Perovskite film layer surface treatment device and perovskite film layer surface treatment system

Abstract

The utility model relates to the technical field of solar cell manufacturing, and discloses a perovskite film layer surface treatment device and a perovskite film layer surface treatment system.The perovskite film layer surface treatment device comprises a first shell which comprises a first flow channel wall and a second flow channel wall, and an ultrasonic flow channel is defined by the first flow channel wall; an air suction flow channel is defined by the second flow channel wall; the second shell comprises a third flow channel wall and a fourth flow channel wall, a mixing flow channel is defined by the third flow channel wall, and one end of the mixing flow channel is suitable for providing positive pressure passivation gas for the film layer surface of the product; an air suction flow channel is defined by the fourth flow channel wall; and an ion air flow channel is defined by the inner wall of the third shell, and the ion air flow channel is suitable for removing static electricity on the surface of the film layer of the product. The perovskite film layer surface treatment device provided by the utility model can passivate the scribed lines of the product while enhancing the cleaning effect, thereby further improving the efficiency and stability of the product.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, in particular to a perovskite film surface treatment device and a perovskite film surface treatment system. Background Art

[0002] Perovskite solar cells are solar cells that use perovskite-type organic metal halide semiconductors as light-absorbing materials. In recent years, the highest photoelectric conversion efficiency of perovskite solar cells has increased from 3.8% to 25.7%. This photoelectric conversion efficiency not only exceeds other thin-film solar cells that were developed earlier, but has also been equal to or even exceeded industrial solar cell technologies such as polycrystalline silicon solar cells that have been developed for many years, showing great prospects for industrial development.

[0003] Due to the accumulation of particles during the product production process and the accumulated film debris after multiple laser scribing, the perovskite film is more sensitive to water vapor. After the raw material substrate is cleaned before coating, it is no longer cleaned during the entire coating process. The current dry cleaning equipment still has the problem of poor cleaning during the cleaning process of perovskite cells. Utility Model Content

[0004] In view of this, the utility model provides a perovskite film surface treatment device and a perovskite film surface treatment system to solve the problem that the existing dry cleaning equipment has poor cleaning performance for perovskite cells.

[0005] In a first aspect, the utility model provides a perovskite film surface treatment device, comprising:

[0006] The first shell includes a first flow channel wall and a second flow channel wall, the first flow channel wall encloses an ultrasonic flow channel, and one end of the ultrasonic flow channel in the first direction is suitable for ultrasonically vibrating and cleaning the film surface of the product; the second flow channel wall encloses an inhalation flow channel, and one end of the inhalation flow channel in the first direction is suitable for negative pressure suction of particles vibrated on the film surface of the product;

[0007] The second shell is arranged on the second direction side of the first shell, and the second shell includes a third flow channel wall and a fourth flow channel wall. The third flow channel wall encloses a mixing flow channel, and one end of the mixing flow channel is suitable for providing positive pressure passivation gas to the film surface of the product to passivate the engraved lines of the product; the fourth flow channel wall encloses an exhaust flow channel, and one end of the exhaust flow channel in the first direction is suitable for negative pressure suction of the passivation gas after the passivation treatment;

[0008] The third shell is arranged on a side of the first shell away from the second shell along the second direction. The inner wall of the third shell encloses an ion wind flow channel, which is suitable for removing static electricity on the surface of the film layer of the product.

[0009] Beneficial effects: The perovskite film surface treatment device provided by the utility model removes static electricity on the film surface of the product by setting a third shell and setting an ion wind flow channel in the third shell, making it easier to remove particles on the surface, further enhancing the cleaning effect on the product, and thus improving the cleaning degree of the perovskite battery; by setting a first shell and setting an ultrasonic flow channel and an intake flow channel in the first shell, the positive pressure gas is converted into ultrasonic vibration through the ultrasonic flow channel, thereby performing ultrasonic vibration cleaning on the product, and then the vibrated particles are instantly sucked away through the intake flow channel, so that the entire cleaning forms a closed loop, thereby enhancing the cleaning effect on the product; at the same time, by setting a second shell and setting a mixing flow channel and an exhaust flow channel in the second shell, the engraved lines of the product are passivated while the cleaning effect is enhanced, further improving the efficiency and stability of the product.

[0010] In an optional embodiment, the first flow channel wall includes a plurality of expanded portions and a plurality of necked portions, each necked portion is arranged between every two adjacent expanded portions, and the expanded portions and the necked portions are suitable for jointly forming an ultrasonic flow channel with a variable cross-section.

[0011] Beneficial effect: Thus, an ultrasonic flow channel with a variable cross-section is formed. When the airflow passes through the ultrasonic flow channel with a variable cross-section, ultrasonic waves are generated through the turbulent flow oscillation, thereby cleaning the product through ultrasonic oscillation, thereby improving the cleaning degree of the product.

[0012] In an optional embodiment, a first adjustment plate is provided in the ultrasonic flow channel, and the first adjustment plate is provided on one side of the necking portion, and the first adjustment plate is suitable for adjusting the flow volume and / or wind speed at the necking portion.

