Purification system for electronic grade acetylene production

Abstract

The utility model relates to a purification system for electronic grade acetylene production, and relates to the technical field of acetylene production. The purification system for electronic grade acetylene production comprises a raw material tank, a purification mechanism, a drying tower, a material storage tank and a waste gas treatment device, and further comprises a heat exchanger, the purification mechanism comprises a plurality of outlet pipes, the outlet pipes are used for introducing each waste gas generated by the purification mechanism into the heat exchanger, and the heat exchanger is communicated with the drying tower. The heat exchanger is used for fully exchanging heat of the waste gas introduced by the plurality of outlet pipes, and the heat exchanger is communicated with the waste gas treatment device. The waste gas treatment device has the following effects that waste gas at different temperatures can be uniformly introduced into the heat exchanger, is changed into the same temperature after full heat exchange in the heat exchanger, and then is introduced into the waste gas treatment device, so that the probability that the waste gas treatment device is damaged due to sudden cold and hot in the cavity of the waste gas treatment device is reduced, and the waste gas treatment device is more environment-friendly. The service life of the waste gas treatment device is ensured.

Description

Technical Field

[0001] The present application relates to the technical field of acetylene production, and in particular to a purification system for producing electronic-grade acetylene. Background Art

[0002] With the continuous development of social economy and the increasing level of science and technology, my country's chemical industry is also booming. Acetylene is an organic compound, commonly known as wind gas or calcium carbide gas, and is one of the important raw materials for organic synthesis. As a special gas, electronic grade acetylene is mainly used in the preparation of amorphous carbon masks in the semiconductor industry. It uses plasma enhanced chemical vapor deposition technology to form a stable amorphous carbon layer film and construct a carbon hard mask that can be used in photolithography. It plays an important role.

[0003] In the prior art, there is a purification system for electronic grade acetylene production, which includes a raw material tank, a purification mechanism, a drying tower, a storage tank and a waste gas treatment device. The raw material tank is connected to the drying tower through the purification mechanism. The purification mechanism is used to purify the acetylene in the raw material tank and pass the purified acetylene into the drying tower. The drying tower is connected to the storage tank through a pipeline. The waste gas treatment device is used to receive the waste gas passed through several steps of the purification mechanism and treat the waste gas. When in use, the purification mechanism extracts the acetylene in the raw material tank and performs multiple purification steps. After purification, the acetylene is passed into the drying tower for drying. The drying tower then passes the dried acetylene into the storage tank for storage to complete the purification.

[0004] Regarding the above-mentioned related technologies, since the temperatures of the exhaust gases generated in several steps of the purification mechanism are not the same, and the exhaust gases of different temperatures will be directly passed into the exhaust gas treatment device, this causes the interior of the exhaust gas treatment device to be in a hot and cold state for a long time, which can easily cause damage to the exhaust gas treatment device and reduce the service life of the exhaust gas treatment device, so there is room for improvement. Utility Model Content

[0005] In order to ensure the service life of the exhaust gas treatment device, the present application provides a purification system for electronic grade acetylene production.

[0006] The present application provides a purification system for electronic grade acetylene production, which adopts the following technical solution:

[0007] A purification system for producing electronic-grade acetylene, comprising a raw material tank, a purification mechanism, a drying tower, a storage tank and a waste gas treatment device, and also comprising a heat exchanger. The purification mechanism comprises a plurality of outlet pipes, and the plurality of outlet pipes are used to pass each waste gas generated by the purification mechanism into the heat exchanger. The heat exchanger is used to fully heat exchange the waste gas introduced into the plurality of outlet pipes, and the heat exchanger is connected to the waste gas treatment device.

[0008] By adopting the above-mentioned technical scheme, compared with the prior art in which the exhaust gases of different temperatures discharged from the purification mechanism are directly passed into the exhaust gas treatment device, the present application sets a heat exchanger so that the exhaust gases of different temperatures can be uniformly passed into the heat exchanger, and after sufficient heat exchange in the heat exchanger, they become the same temperature and are then passed into the exhaust gas treatment device, thereby effectively reducing the probability of damage to the exhaust gas treatment device due to alternating hot and cold temperatures in the chamber of the exhaust gas treatment device, and effectively ensuring the service life of the exhaust gas treatment device.

[0009] Preferably, it further comprises a filter box, wherein a plurality of filter chambers are provided in the filter box, wherein the filter chambers correspond to the outlet pipes one by one, a filter net is provided in each of the filter chambers, each of the outlet pipes is connected to the corresponding filter chamber, and each of the filter chambers is connected to the heat exchanger.

