Liquid medicine supply device for chip manufacturing

Abstract

The utility model discloses a liquid medicine supply device for chip manufacturing. The liquid medicine supply device comprises a working barrel, a liquid inlet pipeline, a liquid outlet pipeline, an exhaust pipeline communicated with the working barrel, an electric control valve body for controlling the exhaust pipeline to be opened or closed, a pump body connected to the liquid inlet pipeline and a supply barrel, the liquid inlet pipeline is provided with a liquid inlet communicated with the supply barrel and a liquid outlet communicated with the working barrel, and the liquid inlet is higher than the liquid outlet; the liquid medicine supply device for chip manufacturing further comprises a control unit and a liquid level sensor arranged on the working barrel, and the liquid level sensor and the electric control valve body are both in communication connection with the control unit. The control unit controls closing of the electric control valve body according to data of the liquid level sensor. According to the liquid medicine supply device, a user can be reminded to replace liquid medicine in time, contact between liquid and outside air can be reduced when the liquid medicine is replaced, and therefore bubbles are reduced.

Description

Technical Field

[0001] The utility model relates to the field of chip manufacturing, in particular to a liquid medicine supply device used for chip manufacturing. Background Art

[0002] A variety of liquid chemicals are needed in the chip manufacturing process, such as etching liquid needed for wet etching during chip packaging, cleaning liquid needed for wet cleaning, and crystal surface protection liquid used on laser slotting machines.

[0003] The crystal surface protection liquid is used to protect the crystal surface when laser grooving is adopted. It needs to be continuously supplied during the process. The existing supply device generally includes a buffer barrel, which is provided with a liquid inlet and a liquid outlet. A pipeline is inserted from the liquid outlet and the liquid is transferred to the machine under the action of the pump body.

[0004] In order to achieve an uninterrupted supply of liquid medicine, new liquid medicine is generally added in advance before the liquid medicine in the buffer barrel is extracted. The new liquid medicine is purchased directly from the manufacturer and then poured into the buffer barrel through the liquid inlet. When the new liquid medicine is added to the buffer barrel, a large amount of bubbles will be mixed in. The mixing of bubbles will affect the use of the crystal surface protection liquid. Utility Model Content

[0005] The purpose of the utility model is to provide a liquid medicine supply device for chip manufacturing to solve the deficiencies in the prior art. It can timely remind users to replace liquid medicine, and when replacing liquid medicine, it can reduce the contact between liquid and external air, thereby reducing the generation of bubbles.

[0006] The utility model provides a liquid medicine supply device for chip manufacturing, comprising a working barrel, a liquid inlet pipeline, a liquid outlet pipeline, an exhaust pipeline connected to the working barrel, an electric control valve body for controlling the exhaust pipeline to be turned on or off, a pump body connected to the liquid inlet pipeline, and a supply barrel;

[0007] The liquid inlet pipeline has a liquid inlet in communication with the supply barrel and a liquid inlet outlet in communication with the working barrel, and the height of the liquid inlet is higher than the height of the liquid inlet outlet;

[0008] The liquid medicine supply device for chip manufacturing further includes a control unit and a liquid level sensor disposed on the working barrel. The liquid level sensor and the electric control valve body are both communicatively connected with the control unit.

[0009] Further, in the vertical direction, the liquid level sensor is located on the upper side of the liquid inlet and outlet.

[0010] Furthermore, the liquid medicine supply device for chip manufacturing further comprises a liquid level alarm sensor, which is disposed on the working barrel and is located at the lower side of the liquid level sensor in the vertical direction.

[0011] Furthermore, the liquid medicine supply device for chip manufacturing also includes a frame, on which is provided an upper support structure adapted to the supply barrel, and after the supply barrel is positioned to the upper support structure, the plane where the bottom of the supply barrel is located is inclined.

