Hinge structure and vacuum equipment

Abstract

The utility model provides a hinge structure and vacuum equipment, the hinge structure comprises a first hinge part, the first hinge part is provided with a first through hole; the second hinge part is provided with a second through hole; the hinge pin is used for connecting the first hinge part and the second hinge part, the hinge pin is fixed in the first through hole and the second through hole, and the part, protruding out of the first hinge part, of the hinge pin is projected on the surface of the first hinge part in a non-equal-diameter structure shape; by means of the change of the diameter of the non-equal-diameter structure, the change of the contact radius of the hinge pin when the cavity cover is closed and opened is achieved, normal opening of the cavity cover is facilitated, bounce at the hinged position is avoided, the use safety is improved while the sealing performance of the vacuum cavity is guaranteed, and the vacuum cavity has a wide use range.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a hinge structure and vacuum equipment. Background Art

[0002] In the current existing structure, in order to avoid the situation that the cavity cover cannot fit with the cavity body due to the error of hinge processing when opening and closing the cover, the lower hinge pin hole is generally designed as a waist hole, and the gas spring is used to reduce the opening force and limit the function. However, on the one hand, after closing the cover, since the lower hinge pin hole is designed as a waist hole, the matching clearance between the waist hole and the shaft will be greater than the compression distance of the sealing ring. Therefore, when the weight of the cavity cover is too light, the cavity cover cannot press the sealing ring, affecting the vacuum seal (secondary auxiliary pressing is required to achieve compression sealing); on the other hand, when the cover needs to be opened, the chamber is generally inflated. When the cavity cover loses the vacuum force, due to the waist hole gap and the thrust of the gas spring, the cavity cover hinge will pop up when the chamber is inflated to a pressure balance close to the inside and outside of the chamber.

[0003] Therefore, how to improve the sealing of the vacuum chamber is a technical problem that needs to be solved urgently. Utility Model Content

[0004] The technical problem solved by the utility model is to provide a hinge structure and a vacuum device, which can ensure the sealing of the vacuum cavity under the premise of realizing normal opening / closing of the cavity cover and has a wider range of applications.

[0005] In order to solve the above problems, the utility model provides a hinge structure, including: a first hinge part, the first hinge part has a first through hole; a second hinge part, the second hinge part has a second through hole; a hinge pin connecting the first hinge part and the second hinge part, the hinge pin is fixed in the first through hole and the second through hole, and the shape of the part of the hinge pin protruding from the first hinge part projected on the surface of the first hinge part is a non-uniform diameter structure.

[0006] Optionally, it further includes a rolling bearing fixed to the second hinge part, the rolling bearing and the hinge pin move relative to each other, and the rotation of the rolling bearing drives the movement of the hinge pin.

[0007] Optionally, the rolling bearing is fixedly connected to the second hinge part by screws.

[0008] Optionally, the hinge pin includes a first hinge pin portion, a hinge pin cap, and a second hinge pin portion connecting the first hinge pin portion and the hinge pin cap.

[0009] Optionally, the second hinge pin portion is prismatic.

[0010] Optionally, a shape of the second through hole matches a shape of the second hinge pin portion.

[0011] Optionally, it also includes: a nut connected to the first hinge pin portion.

[0012] Optionally, the hinge pin cap protrudes from the first hinge portion, and the hinge pin cap is in the non-uniform diameter structure.

[0013] Optionally, the non-uniform diameter structure includes an elliptical shape.

[0014] Correspondingly, the utility model also provides a vacuum device, comprising: the above-mentioned hinge structure; a vacuum chamber, wherein the first hinge part is fixed to the side wall of the vacuum chamber; a chamber cover, covering the opening of the vacuum chamber, wherein the second hinge part is fixed to the side wall of the chamber cover, and the first hinge part and the second hinge part are located on the same side of the vacuum chamber device.

[0015] Optionally, it also includes: a spring connected to the cavity cover.

