Fixing assembly and machining equipment

Abstract

The utility model discloses a fixing assembly and machining equipment. The fixing assembly comprises a first fixing part, a second fixing part and an elastic part, the first fixing part and the second fixing part are arranged at intervals in the first direction, the two ends of the elastic part in the first direction are connected with the first fixing part and the second fixing part respectively, the side, in the second direction, of the first fixing part is used for abutting against the base plate, and the second direction is perpendicular to the first direction. The second fixing piece is used for connecting a fixing structure or a driving device. When the first fixing piece abuts against the base plate, due to the fact that the elastic piece can deform, the first fixing piece and the second fixing piece can move in a staggered mode in the second direction, the abutting force is buffered, the fragment risk is reduced, and the relative movement stroke between the second fixing piece and the base plate can be increased so that movement can be conducted; therefore, the first fixing member tightly abuts against the substrate, and the sealing performance of the edge of the substrate is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate processing, in particular to a fixing component and processing equipment. Background Art

[0002] In order to maintain the position of the substrate on the stage during coating or etching, it is usually necessary to use a fixing component to fix the substrate. In the fixing components of the related technology, the holding force is difficult to adjust when the substrate is held and fixed. When the holding force is too large, the substrate has a greater risk of breaking. When the holding is insufficient, some areas may not be held tightly enough due to the influence of flatness. When the processing gas leaks from the edge of the substrate, it will affect the processing uniformity at the edge of the substrate. Therefore, it is necessary to study and solve the above problems. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a fixing assembly that can adjust the holding force, reduce the risk of fragmentation and ensure edge sealing.

[0004] The utility model also provides a processing device having the fixing component.

[0005] According to an embodiment of the utility model, the fixing assembly includes a first fixing member, a second fixing member and an elastic member, the first fixing member and the second fixing member are arranged at intervals along a first direction, the elastic member is respectively connected to the first fixing member and the second fixing member at both ends of the first direction, the first fixing member is used to support the substrate on one side of the second direction, the second direction is perpendicular to the first direction, and the second fixing member is used to connect a fixing structure or a driving device.

[0006] The fixing assembly according to the embodiment of the utility model has at least the following beneficial effects: when the first fixing member is in contact with the substrate, since the elastic member can be deformed, the first fixing member and the second fixing member can move in a dislocated manner in the second direction, thereby buffering the contact force and reducing the risk of fragmentation, and can increase the relative movement stroke between the second fixing member and the substrate to perform over-motion, thereby ensuring that the first fixing member is in close contact with the substrate and ensuring the sealing of the edge of the substrate.

[0007] According to some embodiments of the utility model, the fixing assembly has a first side and a second side relative to each other in the second direction, and the side of the first fixing member facing the first side is used to support the substrate. The fixing assembly also includes a shielding member, which is connected to the first fixing member and / or the second fixing member, and the shielding member is located on the side of the first fixing member and the second fixing member facing the second side. There is a gap between the first fixing member and the second fixing member, and the shielding member covers the gap.

[0008] According to some embodiments of the utility model, the fixing assembly also includes a first connecting member and a second connecting member, the first connecting member includes a connecting portion and a limiting portion, one end of the connecting portion is fixedly connected to the first fixing member, and the other end is connected to the limiting portion, the limiting portion is located on the side of the shielding member facing the second side, and the limiting portion is spaced apart from the shielding member, the limiting portion can be abutted against the shielding member, and the second connecting member is fixedly connected to the shielding member and the second fixing member; or, one end of the connecting portion is fixedly connected to the second fixing member, and the other end is connected to the limiting portion, the limiting portion is located on the side of the shielding member facing the second side, and the limiting portion is spaced apart from the shielding member, the limiting portion can be abutted against the shielding member, and the second connecting member is fixedly connected to the shielding member and the first fixing member.

[0009] According to some embodiments of the utility model, the shielding member is provided with a plurality of mounting holes, the first connecting member and the second connecting member correspond to each of the mounting holes one by one, the connecting portion is passed through the mounting hole, and the second connecting member is passed through the mounting hole.

[0010] According to some embodiments of the present invention, the mounting hole penetrating the connecting portion has a hole diameter D1, and the connecting portion has an outer diameter D2, satisfying: D1 ≥ 1.3D2.

[0011] According to some embodiments of the utility model, it is characterized in that a first groove is provided on a side of the first fixing member facing the second side, a second groove is provided on a side of the second fixing member facing the second side, the first groove and the second groove are respectively connected to the gap, and the shielding member is provided in the first groove and the second groove.

