Photoresist material rapid curing device

Abstract

The utility model relates to the technical field of curing devices, in particular to a photoresist material rapid curing device which comprises a shell, a fixing frame is fixedly connected to the bottom end of the inner side of the shell, a fixing block is fixedly connected to one side of the fixing frame, and a reset spring is fixedly connected to one side of the fixing block. The light utilization efficiency of the ultraviolet curing lamp can be greatly improved through the arrangement of the electric telescopic rod, the shading cylinder, the mirror reflection aluminum plate and the ultraviolet curing lamp, when a photoresist material is cured, the electric telescopic rod is started, the electric telescopic rod is started, the electric telescopic rod is started, the electric telescopic rod is started, and the ultraviolet curing lamp is started. The electric telescopic rod descends to drive the shading barrel, the mirror reflection aluminum plate and the ultraviolet curing lamp to descend, then the ultraviolet curing lamp is started, the light resistance material is cured through ultraviolet rays, the scattered ultraviolet rays are reflected by the mirror reflection aluminum plate, the ultraviolet rays are gathered to the surface of the light resistance material, and therefore the light resistance material curing efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of curing devices, in particular to a photoresist material rapid curing device. Background Art

[0002] Photoresist is a photosensitive material used to protect areas that do not need to be exposed during photolithography, thereby achieving the formation of microstructures. Photoresist can be cured by light irradiation. Photoresist is usually a polymer that can undergo a chemical reaction under the action of light, thereby changing its solubility or other physical properties. During the photolithography process, the photoresist is coated on a substrate and then selectively cured by light irradiation. During the exposure process, light is irradiated onto the photoresist, causing the photoresist to undergo a chemical reaction in the irradiated area, thereby curing. The cured photoresist can protect other areas on the substrate from being affected by subsequent etching or deposition processes. The curing process of the photoresist requires precise control of the light intensity and exposure time to ensure that the photoresist can be cured correctly.

[0003] In the prior art, after the photoresist material is coated on a substrate, the substrate is placed under an ultraviolet curing lamp to cure the photoresist material. However, in the prior art, the light utilization efficiency of the ultraviolet curing lamp is low, resulting in a long curing time for the photoresist material. In addition, the substrate is not fixed and is prone to deviation during the curing process, resulting in uneven curing of the photoresist material. Therefore, a device for rapid curing of photoresist material is proposed to address the above problems. Utility Model Content

[0004] The purpose of the utility model is to provide a device for rapidly curing photoresist materials to solve the problems raised in the above-mentioned background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A device for rapid curing of photoresist materials comprises a shell, a fixed frame is fixedly connected to the bottom inner side of the shell, a fixed block is fixedly connected to one side of the fixed frame, a return spring is fixedly connected to one side of the fixed block, a sliding rod is fixedly connected to one end of the return spring away from the fixed block, a sliding groove which passes through the inner side of the fixed frame is provided on the side of the fixed frame close to the return spring, a clamping plate is provided on the inner side of the fixed frame, a driving rod is fixedly connected to one side of the clamping plate, a handle is fixedly connected to the bottom end of the shell, and a base plate is fixedly connected to the bottom end of the base plate. A support leg is fixedly connected to the bottom end of the base plate.

[0007] Preferably, the top of the shell is fixedly connected to an electric telescopic rod that passes through the shell, the bottom of the electric telescopic rod is fixedly connected to a light-shielding tube, the inner side of the light-shielding tube is fixedly connected to a mirror-reflective aluminum plate, and the inner side of the mirror-reflective aluminum plate is fixedly connected to an ultraviolet curing lamp.

[0008] Preferably, the number of the electric telescopic rod, the light-shielding tube, the mirror-reflective aluminum plate and the ultraviolet curing lamp is three, and the ultraviolet curing lamp is fixedly connected to the middle of the inner top of the mirror-reflective aluminum plate.

[0009] Preferably, the number of the fixing frames is three, the number of the fixing blocks, the return springs and the sliding rods are twelve each, and the number of the sliding rods, the clamping plates, the sliding grooves, the driving rods and the handles are six each.

