Sealing door and aging test equipment

Abstract

The utility model relates to a sealing door and aging test equipment, comprising a bearing door plate and a sealing door plate which are laminated in a first direction; the ejection mechanism is mounted on the load-bearing door plate and comprises a first driving part and a power steering assembly, and the power steering assembly is connected with the load-bearing door plate and the sealing door plate; the first driving part is used for applying driving force to the power steering assembly in the second direction, and the power steering assembly drives the sealing door plate to be close to or away from the bearing door plate in the first direction when bearing the driving force applied by the first driving part. The first direction intersects the second direction. Compared with a manual door closing mode in the prior art, the automation degree is high. And meanwhile, under the action of the first driving piece, the sealing door plate can press the test body in a state of closing the opening, so that the periphery of the sealing door plate is ensured to seal the opening, air leakage is avoided, and the accuracy of a test result is further ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of chip aging test, in particular to a sealing door and aging test equipment. Background Art

[0002] In order to detect the service life and reliability of the chip, the chip is often subjected to an aging test, and the chip aging test is generally completed in an aging test device.

[0003] The aging test equipment includes a test body, on which a test cavity and an opening connected to the test cavity are provided. The aging test equipment also includes a sealing door installed on the test body, and the sealing door is used to open and close the opening. When the sealing door opens the opening, the chip can be placed in the test cavity through the opening for testing, or the chip after the test can be taken out of the test cavity through the opening; when the sealing door closes the opening, the sealing door and the test body together form a sealed space, so that the chip is in a sealed environment to prevent the external environment from interfering with the chip test results.

[0004] However, when the sealing door closes the opening, there is a risk that the opening is not completely sealed around it, the sealing performance is poor, and the external environment can easily affect the sealed space, thereby affecting the accuracy of the test results. Utility Model Content

[0005] Based on this, it is necessary to provide a sealing door with better sealing performance and aging test equipment to address the problem of poor sealing performance of sealing doors in traditional technologies.

[0006] A sealed door, comprising:

[0007] A load-bearing door panel and a sealing door panel, wherein the sealing door panel and the load-bearing door panel are stacked in a first direction;

[0008] An ejection mechanism is installed on the load-bearing door panel, and the ejection mechanism includes a first driving member and a power steering assembly, wherein the power steering assembly connects the load-bearing door panel and the sealing door panel; the first driving member is used to apply a driving force to the power steering assembly along a second direction, and when the power steering assembly is subjected to the driving force applied by the first driving member, it drives the sealing door panel to move closer to or away from the load-bearing door panel in the first direction; the first direction intersects with the second direction.

[0009] According to the above arrangement, when the opening needs to be closed, the first driving member is controlled to apply a driving force to the power steering assembly along the second direction. When the power steering assembly is subjected to the above driving force, it drives the sealing door plate away from the load-bearing door plate in the first direction to close and seal the opening. Compared with the manual door closing method in the prior art, the degree of automation is high. At the same time, under the action of the first driving member, the sealing door plate can press the test body in the state of closing the opening, ensuring that the sealing door plate is sealed around the opening to avoid air leakage, thereby ensuring the accuracy of the test result. In addition, the first driving member applies a driving force to the power steering assembly along the second direction. The power steering assembly can convert the driving force in the second direction into a force in the first direction and drive the sealing door plate to approach or move away from the load-bearing door plate along the first direction. Compared with the situation where the first driving member directly drives the sealing door plate to approach or move away from the load-bearing door plate along the first direction, the space occupied by the entire sealing door in the first direction can be reduced, meeting the miniaturization requirements of the equipment.

[0010] In one embodiment, the power steering assembly includes a transmission assembly and a limit assembly;

[0011] The transmission assembly connects the first driving member and the sealing door plate, and the first driving member is used to drive the transmission assembly to move along the second direction relative to the load-bearing door;

[0012] The limiting assembly connects the load-bearing door plate and the sealing door plate to limit the movement of the sealing door plate in the second direction relative to the load-bearing door plate. The transmission assembly cooperates with the limiting assembly to enable the sealing door plate to move in the first direction relative to the load-bearing door plate.

[0013] In one embodiment, the transmission assembly includes a connecting rod assembly, and the first driving member and the sealing door plate are both hinged to the connecting rod assembly;

[0014] When the transmission assembly moves relative to the load-bearing door plate along the second direction, the connecting rod assembly rotates relative to the first driving member and the sealing door plate, and the connecting rod assembly can drive the sealing door plate to move relative to the load-bearing door plate in the first direction.