[0013] Beneficial effect: The flow area of ​​the necking portion is adjusted by the first adjusting piece, and then the flow volume and / or wind speed at the necking portion are adjusted to form ultrasound and wind speeds of different frequencies.

[0014] In an optional embodiment, a first positive pressure vent is provided on one side of the first shell along the first direction, and the first positive pressure vent is suitable for connecting the ultrasonic flow channel with the positive pressure source; a second positive pressure vent is provided on the other side of the first shell along the first direction, and the second positive pressure vent is suitable for directing the positive pressure gas in the ultrasonic flow channel to the film surface of the product;

[0015] A first negative pressure vent is provided on one side of the first shell along the first direction, and the first negative pressure vent is suitable for connecting the intake duct with the negative pressure source; a second negative pressure vent is provided on the other side of the first shell along the first direction, and the second negative pressure vent is suitable for sucking particles on the surface of the film layer of the product into the intake duct under negative pressure.

[0016] Beneficial effects: the ultrasonic flow channel is connected with the positive pressure source through the first positive pressure air port, so that positive pressure gas is continuously introduced into the ultrasonic flow channel, and the positive pressure gas is converted into ultrasonic vibration through the ultrasonic flow channel, so that the product is ultrasonically vibrated and cleaned through the second positive pressure air port; the suction flow channel is connected with the negative pressure source through the first negative pressure air port to form a negative pressure in the suction flow channel, so that the particles on the surface of the product are negatively pressured and sucked into the suction flow channel through the second negative pressure air port, which effectively reduces the particle residue and thus improves the cleaning degree of the product.

[0017] In an optional embodiment, a second adjustment plate is provided at one end of the intake air duct near the second negative pressure air outlet, and the second adjustment plate is movably provided on a side of the second flow channel wall near the intake air duct, and the second adjustment plate is suitable for adjusting the suction force of the second negative pressure air outlet and / or the suction force distribution among multiple second negative pressure air outlets.

[0018] Beneficial effect: The flow area of ​​the second negative pressure air outlet is thereby adjusted, thereby adjusting the suction force of the second negative pressure air outlet and / or the suction force distribution among multiple second negative pressure air outlets.

[0019] In an optional embodiment, the ultrasonic flow channel is arranged on both sides of the suction flow channel in the second direction;

[0020] Alternatively, the suction flow channel is arranged on both sides of the ultrasonic flow channel in the second direction.

[0021] Beneficial effects: The first shell of different structural forms can be selected according to the size, weight, density, etc. of the particles, thereby enhancing the pertinence of product cleaning and improving cleaning efficiency.

[0022] In an optional embodiment, a first passivation gas source vent and a second passivation gas source vent are provided on one side of the second shell along the first direction, the first passivation gas source vent is suitable for passing the carrier gas into the mixing flow channel, and the second passivation gas source vent is suitable for passing the passivation source gas into the mixing flow channel, so that the carrier gas and the passivation source gas are mixed in the mixing flow channel to form a passivation gas; a third passivation gas source vent is provided on the other side of the second shell along the first direction, and the third passivation gas source vent is suitable for directing the passivation gas to the film surface of the product;

[0023] A third negative pressure vent is provided on one side of the second shell along the first direction, and the third negative pressure vent is suitable for connecting the exhaust flow channel with the negative pressure source; a fourth negative pressure vent is also provided on the other side of the second shell along the first direction, and the fourth negative pressure vent is suitable for sucking the passivation gas passing through the membrane surface of the product into the exhaust flow channel under negative pressure.

[0024] Beneficial effects: By opening the first passivation gas source vent, the second passivation gas source vent and the third passivation gas source vent on the second shell, the passivation gas is directed to the film surface of the product, thereby enhancing the cleaning effect while passivating the engraved lines of the product, further improving the efficiency and stability of the product; by opening the third negative pressure vent and the fourth negative pressure vent on the second shell, the passivated gas is negatively pressured and sucked into the exhaust flow channel.

[0025] In an optional embodiment, a plurality of baffles are provided in the mixing channel. The baffles are fixedly provided on a side of the third channel wall close to the mixing channel. The baffles are provided at an angle to the third channel wall. The baffles are suitable for promoting sufficient mixing of the carrier gas and the passivation source gas in the mixing channel.

[0026] Beneficial effect: The nitrogen or compressed dry air is fully mixed with the ozone through the effect of the baffle.

[0027] In an optional embodiment, a first through hole is provided on one side of the third shell along the first direction, and the first through hole is suitable for guiding air in the external environment into the ion wind channel; a second through hole is provided on one side of the third shell along the first direction, and the second through hole is suitable for guiding air with positive and negative charges in the ion wind channel to the film surface of the product;

[0028] An ion rod is arranged in the ion wind flow channel, and the ion rod is arranged at one end of the ion wind flow channel close to the second through hole along the first direction, and the ion rod is suitable for generating air with positive and negative charges;

[0029] A fan is also provided in the ion wind channel. The fan is provided at one end of the ion wind channel along the first direction close to the first through hole. The fan is suitable for blowing the positively and negatively charged air generated by the ion rod toward the film surface of the product to remove particles on the film surface of the product.

