Mounting and positioning tool for heat preservation system of semiconductor substrate equipment

Abstract

The utility model provides an installing and positioning tool for a heat preservation system of semiconductor base material equipment, and belongs to the technical field of installing and positioning tools for heat preservation systems. The problem that the effective area of an exhaust step lap joint hole of an existing high-temperature purification equipment heat preservation system cannot be installed according to the design requirement is solved. The positioning and mounting device is used for positioning and mounting lap joint holes among vent holes of the multi-layer heat preservation felt and comprises a square frame formed by transversely and vertically connecting a plurality of connecting pieces, a plurality of small grids are arranged in the square frame, and positioning pins are fixed to the four corners of each small grid respectively; the shape and the size of the positioning pin are determined according to the design shape and the effective area of the lap joint hole; the positioning and mounting device is applied to positioning and mounting of the ventilation lap joint holes of the multi-layer insulation felt.

Description

Technical Field

[0001] The utility model provides an installation and positioning tool for a semiconductor substrate equipment thermal insulation system, belonging to the technical field of installation and positioning tool for thermal insulation systems. Background Art

[0002] High-temperature purification equipment is a device that removes impurities from graphite products outside the graphite body through physical and chemical purification methods. The insulation system of this equipment not only plays the insulation function in the entire equipment system, but also includes the exhaust function. Therefore, the design of the exhaust hole needs to be considered during the design of the insulation system. The temperature of the high-temperature purification equipment reaches 2400℃ during operation. In order to avoid the impact of high temperature on the external metal water-cooled wall of the insulation system, the exhaust hole adopts a stepped overlap design (the center of the second layer of insulation felt ventilation hole is on the circumferential quadrant of the first layer of insulation felt ventilation hole), such as Figure 1-4 As shown, the effective area of ​​the stepped overlap hole needs to be accurately calculated according to the process air intake requirements. However, during the actual installation process, the operator does not have a special insulation felt installation and positioning tool, and cannot accurately ensure that the effective area of ​​the overlap hole is installed according to the design requirements. If the effective area of ​​the overlap hole is greater than the effective area required by the design, heat leakage will occur; if the effective area of ​​the overlap hole is less than the effective area required by the design, impurities cannot be discharged smoothly, affecting the purification effect. Therefore, it is necessary to design a special insulation felt installation and positioning tool to ensure that each time the insulation system is installed, the effective area of ​​the overlap hole = the effective area required by the design. Utility Model Content

[0003] In order to solve the problem that the effective area of ​​the exhaust step overlap holes of the insulation system of high-temperature purification equipment cannot be installed according to the design requirements, the utility model proposes an installation and positioning tool for the insulation system of semiconductor substrate equipment, and the purpose is to provide an insulation felt vent hole installation and positioning tool that can accurately ensure that the effective area of ​​the overlap holes is the same as the designed effective area during the installation process.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is: an installation and positioning tool for a semiconductor substrate equipment insulation system, which is used for positioning and installing overlapping holes between ventilation holes of multiple layers of insulation felt, and includes a grid-type frame formed by horizontally and vertically connecting multiple connecting members, wherein the grid-type frame includes multiple small squares, and positioning pins are respectively fixed on the four corners of each small square;

[0005] The shape and size of the positioning pin are determined according to the design shape and effective area of ​​the overlapping hole.

[0006] The connecting piece is a round or square connecting rod.

[0007] The connecting rods are arranged in four rows and four columns, and the connecting rods in the four rows and four columns form a lattice frame.

[0008] The connecting rods of each row and column are fixed by bolts.

[0009] Each small square is fixed by four connecting pieces, and a fixing seat is arranged on the four corners of each small square, and the fixing seat is used to fix the connecting pieces.

[0010] The four corners of the lattice frame are respectively provided with hand-holding parts.

[0011] The hand-held part is installed at a position extending outwardly on both sides of the four corners of the lattice frame.

[0012] The height of the positioning pin is greater than or equal to the total thickness of the multiple layers of thermal insulation felt.