[0015] In one embodiment, the transmission assembly also includes a connecting module, which is slidably connected to the load-bearing door panel in the second direction; one end of the connecting rod assembly and the first driving member are both connected to the connecting module; the first driving member is capable of driving the connecting module to move relative to the load-bearing door panel in the second direction, and the first driving member is hinged to the connecting rod assembly through the connecting module.

[0016] In one embodiment, the connection module includes a connection seat and a first transmission shaft, the connection seat is slidably connected to the load-bearing door panel in the second direction, and the first transmission shaft is installed on the connection seat;

[0017] The transmission assembly further includes a second transmission shaft, and the transmission assembly includes two connecting rod assemblies arranged at intervals in a third direction; the first transmission shaft and the second transmission shaft both extend along the third direction and are respectively connected to two ends of the connecting rod assembly in the extending direction thereof, and the two ends of the first transmission shaft and the second transmission shaft are respectively hinged to the two connecting rod assemblies;

[0018] The first driving member is connected to the first transmission shaft and is hinged to the connecting rod assembly through the first transmission shaft, and the sealing door panel is connected to the second transmission shaft and is hinged to the connecting rod assembly through the second transmission shaft;

[0019] The first direction, the second direction and the third direction intersect each other.

[0020] In one embodiment, the sealing door also includes a guiding mechanism, which includes a guide rail and a slider, one of which is installed on the load-bearing door panel, and the other is connected to the connecting module; the guide rail extends along the second direction, and the guide rail and the slider are slidably matched to guide the connecting module in the second direction.

[0021] In one of the embodiments, the limiting assembly is also used to guide the sealing door panel along the first direction.

[0022] In one embodiment, the limiting assembly includes a first guide shaft and a first linear bearing, the first guide shaft extends along the first direction, one of the first guide shaft and the first linear bearing is arranged on the load-bearing door panel, and the other is arranged on the sealing door panel; the first guide shaft passes through the first linear bearing to guide the sealing door panel in the first direction.

[0023] In one of the embodiments, the sealed door includes a plurality of ejection mechanisms, and the plurality of ejection mechanisms are arranged at intervals on the load-bearing door panel.

[0024] An aging test device comprises a test body, a driving device and a sealing door as described above; the test body has a test cavity and an opening communicating with the test cavity, the driving device is mounted on the test body, and the sealing door is connected to the driving device;

[0025] When the sealing door plate moves along the first direction relative to the load-bearing door plate, the opening can be opened and closed; the driving device is used to drive the sealing door to move along the second direction or the third direction to move away from or closer to the opening; the first direction, the second direction and the third direction intersect each other. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 An exploded view of a sealed door provided in one embodiment of the present application;

[0027] Figure 2 for Figure 1 A partial structural diagram of the sealing door shown in ;

[0028] Figure 3 for Figure 2 A magnified view of the structure shown in FIG.

[0029] Figure 4 for Figure 2 A structural diagram of another perspective of the structure shown in;

[0030] Figure 5 for Figure 4 An enlarged view of the structure shown in B;

[0031] Figure 6 for Figure 1 The structural diagram of the sealing door plate of the sealing door shown in ;

[0032] Figure 7 for Figure 6 A cross-sectional view of the sealed door panel shown in ;

[0033] Figure 8 A structural diagram of a portion of the structure of an aging test device provided in one embodiment of the present application;

[0034] Fig. 9 for Figure 8 The structure shown in the diagram hides part of the structure.

[0035] Description of reference numerals:

[0036] 100, sealed door; 10, load-bearing door plate; 11, load-bearing door shell; 12, load-bearing door frame; 20, sealed door plate; 21, sealed door frame; 22, insulation board; 23, support bar; 24, support block; 25, door cover; 30, ejection mechanism; 31, first drive member; 32, power steering assembly; 321, transmission assembly; 3211, connecting rod assembly; 3212, connecting module; 3213, connecting seat; 3214, first transmission shaft; 3215, second transmission shaft; 3216, connecting block; 322, limit assembly; 3221, first guide shaft; 3222, first linear bearing; 4 0, guide mechanism; 41, guide rail; 200, drive device; 201, second drive member; 202, reducer; 203, pulley; 204, conveyor belt; 300, first mounting beam; 400, second mounting beam; 500, guide device; 501, second guide shaft; 502, second linear bearing; 600, pressure block; 700, first limit block; 800, second limit block; 900, baffle; 1100, first sensor; 1120, drag chain; 1130, junction box; 1140, second sensor; 1150, mounting plate; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0037] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0040] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0042] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0043] An embodiment of the present application provides an aging test device for performing aging tests on products. Specifically, the product that the aging test device is used to test is a chip. In order to ensure the stability and reliability of the chip, aging testing is a very important part. By performing aging tests on the chip, its performance under long-term operation and stress conditions can be evaluated, and potential problems can be discovered and repaired in a timely manner. It should be understood that there is no limitation on the types of products that the aging test device is used to test. For example, in some other embodiments, the aging test device can also be used to test other electronic components.