[0010] Preferably, one end of the clamping plate is fixedly connected to the sliding rod, the number of the supporting legs is four, and the supporting legs are evenly distributed at the bottom edge of the bottom plate.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. In the utility model, the light utilization efficiency of the ultraviolet curing lamp can be greatly improved by providing the electric telescopic rod, the light shielding tube, the mirror reflective aluminum plate and the ultraviolet curing lamp. When curing the photoresist material, the electric telescopic rod is started, and the electric telescopic rod descends to drive the light shielding tube, the mirror reflective aluminum plate and the ultraviolet curing lamp to descend, and then the ultraviolet curing lamp is started, and the ultraviolet rays cure the photoresist material, and the scattered ultraviolet rays are reflected by the mirror reflective aluminum plate, and the ultraviolet rays are gathered on the surface of the photoresist material, thereby greatly improving the efficiency of curing the photoresist material;

[0013] 2. In the utility model, the fixed frame, fixed block, return spring, slide rod, clamping plate, slide groove, driving rod and handle are provided, so that the substrate coated with photoresist material can be prevented from shifting during the curing process. When the substrate needs to be fixed, the handle is pulled, and the handle drives the driving rod and the clamping plate to move. At this time, the return spring is compressed, and the slide rod slides inside the slide groove. Then, the substrate is placed inside the fixed frame, and the handle is released. At this time, the return spring is reset, and the return spring drives the slide rod to slide inside the slide groove. The slide rod drives the clamping plate to clamp the substrate, thereby preventing uneven curing of the photoresist material during the curing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 For this utility model Figure 1 A schematic diagram of the structure at A;

[0016] Figure 3 This is a schematic diagram of the top view structure of the fixed frame of the utility model;

[0017] Figure 4 It is a schematic diagram of the overall structure of the fixed frame of the utility model.

[0018] In the figure: 1. shell; 2. fixed frame; 3. fixed block; 4. reset spring; 5. slide rod; 6. clamping plate; 7. slide groove; 8. drive rod; 9. handle; 10. bottom plate; 11. support leg; 12. electric telescopic rod; 13. sunshade tube; 14. mirror reflective aluminum plate; 15. ultraviolet curing lamp. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0021] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0022] See also Figure 1-4 , the utility model provides a technical solution:

[0023] A photoresist material rapid curing device comprises a shell 1, a fixed frame 2 is fixedly connected to the bottom inner side of the shell 1, a fixed block 3 is fixedly connected to one side of the fixed frame 2, a return spring 4 is fixedly connected to one side of the fixed block 3, a sliding rod 5 is fixedly connected to the end of the return spring 4 away from the fixed block 3, a sliding groove 7 which passes through the inner side of the fixed frame 2 is provided on the side of the fixed frame 2 close to the return spring 4, a clamping plate 6 is provided on the inner side of the fixed frame 2, a driving rod 8 is fixedly connected to one side of the clamping plate 6, a handle 9 is fixedly connected to the end of the driving rod 8 away from the clamping plate 6, a bottom plate 10 is fixedly connected to the bottom end of the shell 1, and a support leg 11 is fixedly connected to the bottom end of the bottom plate 10.

[0024] An electric telescopic rod 12 that runs through the shell 1 is fixedly connected to the top of the shell 1, and a light-shielding tube 13 is fixedly connected to the bottom of the electric telescopic rod 12. A mirror-reflecting aluminum plate 14 is fixedly connected to the inner side of the light-shielding tube 13, and an ultraviolet curing lamp 15 is fixedly connected to the inner side of the mirror-reflecting aluminum plate 14. There are three electric telescopic rods 12, three light-shielding tubes 13, three mirror-reflecting aluminum plates 14 and three ultraviolet curing lamps 15, and the ultraviolet curing lamp 15 is fixedly connected to the middle of the top inner side of the mirror-reflecting aluminum plate 14. There are three fixed frames 2, twelve fixed blocks 3, return springs 4 and sliding rods 5, six sliding rods 5, clamping plates 6, slide grooves 7, driving rods 8 and handles 9, and one end of the clamping plate 6 is fixedly connected to the sliding rod 5. There are four supporting legs 11, and the supporting legs 11 are evenly distributed at the bottom edge of the base plate 10.