[0010] By adopting the above technical solution, the filter box and the filter screen are arranged so that the exhaust gas discharged through the outlet pipe can pass into the filter cavity in the filter box, so that the filter screen can filter the particulate matter in the exhaust gas, thereby performing preliminary treatment on the exhaust gas, effectively reducing the particulate content in the exhaust gas and facilitating subsequent treatment.

[0011] Preferably, each of the filter screens is slidably connected to the filter box, and a sliding path of each of the filter screens extends outside the filter box. A locking assembly is also provided in the filter box, and the locking assembly is used to lock the filter screen.

[0012] By adopting the above technical solution, the filter and the locking assembly are set up so that relevant personnel can separate the filter from the filter box by pulling out the filter, so that relevant personnel can clean the filter outside the filter box, thereby facilitating the cleaning of the filter by relevant personnel and ensuring the use effect of the filter after cleaning.

[0013] Preferably, the locking assembly includes a locking frame and an elastic member, the locking frame is slidably connected to the filter box, the sliding direction of the locking frame is perpendicular to the sliding direction of the filter screen, a spherical portion is also provided on one end of the locking frame, the spherical portion is inserted into the corresponding filter screen, and the elastic member is used for allowing the locking frame to continue to be inserted into the filter screen.

[0014] By adopting the above technical solution and the specific setting of the locking assembly, the locking frame can continuously lock the filter screen under the elastic force of the elastic member, thereby effectively reducing the probability of the locking frame accidentally detaching from the filter box. At the same time, the setting of the spherical part can also enable relevant personnel to lock the filter screen by simply pulling the filter screen, which effectively facilitates the relevant personnel to disassemble the filter screen.

[0015] Preferably, a storage box is provided at the bottom end of each filter cavity, each storage box is slidably connected to the filter box, and a sliding path of each storage box extends to the outside of the filter box.

[0016] By adopting the above technical solution, the storage box is set up so that relevant personnel can clean the filter material in the filter cavity by pulling out the storage box, which effectively facilitates the cleaning of debris by relevant personnel and reduces the difficulty of cleaning the filter material in the filter box.

[0017] Preferably, the purification mechanism also includes an adsorption tower, an absorption tower, a decomposition tower and a gas stripping tower, the discharge end of the raw material tank is connected to the feed end of the adsorption tower, the discharge end of the adsorption tower is connected to the feed end of the absorption tower, the discharge end of the absorption tower is connected to the feed end of the decomposition tower, the discharge end of the decomposition tower is connected to the feed end of the drying tower, the lower end outlet of the decomposition tower is connected to the inlet end of the gas stripping tower, and the adsorption tower and the gas stripping tower are both connected to corresponding outlet pipes.

[0018] By adopting the above technical scheme and the specific setting of the purification mechanism, the present application can effectively remove carbon dioxide through the adsorption tower, discharge impurities with low solubility through the absorption tower, and allow the solvent containing heavy impurities that can be discharged from the bottom of the analytical tower to enter the gas stripping tower, thereby increasing the purification effect of acetylene and ensuring the purity after purification.

[0019] Preferably, one end of the outlet pipe connected to the adsorption tower is connected to the top of the inner chamber of the heat exchanger, and one end of the outlet pipe connected to the gas stripping tower is connected to the bottom of the inner chamber of the heat exchanger.

[0020] By adopting the above technical solution and specifically arranging the outlet pipe, the exhaust gas with a lower temperature discharged through the adsorption tower can flow downward after passing through the top of the inner chamber of the heat exchanger, and the exhaust gas with a higher temperature discharged through the gas stripping tower can flow upward after passing through the bottom of the inner chamber of the heat exchanger, thereby enabling the two exhaust gases to fully contact each other during the flow, thereby ensuring the effect of heat exchange between the two exhaust gases.

[0021] Preferably, a plurality of heat exchange fans are provided in the heat exchanger, and the plurality of heat exchange fans are respectively located at the upper and lower ends of the inner chamber of the heat exchanger, and the heat exchange fan at the upper end of the inner chamber of the heat exchanger is arranged opposite to the heat exchange fan at the lower end of the inner chamber of the heat exchanger.

[0022] By adopting the above technical solution and setting the exchange fan, the gas at the top and bottom of the heat exchanger can be in continuous contact under the drive of the heat exchange fan, thereby effectively increasing the heat exchange effect of different exhaust gases in the heat exchanger, and further effectively reducing the probability of damage to the exhaust gas treatment device due to alternating hot and cold temperatures in the chamber of the exhaust gas treatment device, thereby effectively ensuring the service life of the exhaust gas treatment device.