[0044] The following is a detailed description of the present application by taking the aging test device applied to a test chip as an example. It is to be understood that the description is only for example and does not limit the protection scope of the present application.

[0045] See also Figure 1 The aging test equipment includes a test body and a sealed door 100. The test body has a test cavity and an opening, the opening is connected to the test cavity, and the sealed door 100 is used to open and close the opening. When testing the chip, the sealed door 100 opens the opening, the chip is placed in the test cavity, the sealed door 100 closes the opening, and the chip is tested in the test cavity. When the chip test is completed, the sealed door 100 opens the opening again and takes the chip out of the test cavity. When testing the next chip or the next batch of chips, repeat the above steps.

[0046] As described in the background technology: when the sealing door 100 is closed, the sealing door 100 and the test body form a sealed space together, so that the chip is in a sealed environment to prevent the outside world from interfering with the chip test results. However, when the sealing door 100 in the conventional technology is closed, there is a risk that the opening is not completely sealed around it, and the sealing performance is poor. The external environment is easy to affect the sealed space, thereby affecting the accuracy of the test results.

[0047] The applicant has found that the root cause of the above problems is that the sealing door 100 is often closed manually and then locked with a single-point door lock. When the sealing door 100 and the test body are locked with a single point, there is a risk of incompletely sealed openings around the sealing door 100, and the sealing performance is poor.

[0048] To solve the above problems, continue to refer to Figure 1 , and see Figure 2 , a sealing door 100 is provided including a load-bearing door plate 10 and a sealing door plate 20, and the sealing door plate 20 is stacked with the load-bearing door plate 10 in a first direction X. The sealing door 100 also includes an ejection mechanism 30 installed on the load-bearing door plate 10, and the ejection mechanism 30 includes a first driving member 31 and a power steering assembly 32, and the power steering assembly 32 connects the load-bearing door plate 10 and the sealing door plate 20. The first driving member 31 is used to apply a driving force to the power steering assembly 32 along the second direction Y, and the power steering assembly 32 drives the sealing door plate 20 to approach or move away from the load-bearing door plate 10 in the first direction X when the driving force applied by the first driving member 31. The first direction X intersects with the second direction Y. Specifically, the first direction X is perpendicular to the second direction Y, the first direction X is perpendicular to the plane where the opening is located, and the second direction Y is parallel to the plane where the opening is located. Among them, the load-bearing door plate 10 is arranged on the test body, and the sealing door plate 20 is used to open and close the opening.

[0049] When the first driving member 31 applies a force to the power steering assembly 32 along the second direction Y, the power steering assembly 32 drives the sealing door plate 20 away from the load-bearing door plate 10 in the first direction X under the force applied by the first driving member 31, and the sealing door plate 20 can close and seal the opening. When the sealing door plate 20 approaches the load-bearing door plate 10 in the first direction X, the sealing door plate 20 can open the opening.

[0050] According to the above arrangement, when the opening needs to be closed, the first driving member 31 is controlled to apply a driving force to the power steering assembly 32 along the second direction Y, and the power steering assembly 32 drives the sealing door plate 20 away from the load-bearing door plate 10 in the first direction X to close and seal the opening when the driving force is applied. Compared with the manual door closing method in the prior art, the degree of automation is high. At the same time, under the action of the first driving member 31, the sealing door plate 20 can press the test body in the state of closing the opening, ensuring that the sealing door plate 20 is sealed around the opening to avoid air leakage, thereby ensuring the accuracy of the test result. In addition, the first driving member 31 applies a driving force to the power steering assembly 32 along the second direction Y, and the power steering assembly 32 can convert the driving force of the second direction Y into a force in the first direction X and drive the sealing door plate 20 to approach or move away from the load-bearing door plate 10 along the first direction X. Compared with the situation where the first driving member 31 directly drives the sealing door plate 20 to approach or move away from the load-bearing door plate 10 along the first direction X, the space occupied by the entire sealing door 100 in the first direction X can be reduced, meeting the miniaturization requirements of the equipment.