[0012] According to some embodiments of the present invention, the cross-sectional area of ​​the first fixing member gradually decreases, and the cross-sectional area of ​​the first fixing member on a side away from the second fixing member is smaller than the cross-sectional area of ​​the first fixing member on a side close to the second fixing member.

[0013] According to some embodiments of the present invention, the first fixing member is provided with a limiting groove, the limiting groove is located on a side of the first fixing member away from the second fixing member, and the limiting groove is used to accommodate a substrate.

[0014] According to some embodiments of the present invention, the first fixing member and the second fixing member both extend in a ring shape, the first fixing member is located on the inner side of the second fixing member, and the inner side of the first fixing member defines an exposure hole for exposing a processing area of ​​the substrate.

[0015] The processing equipment according to the embodiment of the utility model includes a stage, a driving device, a processing device and the fixing component described in the above-mentioned embodiment, the stage and the fixing component are arranged in sequence in the second direction, the side of the stage facing the fixing component is used to carry the substrate, the driving device is connected to the stage, and / or the driving device is connected to the second fixing member, the driving device is used to drive the stage and the fixing component to move relative to each other in the second direction, the processing device is located on the side of the fixing component away from the stage, and the processing device is used to process the substrate.

[0016] The processing equipment according to the embodiment of the utility model has at least the following beneficial effects: the application of the fixing component of the embodiment of the present application can reduce the risk of substrate breakage and ensure the sealing of the edge of the substrate on the basis of achieving the fixation of the substrate, so as to ensure the uniformity of the substrate after being processed by the processing device and ensure the product yield.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0019] Figure 1 A top view of a fixing assembly according to an embodiment of the present utility model;

[0020] Figure 2 for Figure 1 A half-section schematic diagram of a fixing component;

[0021] Figure 3 A schematic diagram of a fixing assembly according to an embodiment of the present utility model;

[0022] Figure 4 It is a schematic diagram of a processing device according to an embodiment of the utility model.

[0023] Reference numerals:

[0024] A first fixing member 100, a first groove 110, a limiting groove 120, and an exposing hole 130;

[0025] A second fixing member 200, a second groove 210, and a gap 220;

[0026] Elastic member 300; shielding member 400, mounting hole 410;

[0027] A first connecting member 500, a connecting portion 510, a limiting portion 520; a second connecting member 600;

[0028] Stage 700; substrate 800. DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0031] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0032] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0033] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0034] In response to the problem that when the fixing component in the related art is used to fix the substrate, there is a high risk of fragmentation and a high probability of gas leakage at the edge of the substrate, the present application divides the fixing component into a first fixing part and a second fixing part. The first fixing part and the second fixing part are connected by an elastic part, and only the first fixing part is abutted against the substrate. The elastic force of the elastic part can be used to buffer the abutting force, and the abutment between the first fixing part and the substrate is made tighter, thereby reducing the risk of fragmentation and the probability of gas leakage.

[0035] The fixing assembly and processing equipment of the embodiment of the present application are described below with reference to the drawings of the specification. It should be noted that in the drawings, the second direction is shown in the up-down direction, and the first direction is shown in the left-right direction. Figure 2 A portion of the shielding member 400 is cut away for display.

[0036] Reference Figures 1 to 4 According to an embodiment of the utility model, the fixing assembly includes a first fixing member 100, a second fixing member 200 and an elastic member 300. The first fixing member 100 and the second fixing member 200 are arranged at intervals along the first direction. The elastic member 300 is connected to the first fixing member 100 and the second fixing member 200 at both ends of the first direction, respectively. The first fixing member 100 is used to abut against the substrate 800 on one side of the second direction, and the second direction is perpendicular to the first direction. When the first fixing member 100 abuts against the substrate 800, since the elastic member 300 can be deformed, the first fixing member 100 and the second fixing member 200 can move displacedly in the second direction, buffer the abutting force, reduce the risk of fragmentation, and increase the relative movement stroke between the second fixing member 200 and the substrate 800 to perform over-movement, ensure that the first fixing member 100 and the substrate 800 are tightly abutted, and ensure the sealing of the edge of the substrate 800. On the other hand, the deformation of the elastic member 300 enables the fixing assembly to be adapted to substrates 800 of different sizes without the need to adaptively change the size of the fixing assembly.

