between the furnace door and the cantilever. The furnace door adjustment mechanism 10 is arranged at the connection between the cantilever 20 and the furnace door 40, which reduces the torque borne by the furnace door adjustment mechanism 10, thereby reducing the difficulty of adjusting the furnace door 40.

[0035] In some embodiments, the second connecting member 200 is located above the first connecting member 100 , and the second connecting member 200 has a first threaded hole 210 that is arranged at an angle to the horizontal direction.

[0036] The adjustment assembly 300 includes an adjustment member 310, which is threadedly connected to the first threaded hole 210 and abuts against the upper surface 110 of the first connecting member 100. By rotating the adjustment member 310, the second connecting member 200 is moved toward or away from the first connecting member 100 to adjust the distance between the first connecting member 100 and the second connecting member 200.

[0037] The adjusting member 310 may be a bolt or other structures, which is not specifically limited in the present disclosure.

[0038] In this embodiment, the first threaded hole 210 is arranged at 90 degrees to the horizontal direction, and the first threaded hole 210 passes through the second connecting member 200. The adjusting member 310 is a bolt, the bolt head of the bolt is located above the second connecting member 200, the stud of the bolt is screwed with the first threaded hole 210, and the stud head passes through the first threaded hole 210 and abuts against the upper surface 110 of the first connecting member 100.

[0039] In some embodiments, the adjustment assembly 300 further includes: a first locking member 320 and at least one first bolt 330. The first locking member 320 has at least one long hole 3210, and the extension direction of the long hole 3210 is parallel to the first threaded hole 210. The second connecting member 200 also has a second threaded hole 220 arranged at an angle to the vertical direction, and the first bolt 330 passes through the long hole 3210 and is threadedly connected to the second threaded hole 220. The first locking member 320 is connected to the first connecting member 100, so as to achieve locking of the first connecting member 100 and the second connecting member 200 after the distance between the first connecting member 100 and the second connecting member 200 is adjusted.

[0040] The first locking member 320 may be a plate-like structure or other structures, which is not specifically limited in the present disclosure. When the first locking member 320 is a plate-like structure, the vertical cross-sectional shape of the first locking member 320 may be a rectangle, a trapezoid, or other irregular shapes, which is not specifically limited in the present disclosure. In this embodiment, the first locking member 320 is a plate-like structure, and the vertical cross-sectional shape is a rectangle.

[0041] In this embodiment, the adjustment assembly 300 further includes: a first locking member 320 and two first bolts 330. The first locking member 320 has two long holes 3210. The second connecting member 200 has two second threaded holes 220, and the second threaded holes 220 are arranged at 90 degrees to the vertical direction.

[0042] The first locking member 320 is fixedly connected to the first connecting member 100. The first locking member 320 can be non-detachably connected to the first connecting member 100 by welding, bonding, etc., or the first locking member 320 can be detachably connected to the first connecting member 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0043] Alternatively, in some embodiments, the first connecting member 100 has a third threaded hole arranged at an angle to the vertical direction. The first bolt 330 passes through the long hole 3210 and is screwed to the third threaded hole, and the first locking member 320 is connected to the second connecting member 200 .

[0044] The first locking member 320 is fixedly connected to the second connecting member 200. The first locking member 320 can be non-detachably connected to the second connecting member 200 by welding, bonding, etc., or the first locking member 320 can be detachably connected to the second connecting member 200 by bolts, nuts, screws, snaps, magnetism, etc.

[0045] In some embodiments, the furnace door adjustment mechanism 10 further includes a second locking member 400 . The second locking member 400 contacts the upper surface 230 of the second connecting member 200 and is screwed to the adjustment member 310 .

[0046] The second locking member 400 may be a nut or other structure, which is not specifically limited in the present disclosure. In the present embodiment, the second locking member 400 is a nut. The nut is screwed to the stud of the adjusting member 310, and after adjusting the distance between the first connecting member 100 and the second connecting member 200, the screw connection between the adjusting member 310 and the second connecting member 200 is locked to ensure the stability of the furnace door adjustment mechanism 10.