[0012] Furthermore, the upper support structure includes a first support plate and a second support plate fixed on the frame and intersectingly arranged. After the first support plate and the second support plate are intersectingly arranged, a supply barrel positioning space is formed between the first support plate and the second support plate; the plane where the first support plate is located is arranged to intersect obliquely with the horizontal plane.

[0013] Furthermore, the first support plate and the second support plate are vertically arranged.

[0014] Furthermore, the supply barrel has an opening, and the liquid inlet pipeline includes a plug body detachably mounted and fixed on the supply barrel to seal the opening, an inner barrel liquid inlet pipe and an outer barrel liquid inlet pipe arranged on opposite sides of the plug body, and the inner barrel liquid inlet pipe and the outer barrel liquid inlet pipe are connected, the inner barrel liquid inlet pipe extends inside the supply barrel, and the copper outer liquid inlet pipe is arranged between the plug body and the working barrel.

[0015] Furthermore, after the replenishing barrel is placed at an angle, one end of the liquid inlet pipe in the barrel is extended and arranged at the lowest position in the replenishing barrel.

[0016] Furthermore, the plug body has a plug body through-hole penetrating the plug body, a first mounting structure and a second mounting structure arranged on opposite sides of the plug body through-hole, the inner barrel liquid inlet pipe can be detachably mounted and fixed on the second mounting structure and communicated with the plug body through-hole, and the outer barrel liquid inlet pipe can be detachably mounted and fixed on the first mounting structure and communicated with the plug body through-hole.

[0017] Furthermore, the frame also has a lower supporting structure, the lower supporting structure is located at the lower side of the upper supporting structure, and the working barrel is positioned on the lower supporting structure.

[0018] Compared with the prior art, the medicine liquid supply device disclosed in the utility model can promptly remind the user to replace the medicine liquid, and can reduce the contact between the liquid and the outside air when replacing the medicine liquid, thereby reducing the generation of bubbles. At the same time, an exhaust pipeline is provided, which can promptly discharge the bubbles in the working barrel, so that there are no bubbles in the medicine liquid flowing out of the working barrel. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a three-dimensional structural schematic diagram of a liquid medicine supply device used in a chip packaging process in the utility model;

[0020] Figure 2 It is a three-dimensional structural schematic diagram of the liquid medicine supply device used in the chip packaging process in the utility model at another angle;

[0021] Figure 3 It is a schematic diagram of the connection structure between the liquid medicine barrel and the supply barrel in the liquid medicine supply device used in the chip packaging process in the utility model;

[0022] Figure 4 It is a structural schematic diagram of the gas outlet pipeline in the liquid medicine supply device used in the chip packaging process in the utility model;

[0023] Explanation of the accompanying drawings: 1-working barrel, 2-liquid inlet pipeline, 21-liquid inlet, 22-liquid inlet outlet, 23-plug body, 231-first mounting structure, 232-second mounting structure, 24-liquid inlet pipe in the barrel, 25-liquid inlet pipe outside the barrel, 3-liquid outlet pipeline, 4-exhaust pipeline, 5-electrically controlled valve body, 7-supply barrel, 71-supply barrel exhaust pipe, 8-liquid level sensor, 9-liquid level alarm sensor, 10-frame, 101-upper support structure, 1011-first support plate, 1012-second support plate, 102-lower support structure. DETAILED DESCRIPTION

[0024] The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0025] Embodiments of the present utility model: Figure 1-4 As shown, a liquid medicine supply device for chip manufacturing is disclosed, and the liquid medicine supply device is used to supply liquid medicine to a workbench during the chip production and manufacturing process.

[0026] The liquid medicine supply device includes: a working barrel 1, a liquid inlet pipeline 2, a liquid outlet pipeline 3, an exhaust pipeline 4 connected to the working barrel 1, an electric control valve body 5 for controlling the opening or closing of the exhaust pipeline 4, a pump body (not shown) connected to the liquid inlet and outlet pipelines 2 and a supply barrel 7.

