Electronic probe sample seat and electronic probe sample table capable of adjusting sample height

Abstract

The utility model provides an electronic probe sample seat capable of adjusting the height of a sample and an electronic probe sample table. The electronic probe sample seat comprises a seat body, a gasket, a screw rod, a nut and a supporting column, a through hole is formed in the bottom face of the base body in the vertical direction, and a first fixing hole and a second fixing hole are formed in the side face of the base body. One end of the screw and the bottom end of the gasket are fixedly arranged, and the other end penetrates through the through hole and then extends downwards; the nut is in threaded connection with the screw rod and is positioned between the seat body and the support column in the vertical direction; the supporting column is concavely provided with a cylindrical groove from top to bottom, the upper portion of the cylindrical groove is provided with an internal thread in threaded connection with the screw rod, and the supporting column is provided with a third fixing hole extending to the cylindrical groove in the horizontal direction. On the basis that the sample to be detected is not shielded, the height of the sample to be detected can be adjusted, the stability of the sample to be detected is realized, the sample to be detected is prevented from inclining, and the detection accuracy is improved.

Description

Technical Field

[0001] The utility model relates to the field of electronic probe sample detection devices, in particular to an electronic probe sample seat and an electronic probe sample table for adjusting the sample height. Background Art

[0002] Electron probe is a microanalysis technique for analyzing material composition, which is widely used in materials science, geology, metallurgy, biology and other fields. It mainly scans the surface of the sample by focusing the electron beam, and uses the X-rays generated by the interaction of the sample with the electron beam to analyze the elemental composition of the sample. It can analyze elements from boron (B) to uranium (U) in the periodic table. In addition to element identification, the electron probe can also perform quantitative analysis, that is, determine the relative content of each element in the sample; electron probe analysis technology is very important in scientific research and industrial testing due to its high precision and high resolution. Through this technology, researchers can have a deeper understanding of the microstructure and chemical properties of the material. Therefore, the stability of the sample to be tested needs to be ensured during the test. In addition, the existing electron probe sample holders are of various forms, and conventional electron probe sample holders are usually designed to adapt to the way of adjusting the probe height; however, in actual use, due to the different specifications of the samples to be tested, the position height of the sample itself often needs to be adjusted. Therefore, there is currently a lack of a convenient and efficient structure for adjusting the sample height.

[0003] The Chinese utility model patent with authorization announcement number CN210742166U records an electronic probe sample table, which includes a base and a lifting platform, the base has opposite side walls, the lifting platform is located between the two side walls, a horizontal baffle is fixedly arranged between the two side walls, the horizontal baffle is located above the lifting platform, a detection hole is opened on the horizontal baffle, the aperture size of the detection hole is smaller than the maximum length of the line connecting two points on any edge of the sample detection surface; a vertical through hole is opened on the base, a screw hole seat is arranged in the through hole, the lifting platform is fixedly arranged at the top end of the lifting screw, and the lifting screw is erected in the screw hole of the screw hole seat.

[0004] Although the patent can adjust the lifting and lowering of the sample to be tested, thereby raising the sample to the position of the horizontal baffle, and the sample to be tested can be fixed by the horizontal baffle to improve the stability of the sample to be tested; however, for porous materials that cannot be inlaid and brittle irregular samples (that is, it is difficult to find a flat surface on the irregular sample for fixing to the surface of the lifting platform), or when the horizontal size of the sample is smaller than the diameter of the horizontal baffle, the horizontal baffle above the lifting platform loses its fixing function; secondly, a horizontal baffle is arranged above the lifting platform, and the aperture of the detection hole on the horizontal baffle is smaller than the maximum length of the line connecting two points on any edge of the detection surface of the sample to be tested, which will cause part of the area to be detected of the sample to be tested to be blocked by the horizontal baffle, thereby affecting the detection surface of the sample to be tested; thirdly, since the area of ​​the sample to be tested needs to be placed at the middle detection hole position, the difficulty and restrictions of the early preparation and processing of the sample to be tested are increased, and the efficiency of sample preparation is reduced. For example: if there are two defects (cracks or black spots, etc.) on the same sample to be tested, and the two defects are far apart, they cannot be displayed at the same time due to the limitation of the aperture of the horizontal baffle. Therefore, the sample to be tested needs to be cut into two specimens during preparation and tested twice, which increases the processing and testing time and reduces efficiency.