[0047] In some embodiments, the furnace door adjustment mechanism 10 further includes a friction plate 500 . The friction plate 500 is disposed on the upper surface 110 of the first connecting member 100 , so that the adjustment member 310 abuts against the upper surface 110 of the first connecting member 100 through the friction plate 500 , thereby protecting the first connecting member 100 .

[0048] The friction plate 500 is fixedly connected to the first connecting member 100. The friction plate 500 can be non-detachably connected to the first connecting member 100 by welding, bonding, etc., or the friction plate 500 can be detachably connected to the first connecting member 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0049] In this embodiment, the friction plate 500 is made of SUS304 material to increase the service life of the friction plate 500. The upper surface 510 of the friction plate 500 is flush with the upper surface 110 of the first connecting member 100.

[0050] In some embodiments, the second connecting member 200 further has at least one guide hole 240 parallel to the first threaded hole 210. The furnace door adjustment mechanism 10 further includes at least one guide column 600, which is connected to the first connecting member 100 and penetrates into the guide hole 240. The guide column 600 is used to guide the movement of the second connecting member 200 to improve the adjustment accuracy of the furnace door adjustment mechanism 10.

[0051] The guide column 600 is fixedly connected to the first connecting member 100. The guide column 600 can be non-detachably connected to the first connecting member 100 by welding, bonding, etc., or the guide column 600 can be detachably connected to the first connecting member 100 by bolts, nuts, screws, snaps, magnetism, etc.

[0052] In some embodiments, there are multiple guide holes 240, and the multiple guide holes 240 are symmetrically arranged relative to the first threaded hole 210. There are multiple guide posts 600, and the multiple guide posts 600 are used to further improve the guiding effect on the movement of the second connecting member 200, thereby further improving the adjustment accuracy of the furnace door adjustment mechanism 10. In this embodiment, there are two guide holes 240 and two guide posts 600.

[0053] In some embodiments, the furnace door adjustment mechanism 10 further includes a copper sleeve 700 . The copper sleeve 700 is disposed between the guide hole 240 and the guide column 600 , so that the guide column 600 is slidably connected relative to the copper sleeve 700 to reduce the friction between the guide column 600 and the guide hole 240 .

[0054] In this embodiment, the copper sleeve 700 is thickened, the guide column 600 is solid, and the first connecting member 100 and the second connecting member 200 are both made of high-strength aluminum alloy to improve the strength and stability of the furnace door adjustment mechanism 10.

[0055] In some embodiments, the guide hole 240 is a through hole, and the upper surface 230 of the second connecting member 200 further has a fourth threaded hole 250. The copper sleeve 700 includes a guide portion 710 and a stop portion 720, the guide portion 710 is disposed in the guide hole 240, and the stop portion 720 is disposed on the upper surface 230 of the second connecting member 200. The furnace door adjustment mechanism 10 also includes a second bolt 800, the second bolt 800 includes a bolt head 810 and a stud 820 connected to each other, the stud 820 is screwed with the fourth threaded hole 250, the bolt head 810 is located above the second connecting member 200, and presses the stop portion 720 downward, so that the copper sleeve 700 is pressed on the second connecting member 200.

[0056] like Figure 2 As shown, the furnace door opening and closing mechanism 1 is configured to drive the furnace door 40 to open and close. The furnace door opening and closing mechanism 1 includes: the furnace door adjustment mechanism 10 mentioned in the above embodiment, the cantilever 20, the driving structure 30 and the furnace door 40. The furnace door adjustment mechanism 10 is connected to the second end 202 of the cantilever 20, and the first end 201 of the cantilever 20 is connected to the driving structure 30. The furnace door 40 is connected to the furnace door adjustment mechanism 10, so that the furnace door 40 and the cantilever 20 are adjusted by using the furnace door adjustment mechanism 10, so as to adjust the relative position of the furnace door 40 and the furnace body, so that the furnace door 40 is aligned with the center of the furnace body. The driving structure 30 is configured to provide a driving force to drive the furnace door 40 to open and close.