[0013] The beneficial effects of the utility model compared with the prior art are as follows: the installation and positioning tooling of the semiconductor substrate equipment insulation system provided by the utility model, through the positioning pins designed to be consistent with the shape, size and position of the overlapping holes, can ensure that when the ventilation holes of two insulation felts are overlapped, the area of ​​the installation holes is consistent with the designed overlapping holes, thereby ensuring the function of the insulation layer and not affecting the discharge of impurities, thereby ensuring the purification effect; and the utility model is designed with a handheld part, which makes it more convenient and efficient in actual operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The utility model is further described below in conjunction with the accompanying drawings:

[0015] Figure 1 This is the assembly drawing of the vent assembly of the thermal insulation system after the high-temperature purification equipment is installed;

[0016] Figure 2 for Figure 1 AA section view in;

[0017] Figure 3 for Figure 2 A schematic diagram of the partial enlarged structure of the vent hole of the thermal insulation system at B in the middle;

[0018] Figure 4 It is a schematic diagram of the effective area and the designed area when the vent holes of the thermal insulation system are installed;

[0019] Figure 5 The structure diagram of the installation and positioning tooling of the utility model is shown as follows Figure 1 ;

[0020] Figure 6 The structure diagram of the installation and positioning tooling of the utility model is shown as follows Figure 2 ;

[0021] Figure 7 This is a schematic diagram of the matching relationship between the installation positioning tooling and the thermal insulation felt of the utility model;

[0022] Figure 8 Schematic diagram of the installation of the positioning tooling and the thermal insulation felt for this utility model Figure 1 ;

[0023] Fig. 9 for Figure 8 CC section view in;

[0024] Fig.10 Schematic diagram of the installation of the positioning tooling and the thermal insulation felt for this utility model Figure 2 ;

[0025] Fig.11 for Fig.10 Middle DD section view;

[0026] In the figure: 1 is the first layer of insulation felt, 2 is the second layer of insulation felt, 3 is the third layer of insulation felt, 4 is the fourth layer of insulation felt, 5 is the vent hole of the first layer of insulation felt, 6 is the vent hole of the second layer of insulation felt, 7 is the vent hole of the third layer of insulation felt, 8 is the vent hole of the fourth layer of insulation felt, 9 is the installation platform, 10 is the hand-held part, 11 is the positioning pin, and 12 is the connecting piece. DETAILED DESCRIPTION

[0027] like Figures 1 to 11 As shown, the utility model provides an installation and positioning tool for a semiconductor substrate equipment insulation system, including arranged connecting parts 12, positioning pins 11 are arranged at the intersection of the arranged connecting parts 12, and a hand-held part 10 is arranged at the outward extension of the connecting parts 12. The hand-held part 10 can be used to realize convenient transportation of the installation and positioning tool during operation.

[0028] The connecting member 12 can be a circular or square connecting rod, which is specifically arranged in four rows and four columns to form a square frame composed of a plurality of small squares. A positioning pin 11 is fixed at the four corners of each square shape. The shape and size of the positioning pin 11 are set according to the effective area of ​​the ventilation holes designed between the insulation felt layers, such as Figure 7 As shown, the outer dimensions of the positioning pin 11 on the tooling are the intersection of two circular vents, similar to an ellipse.

[0029] The hand-held component 10 is installed at the position extending outward from both sides of the four corners of the square frame, such as Figure 5 and 6 As shown, eight hand-held components 10 are provided, and when in use, the operator can lift the hand-held components 10 to carry the tooling and place it at a predetermined position.

[0030] like Figure 1-4As shown, the insulation system used in the utility model includes four insulation layers, namely a first insulation felt layer 1, a second insulation felt layer 2, a third insulation felt layer 3 and a fourth insulation felt layer 4. The sizes of the four insulation felt layers range from Figure 1 From the top, it gradually decreases from the outside to the inside. The first layer of insulation felt 1 is provided with a plurality of first layer insulation felt vents 5, the second layer of insulation felt 2 is provided with a plurality of second layer insulation felt vents 6, the third layer of insulation felt 3 is provided with a plurality of third layer insulation felt vents 7, and the fourth layer of insulation felt 4 is provided with a plurality of fourth layer insulation felt vents 8. Figure 2 As shown, the ventilation holes of the four layers of thermal insulation felt are designed with a stepped overlap, that is, the center of the ventilation hole 6 of the second layer of thermal insulation felt is at the circumferential quadrant point of the ventilation hole 5 of the first layer of thermal insulation felt, and so on. During installation, the effective installation area of ​​the ventilation holes of the two layers of thermal insulation felt is required to be equal to the area required by the design, such as Figure 3 As shown, therefore, the utility model designs the positioning pin 11 in the tooling to be a structure with the same size, shape and area as the overlapping hole, which can ensure the effective overlap between the two layers of vent holes during installation, thereby ensuring the thermal insulation performance of the thermal insulation system and the effective discharge of impurities, thereby ensuring the purification effect.