[0005] In view of this, it is necessary to provide an electron probe sample holder and an electron probe sample table for adjusting the sample height, so that while being able to lift and stabilize the sample to be tested, it can simultaneously accommodate samples of various specifications, and solve or at least alleviate the technical defect of the above-mentioned prior art that the sample to be tested will be obscured during the process of lifting and fixing the sample to be tested, and reduce the tediousness of the preliminary sample preparation. Utility Model Content

[0006] The main purpose of the utility model is to provide an electronic probe sample holder and an electronic probe sample table for adjusting the sample height, aiming to be able to lift and stabilize the sample to be tested, to be suitable for samples of various specifications at the same time, and to solve or at least alleviate the technical defect problem of the above-mentioned prior art that the sample to be tested will be blocked during the process of lifting and fixing the sample to be tested, and to reduce the tediousness of the early sample preparation.

[0007] To achieve the above-mentioned purpose, the utility model provides an electronic probe sample holder for adjusting the sample height, comprising a holder body, a gasket, a screw rod, a nut and a support;

[0008] The base body has a bottom surface, a first side surface, and a second side surface; the bottom surface is provided with a through hole in the vertical direction; the first side surface and the second side surface are arranged opposite to each other, the first side surface is provided with a first fixing hole in the horizontal direction, the second side surface is provided with a second fixing hole in the horizontal direction, and the first fixing hole and the second fixing hole are arranged opposite to each other; the base body forms a lofting area between the first fixing hole and the second fixing hole;

[0009] The gasket is located between the first side surface and the second side surface, and is located above the bottom surface; the screw has a first end and a second end that are arranged opposite to each other, the first end and the bottom end of the gasket are fixedly arranged, and the second end extends downward after passing through the through hole; the nut is threadedly connected to the screw, and is located between the seat body and the pillar in the vertical direction;

[0010] The pillar is provided with a cylindrical groove concave from top to bottom, and the upper part of the cylindrical groove has an internal thread connected to the screw thread; the pillar is provided with a third fixing hole extending to the cylindrical groove in the horizontal direction, and the opening position of the third fixing hole is not lower than the active area of ​​the second end; the active area of ​​the second end is the area where the second end stays when the screw moves up and down.

[0011] Furthermore, the first side surface is provided with a plurality of the first fixing holes at a first height and a second height, and the second side surface is provided with a plurality of the second fixing holes at the first height and the second height, and the first height is higher than the second height;

[0012] The plurality of first fixing holes and the plurality of second fixing holes at the first height are symmetrically arranged, and the plurality of first fixing holes and the plurality of second fixing holes at the second height are symmetrically arranged.

[0013] Furthermore, the first side surface and the second side surface are both arc-shaped surfaces, and the concave surfaces of the first side surface and the second side surface face the gasket; and the gasket is circular.

[0014] Furthermore, the pillar is provided with a plurality of the third fixing holes at a third height and a fourth height, and the third height is higher than the fourth height; and the plurality of the third fixing holes at the third height and the fourth height are evenly distributed around the pillar.

[0015] Furthermore, the screw rod is provided with a threaded portion and a non-threaded portion in sequence from top to bottom, the threaded portion is threadedly connected to the upper portion of the cylindrical groove, and the non-threaded portion extends into the lower portion of the cylindrical groove; the fourth height coincides with the active area of ​​the non-threaded portion in height position.

[0016] Furthermore, a stud facing downward is provided at the lower end of the support column.

[0017] Furthermore, the through hole is a threaded hole, and the through hole is threadably connected to the screw rod.

[0018] Furthermore, the electron probe sample holder further comprises a first abutting member, a second abutting member and a third abutting member;

[0019] The first supporting member is threadedly connected to the first fixing hole, the second supporting member is threadedly connected to the second fixing hole, and the third supporting member is threadedly connected to the third fixing hole.