[0023] In summary, the present application includes at least one of the following beneficial technical effects:

[0024] 1. The setting of the heat exchanger enables exhaust gases of different temperatures to be uniformly passed into the heat exchanger, and become the same temperature after sufficient heat exchange in the heat exchanger, and then passed into the exhaust gas treatment device, which effectively reduces the probability of damage to the exhaust gas treatment device due to the hot and cold conditions in the chamber of the exhaust gas treatment device, and effectively ensures the service life of the exhaust gas treatment device;

[0025] 2. The specific setting of the purification mechanism enables the present application to effectively remove carbon dioxide through the adsorption tower, discharge impurities with low solubility through the absorption tower, and allow the solvent containing heavy impurities that can be discharged from the bottom of the analytical tower to enter the gas stripping tower, thereby increasing the purification effect of acetylene and ensuring the purity after purification;

[0026] 3. The setting of the exchange fan enables the gases at the top and bottom of the heat exchanger to be in continuous contact under the drive of the heat exchange fan, thereby effectively increasing the heat exchange effect of different exhaust gases in the heat exchanger, and further effectively reducing the probability of damage to the exhaust gas treatment device due to the alternating hot and cold conditions in the chamber of the exhaust gas treatment device, effectively ensuring the service life of the exhaust gas treatment device. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall purification system for producing electronic-grade acetylene in the embodiments of the present application.

[0028] Figure 2 It is a schematic diagram of the structure of the storage box in the embodiment of the present application.

[0029] Figure 3 It is a schematic diagram of the structure of the heat exchange fan in the embodiment of the present application.

[0030] Figure 4 It is a structural schematic diagram used to reflect the locking assembly in the embodiment of the present application.

[0031] Explanation of the reference numerals: 1. Raw material tank; 2. Purification mechanism; 21. Outlet pipe; 22. Adsorption tower; 23. Absorption tower; 24. Analysis tower; 25. Gas stripping tower; 3. Drying tower; 4. Storage tank; 5. Waste gas treatment device; 6. Heat exchanger; 61. Heat exchange fan; 62. Discharge pipe; 63. Valve; 7. Filter box; 71. Filter screen; 711. Locking groove; 72. Storage box; 73. Connecting pipe; 8. Filter chamber; 9. Locking assembly; 91. Locking frame; 911. Spherical part; 92. Elastic part. DETAILED DESCRIPTION

[0032] The following is combined with Figure 1-4 This application is described in further detail.

[0033] The present application embodiment discloses a purification system for producing electronic grade acetylene. Figure 1 and Figure 2 The purification system for producing electronic grade acetylene includes a raw material tank 1, a purification mechanism 2, a drying tower 3, a storage tank 4, an exhaust gas treatment device 5 and a heat exchanger 6. The purification mechanism 2 includes a plurality of outlet pipes 21, and the plurality of outlet pipes 21 are used to pass each exhaust gas generated by the purification mechanism 2 to the heat exchanger 6. The heat exchanger 6 is used to fully heat exchange the exhaust gas introduced into the plurality of outlet pipes 21, and the heat exchanger 6 is connected to the exhaust gas treatment device 5.

[0034] Reference Figure 1 The purification mechanism 2 further includes an adsorption tower 22, an absorption tower 23, a desorption tower 24 and a gas stripping tower 25. The adsorption tower 22 is used to remove carbon dioxide, the absorption tower 23 is used to discharge impurities with low solubility, and the desorption tower 24 is used to discharge the solvent in which heavy impurities are dissolved. The discharge end at the bottom of the raw material tank 1 is connected to the feed end at the bottom of the adsorption tower 22 through a pipeline. The discharge end at the top of the adsorption tower 22 is connected to the feed end at the bottom of the absorption tower 23 through a pipeline, and the discharge end at the top of the absorption tower 23 is connected to the feed end at the bottom of the desorption tower 24 through a pipeline.

[0035] Reference Figure 1 , the discharge end at the top of the analysis tower 24 is connected to the feed end at the bottom of the drying tower 3 through a pipeline, and the lower end outlet of the analysis tower 24 is connected to the inlet end of the stripping tower 25 through a pipeline. The top outlet end of the drying tower 3 is connected to the top of the storage tank 4 through a pipeline. In the embodiment of the present application, the number of the outlet pipes 21 is set to two. One end of one of the outlet pipes 21 is connected to the top of the adsorption tower 22, and one end of the other vent pipe is connected to the top of the stripping tower 25.