[0016] Compared with the prior art, the technical solution of the utility model has the following advantages:

[0017] A first hinge part, wherein the first hinge part has a first through hole; a second hinge part, wherein the second hinge part has a second through hole; a hinge pin connecting the first hinge part and the second hinge part, wherein the hinge pin is fixed in the first through hole and the second through hole, and the portion of the hinge pin protruding from the first hinge part projected onto the surface of the first hinge part is in a non-uniform structure; the change in the diameter of the non-uniform structure is utilized to realize the change in the contact radius with the hinge pin when closing and opening the cavity cover, and in the process of closing the cavity cover, the contact radius with the hinge pin becomes larger, and the gap between the first through hole and the surface of the hinge pin in the direction close to the first hinge part is reduced, so that the cover is automatically pressed, and no secondary pressing is required; in the process of opening the cavity cover, the contact radius with the hinge pin becomes smaller, and the gap between the first through hole and the surface of the hinge pin in the direction close to the second hinge part is reduced, so that the cavity cover is opened normally and the hinge joint is prevented from bouncing up, thereby ensuring the sealing of the vacuum chamber and improving the safety of use, and having a wide range of uses. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of a vacuum device including a hinge structure in one embodiment;

[0019] Figure 2 is a schematic diagram of a hinge structure in one embodiment;

[0020] Figure 3 It is a structural schematic diagram of a vacuum device including a hinge structure in one embodiment of the utility model;

[0021] Figure 4 This is a schematic structural diagram of a hinge pin in one embodiment of the utility model;

[0022] Figure 5 This is a schematic diagram of the structure of the vacuum device in one embodiment of the utility model when the cover is closed;

[0023] Figure 6 It is a partial cross-sectional view of the vacuum device in one embodiment of the utility model when the cover is closed;

[0024] Figure 7 It is a partial cross-sectional view of the vacuum device in one embodiment of the utility model when the cover is opened;

[0025] Figure 8 It is a partial cross-sectional view of a rolling bearing fixation in one embodiment of the utility model. DETAILED DESCRIPTION

[0026] As mentioned in the background technology, in the existing vacuum equipment, the chamber cover and the opening of the vacuum chamber cannot fit well, which affects the sealing of the vacuum equipment. Figure 1 and Figure 2 Detailed description.

[0027] First, please refer to Figure 1 , a vacuum chamber 100; a chamber cover 101 covering the opening of the vacuum chamber 100; a hinge structure 102 located on one side of the vacuum device, the hinge structure 102 and the vacuum chamber are also connected to a gas spring 103.

[0028] The inventor discovered that please refer to Figure 2 Since the pin hole 102a of the hinge structure 102 is generally designed as a waist hole, and the matching clearance between the waist hole 102a and the shaft 101a is greater than the compression distance of the sealing ring, when the weight of the chamber cover 101 is too light, the chamber cover 101 will not be able to compress the sealing ring, affecting the vacuum seal (a second auxiliary press is required to achieve the compression seal); and when the cover needs to be opened, the vacuum chamber 100 is generally inflated. When the chamber cover 101 loses the vacuum force, due to the gap in the waist hole 102a and the thrust of the gas spring 103, when the vacuum chamber 100 is inflated to a pressure close to the balance between the inside and outside of the vacuum chamber 100, the hinge of the chamber cover 101 will pop up, resulting in the vacuum chamber 100 not being able to be sealed and the problem of abnormal process.

[0029] After research, the inventor found that by installing a hinge pin with a non-uniform structure on the vacuum equipment, the change in the diameter of the non-uniform structure can be used to achieve a change in the contact radius with the hinge pin when closing and opening the lid. In the process of closing the lid, the contact radius with the hinge pin becomes larger, and the gap between the first through hole and the surface of the hinge pin near the first hinge part is reduced, thereby achieving automatic tightening of the lid without the need for secondary pressing; in the process of opening the lid, the contact radius with the hinge pin becomes smaller, and the gap between the first through hole and the surface of the hinge pin near the second hinge part is reduced, which facilitates the normal opening of the lid and avoids the hinge from bouncing up. This improves the sealing of the cavity and the safety of use, and has a wider range of uses.

