Drainable tubular cold trap
By designing the liquid discharge mechanism of the upper drain valve, water storage tank and lower drain valve in the liquid drainable tube-type cold trap, the problem of air pressure damage when the cold trap tank is discharged is solved, and the air pressure isolation in the cold trap tank is achieved.
Patent Information
- Application Number
- CN202420418347.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-04
- Publication Date
- 2025-03-18
- Estimated Expiration
- 2034-03-04
AI Technical Summary
When the existing liquid drainable tube cold traps discharge condensate, they will communicate with the external atmosphere, destroying the air pressure in the cold trap tank.
A liquid discharge mechanism is designed, including an upper drain valve, a water storage tank and a lower drain valve. The discharge of condensate is controlled by the switches of the upper drain valve and the lower drain valve to ensure that the cold trap tank is always isolated from the external atmosphere.
It effectively avoids the damage to the air pressure in the cold trap tank and ensures that the air pressure is kept in isolation during the condensation water discharge process.
Smart Images
Figure CN222637286U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of semiconductor vacuum, and more particularly to a drainable tubular cold trap. Background Art
[0002] Figure 1 is a perspective view of a known drainable tubular cold trap. Figure 2 yes Figure 1 A cross-sectional view along line AA.
[0003] exist Figure 1 and Figure 2 In the known drainable tubular cold trap 100' shown, the drainable tubular cold trap 100' comprises a cold trap tank 1', a cold trap rod 2' and a drain mechanism 3'. The cold trap tank 1' is provided with an air inlet 11' and an air outlet 12', and the air inlet 11' and the air outlet 12' are used for allowing cooling gas to enter and exit the cold trap tank 1'. The cold trap rod 2' is arranged in the cold trap tank 1'. The drain mechanism 3' is connected to the bottom of the cold trap tank 1', and the drain mechanism 3' is used to discharge condensed water generated by the contact between the cooling gas and the cold trap rod 2'. The drain mechanism 3' comprises a drain valve 31', and the drain valve 31' is connected to the bottom of the cold trap tank 1', and the drain valve 31' is used to: when it is necessary to discharge condensed water from the bottom of the cold trap tank 1', the drain valve 31' is opened to discharge the condensed water at the bottom of the cold trap tank 1' through the drain valve 31'.
[0004] In the drainable tube cold trap 100', the cooling gas can only move from the air inlet 11' to the air outlet 12' for discharge. This structural design only allows the cooling gas to contact the cold trap rod 2' and the nearby area to participate in the cooling work. The cooling gas away from the cold trap rod' area cannot participate in the cooling work well, which greatly reduces the efficiency of the cooling gas.
[0005] Since condensed water is formed in the process of cooling gas, in order to ensure the normal operation of the cold trap tank 1', this part of condensed water must be discharged. In the drainable tube cold trap 100', the drain valve 31' is opened when discharging the condensed water. This method will connect the cold trap 1' to the external atmosphere, destroying the air pressure inside the cold trap tank 1', which has disadvantages in use. Utility Model Content
[0006] In view of the problems existing in the background technology, the purpose of the present disclosure is to provide a drainable tube type cold trap, which can isolate the cold trap tank from the external atmosphere when the condensed water at the bottom of the cold trap tank is discharged from the cold trap tank, thereby eliminating the problem of destroying the air pressure in the cold trap tank.
[0007] Thus, a drainable tube-type cold trap comprises a cold trap tank, a cold trap rod and a drainage mechanism, the cold trap tank is provided with an air inlet and an air outlet, the air inlet and the air outlet are used for allowing cooling gas to enter and exit the cold trap tank; the cold trap rod is arranged in the cold trap tank, the drainage mechanism is connected to the bottom of the cold trap tank, the drainage mechanism is used to discharge condensed water generated by the contact between the cooling gas and the cold trap rod; the drainage mechanism comprises an upper drainage valve, a water storage tank and a lower drainage valve connected in series from top to bottom, the upper drainage valve is connected to the bottom of the cold trap tank, the upper drainage valve, the water storage tank and the lower drainage valve are used together: when it is necessary to drain the condensed water from the bottom of the cold trap tank, the lower drainage valve is closed and the upper drainage valve is opened to discharge the condensed water at the bottom of the cold trap tank into the water storage tank for storage via the upper drainage valve, and when it is necessary to drain the water in the water storage tank, the upper drainage valve is closed and the lower drainage valve is opened to discharge the water in the water storage tank via the lower drainage valve.