[0051] In some embodiments, see Figure 2 The sealed door 100 includes a plurality of ejection mechanisms 30, and the plurality of ejection mechanisms 30 are arranged at intervals on the load-bearing door plate 10. In this way, with the cooperation of the plurality of ejection mechanisms 30, it is possible to further ensure that the sealing door plate 20 has a sealed opening all around.

[0052] In some specific embodiments, the sealing door 100 is a rectangular plate-shaped structure, and the sealing door 100 includes four ejection mechanisms 30, and the four ejection mechanisms 30 are distributed at the four corners of the sealing door 100. It is understandable that in some other embodiments, the shape of the sealing door 100 is not limited, such as the sealing door 100 can also be a disc or other irregular shapes. At the same time, the number of ejection mechanisms 30 is not limited, such as the sealing door 100 can also include one ejection mechanism 30, two ejection mechanisms 30, three ejection mechanisms 30 or more than four ejection mechanisms 30.

[0053] Optionally, the first driving member 31 rotates the cylinder, and when the piston rod of the cylinder is pushed out or retracted, it can apply a driving force to the power steering assembly 32 along the second direction Y. In some other embodiments, the type of the first driving member 31 is not limited, such as the first driving member 31 can also be a motor, and the motor applies a driving force to the power steering assembly 32 through an intermediate transmission member.

[0054] See also Figure 3 The power steering assembly 32 includes a transmission assembly 321 and a limit assembly 322. The transmission assembly 321 connects the first driving member 31 and the sealing door plate 20. The first driving member 31 is used to drive the transmission assembly 321 to move relative to the load-bearing door plate 10 along the second direction Y. The limit assembly 322 connects the load-bearing door plate 10 and the sealing door plate 20 to limit the movement of the sealing door plate 20 relative to the load-bearing door plate 10 in the second direction Y. The transmission assembly 321 cooperates with the limit assembly 322 to enable the sealing door plate 20 to move relative to the load-bearing door plate 10 in the first direction X. In this way, when the first driving member 31 drives the transmission component 321 to move along the second direction Y relative to the load-bearing door panel 10, the transmission component 321 has a tendency to drive the sealing door panel 20 to move along the second direction Y. However, since the limiting component 322 limits the sealing door panel 20 from moving along the second direction Y relative to the load-bearing door panel 10, at this time, under the limiting action of the limiting component 322, the transmission component 321 drives the sealing door panel 20 to move along the first direction X to approach or move away from the load-bearing door panel 10, thereby realizing the function of opening and closing the opening.

[0055] It is conceivable that the power steering assembly 32 may also be arranged in other ways, as long as the driving force received in the second direction Y can be converted into a force in the first direction X. For example, in some other embodiments, the power steering assembly 32 may be arranged to omit the limit assembly 322. In this case, when the first driving member 31 applies a driving force to the transmission assembly 321, the transmission assembly 321 can drive the sealing door panel 20 to move relative to the load-bearing door panel 10 in the first direction X and the second direction Y, and the sealing door panel 20 can open and close the opening when it moves relative to the load-bearing door panel 10 in the first direction X and the second direction Y.

[0056] In some embodiments, see Figure 3 The transmission assembly 321 includes a connecting rod assembly 3211, and the first driving member 31 and the sealing door plate 20 are both hinged to the connecting rod assembly 3211. When the transmission assembly 321 moves relative to the load-bearing door plate 10 along the second direction Y, the connecting rod assembly 3211 rotates relative to the first driving member 31 and the sealing door plate 20, and the connecting rod assembly 3211 can drive the sealing door plate 20 to move relative to the load-bearing door plate 10 in the first direction X.

[0057] It should be noted that the connecting rod assembly 3211 may include only one connecting rod, or include multiple connecting rods hinged to each other. It should also be noted that the first driving member 31 and the sealing door panel 20 are both hinged to the connecting rod assembly 3211, which means that the connecting rod assembly 3211 has two ends that are arranged away from each other, the first driving member 31 is hinged to one end of the connecting rod assembly 3211, and the sealing door panel 20 is hinged to the other end of the connecting rod assembly 3211. For example, when the connecting rod assembly 3211 has one connecting rod, the first driving member 31 is hinged to one end of the connecting rod, and the sealing door panel 20 is hinged to the other end of the connecting rod. When the connecting rod assembly 3211 includes multiple connecting rods, the first driving member 31 is hinged to the suspended end of a connecting rod located at the endmost end of the connecting rod assembly 3211, and the sealing door panel 20 is hinged to the suspended end of the connecting rod located at the endmost end of the other end of the connecting rod assembly 3211.