[0057] The furnace door adjustment mechanism 10 provided in the embodiment of the present disclosure can be widely used in manufacturing equipment for semiconductor or photovoltaic materials.

[0058] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0059] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0060] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0061] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0062] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A furnace door adjustment mechanism, characterized in that: Applied to a furnace door opening and closing mechanism, the furnace door opening and closing mechanism comprises a cantilever and a driving structure, the first end of the cantilever is connected to the driving structure, and the second end of the cantilever is connected to the furnace door through the furnace door adjustment mechanism; Wherein, the furnace door adjustment mechanism comprises: A first connecting member connected to the second end of the cantilever; A second connecting member connected to the furnace door; An adjusting component connects the first connecting member and the second connecting member and is capable of adjusting the distance between the first connecting member and the second connecting member.

2. The furnace door adjustment mechanism according to claim 1, characterized in that: The second connecting member is located above the first connecting member, and the second connecting member has a first threaded hole arranged perpendicular to the horizontal direction; The adjustment component comprises: An adjusting member is threadedly connected to the first threaded hole and abuts against an upper surface of the first connecting member.

3. The furnace door adjustment mechanism according to claim 2, characterized in that: The adjustment component also includes: A first locking member having at least one long hole, wherein an extending direction of the long hole is parallel to the first threaded hole; at least one first bolt; Wherein, the second connecting member further has a second threaded hole arranged perpendicular to the vertical direction, the first bolt passes through the long hole and is threadedly connected to the second threaded hole, and the first locking member is connected to the first connecting member; or, The first connecting member has a third threaded hole arranged perpendicular to the vertical direction, the first bolt passes through the long hole and is threadedly connected to the third threaded hole, and the first locking member is connected to the second connecting member.

4. The furnace door adjustment mechanism according to claim 2, characterized in that: Also includes: The second locking member contacts the upper surface of the second connecting member and is threadedly connected to the adjusting member.

5. The furnace door adjustment mechanism according to claim 2, characterized in that: Also includes: The friction plate is arranged on the upper surface of the first connecting member, so that the adjusting member abuts against the upper surface of the first connecting member through the friction plate.

6. The furnace door adjustment mechanism according to any one of claims 2 to 5, characterized in that: The second connecting member also has at least one guide hole parallel to the first threaded hole; The furnace door adjustment mechanism also includes: At least one guide post is connected to the first connecting member and passes through the guide hole.

7. The furnace door adjustment mechanism according to claim 6, characterized in that: There are multiple guide holes, and the multiple guide holes are symmetrically arranged relative to the first threaded hole.

8. The furnace door adjustment mechanism according to claim 6, characterized in that: Also includes: The copper sleeve is arranged between the guide hole and the guide column, so that the guide column can be slidably connected relative to the copper sleeve.

9. The furnace door adjustment mechanism according to claim 8, characterized in that: The guide hole is a through hole, the upper surface of the second connecting member further has a fourth threaded hole, the copper sleeve comprises a guide portion and a limiting portion, the guide portion is arranged in the guide hole, and the limiting portion is arranged on the upper surface of the second connecting member; The furnace door adjustment mechanism also includes: The second bolt includes a bolt head and a stud connected to each other, the stud is threadedly connected to the fourth threaded hole, and the bolt head is located above the second connecting member and presses the limiting portion downward.

10. A furnace door opening and closing mechanism, characterized in that: It is configured to drive the furnace door to open and close; wherein, the furnace door opening and closing mechanism comprises: a driving structure configured to provide a driving force; a cantilever, a first end of the cantilever being connected to the driving structure; The furnace door adjustment mechanism according to any one of claims 1 to 9, connected to the second end of the cantilever; The furnace door is connected to the furnace door adjustment mechanism so that the distance between the furnace door and the cantilever can be adjusted by using the furnace door adjustment mechanism.

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