[0020] Furthermore, no blocking piece is arranged above the gasket.

[0021] The present invention further provides an electron probe sample stage, comprising a stage body and any of the above-described electron probe sample holders, wherein the stage body and the electron probe sample holder are detachably fixedly connected.

[0022] Compared with the prior art, the utility model has at least the following advantages:

[0023] The utility model can be simultaneously applicable to the height adjustment of various specifications of samples to be tested, such as inlaid samples and non-inlaid samples, so as to maintain the stability of the position of the samples to be tested, reduce the tediousness of the early sample preparation, and facilitate the detection; and the utility model can realize the lifting and fixing of the samples to be tested without shielding the samples to be tested, avoid the tilting of the samples to be tested, improve the accuracy of the detection, and better adapt to the detection needs; it should be noted that if the surface of the sample is uneven, the emitted X-rays will be irregularly absorbed, reducing the X-ray measurement intensity, thereby affecting the accuracy of the quantitative test of the elemental composition.

[0024] The utility model realizes the up and down movement of the screw relative to the cylindrical groove by arranging a screw rod and a cylindrical groove; further stabilization of the screw rod is realized by arranging an internal thread on the upper part of the cylindrical groove and opening a third fixing hole on the pillar; the lifting and lowering of the gasket can be realized by fixedly connecting the screw rod and the gasket, so that the sample to be tested can be raised to the detection height; the sample to be tested can be stabilized in the horizontal direction by opening a first fixing hole on the first side and a second fixing hole on the second side, so as to avoid the sample to be tested from tilting; since the side surface of the seat body is provided with a fixing hole, the stability of the seat body can be maintained by setting a nut between the seat body and the pillar, so as to ensure that the sample to be tested does not tilt. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0026] Figure 1 This is a front view of an electronic probe sample holder assembled to a sample stage in one embodiment of the utility model;

[0027] Figure 2This is a three-dimensional diagram of an electronic probe sample holder assembled to a sample stage in one embodiment of the utility model;

[0028] Figure 3 This is a schematic diagram of the structure of the seat body in one embodiment of the utility model (the threads in the through hole, the first fixing hole and the second fixing hole are not shown);

[0029] Figure 4 This is a schematic diagram of the structure after the gasket, screw rod and nut are assembled in one embodiment of the utility model;

[0030] Figure 5 It is a schematic structural diagram of a support in one embodiment of the utility model.

[0031] Explanation of the accompanying drawings: 1. seat body; 2. through hole; 3. first side surface; 4. second side surface; 5. gasket; 6. screw; 7. threaded portion; 8. non-threaded portion; 9. nut; 10. support; 11. first supporting member; 12. second supporting member; 13. third supporting member; 14. stud; 15. platform body.

[0032] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with the implementation methods and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] It should be noted that all directional indications (such as up, down, horizontal, vertical...) in the implementation mode of the utility model are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0035] In addition, in the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of the features.

[0036] Furthermore, the technical solutions between the various implementation modes of the present invention may be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in the field. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0037] In order to realize the lifting and lowering of the sample to be tested, ensure the stability of the sample to be tested, avoid its tilting, and be applicable to samples of various specifications to be tested, avoid the sample to be tested from being blocked, and reduce the tediousness of the early sample preparation; see Figure 1-5 As shown, the present invention provides an electron probe sample stand for adjusting the sample height, comprising a stand body 1 , a gasket 5 , a screw rod 6 , a nut 9 and a support 10 .

[0038] The base body 1 has a bottom surface, a first side surface, and a second side surface; the bottom surface extends horizontally, the first side surface and the second side surface extend vertically, the first side surface and the second side surface are arranged opposite to each other, and the specifications of the first side surface and the second side surface can be consistent; the bottom surface, the first side surface and the second side surface can be integrally formed, and the seat opening of the base body 1 faces upward; in order to facilitate the placement and removal of samples to be tested, the base body 1 can only be provided with the first side surface and the second side surface.