[0030] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0031] Figure 3 It is a structural schematic diagram of a vacuum device including a hinge structure in one embodiment of the utility model; Figure 4 This is a schematic structural diagram of a hinge pin in one embodiment of the utility model; Figure 5 This is a schematic diagram of the structure of the vacuum device in one embodiment of the utility model when the cover is closed; Figure 6 It is a partial cross-sectional view of the vacuum device in one embodiment of the utility model when the cover is closed; Figure 7 It is a partial cross-sectional view of the vacuum device in one embodiment of the utility model when the cover is opened; Figure 8 It is a partial cross-sectional view of a rolling bearing fixation in one embodiment of the utility model.

[0032] First, please refer to Figure 3 and Figure 6 A vacuum device includes a vacuum chamber 3, a chamber cover 1, and a hinge structure.

[0033] In this embodiment, the chamber cover 1 covers the opening of the vacuum chamber 3, and the hinge structure includes a first hinge part 5, a second hinge part 4 and a hinge pin 6. The first hinge part 5 is fixed to the side wall of the vacuum chamber 3, and the first hinge part 5 has a first through hole (not marked in the figure); the second hinge part 4 is fixed to the side wall of the chamber cover 1, the first hinge part 5 and the second hinge part 4 are located on the same side of the vacuum chamber 3 equipment, the second hinge part 4 has a second through hole (not marked in the figure), the hinge pin 6 connects the first hinge part 5 and the second hinge part 4, the hinge pin 6 is fixed in the first through hole and the second through hole, and the shape of the part of the hinge pin 6 protruding from the first hinge part 5 projected on the surface of the first hinge part 5 is a non-uniform diameter structure.

[0034] In this embodiment, the change in the diameter of the non-uniform structure is utilized to achieve a change in the contact radius with the hinge pin 6 when closing and opening the cover. In the process of closing the cavity cover 1, the contact radius with the hinge pin 6 is enlarged, and the gap between the first through hole and the surface of the hinge pin 6 near the first hinge part 5 is reduced, thereby achieving automatic tightening of the cover without the need for secondary pressing. In the process of opening the cover, the contact radius with the hinge pin 6 is reduced, and the gap between the first through hole and the surface of the hinge pin 6 near the second hinge part 4 is reduced, thereby facilitating the normal opening of the cavity cover 1 and avoiding the hinge from bouncing up. This improves the sealing of the cavity and the safety of use, and has a wider range of uses.

[0035] In this embodiment, please refer to Figure 3 The vacuum equipment also includes a spring 2 connected to the chamber cover 1.

[0036] In this embodiment, the spring 2 is a gas spring.

[0037] In this embodiment, please refer to Figure 3 , Figure 5 and Figure 8 The hinge structure further includes a rolling bearing 8 fixed to the second hinge part 4 , the rolling bearing 8 and the hinge pin 6 move relative to each other, and the rotation of the rolling bearing 8 drives the movement of the hinge pin 6 .

[0038] In this embodiment, the rolling bearing 8 is fixedly connected to the second hinge part 4 via screws 7 .

[0039] In this embodiment, the rolling bearing 8 cooperates with the hinge pin 6, which causes less damage to the hinge structure than sliding friction.

[0040] In this embodiment, the rolling bearing 8 may be a ball bearing or other bearings that can achieve this function, taking advantage of its small rolling friction damage, thereby reducing damage to the hinge structure.

[0041] In this embodiment, please refer to Figure 8 The rolling bearing 8 is fixed by the screw 7, and a gap 12 is reserved between the two to achieve relative movement of the rolling bearing 8 and the hinge pin 6.

[0042] In this embodiment, please refer to Figure 4 The hinge pin 6 includes a first hinge pin portion 6-1, a hinge pin cap 6-3 and a second hinge pin portion 6-2 connecting the first hinge pin portion 6-1 and the hinge pin cap 6-3.