[0036] Reference Figure 1 and Figure 3The purification system for electronic grade acetylene production further comprises a filter box 7, in which a plurality of filter chambers 8 are provided. In the embodiment of the present application, the number of the filter chambers 8 is set to two, and they are respectively located at the upper and lower ends of the filter box 7. The other end of the outlet pipe 21 connected to the adsorption tower 22 is connected to the filter chamber 8 at the top, and the other end of the outlet pipe 21 connected to the gas stripping tower 25 is connected to the filter chamber 8 at the bottom.

[0037] Reference Figure 2 and Figure 3 , each filter cavity 8 is provided with a filter screen 71. In the embodiment of the present application, two filter screens 71 are provided in each filter cavity 8. Each filter screen 71 is slidably connected to the filter box 7 through a slide rail, and the sliding direction of each filter screen 71 is the width direction of the filter box 7. The sliding path of each filter screen 71 extends to the outside of the filter box 7.

[0038] Reference Figure 3 and Figure 4 The filter box 7 is also provided with a locking assembly 9, which is arranged in four groups, and the four groups of locking assemblies 9 are arranged one by one with the four filter screens 71. Two locking assemblies 9 are arranged in each group, and the two locking assemblies 9 are respectively located at the upper and lower ends of the corresponding filter screen 71.

[0039] Reference Figure 3 and Figure 4 Each locking assembly 9 includes a locking frame 91 and an elastic member 92. Each locking frame 91 is slidably connected to the inner wall of the filter box 7. A spherical portion 911 is provided on one end of each locking frame 91 close to the corresponding filter screen 71. The spherical portion 911 is hemispherical. The spherical portion 911 on each locking frame 91 is inserted into the corresponding filter screen 71. Each filter screen 71 is provided with two locking grooves 711 for the corresponding spherical portion 911 to be inserted. The locking grooves 711 are all less than half of the sphere, so that a part of the spherical portion 911 is exposed outside the locking groove 711.

[0040] Reference Figure 3 and Figure 4 In the embodiment of the present application, the elastic member 92 is a pressure spring, which is sleeved on the corresponding locking frame 91, and one end of the pressure spring is against the corresponding locking frame 91, and the other end is against the inner wall of the filter box 7.

[0041] Reference Figure 3 and Figure 4In the initial state, that is, when the filter screen 71 is not installed in the filter box 7, the locking frame 91 is located at the end of its own sliding path. When the filter screen 71 is inserted into the filter box 7 and slides, the spherical portion 911 on the locking frame 91 abuts against the end wall of the filter screen 71. At this time, the locking frame 91 slides away from the filter screen 71 to avoid the filter screen 71. During this process, the elastic member 92 is compressed. When the filter screen 71 continues to slide so that the spherical portion 911 completely corresponds to the locking groove 711, the locking frame 91 is inserted into the corresponding locking groove 711 under the elastic force of the elastic member 92, thereby locking the filter screen 71.

[0042] Reference Figure 2 and Figure 3 , a storage box 72 is provided at the bottom end of each filter cavity 8. In the embodiment of the present application, two storage boxes 72 are provided in each filter cavity 8, and each storage box 72 is located on the side of the corresponding filter screen 71 away from the outlet pipe 21. Each storage box 72 is slidably connected to the filter box 7, and the sliding direction of each storage box 72 is the width direction of the filter box 7. The sliding path of each storage box 72 extends outside the filter box 7, so that the storage box 72 can be pulled out by relevant personnel.

[0043] Reference Figure 2 and Figure 3 Two connecting pipes 73 are also provided on one end of the filter box 7 away from the outlet pipe 21, and one end of the two connecting pipes 73 is separately connected to two different filter chambers 8. The other end of the connecting pipe 73 connected to the top filter chamber 8 is connected to the top of the inner chamber of the heat exchanger 6, and the other end of the connecting pipe 73 connected to the bottom filter chamber 8 is connected to the bottom of the inner chamber of the heat exchanger 6.

[0044] Reference Figure 2 and Figure 3 , a plurality of heat exchange fans 61 are also provided in the heat exchanger 6. In the embodiment of the present application, the number of the heat exchange fans 61 is set to two. The two heat exchange fans 61 are respectively fixedly installed at the upper and lower ends of the inner chamber of the heat exchanger 6 by bolts, and the blowing directions of the two heat exchange fans 61 are set oppositely.