[0027] The liquid inlet pipeline 2 has a liquid inlet 21 connected to the replenishing barrel 7 and a liquid inlet outlet 22 connected to the working barrel 1, and the height of the liquid inlet 21 is higher than the height of the liquid inlet outlet 22. The pump body can be connected to any position of the liquid inlet pipeline 2 to supply liquid medicine.

[0028] The liquid medicine supply device for chip manufacturing also includes a control unit and a liquid level sensor 8 arranged in the working barrel 1, the liquid level sensor 8 is electrically connected to the control unit, and the electric control valve body 5 is electrically connected to the control unit; the control unit controls the closing of the electric control valve body 5 according to the data of the liquid level sensor 8.

[0029] It can be understood that the working barrel 1 has a liquid outlet and a liquid outlet valve for controlling the opening or closing of the liquid outlet. When the liquid outlet valve is opened, the medicine is supplied to the outside through the liquid outlet, and the medicine in the replenishment barrel 7 flows into the working barrel 1 to replenish the working barrel 1. When the medicine in the replenishment barrel 7 is sufficient, the working barrel 1 is always maintained at a high liquid level. At this time, the liquid level sensor 8 will not be triggered. At the same time, the electric control valve body 5 is in an open state so that the exhaust pipe 4 is in a conductive state. After the medicine in the replenishment barrel 7 is consumed, the liquid level in the working barrel 1 will decrease, and the liquid level sensor 8 will be triggered at this time. After the liquid level sensor 8 is triggered, it reminds the staff to replace the medicine.

[0030] After the new supply barrel 7 is replaced, the exhaust pipe 4 is closed, so that the working barrel 1 can only be connected to the outside world through the liquid outlet and the liquid inlet 22 connected to the supply barrel. At this time, under the action of the pump body, the liquid can flow from the supply barrel 7 to the working barrel 1, and the liquid in the working barrel 1 gradually increases, and the liquid level height gradually increases, which will trigger the liquid level sensor 8 again. After the liquid level sensor 8 is triggered again, the opening of the electric control valve body 5 is controlled to open the exhaust pipe 4 to facilitate the discharge of bubbles. Since the height of the supply barrel 7 is higher than that of the working barrel 1, under the siphon effect of the liquid, the fluid in the supply barrel 7 can be continuously supplied to the working barrel 1.

[0031] The medicine liquid supply device disclosed in the utility model can timely remind the user to replace the medicine liquid, and can reduce the contact between the liquid and the outside air when replacing the medicine liquid, thereby reducing the generation of bubbles. At the same time, an exhaust pipeline is provided, which can timely discharge the bubbles in the working barrel 1, so that there are no bubbles in the medicine liquid flowing out of the working barrel 1.

[0032] Specifically, in the vertical direction, the liquid level sensor 8 is located on the upper side of the liquid inlet and outlet 22. The liquid level sensor 8 is located on the upper side of the liquid inlet and outlet 22, so that before the liquid level alarm, as much liquid medicine as possible can be stored in the working barrel 1, so as to avoid the problem that the user cannot replace the supply barrel 7 in time. After the liquid level alarm, the liquid level is still a distance away from the liquid inlet and outlet 22. The replacement of the supply barrel 7 before the liquid level drops to the liquid inlet and outlet 22 can reduce the appearance of bubbles in the working barrel 1. The liquid inlet and outlet 22 is relatively arranged on the working barrel 1 near the bottom of the working barrel 1, so that the liquid medicine can reduce the contact with the air in the process of flowing from the supply barrel 7 to the working barrel 1, thereby better improving the problem of bubbles in the liquid medicine.

[0033] The liquid medicine supply device for chip manufacturing further includes a liquid level alarm sensor 9 , which is disposed on the working barrel 1 and is located below the liquid level sensor 8 in the vertical direction.

[0034] The liquid level alarm sensor 9 is used to indicate that the liquid medicine in the working barrel 1 has reached the limit position, that is, the liquid medicine in the working barrel 1 is about to bottom out. Setting two sensors for detecting the liquid level can give the user a better reminder, thereby reducing the bubbles in the liquid medicine in the working barrel 1.