[0058] The transmission assembly 321 further includes a connection module 3212, and the connection module 3212 is slidably connected to the load-bearing door panel 10 in the second direction Y. One end of the connecting rod assembly 3211 is connected to the first driving member 31 and the connection module 3212, and the first driving member 31 can drive the connection module 3212 to move relative to the load-bearing door panel 10 in the second direction Y. The first driving member 31 is hinged to the connecting rod assembly 3211 through the connection module 3212. In this way, when the first driving member 31 drives the connection module 3212 to move relative to the load-bearing door panel 10 in the second direction Y, the connecting rod assembly 3211 and the connection module 3212 move relative to the load-bearing door panel 10 together. Since the limit assembly 322 limits the sealing door panel 20 from moving in the second direction Y relative to the load-bearing door panel 10, the connecting rod assembly 3211 rotates relative to the connecting module 3212 and the sealing door panel 20. At the same time, the connecting rod assembly 3211 applies a force along the first direction X to the sealing door panel 20, so that the sealing door panel 20 moves along the first direction X relative to the load-bearing door panel 10.

[0059] For further information, see Figure 3-Figure 5 The sealed door 100 further includes a guide mechanism 40, which includes a guide rail 41 and a slider. One of the guide rail 41 and the slider is installed on the load-bearing door panel 10, and the other is connected to the connection module 3212. The guide rail 41 extends along the second direction Y, and the guide rail 41 and the slider are slidably matched to guide the connection module 3212 in the second direction Y to prevent the connection module 3212 from deviating when moving along the second direction Y.

[0060] In some specific implementations, please refer to Figure 5 The connection module 3212 includes a connection seat 3213 and a first transmission shaft 3214. The connection seat 3213 is slidably connected to the load-bearing door panel 10 in the second direction Y. The first transmission shaft 3214 is mounted on the connection seat 3213. The guide rail 41 is disposed on the load-bearing door panel 10, and the slider is disposed on the connection seat 3213.

[0061] Further reading Figure 3 , the transmission assembly 321 also includes a second transmission shaft 3215, and the transmission assembly 321 includes two connecting rod assemblies 3211 arranged at intervals in the third direction Z. The first transmission shaft 3214 and the second transmission shaft 3215 both extend along the third direction Z, and the two ends of the first transmission shaft 3214 are respectively hinged to one end of the two connecting rod assemblies 3211, and the two ends of the second transmission shaft 3215 are respectively hinged to the other ends of the two connecting rod assemblies 3211. The first driving member 31 is connected to the first transmission shaft 3214 and is hinged to the connecting rod assembly 3211 through the first transmission shaft 3214. The sealing door panel 20 is connected to the second transmission shaft 3215 and is hinged to the connecting rod assembly 3211 through the second transmission shaft 3215. Specifically, a bearing is provided between the first transmission shaft 3214 and the connecting rod assembly 3211, and the two are hinged through the bearing. A bearing is also provided between the second transmission shaft 3215 and the connecting rod assembly 3211, and the two are hinged through the bearing. The sealing door plate 20 is connected to the second transmission shaft 3215 via the connecting block 3216. The first direction X, the second direction Y and the third direction Z intersect each other. Specifically, the first direction X, the second direction Y and the third direction Z are perpendicular to each other.

[0062] With the above arrangement, the first driving member 31 drives the first transmission shaft 3214 to move relative to the load-bearing door panel 10 along the second direction Y, and drives the connecting seat 3213 to move along the second direction Y. When the connecting seat 3213 moves along the second direction Y, the guide rail 41 cooperates with the slider to guide the connecting seat 3213. Since the first transmission shaft 3214 and the second transmission shaft 3215 are both hinged to the connecting rod assembly 3211, the connecting rod assembly 3211 rotates relative to the first transmission shaft 3214 and the second transmission shaft 3215. Under the limiting action of the limiting assembly 322, the connecting rod assembly 3211 applies a force to the sealing door panel 20 along the first direction X, and the sealing door panel 20 approaches or moves away from the load-bearing door panel 10 along the first direction X.

[0063] In some embodiments, the limiting assembly 322 is further used to guide the sealing door panel 20 along the first direction X to prevent the sealing door panel 20 from deviating when moving along the first direction X.