[0045] Reference Figure 1 and Figure 2 The end of the heat exchanger 6 away from the filter box 7 is also provided with a discharge pipe 62, one end of the discharge pipe 62 is connected to the chamber in the heat exchanger 6, and the other end is connected to the exhaust gas treatment device 5. The discharge pipe 62 is also provided with a valve 63, which is a solenoid valve in the embodiment of the present application.

[0046] The implementation principle of the purification system for electronic grade acetylene production in the embodiment of the present application is as follows: when in use, the outlet pipe 21 passes the waste gas generated by the adsorption tower 22 and the gas stripping tower 25 into the filter box 7 for filtration. After the filtration is completed, the two connecting pipes 73 pass the waste gas to the bottom and top of the inner chamber of the heat exchanger 6 respectively, and through the heat exchange fan 61, the different waste gases are fully contacted, so as to fully exchange heat. Then, the valve 63 is opened, and the isothermal gas after heat exchange is passed into the waste gas treatment device 5 through the discharge pipe 62 for treatment.

[0047] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A purification system for electronic grade acetylene production, comprising a raw material tank (1), a purification mechanism (2), a drying tower (3), a storage tank (4) and an exhaust gas treatment device (5), characterized in that: It also includes a heat exchanger (6), the purification mechanism (2) includes a plurality of outlet pipes (21), the plurality of outlet pipes (21) are used to pass each exhaust gas generated by the purification mechanism (2) into the heat exchanger (6), the heat exchanger (6) is used to fully exchange heat between the exhaust gases passed through the plurality of outlet pipes (21), and the heat exchanger (6) is connected to the exhaust gas treatment device (5); It also comprises a filter box (7), wherein a plurality of filter chambers (8) are provided in the filter box (7), wherein the filter chambers (8) are arranged in a one-to-one correspondence with the outlet pipes (21), wherein a filter screen (71) is arranged in each of the filter chambers (8), wherein each of the outlet pipes (21) is communicated with a corresponding filter chamber (8), and wherein each of the filter chambers (8) is communicated with the heat exchanger (6); The heat exchanger (6) is also provided with a plurality of heat exchange fans (61), which are respectively located at the upper and lower ends of the inner chamber of the heat exchanger (6), and the heat exchange fan (61) at the upper end of the inner chamber of the heat exchanger (6) is arranged opposite to the heat exchange fan (61) at the lower end of the inner chamber of the heat exchanger (6).

2. The purification system for producing electronic grade acetylene according to claim 1, characterized in that: Each of the filter screens (71) is slidably connected to the filter box (7), and a sliding path of each of the filter screens (71) extends outside the filter box (7). A locking assembly (9) is also provided in the filter box (7), and the locking assembly (9) is used to lock the filter screen (71).

3. A purification system for producing electronic grade acetylene according to claim 2, characterized in that: The locking assembly (9) comprises a locking frame (91) and an elastic member (92); the locking frame (91) is slidably connected to the filter box (7); the sliding direction of the locking frame (91) is perpendicular to the sliding direction of the filter screen (71); a spherical portion (911) is further provided on one end of the locking frame (91); the spherical portion (911) is inserted into the corresponding filter screen (71); and the elastic member (92) is used to allow the locking frame (91) to be continuously inserted into the filter screen (71).

4. The purification system for producing electronic grade acetylene according to claim 1, characterized in that: A storage box (72) is provided at the bottom end of each of the filter cavities (8), and each of the storage boxes (72) is slidably connected to the filter box (7), and a sliding path of each of the storage boxes (72) extends outside the filter box (7).

5. The purification system for producing electronic grade acetylene according to claim 1, characterized in that: The purification mechanism (2) further comprises an adsorption tower (22), an absorption tower (23), a desorption tower (24) and a gas stripping tower (25); the discharge end of the raw material tank (1) is connected to the feed end of the adsorption tower (22); the discharge end of the adsorption tower (22) is connected to the feed end of the absorption tower (23); the discharge end of the absorption tower (23) is connected to the feed end of the desorption tower (24); the discharge end of the desorption tower (24) is connected to the feed end of the drying tower (3); the lower end outlet of the desorption tower (24) is connected to the inlet end of the gas stripping tower (25); and the adsorption tower (22) and the gas stripping tower (25) are both connected to corresponding outlet pipes (21).

6. A purification system for producing electronic grade acetylene according to claim 5, characterized in that: One end of the outlet pipe (21) connected to the adsorption tower (22) is connected to the top of the inner chamber of the heat exchanger (6), and one end of the outlet pipe (21) connected to the gas stripping tower (25) is connected to the bottom of the inner chamber of the heat exchanger (6).

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