[0035] The liquid medicine supply device for chip manufacturing also includes a frame 10, on which an upper support structure 101 adapted to the supply barrel 7 is provided. After the supply barrel 7 is positioned to the upper support structure 101, the plane where the bottom of the supply barrel 7 is located is inclined.

[0036] The plane where the bottom of the replenishing barrel 7 is located is tilted, so that when there is less liquid medicine in the replenishing barrel 7, the liquid medicine can be gathered at the bottom of the replenishing barrel 7, and the remaining liquid medicine can be more conveniently extracted by the liquid inlet pipeline 2 after being gathered.

[0037] In order to facilitate the inclined setting of the supply barrel 7 on the upper support structure 101, the upper support structure 101 includes a first support plate 1011 and a second support plate 1012 which are fixed on the frame 10 and intersectingly arranged. After the first support plate 1011 and the second support plate 1012 are intersectingly arranged, a supply barrel positioning space is formed between the first support plate 1011 and the second support plate 1012; the plane where the first support plate 1011 is located is arranged to intersect obliquely with the horizontal plane.

[0038] After the supply barrel 7 is placed on the upper support structure 101 , the bottom surface of the supply barrel 7 is supported on the first support plate 1011 , and the side wall of the supply barrel 7 fits together with the second support plate 1012 so that the second support plate 1012 forms an effective limit for the supply barrel 7 .

[0039] Specifically, the first support plate 1011 and the second support plate 1012 are arranged vertically. A plurality of second support plates 1012 may be provided, and the plurality of second support plates 1012 are arranged in an annular manner to form a supply barrel positioning space adapted to the supply barrel 7 .

[0040] The replenishing barrel 7 has an opening, and the liquid inlet pipeline 2 includes a plug body 23 that is detachably mounted and fixed on the replenishing barrel 7 to seal the opening, an inner barrel liquid inlet pipe 24 and an outer barrel liquid inlet pipe 25 that are arranged on opposite sides of the plug body 23, and the inner barrel liquid inlet pipe 24 and the outer barrel liquid inlet pipe 25 are connected, the inner barrel liquid inlet pipe 25 extends inside the replenishing barrel 7, and the outer barrel liquid inlet pipe 25 is arranged between the plug body 23 and the working barrel 1.

[0041] After the supply barrel 7 is replaced, the opening of the supply barrel 7 is closed by the plug body 23. At this time, the inner liquid inlet pipe 24 is placed in the supply barrel 7, and the outer liquid inlet pipe 25 is arranged outside the supply barrel 7. The outer liquid inlet pipe 25 connects the supply barrel 7 and the working barrel 1; the inner liquid inlet pipe 24 can be extended obliquely so that the inner liquid inlet pipe 24 can be extended to the lowest point of the inclined supply barrel 7.

[0042] Specifically, after the replenishing barrel 7 is placed at an angle, one end of the liquid inlet pipe 24 in the barrel is extended and arranged at the lowest position in the replenishing barrel 7 .

[0043] In this embodiment, the plug body 23 has a plug body through-hole penetrating the plug body, a first mounting structure 231 and a second mounting structure 232 arranged on opposite sides of the plug body through-hole, the barrel inner liquid inlet pipe 24 can be detachably mounted and fixed on the second mounting structure 232 and is in communication with the plug body through-hole, and the barrel outer liquid inlet pipe 25 can be detachably mounted and fixed on the first mounting structure 231 and is in communication with the plug body through-hole.

[0044] The frame 10 further has a lower supporting structure 102 , which is located at the lower side of the upper supporting structure 101 , and the working barrel 1 is positioned on the lower supporting structure 102 .

[0045] It is understandable that in order to facilitate the outward transfer of the fluid in the supply barrel 7, the supply barrel 7 is provided with a supply barrel exhaust pipe 71 connected to the outside, and the supply barrel exhaust pipe 71 can discharge the bubbles generated in the supply barrel 7 to the outside.