[0030] Beneficial effect: By arranging an ion rod and a fan in the ion wind flow channel, the ion rod can generate air with positive and negative charges, which is blown by the fan to remove static electricity on the surface of the product film layer, making it easier to remove particles on the surface of the product film layer.

[0031] In a second aspect, the utility model also provides a perovskite film surface treatment system, comprising:

[0032] The perovskite film surface treatment device as described above;

[0033] a blower, including an air outlet and an air inlet;

[0034] A first pipeline, one end of which is connected to the gas outlet, and the other end of which is suitable for being connected to the ultrasonic flow channel;

[0035] The second pipeline has one end connected to the air inlet and the other end suitable for being connected to the suction flow passage.

[0036] Beneficial effect: the ultrasonic flow channel is connected with the air outlet of the blower through the first pipeline, so that the positive pressure gas forms ultrasonic waves through the ultrasonic flow channel, thereby cleaning the product through ultrasonic vibration; at the same time, the suction flow channel is connected with the air inlet of the blower through the second pipeline, so that the negative pressure vacuum suction of the suction flow channel instantly sucks away the vibrated particles, avoiding particles from remaining on the surface of the product, thereby improving the cleanliness of the product cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 A schematic diagram of the working principle of a perovskite film surface treatment device according to an embodiment of the utility model;

[0039] Figure 2 A schematic diagram of the working principle of another perovskite film surface treatment device according to an embodiment of the utility model;

[0040] Figure 3 A schematic diagram of the working principle of a first shell of a perovskite film surface treatment device according to an embodiment of the utility model;

[0041] Figure 4 A schematic diagram of the working principle of the first shell of another perovskite film surface treatment device according to an embodiment of the utility model;

[0042] Figure 5 A schematic diagram of the working principle of the second shell of a perovskite film surface treatment device according to an embodiment of the utility model;

[0043] Figure 6 A schematic diagram of the working principle of a third shell of a perovskite film surface treatment device according to an embodiment of the utility model;

[0044] Figure 7 A schematic diagram of the working principle of a perovskite film surface treatment system according to an embodiment of the utility model;

[0045] Figure 8 A schematic diagram of the basic structure of a perovskite solar cell involved in an embodiment of the utility model;

[0046] Fig. 9 This is an example of a laser groove obtained after the surface of a film layer of a product is treated using the dry cleaning equipment before improvement in the background technology;

[0047] Fig.10 This is an example diagram of laser grooves obtained after the surface of a product's film layer is treated using the perovskite film layer surface treatment device and the perovskite film layer surface treatment system of the present invention.

[0048] Description of reference numerals:

[0049] 10. first housing; 101. ultrasonic flow channel; 102. suction flow channel; 103. first positive pressure air outlet; 104. second positive pressure air outlet; 105. first negative pressure air outlet; 106. second negative pressure air outlet; 11. first flow channel wall; 111. expansion portion; 112. necking portion; 12. second flow channel wall; 13. first adjustment sheet; 14. second adjustment sheet;

[0050] 20, second housing; 201, mixing flow channel; 202, exhaust flow channel; 203, first passivation gas source vent; 204, second passivation gas source vent; 205, third passivation gas source vent; 206, third negative pressure vent; 207, fourth negative pressure vent; 21, third flow channel wall; 22, fourth flow channel wall; 23, baffle;

[0051] 30. third housing; 301. ion wind channel; 302. first through hole; 303. second through hole; 31. ion rod; 32. fan; 33. filter;

[0052] 40. blower; 401. air outlet; 402. air inlet;

[0053] 50. First pipeline; 51. First control valve; 52. First temperature sensor; 53. First filter; 54. First pressure sensor; 55. Second pressure sensor;

[0054] 60. Second pipeline; 61. Second control valve; 62. Second temperature sensor; 63. Second filter; 64. Third pressure sensor; 65. Fourth pressure sensor;

[0055] 70. Product; 71. Transparent conductive oxide substrate conductive layer; 72. First carrier transport layer; 73. Perovskite absorption layer; 74. Second carrier transport layer; 75. Top electrode conductive material. DETAILED DESCRIPTION

[0056] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0057] Combine the following Figures 1 to 10 , describing an embodiment of the utility model.

[0058] According to an embodiment of the present utility model, on the one hand, a perovskite film surface treatment device is provided, comprising:

[0059] The first housing 10 includes a first flow channel wall 11 and a second flow channel wall 12. The first flow channel wall 11 encloses an ultrasonic flow channel 101. One end of the ultrasonic flow channel 101 in the first direction is suitable for ultrasonically vibrating and cleaning the surface of the film layer of the product 70. The second flow channel wall 12 encloses an inhalation flow channel 102. One end of the inhalation flow channel 102 in the first direction is suitable for negative pressure suction of particles vibrated on the surface of the film layer of the product 70, thereby completely suctioning and removing the particles on the surface of the film layer of the product 70, thereby enhancing the dry cleaning effect on the product 70.