[0064] Optionally, continue to Figure 5The limiting assembly 322 includes a first guide shaft 3221 and a first linear bearing 3222. The first guide shaft 3221 extends along the first direction X. One of the first guide shaft 3221 and the first linear bearing 3222 is disposed on the load-bearing door panel 10, and the other is disposed on the sealing door panel 20. The first guide shaft 3221 is inserted into the first linear bearing 3222 to guide the sealing door panel 20 in the first direction X. In this way, since the first guide shaft 3221 is inserted into the first linear bearing 3222, the two cooperate to limit the sealing door panel 20 in the second direction Y; at the same time, when the sealing door panel 20 moves relative to the load-bearing door panel 10 along the first direction X, the first guide shaft 3221 can move relative to the first linear bearing 3222 along the first direction X to guide the sealing door panel 20.

[0065] It is understandable that in some other embodiments, the arrangement of the transmission assembly 321 and the limiting assembly 322 is not limited. For the transmission assembly 321, any arrangement is acceptable as long as it can cooperate with the limiting assembly 322 to convert the force in the second direction Y into the force in the first direction X, so as to drive the sealing door panel 20 to move relative to the load-bearing door panel 10 along the first direction X. For the limiting assembly 322, any arrangement is acceptable as long as it can limit the sealing door panel 20 along the second direction Y and guide the sealing door panel 20 along the first direction X.

[0066] In some embodiments, see Figure 2 The load-bearing door panel 10 includes a load-bearing door outer shell 11 and a load-bearing door frame 12. The load-bearing door outer shell 11 has an opening on one side facing the sealing door panel 20. The load-bearing door frame 12 is arranged in the load-bearing door outer shell 11 through the opening, and the ejection mechanism 30 is installed on the load-bearing door frame 12.

[0067] See also Figure 6 and Figure 7 The sealed door panel 20 includes a sealed door frame 21, a heat preservation board 22, a support bar 23, a support block 24 and a door cover 25. The sealed door frame 21 is arranged facing the load-bearing door panel 10, the heat preservation board 22 is arranged on the side of the sealed door frame 21 away from the load-bearing door panel 10 in the first direction X, and the support block 24 abuts against the sealed door frame 21 and penetrates the heat preservation board 22. The support bar 23 is arranged on the side of the heat preservation board 22 away from the sealed door frame 21 in the first direction X, and the fixing member penetrates the support bar 23, the heat preservation board 22, the support block 24 and the sealed door frame 21 to fix the four. The door cover 25 is arranged outside the heat preservation board 22 and the sealed door frame 21 through the side where the heat preservation board 22 is arranged.

[0068] The insulation board 22 is made of insulation cotton, which is made of sound insulation and heat insulation materials. The insulation temperature range is -20℃-150℃, which can meet the high and low temperature control requirements, ensure the normal temperature control in the aging test equipment, and ensure that the machine noise is within the allowable range. The support block 24 is made of insulation material, which can greatly reduce the heat transfer between the sealed space formed by the sealing door panel 20 and the test body and the outside world.

[0069] In some embodiments, see Figure 8 The aging test equipment further includes a driving device 200, which is mounted on the test body. The load-bearing door plate 10 of the sealing door 100 is connected to the driving device 200, that is, the sealing door 100 is mounted on the test body through the driving device 200. When the sealing door plate 20 moves relative to the load-bearing door plate 10 along the first direction X, the opening can be opened and closed. The driving device 200 is used to drive the sealing door 100 to move along the second direction Y or the third direction Z to move away from or close to the opening.

[0070] With the above arrangement, when the sealing door plate 20 opens the opening, the driving device 200 drives the sealing door 100 to move along the second direction Y or the third direction Z, so that the sealing door 100 is misaligned with the opening in the first direction X, so as to facilitate the chip to be taken and placed facing the opening. When the chip is taken and placed, the driving device 200 drives the sealing door 100 to move in the opposite direction along the second direction Y or the third direction Z to reset, so that the sealing door plate 20 closes the opening.

[0071] Continue reading Figure 8 The aging test equipment includes a first mounting beam 300 and a second mounting beam 400. The first mounting beam 300 and the second mounting beam 400 are parallel to each other in their extending directions and are both mounted on the test body. The first mounting beam 300 and the second mounting beam 400 are arranged at intervals in the second direction Y or the third direction Z. The driving device 200 is mounted on the first mounting beam 300 or the second mounting beam 400 to drive the sealing door 100 to move along the extending directions of the first mounting beam 300 and the second mounting beam 400.