[0025] Working process: before use, the device is powered on, and the photoresist material is first coated on the surface of the substrate. Then, the substrate is fixed inside the fixed frame (2), and the handle (9) is pulled. The handle (9) drives the driving rod (8) and the clamping plate (6) to move. At this time, the reset spring (4) is compressed, and the slide bar (5) slides inside the slide groove (7). Then, the substrate is placed inside the fixed frame (2), and the handle (9) is released. At this time, the reset spring (4) is reset, and the reset spring (4) drives the slide bar (5) to slide inside the slide groove (7). The slide bar (5) drives the clamping plate (6) The substrate is clamped to prevent uneven curing of the photoresist material during the curing process. The photoresist material is then cured and the electric telescopic rod (12) is started. The electric telescopic rod (12) descends to drive the light shielding tube (13), the mirror reflective aluminum plate (14) and the ultraviolet curing lamp (15) to descend. The ultraviolet curing lamp (15) is then started and the ultraviolet light cures the photoresist material. The scattered ultraviolet light is reflected by the mirror reflective aluminum plate (14) and is gathered onto the surface of the photoresist material, thereby greatly improving the efficiency of curing the photoresist material.

[0026] The contents not described in detail in this specification belong to the prior art known to the professional and technical personnel in this field. The standard parts used in this utility model can be purchased from the market, and the special-shaped parts can be customized according to the description and the drawings. The specific connection methods of each part adopt the conventional means such as bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt the conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0027] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for rapid curing of photoresist materials, comprising a housing (1), characterized in that: The bottom inner end of the shell (1) is fixedly connected to a fixed frame (2), one side of the fixed frame (2) is fixedly connected to a fixed block (3), one side of the fixed block (3) is fixedly connected to a return spring (4), one end of the return spring (4) away from the fixed block (3) is fixedly connected to a slide rod (5), a side of the fixed frame (2) close to the return spring (4) is provided with a slide groove (7) penetrating the inner side of the fixed frame (2), a clamping plate (6) is provided on the inner side of the fixed frame (2), one side of the clamping plate (6) is fixedly connected to a driving rod (8), and one end of the driving rod (8) away from the clamping plate (6) is fixedly connected to a handle (9), the bottom end of the shell (1) is fixedly connected to a bottom plate (10), and the bottom end of the bottom plate (10) is fixedly connected to a support leg (11).

2. A device for rapid curing of photoresist materials according to claim 1, characterized in that: The top end of the housing (1) is fixedly connected to an electric telescopic rod (12) that passes through the housing (1), the bottom end of the electric telescopic rod (12) is fixedly connected to a light shielding tube (13), the inner side of the light shielding tube (13) is fixedly connected to a mirror reflective aluminum plate (14), and the inner side of the mirror reflective aluminum plate (14) is fixedly connected to an ultraviolet curing lamp (15).

3. A device for rapid curing of photoresist materials according to claim 2, characterized in that: The number of the electric telescopic rod (12), the light shielding tube (13), the mirror-reflecting aluminum plate (14) and the ultraviolet curing lamp (15) is three, and the ultraviolet curing lamp (15) is fixedly connected to the middle of the inner top of the mirror-reflecting aluminum plate (14).

4. The device for rapid curing of photoresist materials according to claim 1, characterized in that: The number of the fixed frames (2) is three, the number of the fixed blocks (3), the return springs (4) and the slide bars (5) are twelve, and the number of the slide bars (5), the clamping plates (6), the slide grooves (7), the drive rods (8) and the handles (9) are six.

5. The device for rapid curing of photoresist materials according to claim 1, characterized in that: One end of the clamping plate (6) is fixedly connected to the sliding rod (5), and the number of the supporting legs (11) is four, and the supporting legs (11) are evenly distributed at the bottom edge of the bottom plate (10).

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