[0060] The second shell 20 is arranged on the second direction side of the first shell 10. The second shell 20 includes a third flow channel wall 21 and a fourth flow channel wall 22. The third flow channel wall 21 encloses a mixing flow channel 201. One end of the mixing flow channel 201 is suitable for providing a positive pressure passivation gas to the film surface of the product 70 to passivate the engraved lines of the product 70. The fourth flow channel wall 22 encloses an exhaust flow channel 202. One end of the exhaust flow channel 202 in the first direction is suitable for negatively sucking the passivation gas after the passivation treatment.

[0061] The third shell 30 is arranged on a side of the first shell 10 away from the second shell 20 along the second direction. The inner wall of the third shell 30 encloses an ion wind channel 301, which is suitable for removing static electricity on the surface of the film layer of the product 70, thereby making it easier to remove particles on the surface of the product 70.

[0062] Furthermore, the first shell 10 , the second shell 20 and the third shell 30 may be integrally formed, thereby jointly constituting an integrated structure of the perovskite film layer surface treatment device.

[0063] Furthermore, the distance between the perovskite film layer surface treatment device and the product 70 along the first direction is adjustable, and the distance between the perovskite film layer surface treatment device and the product 70 along the first direction is H, and H satisfies 1mm≤H≤7mm, thereby simultaneously ensuring the dry cleaning effect on the product 70 and the passivation effect on the engraved lines of the product 70.

[0064] The perovskite film surface treatment device provided by the utility model removes static electricity on the film surface of the product 70 by setting a third shell 30 and setting an ion wind channel 301 in the third shell 30, so that the particles on the surface are easier to remove, further enhancing the cleaning effect of the product 70, and thus improving the cleaning degree of the perovskite battery; by setting a first shell 10, and setting an ultrasonic flow channel 101 and an air intake flow channel 102 in the first shell 10, the positive pressure gas is converted into ultrasonic vibration through the ultrasonic flow channel 101, so that the product 70 is ultrasonically vibrated and cleaned, and then the vibrated particles are instantly sucked away through the air intake flow channel 102, so that the entire cleaning forms a closed loop, and the cleaning effect of the product 70 is enhanced; at the same time, by setting a second shell 20, and setting a mixing flow channel 201 and an exhaust flow channel 202 in the second shell 20, the engraved lines of the product 70 are passivated while the cleaning effect is enhanced, and the efficiency and stability of the product 70 are further improved.

[0065] In some embodiments, please combine Figure 3 and Figure 4 As shown, the first flow channel wall 11 includes a plurality of expanded portions 111 and a plurality of necked portions 112 , each necked portion 112 is disposed between every two adjacent expanded portions 111 , and the expanded portions 111 and the necked portions 112 are suitable for jointly forming an ultrasonic flow channel 101 with a variable cross-section.

[0066] It should be noted that, in the specific implementation process, the expansion portion 111 can be designed into different shapes such as diamond, triangle, circle, ellipse, semicircle, square and rectangle according to the type of particles. By designing the expansion portion 111 into different shapes, ultrasound and wind speeds of different frequencies are generated when the airflow passes through the variable cross-section.

[0067] Furthermore, the expanded portion 111 and the necked portion 112 are integrally formed, thereby jointly constituting an integrated variable cross-section structure of the ultrasonic flow channel 101 .

[0068] In this embodiment, a plurality of expanded portions 111 and a plurality of necked portions 112 are provided to form an ultrasonic flow channel 101 of variable cross-section. When the airflow passes through the ultrasonic flow channel 101 of variable cross-section, ultrasonic waves are generated by the turbulent flow oscillation, thereby cleaning the product 70 through ultrasonic oscillation, thereby improving the cleaning degree of the product 70.

[0069] In some embodiments, please combine Figure 3 and Figure 4 As shown, a first adjustment piece 13 is provided in the ultrasonic flow channel 101 , and the first adjustment piece 13 is movably provided at one side of the necking portion 112 , and the first adjustment piece 13 is suitable for adjusting the flow volume and / or wind speed at the necking portion 112 .

[0070] It should be noted that different positions of the first adjustment piece 13 will affect the flow path of the variable cross-section wind and will also generate ultrasound and wind speeds of different frequencies.

[0071] In this embodiment, a first adjustment plate 13 is movably set at the position of the necking portion 112, so that the flow area of ​​the necking portion 112 can be adjusted by the first adjustment plate 13, and then the flow volume and / or wind speed at the position of the necking portion 112 can be adjusted to form ultrasound and wind speeds of different frequencies.

[0072] In some embodiments, please combine Figure 3 and Figure 4 As shown, a first positive pressure vent 103 is provided on one side of the first shell 10 along the first direction, and the first positive pressure vent 103 is suitable for connecting the ultrasonic flow channel 101 with the positive pressure source; a second positive pressure vent 104 is provided on the other side of the first shell 10 along the first direction, and the second positive pressure vent 104 is suitable for guiding the positive pressure gas in the ultrasonic flow channel 101 to the film surface of the product 70;

[0073] A first negative pressure vent 105 is also provided on one side of the first shell 10 along the first direction, and the first negative pressure vent 105 is suitable for connecting the intake duct 102 with the negative pressure source; a second negative pressure vent 106 is also provided on the other side of the first shell 10 along the first direction, and the second negative pressure vent 106 is suitable for sucking particles on the film layer surface of the product 70 into the intake duct 102 under negative pressure.