[0037] The second fixing member 200 is used to connect the fixing structure or the driving device. When the second fixing member 200 is connected to the fixing structure, the second fixing member 200 is fixed in place by the fixing structure, and the substrate 800 moves relative to the stationary fixing component. When the second fixing member 200 is connected to the driving device, the fixing component moves relative to the stationary substrate 800, or both the second fixing member 200 and the substrate 800 can move.

[0038] Reference Figure 3In some embodiments, the fixing assembly has a first side and a second side relative to each other in the second direction, and the side of the first fixing member 100 facing the first side is used to support the substrate 800. The fixing assembly also includes a shielding member 400, which is connected to the first fixing member 100 and / or the second fixing member 200. The shielding member 400 is located on the side of the first fixing member 100 and the second fixing member 200 facing the second side. There is a gap 220 between the first fixing member 100 and the second fixing member 200, and the shielding member 400 covers the gap 220 to reduce the probability of the processing gas entering from the gap 220 and contacting the elastic member 300 during processing, reduce the probability of the elastic member 300 being damaged by contact with the processing gas, and extend the life of the elastic member 300.

[0039] Specifically, the shielding member 400 may be made of an inert material such as a ceramic material to ensure sufficient stability so that the shielding member 400 does not react with the processing gas. The processing gas may be selected differently depending on the processing type. For example, the substrate 800 may be glass, and the processing gas may be a gas for coating, or the processing gas may be a gas for etching.

[0040] Reference Figure 3 In some embodiments, the fixing assembly further includes a first connecting member 500 and a second connecting member 600, the first connecting member 500 includes a connecting portion 510 and a limiting portion 520, one end of the connecting portion 510 is fixedly connected to the first fixing member 100, and the other end is connected to the limiting portion 520, the limiting portion 520 is located on the side of the shielding member 400 facing the second side, and the limiting portion 520 is spaced apart from the shielding member 400, the limiting portion 520 can be abutted against the shielding member 400, and the second connecting member 600 is fixedly connected to the shielding member 400 and the second fixing member 200. When the first fixing member 100 is in abutment with the substrate 800, the first fixing member 100 and the second fixing member 200 can be staggered up and down under the action of the elastic member 300, wherein, when the elastic member 300 is deformed, the first fixing member 100 and the second fixing member 200 perform a swinging-like motion, that is, the second fixing member 200 swings clockwise relative to the first fixing member 100, and the shielding member 400 also swings relative to the first fixing member 100 as the second fixing member 200 swings. After the shielding member 400 swings to a certain angle, the shielding member 400 is in abutment with the limiting portion 520, and the limiting portion 520 limits the swinging, thereby limiting the relative motion amplitude between the first fixing member 100 and the second fixing member 200, so as to avoid the elastic member 300 from deforming beyond the limit, thereby effectively protecting the elastic member 300.

[0041] Alternatively, in other embodiments, one end of the connecting portion 510 is fixedly connected to the second fixing member 200, and the other end is connected to the limiting portion 520, the limiting portion 520 is located on the side of the shielding member 400 facing the second side, and the limiting portion 520 is spaced apart from the shielding member 400, the limiting portion 520 can be abutted against the shielding member 400, and the second connecting member 600 is fixedly connected to the shielding member 400 and the first fixing member 100. Similarly, when the elastic member 300 is deformed, the second fixing member 200 swings clockwise relative to the first fixing member 100. Since the shielding member 400 is fixed to the first fixing member 100, in this embodiment, the first connecting member 500 also swings relative to the first fixing member 100 as the second fixing member 200 swings. After the first connecting member 500 swings to a certain angle, the limiting portion 520 abuts against the shielding member 400. The limiting portion 520 limits the swinging, thereby limiting the relative movement amplitude between the first fixing member 100 and the second fixing member 200, so as to avoid the elastic member 300 from deforming beyond the limit, thereby effectively protecting the elastic member 300.

[0042] Reference Figure 3 In some embodiments, the shielding member 400 is provided with a plurality of mounting holes 410, and the first connecting member 500 and the second connecting member 600 correspond to each mounting hole 410 one by one, the connecting portion 510 is inserted into the mounting hole 410, and the second connecting member 600 is inserted into the mounting hole 410. The second connecting member 600 can be conveniently fixedly connected through the mounting hole 410. For example, if the second connecting member 600 is a bolt, the threaded portion is threadedly connected with the second fixing member 200, and when the bolt head abuts against the shielding member 400, a fixed connection can be achieved, and the mounting hole 410 can provide a limiting effect to improve the structural stability. The first connecting member 500 is inserted into the mounting hole 410, and the limiting effect of the mounting hole 410 can limit the possible movement, improve the structural stability, and the first connecting member 500 and the second connecting member 600 can be quickly assembled and positioned through the mounting hole 410 to improve the assembly efficiency.