[0008] The beneficial effects of the present disclosure are as follows: in the drainable tube type cold trap according to the present disclosure, through the arrangement and coordination of the upper drain valve, the water storage tank and the lower drain valve, when the condensed water at the bottom of the cold trap tank is discharged from the cold trap tank, the cold trap tank is isolated from the external atmosphere, and thus there is no problem of destroying the air pressure in the cold trap tank. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] Figure 1 is a perspective view of a known drainable tubular cold trap.
[0010] Figure 2 yes Figure 1 A cross-sectional view along line AA.
[0011] Figure 3 is a perspective view of a drainable tubular cold trap according to the present disclosure.
[0012] Figure 4 yes Figure 3 Simplified side view of .
[0013] Figure 5 is along Figure 4 A cross-sectional view made along line BB.
[0014] Figure 6 yes Figure 5 Top view of the .
[0015] The reference numerals are described as follows:
[0016] 100' drainable tubular cold trap 11 air inlet
[0017] 1' cold trap tank 12 gas outlet
[0018] 11' air inlet 13 axis
[0019] 12' air outlet 14 water guide hole
[0020] 13' axis 2 cold trap rod
[0021] 2' cold trap rod 3 drainage mechanism
[0022] 3' drainage valve on drainage mechanism 31
[0023] 31' Drain valve 32 Water storage tank
[0024] 100 drainable tubular cold trap 33 bottom drain valve
[0025] 1 cold trap tank 4 spiral air guide vanes DETAILED DESCRIPTION
[0026] The accompanying drawings show embodiments of the present disclosure, and it will be understood that the disclosed embodiments are merely examples of the present disclosure, and the present disclosure can be implemented in various forms. Therefore, the specific details disclosed herein should not be interpreted as limiting, but merely as the basis for the claims and as a representative basis for teaching ordinary technicians in the field to implement the present disclosure in various ways.
[0027] Reference Figure 3 According to the present disclosure, the drainable tubular cold trap 100 includes a cold trap tank 1, a cold trap rod 2, and a drainage mechanism 3. The cold trap tank 1 is provided with an air inlet 11 and an air outlet 12, and the air inlet 11 and the air outlet 12 are used for cooling gas to enter and exit the cold trap tank 1. The cold trap rod 2 is arranged in the cold trap tank 1. The drainage mechanism 3 is connected to the bottom of the cold trap tank 1, and the drainage mechanism 3 is used to discharge the condensed water generated by the contact between the cooling gas and the cold trap rod 2. The drainage mechanism 3 includes an upper drainage valve 31, a water storage tank 32, and a lower drainage valve 33 which are sequentially connected in series from top to bottom. The upper drainage valve 31 is connected to the bottom of the cold trap tank 1. The upper drain valve 31, the water storage tank 32 and the lower drain valve 33 are used together: when it is necessary to drain the condensed water from the bottom of the cold trap tank 1, the lower drain valve 33 is closed and the upper drain valve 31 is opened to discharge the condensed water at the bottom of the cold trap tank 1 into the water storage tank 32 for storage via the upper drain valve 31; when it is necessary to drain the water in the water storage tank 32, the upper drain valve 31 is closed and the lower drain valve 33 is opened to discharge the water in the water storage tank 32 via the lower drain valve 33.
[0028] In the drainable tube type cold trap 100 according to the present disclosure, by the arrangement and coordination of the upper drain valve 31, the water storage tank 32 and the lower drain valve 33, when the condensed water at the bottom of the cold trap tank 1 is discharged from the cold trap tank 1, the cold trap tank 1 is isolated from the external atmosphere, and thus there is no problem of destroying the air pressure in the cold trap tank 1.
[0029] The upper drain valve 31 and the lower drain valve 33 may be of any suitable type. For example, the upper drain valve 31 and the lower drain valve 33 are both manual diaphragm valves.
[0030] In one example, refer to Figure 3 and Figure 4 The air inlet 11 is eccentrically arranged relative to the axis 13 of the cold trap tank 1. The eccentric arrangement of the air inlet 11 relative to the axis 13 of the cold trap tank 1 is conducive to better generating a spiral upward airflow around the cold trap rod 2 after the cooling gas enters the cold trap tank 1 through the air inlet 11, so that compared with the background technology, the cooling gas in the area far away from the cold trap rod 2 can participate in the cooling work, thereby improving the cooling efficiency and cooling effect of the cooling gas.
[0031] In one example, refer to Figure 3 Combined with Figure 4 and Figure 5 The drainable tubular cold trap 100 also includes a spiral air guide plate 4, which spirally rises around the cold trap rod 2. The spiral air guide plate 4 spirally rises around the cold trap rod 2 can force the cooling gas to spirally rise along the spiral air guide plate 4 to cool the cold trap rod 2. Compared with the background technology, the cooling gas in the area far away from the cold trap rod 2 can participate in the cooling work, thereby improving the cooling efficiency and cooling effect of the cooling gas, especially when combined with the eccentric setting of the air inlet 11 relative to the axis 13 of the cold trap tank 1.