[0074] Furthermore, the first positive-pressure air outlet 103 can connect the ultrasonic flow channel 101 with the air outlet 401 of the blower 40 , and the first negative-pressure air outlet 105 can connect the suction flow channel 102 with the air inlet 402 of the blower 40 .

[0075] In this embodiment, the ultrasonic flow channel 101 is connected to the positive pressure source through the first positive pressure air port 103, so that positive pressure gas is continuously introduced into the ultrasonic flow channel 101, and the positive pressure gas is converted into ultrasonic oscillation through the ultrasonic flow channel 101, so that the product 70 is ultrasonically oscillated and cleaned through the second positive pressure air port 104; the suction flow channel 102 is connected to the negative pressure source through the first negative pressure air port 105, so that negative pressure is formed in the suction flow channel 102, so that the particles on the surface of the product 70 are negatively pressured and sucked into the suction flow channel 102 through the second negative pressure air port 106, thereby effectively reducing the residual particles and improving the cleaning degree of the product 70.

[0076] Furthermore, please combine Figure 3 and Figure 4 As shown, the cross-sectional area of ​​the intake duct 102 along the second direction gradually decreases from an end close to the first negative pressure air outlet 105 to an end close to the second negative pressure air outlet 106 , thereby increasing the suction force of the second negative pressure air outlet 106 , making it easier to completely suck the particles on the surface of the product 70 into the intake duct 102 .

[0077] In some embodiments, please combine Figure 3 and Figure 4 As shown, a second adjusting plate 14 is provided at one end of the intake air duct 102 close to the second negative pressure air outlet 106. The second adjusting plate 14 is movably provided on a side of the second flow channel wall 12 close to the intake air duct 102. The second adjusting plate 14 is suitable for adjusting the suction force of the second negative pressure air outlet 106 and / or the suction force distribution among multiple second negative pressure air outlets 106.

[0078] In this embodiment, by movably setting the second adjustment plate 14 in the suction flow channel 102, the size of the flow area of ​​the second negative pressure air outlet 106 is adjusted, thereby adjusting the suction force of the second negative pressure air outlet 106 and / or the suction force distribution among multiple second negative pressure air outlets 106.

[0079] In some embodiments, please combine Figure 1 and Figure 3 As shown, the ultrasonic flow channel 101 is arranged on both sides of the suction flow channel 102 in the second direction;

[0080] Or, please combine Figure 2 and Figure 4 As shown, the suction flow channel 102 is arranged on both sides of the ultrasonic flow channel 101 in the second direction.

[0081] It should be noted that the internal structure of the first housing 10 can be divided into two types. Figure 1 and Figure 3 As shown, one is that the suction flow channel 102 is located in the middle, and the two ultrasonic flow channels 101 are respectively located on both sides of the second direction of the suction flow channel 102. Figure 2 and Figure 4 As shown, the other is that the ultrasonic flow channel 101 is located in the middle, and the two suction flow channels 102 are respectively located on both sides of the second direction of the ultrasonic flow channel 101; in the specific implementation process, the first shell 10 with different structural forms can be selected according to the size, weight, density, etc. of the particles, so as to enhance the targeted cleaning of the product 70 and improve the cleaning efficiency.

[0082] In some embodiments, see Figure 5As shown, a first passivation gas source vent 203 and a second passivation gas source vent 204 are provided on one side of the second shell 20 along the first direction, the first passivation gas source vent 203 is suitable for passing a carrier gas such as nitrogen (N2) or compressed dry air (CDA) into the mixing channel 201, and the second passivation gas source vent 204 is suitable for passing a passivation source gas such as ozone (O3) into the mixing channel 201, so that the carrier gas and the passivation source gas are mixed in the mixing channel 201 to form a passivation gas; a third passivation gas source vent 205 is provided on the other side of the second shell 20 along the first direction, and the third passivation gas source vent 205 is suitable for guiding the passivation gas to the film surface of the product 70;

[0083] A third negative pressure vent 206 is provided on one side of the second shell 20 along the first direction, and the third negative pressure vent 206 is suitable for connecting the exhaust channel 202 with the negative pressure source; a fourth negative pressure vent 207 is also provided on the other side of the second shell 20 along the first direction, and the fourth negative pressure vent 207 is suitable for sucking the passivation gas passing through the film surface of the product 70 into the exhaust channel 202 under negative pressure.

[0084] Furthermore, the flow rate of the carrier gas in the first passivation gas source outlet 203 can be controlled by a first flow meter (not shown in the figure), and the flow rate of the passivation source gas in the second passivation gas source outlet 204 can be controlled by a second flow meter (not shown in the figure) to ensure that the introduced gas is controllable to meet the process requirements.

[0085] In this embodiment, a first passivation gas source vent 203, a second passivation gas source vent 204 and a third passivation gas source vent 205 are provided on the second shell 20 to direct the passivation gas to the film surface of the product 70, thereby enhancing the cleaning effect and passivating the engraved lines of the product 70, further improving the efficiency and stability of the product 70; a third negative pressure vent 206 and a fourth negative pressure vent 207 are provided on the second shell 20, so that the passivated gas is negatively pressured and sucked into the exhaust channel 202.