[0039] In order to facilitate the vertical movement of the screw rod 6, a through hole 2 is opened in the vertical direction on the bottom surface, and the through hole 2 is located in the central area of ​​the bottom surface; the through hole 2 is a threaded hole, the diameter of the through hole 2 is consistent with the screw rod 6, and the through hole 2 is threadedly connected to the screw rod 6.

[0040] In order to fix the sample to be tested in the horizontal direction, the first side surface is provided with a first fixing hole in the horizontal direction, and the second side surface is provided with a second fixing hole in the horizontal direction, and the first fixing hole and the second fixing hole are arranged opposite to each other; the base body 1 forms a layout area between the first fixing hole and the second fixing hole; that is, the opening positions of the first fixing hole and the second fixing hole coincide with the layout area in height position, and the layout area is the internal area of ​​the base body 1 where the sample to be tested is located during testing; by setting the nut 9, the screw rod 6 and the through hole 2, the relative height of the base body 1 and the gasket 5 can be adjusted, so that the sample to be tested is located in the layout area of ​​the base body 1.

[0041] In order to increase the stability of the sample to be tested, the first side is provided with a plurality of the first fixing holes at a first height and a second height, and the second side is provided with a plurality of the second fixing holes at the first height and the second height, and the first height is higher than the second height; that is, the first fixing holes and the second fixing holes are provided at different heights.

[0042] In order to make the sample to be tested be subjected to uniform force, the plurality of first fixing holes and the plurality of second fixing holes at the first height are symmetrically arranged, and the plurality of first fixing holes and the plurality of second fixing holes at the second height are symmetrically arranged.

[0043] The sample to be tested is usually in the shape of an inlaid cylinder, or an irregular cuboid or cube; in order to facilitate the placement and fixation of the sample to be tested, the first side surface and the second side surface are both arc-shaped surfaces, and the concave surfaces of the first side surface and the second side surface face the gasket 5; the gasket 5 is located between the first side surface and the second side surface, and is located above the bottom surface of the base 1; the gasket 5 can be circular, and the gasket 5 can be understood as a circular horizontal gasket 5; in order to increase the stability of the sample, a double-sided conductive tape can be bonded to the gasket 5 to bond the sample to be tested; the gasket 5 is parallel to the bottom surface of the base 1 and remains horizontal, thereby preventing the sample to be tested from tilting. In the utility model, no baffle is provided above the gasket 5, that is, there is no component above the gasket 5 that blocks the sample to be tested, thereby ensuring that samples of various specifications can be applied at the same time and reducing the tediousness of the initial sample preparation.

[0044] The screw rod 6 has a first end and a second end that are relatively arranged, the first end can be understood as the upper end, and the second end can be understood as the lower end; the first end and the bottom end of the gasket 5 are fixedly arranged, so that the gasket 5 can be controlled by the screw rod 6 to adjust the height of the sample to be tested. The second end extends downward after passing through the through hole 2 and extends into the cylindrical groove. It should be noted that the sample to be tested usually has a certain height. Due to the different specifications of the samples to be tested, especially the different heights, the utility model needs to adjust the lifting of the sample to be tested so that the upper end surface of the sample to be tested reaches the detection height.

[0045] The nut 9 is threadedly connected to the screw rod 6 and is located between the bottom surface of the seat body 1 and the support 10 in the vertical direction. The outer diameter of the nut 9 should be larger than the diameter of the through hole 2. By setting the nut 9, the seat body 1 can be stabilized after the gasket 5 is raised or lowered.

[0046] The pillar 10 is located below the seat body 1, and the pillar 10 is provided with a cylindrical groove from top to bottom, and the pillar 10 can be cylindrical; the cylindrical groove and the shape of the screw 6 are consistent, and specifically can be a cylindrical groove body; the upper part of the cylindrical groove has an internal thread threadedly connected to the screw 6; further, the screw 6 is provided with a threaded portion 7 and a non-threaded portion 8 in sequence from top to bottom, the threaded portion 7 is threadedly connected to the upper part of the cylindrical groove, and the non-threaded portion 8 extends into the lower part of the cylindrical groove; and the threaded portion 7 is threadedly connected to the through hole 2 at the same time.