[0043] Furthermore, the mounting hole 410 through which the connecting part 510 is passed has an aperture D1, and the connecting part 510 has an outer diameter D2, satisfying: D1 ≥ 1.3D2. When the first fixing member 100 and the second fixing member 200 swing relative to each other, a certain space needs to be reserved between the shielding member 400 and the connecting part 510 to ensure the relative swing of the shielding member 400 and the first connecting member 500, so as to ensure the limiting effect. Controlling D1 ≥ 1.3D2 can ensure the relative swing of the shielding member 400 and the first connecting member 500, ensure the relative movement between the first fixing member 100 and the second fixing member 200, and give full play to the performance of the elastic member 300.

[0044] Reference Figure 3In some embodiments, a first groove 110 is provided on one side of the first fixing member 100 facing the second side, a second groove 210 is provided on one side of the second fixing member 200 facing the second side, the first groove 110 and the second groove 210 are respectively connected to the gap 220, and the shielding member 400 is provided in the first groove 110 and the second groove 210. The first groove 110 and the second groove 210 can provide positioning and limiting for the assembly of the shielding member 400, quickly determine the assembly position, and reduce the probability of the shielding member 400 slipping off. On the other hand, the step formed by the first groove 110 and the second groove 210 can increase the gas path and reduce the probability of the processing gas bypassing the shielding member 400 and entering the gap 220 during processing.

[0045] Reference Figure 3 In some embodiments, the cross-sectional area of ​​the first fixing member 100 gradually decreases, and the cross-sectional area of ​​the first fixing member 100 on the side facing away from the second fixing member 200 is smaller than the cross-sectional area of ​​the first fixing member 100 on the side close to the second fixing member 200. The change in the cross-sectional area forms a tip on the side of the first fixing member 100 close to the substrate 800, so as to apply a holding force on the substrate 800, and can make the upper surface of the first fixing member 100 be an inclined surface, and the normal direction of the inclined surface is biased toward one side of the substrate 800, which is conducive to guiding the processing gas toward the substrate 800 and ensuring the processing effect.

[0046] Reference Figure 3 and Figure 4 In some embodiments, the first fixing member 100 is provided with a limiting groove 120, which is located on the side of the first fixing member 100 away from the second fixing member 200, and is used to accommodate the substrate 800. The limiting groove 120 can control the area of ​​the first fixing member 100 and the substrate 800 to control the abutment effect, and the side wall formed by the limiting groove 120 on the first fixing member 100 can provide a limit to the substrate 800 in the left and right directions to prevent the substrate 800 from slipping during the processing.

[0047] Reference Figure 1 and Figure 2 In some embodiments, the first fixing member 100 and the second fixing member 200 are both extended in a ring shape, the first fixing member 100 is located on the inner side of the second fixing member 200, and the inner side of the first fixing member 100 defines an exposure hole 130, and the exposure hole 130 is used to expose the processing area of ​​the substrate 800. The ring-shaped first fixing member 100 and the second fixing member 200 can abut and fix the circumferential edges of the substrate 800, and seal the circumferential edges of the substrate 800, reduce the probability of gas leakage from the edges, and ensure the product yield. Among them, the elastic member 300 can be set to be ring-shaped, or it can be set to be a plurality of elastic members 300 arranged along the circumference, as long as the relative movement of the first fixing member 100 and the second fixing member 200 can be achieved by utilizing elastic deformation.

[0048] It should be noted that in Figure 3 and Figure 4 The first direction is indicated by the left and right direction. Figure 1 and Figure 2 In the figure, the first direction is the relative direction of the inside and the outside, the exposure hole 130 surrounded by the first fixing member 100 is the inside, and the side of the first fixing member 100 away from the exposure hole 130 is the outside.