[0086] In some embodiments, see Figure 5 As shown, a plurality of baffles 23 are arranged in the mixing channel 201. The baffles 23 are fixedly arranged on a side of the third channel wall 21 close to the mixing channel 201. The baffles 23 are arranged at an angle to the third channel wall 21. The baffles 23 are suitable for promoting sufficient mixing of the carrier gas and the passivation source gas in the mixing channel 201.

[0087] In this embodiment, a plurality of baffles 23 are provided in the mixing channel 201 , so that the nitrogen or compressed dry air and the ozone are fully mixed by the baffles 23 .

[0088] In some embodiments, see Figure 6As shown, a first through hole 302 is provided on one side of the third shell 30 along the first direction, and the first through hole 302 is suitable for guiding the air in the external environment into the ion wind channel 301; a second through hole 303 is provided on one side of the third shell 30 along the first direction, and the second through hole 303 is suitable for guiding the air with positive and negative charges in the ion wind channel 301 to the film surface of the product 70;

[0089] An ion rod 31 is disposed in the ion wind channel 301. The ion rod 31 is disposed at one end of the ion wind channel 301 close to the second through hole 303 along the first direction. The ion rod 31 is suitable for generating air with positive and negative charges.

[0090] A fan 32 is also provided in the ion wind channel 301. The fan 32 is arranged at one end of the ion wind channel 301 along the first direction close to the first through hole 302. The fan 32 is suitable for blowing the positively and negatively charged air generated by the ion rod 31 toward the film surface of the product 70 to remove particles on the film surface of the product 70.

[0091] In this embodiment, by arranging an ion rod 31 and a fan 32 in the ion wind channel 301, the ion rod 31 can generate air with positive and negative charges, which is blown by the fan 32 to remove static electricity on the surface of the film layer of the product 70, so that particles on the surface of the film layer of the product 70 are easier to remove.

[0092] Furthermore, a filter screen 33 is provided on the third shell 30 , and the filter screen 33 covers the first through hole 302 . The filter screen 33 is suitable for filtering impurities in the external environment, so as to prevent the impurities from being blown toward the film surface of the product 70 through the ion wind channel 301 .

[0093] According to an embodiment of the present invention, on the other hand, a perovskite film surface treatment system is provided, comprising:

[0094] The perovskite film surface treatment device as described above;

[0095] Blower 40, see Figure 7 As shown, the blower 40 includes an air outlet 401 and an air inlet 402;

[0096] A first pipeline 50, one end of which is connected to the gas outlet 401, and the other end of which is suitable for being connected to the ultrasonic flow channel 101;

[0097] One end of the second pipeline 60 is connected to the air inlet 402 , and the other end is suitable for being connected to the suction flow channel 102 .

[0098] Furthermore, the blower 40 can be set with a frequency to adjust the wind pressure and suction force.

[0099] In this embodiment, the ultrasonic flow channel 101 is connected to the air outlet 401 of the blower 40 through the first pipeline 50, so that the positive pressure gas forms ultrasonic waves through the ultrasonic flow channel 101, thereby cleaning the product through ultrasonic vibration; at the same time, the suction flow channel 102 is connected to the air inlet 402 of the blower 40 through the second pipeline 60, so that the negative pressure vacuum suction of the suction flow channel 102 instantly sucks away the vibrated particles, thereby avoiding particles from remaining on the surface of the product, thereby improving the cleanliness of the product.

[0100] In some embodiments, see Figure 7 As shown, the first pipeline 50 includes a first control valve 51, and the first control valve 51 is suitable for adjusting the pressure and ultrasonic frequency of the ultrasonic flow channel 101;

[0101] The second pipeline 60 includes a second control valve 61 , and the second control valve 61 is suitable for adjusting the suction force of the suction flow channel 102 .

[0102] Furthermore, the first control valve 51 and the second control valve 61 may be angle valves.

[0103] In this embodiment, a first control valve 51 is provided to control the ratio between the total air flow in the first pipeline 50 and the air flow entering the ultrasonic flow channel 101, thereby adjusting the pressure and ultrasonic frequency of the ultrasonic flow channel 101; and a second control valve 61 is provided to adjust the suction force of the suction flow channel 102, thereby controlling the dust collection effect.

[0104] In some embodiments, see Figure 7 As shown, the first pipeline 50 further includes a first temperature sensor 52 , and the second pipeline 60 further includes a second temperature sensor 62 . The first temperature sensor 52 and the second temperature sensor 62 are suitable for monitoring the temperature of the air flowing in the pipelines.

[0105] In this embodiment, the first temperature sensor 52 and the second temperature sensor 62 are provided to monitor the temperature of the air flowing in the pipeline, thereby assisting in determining the energy carried by the air.

[0106] In some embodiments, see Figure 7 As shown, the first pipeline 50 further includes a first filter 53, and the first filter 53 is suitable for purifying the positive pressure gas from the blower 40;

[0107] The second pipeline 60 further includes a second filter 63 , which filters and absorbs particles from the inhalation flow passage 102 .