[0043] Among them, the second hinge pin portion 6-2 is in a prism shape, and the shape of the second through hole matches the shape of the second hinge pin portion 6-2. The second hinge pin portion 6-2 is in a prism shape so that the contact surface between the second through hole and the second hinge pin portion 6-2 is a plane, thereby increasing the contact area between the second through hole and the second hinge pin portion 6-2 and playing an anti-slip and skidding role.

[0044] In this embodiment, please refer to Figure 6 , also includes: a nut 13 connected to the first hinge pin portion 6-1.

[0045] In this embodiment, please refer to Figure 4 and Figure 5 The hinge pin cap 6-3 protrudes from the first hinge part 5, and the hinge pin cap 6-3 is in the non-uniform diameter structure.

[0046] In this embodiment, the non-uniform diameter structure is elliptical.

[0047] In other embodiments, the non-uniform diameter structure may also be elliptical.

[0048] In this embodiment, the contact radius of the hinge pin gradually increases during the closing process of the cavity cover 1, so that the cavity cover can be automatically pressed. Figure 5 As shown in FIG. 1 , due to the design of the hinge pin 6, the hinge contact radius 9 gradually increases during the closing process of the cavity cover 1, and at this time, the gap 10 between the hinge pin 6 and the lower surface of the first through hole of the first hinge portion 5 gradually decreases. Figure 6 As shown, the automatic compression of the cavity cover 1 is realized; when the cavity cover 1 is opened, the hinge contact radius 9 begins to gradually decrease, and the gap 11 between the hinge pin 6 and the upper surface of the first through hole also gradually decreases, so that the elastic force of the spring 2 can be slowly released, and the cavity cover hinge end will not suddenly bounce up; please refer to Figure 7 When the cavity cover 1 reaches the required opening angle, the upper surface of the hinge pin 6 contacts the upper surface of the first through hole of the first hinge part 5, which can realize the self-limiting function after opening and closing, avoiding the problem that the cavity cover 1 cannot be limited due to failure of the spring 2.

[0049] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

Claims

1. A hinge structure, characterized in that: include: A first hinge portion, wherein the first hinge portion has a first through hole; a second hinge portion, wherein the second hinge portion has a second through hole; A hinge pin connecting the first hinge part and the second hinge part is fixed in the first through hole and the second through hole, and the shape of the part of the hinge pin protruding from the first hinge part projected on the surface of the first hinge part is a non-uniform diameter structure.

2. The hinge structure according to claim 1, characterized in that: It also includes a rolling bearing fixed to the second hinge part, the rolling bearing and the hinge pin move relative to each other, and the rotation of the rolling bearing drives the movement of the hinge pin.

3. The hinge structure according to claim 2, characterized in that: The rolling bearing is fixedly connected to the second hinge part by means of screws.

4. The hinge structure according to claim 1, characterized in that: The hinge pin includes a first hinge pin portion, a hinge pin cap, and a second hinge pin portion connecting the first hinge pin portion and the hinge pin cap.

5. The hinge structure according to claim 4, characterized in that: The second hinge pin portion is prism-shaped.

6. The hinge structure according to claim 5, characterized in that: The shape of the second through hole matches the shape of the second hinge pin portion.

7. The hinge structure according to claim 4, characterized in that: Also includes: A nut is connected to the first hinge pin portion.

8. The hinge structure according to claim 4, characterized in that: The hinge pin cap protrudes from the first hinge part, and the hinge pin cap is in the non-uniform diameter structure shape.

9. The hinge structure according to claim 1, characterized in that: The non-uniform diameter structure includes an elliptical shape.

10. A vacuum device, characterized in that: include: The hinge structure according to any one of claims 1 to 9; A vacuum chamber, wherein the first hinge portion is fixed to a side wall of the vacuum chamber; The chamber cover covers the opening of the vacuum chamber, the second hinge part is fixed to the side wall of the chamber cover, and the first hinge part and the second hinge part are located on the same side of the vacuum chamber equipment.

11. The vacuum device according to claim 10, characterized in that Also includes: A spring is connected to the cavity cover.

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