[0072] In some specific embodiments, the first mounting beam 300 and the second mounting beam 400 both extend along the third direction Z and are spaced apart in the second direction Y. The driving device 200 is mounted on the first mounting beam 300, and one end of the sealed door 100 in the second direction Y is connected to the driving device 200. The aging test equipment further includes a guide device 500, and both ends of the sealed door 100 in the second direction Y are slidably connected to the first mounting beam 300 and the second mounting beam 400 through the guide device 500. The driving device 200 drives the sealed door 100 to move along the third direction Z so as to move away from or close to the opening in the third direction Z.

[0073] For further information, see Fig. 9The driving device 200 includes a second driving member 201, a speed reducer 202, two pulleys 203 and a conveyor belt 204. The speed reducer 202 is connected to the second driving member 201, and the two pulleys 203 are both installed on the first mounting beam 300, one of the pulleys 203 is connected to the speed reducer 202, and the conveyor belt 204 is sleeved outside the two pulleys 203, and the sealing door 100 is connected to the conveyor belt 204 through the pressing block 600. Specifically, the speed reducer 202 is a two-stage synchronous pulley speed reducer, which can transmit a large torque. The second driving member 201 drives the pulley 203 to rotate through the speed reducer 202, and the pulley 203 drives the conveyor belt 204 to move, and drives the sealing door 100 to move along the third direction Z through the pressing block 600. Specifically, the second driving member 201 is a motor.

[0074] Continue reading Figure 8 The guide device 500 includes a second guide shaft 501 and a second linear bearing 502. The second guide shaft 501 is mounted on the mounting beam. The second linear bearings 502 are respectively connected to the corresponding second guide shafts 501. The two ends of the sealed door 100 in the second direction Y are respectively connected to the two second linear bearings 502. Specifically, the sealed door 100 is connected to the second linear bearings 502 through the mounting plate 1150, and the second linear bearing 502 at one end is connected to the pressing block 600.

[0075] Continue reading Fig. 9 A first limit block 700 and a second limit block 800 are provided on the mounting beam, and the first limit block 700 and the second limit block 800 can cooperate with the mounting plate 1150 to limit the movement of the sealing door 100 in the third direction Z between the first limit position and the second limit position.

[0076] Furthermore, a baffle 900 is connected to the pressing block 600, and a first sensor 1100 cooperating with the baffle 900 is also provided on the first mounting beam 300. Through the cooperation between the baffle 900 and the first sensor 1100, it is possible to detect whether the sealing door 100 moves to a set position in the third direction Z, so as to facilitate the removal of chips or facilitate the movement of the sealing door plate 20 relative to the load-bearing door plate 10 in the first direction X to open and close the opening. Furthermore, a second sensor 1140 is also provided on the first mounting beam 300, and the baffle 900 cooperates with the second sensor 1140 to achieve zeroing of the position of the sealing door 100. Among them, the first sensor 1100 and the second sensor 1140 are both photoelectric sensors.

[0077] In some embodiments, the aging test equipment further includes a drag chain 1120 and a junction box 1130, one end of the drag chain 1120 is disposed on the first mounting beam 300, the junction box 1130 is connected to the mounting plate 1150, and the other end of the drag chain 1120 is connected to the junction box 1130. When the sealed door 100 moves along the third direction Z, the drag chain 1120 and the junction box 1130 move with the sealed door 100.

[0078] Another embodiment of the present application further provides a sealing door 100 included in the above aging test equipment. Since the above aging test equipment has beneficial effects, the sealing door 100 belonging to the aging test equipment has corresponding beneficial effects, which will not be described in detail here.

[0079] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0080] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A sealed door, characterized in that: include: A load-bearing door panel (10) and a sealing door panel (20), wherein the sealing door panel (20) and the load-bearing door panel (10) are stacked in a first direction (X); An ejection mechanism (30) is installed on the load-bearing door panel (10), the ejection mechanism (30) comprising a first driving member (31) and a power steering assembly (32), the power steering assembly (32) connecting the load-bearing door panel (10) and the sealing door panel (20); the first driving member (31) is used to apply a driving force to the power steering assembly (32) along a second direction (Y), and the power steering assembly (32) drives the sealing door panel (20) to move closer to or away from the load-bearing door panel (10) in the first direction (X) when receiving the driving force applied by the first driving member (31); the first direction (X) intersects with the second direction (Y).