[0108] Furthermore, the first filter 53 may be a high efficiency filter, and the second filter 63 may be a medium efficiency filter.

[0109] In this embodiment, by setting the first filter 53 and the second filter 63, the positive-pressure gas output from the air outlet 401 of the blower 40 is filtered and purified by the first filter 53 to form positive-pressure clean gas. The positive-pressure clean gas forms ultrasonic waves through the ultrasonic flow channel 101, thereby cleaning the product through ultrasonic vibrations; the negative-pressure vacuum suction in the suction flow channel 102 instantly sucks away the vibrated particles, and returns to the blower 40 after being filtered and purified by the second filter 63, thereby forming a closed loop for the entire cleaning process.

[0110] Furthermore, the input end and output end of the first filter 53 are respectively provided with a first pressure sensor 54 and a second pressure sensor 55, and the input end and output end of the second filter 63 are respectively provided with a third pressure sensor 64 and a fourth pressure sensor 65, so as to monitor the clogging condition of the filter element so as to replace the filter element in time and ensure the dust removal effect.

[0111] It should be noted that Figure 8 A schematic diagram of the basic structure of a perovskite solar cell involved in an embodiment of the utility model is given as an example. Among them, the product 70 mainly includes a transparent conductive oxide substrate conductive layer 71, a first carrier transport layer 72, a perovskite absorption layer 73, a second carrier transport layer 74 and a top electrode conductive material 75. The cleaning effect of the perovskite film surface treatment device provided by the utility model on the product is verified through a test experiment.

[0112] The perovskite conductive substrate is cleaned, P1 scribed, HTL coating and perovskite film are deposited in sequence;

[0113] After passing P2, dry cleaning is performed, and the distance between the dry cleaning head and the film surface of the product is controlled to be between 2mm and 4mm. The fan 32 is ensured to be turned on normally, the ion rod 31 is 50HZ, the frequency of the blower 40 is 45KHZ, the pressure of the air outlet 401 is maintained between 15Kpa and 20Kpa, the negative pressure of the air inlet 402 is maintained between -6kpa and -8kpa, the O3 flow rate is controlled at 500SCCM, the mixing ratio of N2 and O3 is between 15% and 20%, and the movement speed of the perovskite substrate is 0.9m / min;

[0114] depositing electrode layers;

[0115] After P3, dry cleaning is performed again, and the distance between the perovskite film surface treatment device and the film surface of the product is controlled to be between 2mm and 4mm, the fan 32 is guaranteed to be turned on normally, the ion rod 31 is 50HZ frequency, the blower 40 frequency is 48KHZ, the pressure of the air outlet 401 is maintained between 18Kpa and 25Kpa, the negative pressure of the air inlet 402 is maintained between -8kpa and -10kpa, the O3 flow rate is controlled to 800SCCM, the N2 and O3 mixing ratio is between 20% and 25%, and the perovskite substrate movement speed is 0.9m / min;

[0116] Then it goes through P4, film laying, lamination and other processes in sequence to get the product.

[0117] The product power test is as follows:

[0118]

[0119]

[0120] Fig. 9 An example diagram of laser grooving obtained after treating the film surface of a product using the dry cleaning equipment before improvement in the background technology is shown. Obviously, the debris of some electrode layers in the laser grooving cannot be removed, and many new laser short-circuit points will appear after the lamination process. Fig.10 An example diagram of laser grooves obtained after the surface of a product's film layer is treated using the perovskite film layer surface treatment device and the perovskite film layer surface treatment system of the present invention is shown. Obviously, the particles in the laser grooves are effectively reduced, avoiding short circuits after lamination.

[0121] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A perovskite film surface treatment device, characterized in that: include: The first housing (10) comprises a first flow channel wall (11) and a second flow channel wall (12), wherein the first flow channel wall (11) encloses an ultrasonic flow channel (101), and one end of the ultrasonic flow channel (101) in the first direction is suitable for ultrasonically vibrating and cleaning the surface of a product; the second flow channel wall (12) encloses an inhalation flow channel (102), and one end of the inhalation flow channel (102) in the first direction is suitable for negative pressure suction of particles vibrated on the surface of a film layer of the product; The second shell (20) is arranged on one side of the first shell (10) in the second direction, and the second shell (20) comprises a third flow channel wall (21) and a fourth flow channel wall (22), the third flow channel wall (21) encloses a mixing flow channel (201), one end of the mixing flow channel (201) is suitable for providing a positive pressure passivation gas to the film surface of the product to passivate the engraved lines of the product; the fourth flow channel wall (22) encloses an exhaust flow channel (202), and one end of the exhaust flow channel (202) in the first direction is suitable for negatively suctioning the passivation gas after the passivation treatment; The third shell (30) is arranged on a side of the first shell (10) away from the second shell (20) along the second direction, and the inner wall of the third shell (30) encloses an ion wind flow channel (301), and the ion wind flow channel (301) is suitable for removing static electricity on the surface of the film layer of the product.