[0047] If the screw rod 6 and the cylindrical groove are only connected by threads, wear will easily occur when the frequency of use increases, resulting in an unstable connection; therefore, the pillar 10 is provided with a third fixing hole extending to the cylindrical groove in the horizontal direction, and the opening position of the third fixing hole is not lower than the active area of ​​the second end; the active area of ​​the second end is the area where the second end stays when the screw rod 6 moves up and down; specifically, the upward movement of the second end has an upper limit, which is the lowest position of the third fixing hole. That is, when the screw rod 6 moves up and down, the third fixing hole can fix the screw rod 6 through a supporting member. It should be understood that by providing the third fixing hole, the connection can be strengthened to offset the problem of unstable connection after thread wear.

[0048] In order to improve stability and prevent the sample to be tested from tilting, the pillar 10 is provided with a plurality of the third fixing holes at the third height and the fourth height, and two third fixing holes may be provided at the third height and the fourth height; the third height is higher than the fourth height; and the plurality of the third fixing holes at the third height and the fourth height are evenly distributed around the pillar 10.

[0049] During long-term use, in order to prevent the abutment in the third fixing hole from damaging the threads on the screw rod 6 in a tightened state, and at the same time ensure the stability of the screw rod 6, especially the stability in the horizontal direction; the fourth height may coincide with the height position of the active area of ​​the non-threaded portion 8. Of course, the third height may coincide with the height position of the active area of ​​the non-threaded portion 8, and may also coincide with the height position of the active area of ​​the threaded portion 7. If the third height coincides with the height position of the active area of ​​the threaded portion 7, then in the third fixing hole at the third height, the abutment of the screw rod 6 by the abutment may be slightly weaker, while in the third fixing hole at the fourth height, the abutment of the screw rod 6 by the abutment may be slightly stronger.

[0050] In order to facilitate the installation of the sample holder on the sample stage, a stud 14 facing downward is provided at the lower end of the support column 10 ; at this time, a threaded groove matching with the stud 14 is recessed downwardly on the stage body 15 of the sample stage.

[0051] As a further explanation, the electron probe sample holder also includes a first abutment 11, a second abutment 12 and a third abutment 13, and the first abutment 11, the second abutment 12 and the third abutment 13 can all be screws; the first abutment 11 and the first fixing hole are threadedly connected in the horizontal direction, the second abutment 12 and the second fixing hole are threadedly connected in the horizontal direction, and the third abutment 13 and the third fixing hole are threadedly connected in the horizontal direction.

[0052] The working method of the utility model can be: the screw rod 6 is passed through the through hole 2 and the nut 9 from top to bottom in sequence; the upper end of the screw rod 6 is fixedly connected to the gasket 5, and the sample to be tested is placed on the gasket 5; by adjusting the screw rod 6 and the nut 9, the sample to be tested is made to correspond to the layout area of ​​the base body 1; then, the first abutment 11 and the second abutment 12 are tightened to keep the sample to be tested stable.

[0053] The screw rod 6 is extended downward into the cylindrical groove and connected with the cylindrical groove by thread, and the non-threaded portion 8 of the screw rod 6 is extended to the lower part of the cylindrical groove; the insertion depth of the screw rod 6 is controlled, thereby controlling the height of the sample to be tested. Afterwards, the third abutting member 13 is tightened to ensure the stability of the screw rod 6; wherein, the third abutting member 13 abutting against the threaded portion 7 of the screw rod 6 is tightened with a small amplitude, and the third abutting member 13 abutting against the non-threaded portion 8 of the screw rod 6 is tightened with a large amplitude.

[0054] The utility model realizes the height adjustment and position fixing of the sample to be tested, and maintains the stability of the sample to be tested. In addition, the utility model is simple and easy to operate, and also improves the accuracy of experimental detection.