[0031] like Figure 8-11 As shown, the principle used in the utility model is as follows:

[0032] During the installation of the exhaust step overlap holes of the insulation system, the operator needs to place the fourth layer of insulation felt 4 with the vent holes cut on the installation platform 9, and then place the third layer of insulation felt 3 (with the vent holes cut in the early stage) on the fourth layer of insulation felt 4. The operator lifts the handheld part 10 of the installation positioning tool and places it on the vent holes 7 of the third layer of insulation felt. By moving the insulation felt vent hole installation positioning tool and the third layer of insulation felt 3, the positioning pins 11 of the installation positioning tool pass through the vent holes 7 of the third layer of insulation felt and the vent holes 8 of the fourth layer of insulation felt at the same time. After positioning, the relative positions of the third layer of insulation felt 3 and the fourth layer of insulation felt 4 are fixed, as shown in FIG. Figure 8-9 Then, place the second layer of insulation felt 2 (with ventilation holes cut in advance) on the third layer of insulation felt 3. The operator lifts the handpiece 10 of the installation and positioning tool and places it on the ventilation hole 6 of the second layer of insulation felt. By moving the installation and positioning tool and the second layer of insulation felt 2, the positioning pin 11 of the installation and positioning tool passes through the ventilation hole 6 of the second layer of insulation felt and the ventilation hole 7 of the third layer of insulation felt at the same time. After positioning, the second layer of insulation felt 2 is fixed to the third layer of insulation felt 3, as shown in FIG. Figure 10-11 As shown. Similarly, the first layer of insulation felt 1 (with ventilation holes cut in advance) is positioned and fixed to the second layer of insulation felt 2 using the tool. Using the tool to position the ventilation holes of the insulation felt can ensure that the effective area of ​​the overlap holes installed by the on-site operator is the same as the effective area of ​​the theoretical design, which does not affect the purification effect and avoids the impact of heat leakage on the water-cooled wall outside the insulation felt.

[0033] Regarding the specific structure of the utility model, it should be explained that the connection relationship between the various component modules adopted in the utility model is definite and feasible. Except for special instructions in the embodiments, the specific connection relationship can bring corresponding technical effects and solve the technical problems raised by the utility model without relying on the execution of corresponding software programs. The components, modules, models of specific components and the connection methods between each other appearing in the utility model, as well as the conventional use methods and expected technical effects brought about by the above-mentioned technical features, except for specific instructions, all belong to the disclosed contents in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by technical personnel in this field before the application date, or belong to the existing technologies such as conventional technologies and common knowledge in this field, and there is no need to elaborate, so that the technical solution provided in this case is clear, complete and feasible, and the corresponding physical products can be reproduced or obtained according to the technical means.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. An installation and positioning tool for a semiconductor substrate equipment insulation system, used for positioning and installing overlapping holes between ventilation holes of multiple layers of insulation felt, characterized in that: It comprises a lattice frame formed by connecting a plurality of connecting members horizontally and vertically, wherein a plurality of small squares are arranged in the lattice frame, and positioning pins are respectively fixed on the four corners of each small square; The shape and size of the positioning pin are determined according to the design shape and effective area of ​​the overlapping hole.

2. The installation and positioning tool for the semiconductor substrate equipment insulation system according to claim 1, characterized in that: The connecting piece is a round or square connecting rod.

3. The installation and positioning tool for the semiconductor substrate equipment insulation system according to claim 2, characterized in that: The connecting rods are arranged in four rows and four columns, and the connecting rods in the four rows and four columns form a lattice frame.

4. The installation and positioning tool for the semiconductor substrate equipment insulation system according to claim 3, characterized in that: The connecting rods of each row and column are fixed by bolts.

5. The installation and positioning tool for the semiconductor substrate equipment insulation system according to claim 1, characterized in that: Each small square is fixed by four connecting pieces, and a fixing seat is arranged on the four corners of each small square, and the fixing seat is used to fix the connecting pieces.

6. The installation and positioning tool for a semiconductor substrate equipment thermal insulation system according to any one of claims 1 to 5, characterized in that: The four corners of the lattice frame are respectively provided with hand-holding parts.

7. The installation and positioning tool for the semiconductor substrate equipment thermal insulation system according to claim 6, characterized in that: The hand-held part is installed at a position extending outwardly on both sides of the four corners of the lattice frame.

8. The installation and positioning tool for the semiconductor substrate equipment insulation system according to claim 1, characterized in that: The height of the positioning pin is greater than or equal to the total thickness of the multiple layers of thermal insulation felt.

Images