[0032] like Figure 5 As shown, in one example, the span of the spiral air guide blade 4 in the vertical direction covers the air inlet 11 and the air outlet 12. As a result, the cooling gas in the area between the air inlet 11 and the air outlet 12 can participate in the cooling work under the forced action of the spiral air guide blade 4, thereby improving the cooling efficiency and cooling effect of the cooling gas.
[0033] like Figure 5 As shown, in one example, the spiral air guide blade 4 is arranged along the inner wall of the cold trap tank 1. The spiral air guide blade 4 is arranged along the inner wall of the cold trap tank 1, so that all the cooling gas in the plane perpendicular to the axis 13 of the cold trap tank 1 participates in the cooling work, thereby improving the cooling efficiency and cooling effect of the cooling gas.
[0034] Furthermore, if Figure 5 and Figure 6 As shown, the inner wall of the cold trap tank 1 is provided with a water guide hole 14 extending axially downward, and the water guide hole 14 is used to collect condensed water to the bottom of the cold trap tank 1. The water guide hole 14 extending axially downward can allow the condensed water to flow quickly to the bottom of the cold trap tank 1, which is conducive to the rapid collection of the condensed water, and further facilitates the cold trap tank 1 to discharge the collected condensed water in time.
[0035] like Figure 6 As shown, there are a plurality of water guide holes 14 and they are arranged at intervals along the circumference of the cold trap tank 1. Further, the plurality of water guide holes 14 are arranged at equal intervals along the circumference of the cold trap tank 1.
[0036] The above detailed description is used to describe multiple exemplary embodiments, but this document is not intended to be limited to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined together to form multiple additional combinations that are not shown for the sake of simplicity.
Claims
1. A drainable tubular cold trap, comprising a cold trap tank (1), a cold trap rod (2) and a drain mechanism (3), The cold trap tank (1) is provided with an air inlet (11) and an air outlet (12), and the air inlet (11) and the air outlet (12) are used for cooling gas to enter and exit the cold trap tank (1); The cold trap rod (2) is arranged in the cold trap tank (1). The drainage mechanism (3) is connected to the bottom of the cold trap tank (1), and is used to discharge condensed water generated by the contact between the cooling gas and the cold trap rod (2); It is characterized in that The liquid discharge mechanism (3) comprises an upper drain valve (31), a water storage tank (32) and a lower drain valve (33) which are connected in series from top to bottom. The upper drain valve (31) is connected to the bottom of the cold trap tank (1). The upper drain valve (31), the water storage tank (32) and the lower drain valve (33) are used together: when it is necessary to drain condensed water from the bottom of the cold trap tank (1), the lower drain valve (33) is closed and the upper drain valve (31) is opened to drain the condensed water at the bottom of the cold trap tank (1) through the upper drain valve (31) to the water storage tank (32) for storage; when it is necessary to drain the water in the water storage tank (32), the upper drain valve (31) is closed and the lower drain valve (33) is opened to drain the water in the water storage tank (32) through the lower drain valve (33).
2. The drainable tubular cold trap according to claim 1, characterized in that: The upper drain valve (31) and the lower drain valve (33) are both manual diaphragm valves.
3. The drainable tubular cold trap according to claim 1, characterized in that: The air inlet (11) is eccentrically arranged relative to the axis (13) of the cold trap tank (1).
4. The drainable tubular cold trap according to any one of claims 1 to 3, characterized in that: The drainable tubular cold trap (100) further comprises a spiral air guide plate (4), wherein the spiral air guide plate (4) rises in a spiral around the cold trap rod (2).
5. The drainable tubular cold trap according to claim 4, characterized in that: The span of the spiral air guide blade (4) in the up-down direction covers the air inlet (11) and the air outlet (12).
6. The drainable tubular cold trap according to claim 5, characterized in that: The spiral air guide blade (4) is arranged along the inner wall of the cold trap tank (1).
7. The drainable tubular cold trap according to claim 6, characterized in that: The inner wall of the cold trap tank (1) is provided with a water guide hole (14) extending axially downward, and the water guide hole (14) is used to collect condensed water to the bottom of the cold trap tank (1).
8. The drainable tubular cold trap according to claim 7, characterized in that: There are a plurality of water guide holes (14) which are arranged at intervals along the circumference of the cold trap tank (1).
9. The drainable tubular cold trap according to claim 8, characterized in that: A plurality of water guide holes (14) are arranged at equal intervals along the circumference of the cold trap tank (1).