[0055] The utility model also provides an electron probe sample stage, comprising a stage body 15 and an electron probe sample holder as described above, wherein the stage body 15 and the electron probe sample holder are detachably fixedly connected. The stage body 15 may be concavely provided with a threaded groove, and the pillar 10 of the sample holder may be protruding downwardly with a stud 14, wherein the diameter of the stud 14 is smaller than the diameter of the pillar 10; the threaded groove and the stud 14 are threadedly connected. As another embodiment, the pillar 10 and the stage body 15 may also be fixedly connected by a fixing screw at the center of the bottom surface; that is, a fixing screw is installed downwardly on the bottom surface of the cylindrical groove, and the fixing screw extends to the stage body 15.

[0056] The above technical solutions of the present invention are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. An electron probe sample holder for adjusting sample height, characterized in that: Including seat body, gasket, screw, nut and support; The base body has a bottom surface, a first side surface, and a second side surface; the bottom surface is provided with a through hole in the vertical direction; the first side surface and the second side surface are arranged opposite to each other, the first side surface is provided with a first fixing hole in the horizontal direction, the second side surface is provided with a second fixing hole in the horizontal direction, and the first fixing hole and the second fixing hole are arranged opposite to each other; the base body forms a lofting area between the first fixing hole and the second fixing hole; The gasket is located between the first side surface and the second side surface, and is located above the bottom surface; the screw has a first end and a second end that are arranged opposite to each other, the first end and the bottom end of the gasket are fixedly arranged, and the second end extends downward after passing through the through hole; the nut is threadedly connected to the screw, and is located between the seat body and the pillar in the vertical direction; The pillar is provided with a cylindrical groove concave from top to bottom, and the upper part of the cylindrical groove has an internal thread connected to the screw thread; the pillar is provided with a third fixing hole extending to the cylindrical groove in the horizontal direction, and the opening position of the third fixing hole is not lower than the active area of ​​the second end; the active area of ​​the second end is the area where the second end stays when the screw moves up and down.

2. The electron probe sample holder according to claim 1, characterized in that: The first side surface is provided with a plurality of the first fixing holes at a first height and a second height, and the second side surface is provided with a plurality of the second fixing holes at the first height and the second height, wherein the first height is higher than the second height; The plurality of first fixing holes and the plurality of second fixing holes at the first height are symmetrically arranged, and the plurality of first fixing holes and the plurality of second fixing holes at the second height are symmetrically arranged.

3. The electron probe sample holder according to claim 1, characterized in that: The first side surface and the second side surface are both arc-shaped surfaces, and the concave surfaces of the first side surface and the second side surface face the gasket; and the gasket is circular.

4. The electron probe sample holder according to claim 1, characterized in that: The pillar is provided with a plurality of third fixing holes at a third height and a fourth height, and the third height is higher than the fourth height; the plurality of third fixing holes at the third height and the fourth height are evenly distributed around the pillar.

5. The electron probe sample holder according to claim 4, characterized in that: The screw rod is provided with a threaded portion and a non-threaded portion in sequence from top to bottom, the threaded portion is threadedly connected to the upper portion of the cylindrical groove, and the non-threaded portion extends into the lower portion of the cylindrical groove; the fourth height coincides with the active area of ​​the non-threaded portion in height position.

6. The electron probe sample holder according to claim 1, characterized in that: The lower end of the support column is provided with a stud facing downward.

7. The electron probe sample holder according to claim 1, characterized in that: The through hole is a threaded hole, and the through hole is threadedly connected to the screw rod.

8. The electron probe sample holder according to claim 1, characterized in that: The electron probe sample holder further comprises a first abutting member, a second abutting member and a third abutting member; The first supporting member is threadedly connected to the first fixing hole, the second supporting member is threadedly connected to the second fixing hole, and the third supporting member is threadedly connected to the third fixing hole.

9. The electron probe sample holder according to any one of claims 1 to 8, characterized in that: No blocking piece is arranged above the gasket.

10. An electron probe sample stage, characterized in that: It comprises a platform and an electron probe sample holder as claimed in any one of claims 1 to 9, wherein the platform and the electron probe sample holder are detachably fixedly connected.

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