2. The perovskite film surface treatment device according to claim 1, characterized in that: The first flow channel wall (11) comprises a plurality of expanded portions (111) and a plurality of necked portions (112), each of the necked portions (112) being arranged between every two adjacent expanded portions (111), and the expanded portions (111) and the necked portions (112) are suitable for jointly forming the ultrasonic flow channel (101) with a variable cross-section.

3. The perovskite film surface treatment device according to claim 2, characterized in that: A first adjustment sheet (13) is provided in the ultrasonic flow channel (101), and the first adjustment sheet (13) is provided on one side of the necked portion (112). The first adjustment sheet (13) is suitable for adjusting the amount of air flow and / or the wind speed at the necked portion (112).

4. The perovskite film surface treatment device according to claim 1, characterized in that: A first positive pressure air vent (103) is provided on one side of the first shell (10) along the first direction, and the first positive pressure air vent (103) is suitable for connecting the ultrasonic flow channel (101) with a positive pressure source; a second positive pressure air vent (104) is provided on the other side of the first shell (10) along the first direction, and the second positive pressure air vent (104) is suitable for guiding the positive pressure gas in the ultrasonic flow channel (101) to the film surface of the product; The first shell (10) is also provided with a first negative pressure vent (105) on one side along the first direction, and the first negative pressure vent (105) is suitable for connecting the suction flow channel (102) with a negative pressure source; the first shell (10) is also provided with a second negative pressure vent (106) on the other side along the first direction, and the second negative pressure vent (106) is suitable for sucking particles on the surface of the film layer of the product into the suction flow channel (102) under negative pressure.

5. The perovskite film surface treatment device according to claim 4, characterized in that: A second adjustment sheet (14) is provided at one end of the suction flow channel (102) close to the second negative pressure air outlet (106); the second adjustment sheet (14) is movably provided on a side of the second flow channel wall (12) close to the suction flow channel (102); the second adjustment sheet (14) is suitable for adjusting the suction force of the second negative pressure air outlet (106) and / or the suction force distribution among multiple second negative pressure air outlets (106).

6. The perovskite film surface treatment device according to any one of claims 1 to 5, characterized in that: The ultrasonic flow channel (101) is arranged on both sides of the suction flow channel (102) in the second direction; Alternatively, the suction flow channel (102) is arranged on both sides of the ultrasonic flow channel (101) in the second direction.

7. The perovskite film surface treatment device according to claim 1, characterized in that: The second shell (20) is provided with a first passivation gas source air port (203) and a second passivation gas source air port (204) on one side along the first direction, the first passivation gas source air port (203) being suitable for passing the carrier gas into the mixing channel (201), and the second passivation gas source air port (204) being suitable for passing the passivation source gas into the mixing channel (201), so that the carrier gas and the passivation source gas are mixed in the mixing channel (201) to form the passivation gas; the second shell (20) is provided with a third passivation gas source air port (205) on the other side along the first direction, the third passivation gas source air port (205) being suitable for directing the passivation gas to the film surface of the product; The second shell (20) is provided with a third negative pressure air outlet (206) on one side along the first direction, and the third negative pressure air outlet (206) is suitable for connecting the exhaust flow channel (202) with the negative pressure source; the second shell (20) is also provided with a fourth negative pressure air outlet (207) on the other side along the first direction, and the fourth negative pressure air outlet (207) is suitable for sucking the passivation gas passing through the film surface of the product into the exhaust flow channel (202) under negative pressure.

8. The perovskite film surface treatment device according to claim 7, characterized in that: A plurality of baffles (23) are arranged in the mixing flow channel (201). The baffles (23) are fixedly arranged on a side of the third flow channel wall (21) close to the mixing flow channel (201). The baffles (23) are arranged at an angle to the third flow channel wall (21). The baffles (23) are suitable for promoting sufficient mixing of the carrier gas and the passivation source gas in the mixing flow channel (201).

9. The perovskite film surface treatment device according to claim 1, characterized in that: The third shell (30) is provided with a first through hole (302) on one side along the first direction, and the first through hole (302) is suitable for guiding air in the external environment into the ion wind flow channel (301); the third shell (30) is provided with a second through hole (303) on one side along the first direction, and the second through hole (303) is suitable for guiding air with positive and negative charges in the ion wind flow channel (301) to the film surface of the product; An ion rod (31) is arranged in the ion wind flow channel (301), and the ion rod (31) is arranged at one end of the ion wind flow channel (301) close to the second through hole (303) along the first direction, and the ion rod (31) is suitable for generating air with positive and negative charges; A fan (32) is also provided in the ion wind flow channel (301). The fan (32) is provided at one end of the ion wind flow channel (301) close to the first through hole (302) along the first direction. The fan (32) is suitable for blowing the positively and negatively charged air generated by the ion rod (31) toward the film layer surface of the product to remove particles on the film layer surface of the product.

10. A perovskite film surface treatment system, characterized in that: include: The perovskite film surface treatment device as described in any one of claims 1 to 9; A blower (40) comprising an air outlet (401) and an air inlet (402); A first pipeline (50), one end of which is connected to the gas outlet (401), and the other end of which is suitable for being connected to the ultrasonic flow channel (101); The second pipeline (60) has one end connected to the air inlet (402) and the other end suitable for being connected to the air inlet passage (102).

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