2. The sealing door according to claim 1, characterized in that: The power steering assembly (32) comprises a transmission assembly (321) and a limit assembly (322); The transmission assembly (321) connects the first driving member (31) and the sealing door plate (20), and the first driving member (31) is used to drive the transmission assembly (321) to move relative to the load-bearing door along the second direction (Y); The limiting assembly (322) connects the load-bearing door plate (10) and the sealing door plate (20) so as to limit the movement of the sealing door plate (20) relative to the load-bearing door plate (10) in the second direction (Y); the transmission assembly (321) cooperates with the limiting assembly (322) so that the sealing door plate (20) moves relative to the load-bearing door plate (10) in the first direction (X).

3. The sealing door according to claim 2, characterized in that: The transmission assembly (321) comprises a connecting rod assembly (3211), and the first driving member (31) and the sealing door plate (20) are both hingedly connected to the connecting rod assembly (3211); When the transmission assembly (321) moves relative to the load-bearing door plate (10) along the second direction (Y), the connecting rod assembly (3211) rotates relative to the first driving member (31) and the sealing door plate (20), and the connecting rod assembly (3211) can drive the sealing door plate (20) to move relative to the load-bearing door plate (10) in the first direction (X).

4. The sealing door according to claim 3, characterized in that: The transmission assembly (321) also includes a connecting module (3212), and the connecting module (3212) is slidably connected to the load-bearing door panel (10) in the second direction (Y); one end of the connecting rod assembly (3211) and the first driving member (31) are both connected to the connecting module (3212); the first driving member (31) can drive the connecting module (3212) to move relative to the load-bearing door panel (10) in the second direction (Y), and the first driving member (31) is hinged to the connecting rod assembly (3211) through the connecting module (3212).

5. The sealing door according to claim 4, characterized in that: The connection module (3212) comprises a connection seat (3213) and a first transmission shaft (3214); the connection seat (3213) is slidably connected to the load-bearing door panel (10) in the second direction (Y); and the first transmission shaft (3214) is mounted on the connection seat (3213); The transmission assembly (321) further comprises a second transmission shaft (3215), and the transmission assembly (321) comprises two connecting rod assemblies (3211) arranged at intervals in a third direction (Z); the first transmission shaft (3214) and the second transmission shaft (3215) both extend along the third direction (Z), and are respectively connected to two ends of the connecting rod assembly (3211) in the extension direction thereof, and the two ends of the first transmission shaft (3214) and the second transmission shaft (3215) are respectively hinged to the two connecting rod assemblies (3211); The first driving member (31) is connected to the first transmission shaft (3214), and is hinged to the connecting rod assembly (3211) via the first transmission shaft (3214); the sealing door panel (20) is connected to the second transmission shaft (3215), and is hinged to the connecting rod assembly (3211) via the second transmission shaft (3215); The first direction (X), the second direction (Y), and the third direction (Z) intersect each other.

6. The sealing door according to claim 4, characterized in that: The sealed door also includes a guiding mechanism (40), and the guiding mechanism (40) includes a guide rail (41) and a slider, one of the guide rail (41) and the slider is installed on the load-bearing door panel (10), and the other is connected to the connecting module (3212); the guide rail (41) extends along the second direction (Y), and the guide rail (41) and the slider are slidably matched to guide the connecting module (3212) in the second direction (Y).

7. The sealing door according to claim 2, characterized in that: The limiting assembly (322) is also used to guide the sealing door panel (20) along the first direction (X).

8. The sealing door according to claim 7, characterized in that: The limiting assembly (322) includes a first guide shaft (3221) and a first linear bearing (3222), wherein the first guide shaft (3221) extends along the first direction (X), and one of the first guide shaft (3221) and the first linear bearing (3222) is arranged on the load-bearing door panel (10), and the other is arranged on the sealing door panel (20); the first guide shaft (3221) is passed through the first linear bearing (3222) to guide the sealing door panel (20) in the first direction (X).

9. The sealing door according to any one of claims 1 to 8, characterized in that: The sealed door comprises a plurality of ejection mechanisms (30), and the plurality of ejection mechanisms (30) are arranged at intervals on the load-bearing door panel (10).

10. An aging test device, characterized in that: The invention comprises a test body, a driving device (200) and a sealing door according to any one of claims 1 to 9; the test body comprises a test cavity and an opening communicating with the test cavity, the driving device (200) is mounted on the test body, and the sealing door is connected to the driving device (200); When the sealing door plate (20) moves relative to the load-bearing door plate (10) along the first direction (X), it can open and close the opening; the driving device (200) is used to drive the sealing door to move along the second direction (Y) or the third direction (Z) to move away from or closer to the opening; the first direction (X), the second direction (Y) and the third direction (Z) intersect each other.

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