[0049] Reference Figure 4 According to the processing equipment of the embodiment of the utility model, it includes a stage 700, a driving device, a processing device and a fixing assembly of any of the above embodiments, the stage 700 and the fixing assembly are arranged in sequence in the second direction, the side of the stage 700 facing the fixing assembly is used to carry the substrate 800, the driving device is connected to the stage 700, and / or the driving device is connected to the second fixing member 200, the driving device is used to drive the stage 700 and the fixing assembly to move relative to each other in the second direction, the processing device is located on the side of the fixing assembly away from the stage 700, and the processing device is used to process the substrate 800. By using the fixing assembly of the embodiment of the present application, it is possible to reduce the risk of fragmentation of the substrate 800 on the basis of fixing the substrate 800, and ensure the sealing of the edge of the substrate 800, so as to ensure the uniformity of the substrate 800 after being processed by the processing device, and ensure the product yield.

[0050] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. A fixing assembly, characterized in that: It includes a first fixing member, a second fixing member and an elastic member, the first fixing member and the second fixing member are arranged at intervals along a first direction, the elastic member is respectively connected to the first fixing member and the second fixing member at both ends of the first direction, the first fixing member is used to support the substrate on one side of the second direction, the second direction is perpendicular to the first direction, and the second fixing member is used to connect a fixing structure or a driving device.

2. The fixing assembly according to claim 1, characterized in that: The fixing assembly has a first side and a second side relative to each other in the second direction, and a side of the first fixing member facing the first side is used to abut against the substrate. The fixing assembly also includes a shielding member, which is connected to the first fixing member and / or the second fixing member, and is located on a side of the first fixing member and the second fixing member facing the second side. There is a gap between the first fixing member and the second fixing member, and the shielding member covers the gap.

3. The fixing assembly according to claim 2, characterized in that: It also includes a first connecting member and a second connecting member, the first connecting member includes a connecting portion and a limiting portion, one end of the connecting portion is fixedly connected to the first fixing member, and the other end is connected to the limiting portion, the limiting portion is located on the side of the shielding member facing the second side, and the limiting portion is spaced apart from the shielding member, the limiting portion can abut against the shielding member, and the second connecting member is fixedly connected to the shielding member and the second fixing member; or, one end of the connecting portion is fixedly connected to the second fixing member, and the other end is connected to the limiting portion, the limiting portion is located on the side of the shielding member facing the second side, and the limiting portion is spaced apart from the shielding member, the limiting portion can abut against the shielding member, and the second connecting member is fixedly connected to the shielding member and the first fixing member.

4. The fixing assembly according to claim 3, characterized in that: The shielding member is provided with a plurality of mounting holes, the first connecting member and the second connecting member correspond to each of the mounting holes one by one, the connecting portion is penetrated in the mounting hole, and the second connecting member is penetrated in the mounting hole.

5. The fixing assembly according to claim 4, characterized in that: The mounting hole penetrating the connecting portion has a hole diameter D1, and the connecting portion has an outer diameter D2, satisfying: D1≥1.3D2.

6. The fixing assembly according to any one of claims 2 to 5, characterized in that: A first groove is provided on a side of the first fixing member facing the second side, a second groove is provided on a side of the second fixing member facing the second side, the first groove and the second groove are respectively connected to the gap, and the shielding member is provided in the first groove and the second groove.

7. The fixing assembly according to any one of claims 1 to 5, characterized in that: The cross-sectional area of ​​the first fixing member gradually decreases, and the cross-sectional area of ​​a side of the first fixing member away from the second fixing member is smaller than the cross-sectional area of ​​a side of the first fixing member close to the second fixing member.

8. The fixing assembly according to any one of claims 1 to 5, characterized in that: The first fixing member is provided with a limiting groove, the limiting groove is located at a side of the first fixing member away from the second fixing member, and the limiting groove is used to accommodate a substrate.

9. The fixing assembly according to claim 1, characterized in that: The first fixing member and the second fixing member both extend in a ring shape, the first fixing member is located on the inner side of the second fixing member, and an exposure hole is defined on the inner side of the first fixing member, and the exposure hole is used to expose a processing area of ​​the substrate.

10. Processing equipment, characterized in that, It comprises a stage, a driving device, a processing device and a fixing component according to any one of claims 1 to 9, wherein the stage and the fixing component are arranged in sequence in the second direction, the side of the stage facing the fixing component is used to carry a substrate, the driving device is connected to the stage, and / or the driving device is connected to the second fixing member, the driving device is used to drive the stage and the fixing component to move relative to each other in the second direction, the processing device is located on a side of the fixing component away from the stage, and the processing device is used to process the substrate.

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