[0046] The above describes in detail the structure, features and effects of the utility model based on the embodiments shown in the drawings. The above is only a preferred embodiment of the utility model, but the utility model is not limited to the scope of implementation shown in the drawings. Any changes made in accordance with the concept of the utility model, or modifications to equivalent embodiments with equivalent changes, which still do not exceed the spirit covered by the description and the drawings, should be within the protection scope of the utility model.

Claims

1. A liquid medicine supply device for chip manufacturing, characterized in that: include: A working barrel, a liquid inlet pipeline, a liquid outlet pipeline, an exhaust pipeline connected to the working barrel, an electric control valve body for controlling the opening or closing of the exhaust pipeline, a pump body connected to the liquid inlet pipeline, and a supply barrel; The liquid inlet pipeline has a liquid inlet in communication with the supply barrel and a liquid inlet outlet in communication with the working barrel, and the height of the liquid inlet is higher than the height of the liquid inlet outlet; The liquid medicine supply device for chip manufacturing further includes a control unit and a liquid level sensor disposed on the working barrel. The liquid level sensor and the electric control valve body are both communicatively connected with the control unit.

2. The liquid medicine supply device for chip manufacturing according to claim 1, characterized in that: In the vertical direction, the liquid level sensor is located on the upper side of the liquid inlet and outlet.

3. The liquid medicine supply device for chip manufacturing according to claim 2, characterized in that: The liquid medicine supply device for chip manufacturing further comprises a liquid level alarm sensor, which is arranged on the working barrel and is located at the lower side of the liquid level sensor in the vertical direction.

4. The liquid medicine supply device for chip manufacturing according to claim 3, characterized in that: The liquid medicine supply device for chip manufacturing also includes a frame, on which an upper support structure adapted to the supply barrel is disposed. After the supply barrel is positioned on the upper support structure, the plane where the bottom of the supply barrel is located is inclined.

5. The liquid medicine supply device for chip manufacturing according to claim 4, characterized in that: The upper support structure includes a first support plate and a second support plate fixed on the frame and intersecting with each other. After the first support plate and the second support plate are intersecting with each other, a supply barrel positioning space is formed between the first support plate and the second support plate; the plane where the first support plate is located is arranged to intersect obliquely with the horizontal plane.

6. The liquid medicine supply device for chip manufacturing according to claim 5, characterized in that: The first supporting plate and the second supporting plate are vertically arranged.

7. The chemical solution supply device for chip manufacturing according to claim 4, characterized in that: The supply barrel has an opening, and the liquid inlet pipeline includes a plug body detachably mounted and fixed on the supply barrel to seal the opening, an inner-barrel liquid inlet pipe and an outer-barrel liquid inlet pipe arranged on opposite sides of the plug body, and the inner-barrel liquid inlet pipe and the outer-barrel liquid inlet pipe are connected, the inner-barrel liquid inlet pipe extends inside the supply barrel, and the outer-barrel liquid inlet pipe is arranged between the plug body and the working barrel.

8. The liquid medicine supply device for chip manufacturing according to claim 7, characterized in that: After the replenishing barrel is placed at an angle, one end of the liquid inlet pipe in the barrel is extended and arranged at the lowest position in the replenishing barrel.

9. The chemical solution supply device for chip manufacturing according to claim 7, characterized in that: The plug body has a plug body through-hole penetrating the plug body, a first mounting structure and a second mounting structure arranged on opposite sides of the plug body through-hole, the inner barrel liquid inlet pipe is detachably mounted and fixed on the second mounting structure and is in communication with the plug body through-hole, and the outer barrel liquid inlet pipe is detachably mounted and fixed on the first mounting structure and is in communication with the plug body through-hole.

10. The chemical solution supply device for chip manufacturing according to claim 4, characterized in that: The frame also has a lower supporting structure, which is located at the lower side of the upper supporting structure, and the working barrel is positioned on the lower supporting structure.

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