Electrode structure of low-temperature co-fired laminated piezoelectric element
By designing the electrode structure of low-temperature co-fired stacked piezoelectric elements, using multi-layer piezoelectric ceramic sheets and printed silver layer inner electrodes, the problem of high equipment requirements and low pass rate of small-sized products in the prior art is solved, and the process is simplified and the pass rate is improved.
Patent Information
- Application Number
- CN202420623625.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-28
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-03-28
AI Technical Summary
The existing low-temperature co-fired piezoelectric ceramic inner electrode connection process equipment has high requirements and complex operation. In small-sized products, the internal electrode structure is complex, resulting in low pass rate.
An electrode structure of a low-temperature co-fired stacked piezoelectric element is designed, and a stacked structure is formed using multiple piezoelectric ceramic sheets, and an electrode inside the surface printing silver layer is arranged, longitudinal and transverse positioning and cutting positions are arranged. The electrode cutting product is formed by a hot cutter, and a silver-printing layer electrode and a flange electrode are arranged on its surface and side, and finally a low-temperature silver paste layer is coated.
The stacking process is simplified, the requirements of manufacturing process equipment are reduced, processing costs are reduced, and the ease of process and qualification rate are improved.
Smart Images
Figure CN222674890U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of piezoelectric elements, in particular to an electrode structure of a low-temperature co-fired laminated piezoelectric element. Background Art
[0002] There are two basic ways to connect the internal electrodes of low-temperature co-fired piezoelectric ceramics: one is to connect by drilling, and the other is to coat an external electrode on one end surface. The first method has high requirements on the manufacturing process and requires precise equipment to achieve. The second method requires three electrodes to exist on one end surface at the same time. If the size of the piezoelectric ceramic is small, the difficulty of this method will be greatly increased.
[0003] Existing technical issues include:
[0004] 1. The equipment requirements are high. The cost of precision equipment is high, which also places higher requirements on operators and increases labor costs;
[0005] 2. Affected by the internal electrode structure, the process control requirements are relatively strict;
[0006] 3. The pass rate of smaller-sized products is limited due to the complex internal electrode structure.
[0007] Therefore, we propose an electrode structure of a low-temperature co-fired laminated piezoelectric element to solve the above-mentioned problems. Utility Model Content
[0008] The purpose of the utility model is to provide an electrode structure of a low-temperature co-fired laminated piezoelectric element to solve the problems raised in the above-mentioned background technology.
[0009] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0010] An electrode structure of a low-temperature co-fired laminated piezoelectric element, comprising a plurality of piezoelectric ceramic sheets, wherein the electrode structure is a laminated structure formed by the plurality of piezoelectric ceramic sheets, wherein the piezoelectric ceramic sheets include a first piezoelectric ceramic sheet-A, a second piezoelectric ceramic sheet-B, a third piezoelectric ceramic sheet-C and a fourth piezoelectric ceramic sheet-D;
[0011] The second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D are provided with surface-printed silver layer inner electrodes; the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D are provided with multiple groups of longitudinal positioning and cutting positions, and transverse positioning and cutting positions, and cutting paths are formed along the longitudinal positioning and cutting positions, and transverse positioning and cutting positions. The electrode cutting products are formed by cutting along the cutting paths through a hot cutting machine, and the surfaces of the electrode cutting products are provided with surface-printed silver layer electrodes and side-printed silver layer flanged electrodes, and a low-temperature silver paste layer is also provided on one side of the electrode cutting product.
[0012] As a further solution of the utility model: a group of positioning R angles are arranged on the first piezoelectric ceramic sheet-A, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D.
[0013] As a further solution of the utility model: the electrode patterns of the surface-printed silver layer inner electrode are divided into three types, namely the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D, and the positioning R angle corresponds to the direction of the electrode pattern.
[0014] As a further solution of the utility model: the stacking order from bottom to top is the second piezoelectric ceramic sheet-B, the fourth piezoelectric ceramic sheet-D, the second piezoelectric ceramic sheet-B, the fourth piezoelectric ceramic sheet-D, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C, the second piezoelectric ceramic sheet-B, and the first piezoelectric ceramic sheet-A. The front side of the first piezoelectric ceramic sheet-A is marked, all electrodes face upward, and the direction of the electrode pattern is aligned according to the positioning R angle.
[0015] As a further solution of the utility model: the silver paste used for the inner electrode of the surface printed silver layer is a silver paste with a temperature resistance of 900° C. or a silver-palladium paste with a palladium content of 5%.
[0016] As a further solution of the utility model: the end face polarization of the electrode cutting product is ① negative ② positive, the side face polarization is ① positive ③ negative, and the polarization voltage is 80V.
[0017] As a further solution of the utility model: the piezoelectric ceramic sheet is made of low-temperature co-fired piezoelectric ceramic material.
[0018] Compared with the prior art, the beneficial effects of the utility model are:
[0019] The electrode structure of the low-temperature co-fired laminated piezoelectric element adopts low-temperature co-fired piezoelectric ceramic material and designs a new internal electrode structure, which makes the lamination process simpler; the manufacturing process equipment is simplified and the processing cost is reduced; the process is easy to implement and the qualified rate is improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic structural diagram of the first piezoelectric ceramic sheet-A in the utility model.
[0021] Figure 2 It is a schematic structural diagram of the second piezoelectric ceramic sheet-B in the utility model.
[0022] Figure 3 It is a schematic structural diagram of the third piezoelectric ceramic piece-C in the utility model.
[0023] Figure 4It is a schematic structural diagram of the fourth piezoelectric ceramic piece-D in the utility model.
[0024] Figure 5 It is a schematic diagram of the explosion of the laminated sheets in the utility model.
[0025] Figure 6 It is a schematic diagram for explaining the stacking sequence of the laminated sheets in the present invention.
[0026] Figure 7 It is a schematic diagram of silk screen printing on the laminated surface in the utility model.
[0027] Figure 8 It is a partial enlarged structural schematic diagram of the cutting product in the utility model.
[0028] Fig. 9 It is a schematic structural diagram of the silver in the utility model.
[0029] Fig.10 It is a schematic diagram of the polarization structure in the utility model.
[0030] Fig.11 It is a schematic diagram of the structure of silver coating in the utility model.
[0031] Fig.12 It is a structural schematic diagram of the multilayer finished product in the utility model.
[0032] Fig.13 It is a schematic diagram of the explosion of the multilayer sheet in the utility model.
[0033] Among them: 1. Surface printed silver layer electrode; 2. Side printed silver layer flange electrode; 3. Low-temperature silver paste layer; 4. Positioning R angle; 5. Longitudinal positioning and cutting position; 6. Horizontal positioning and cutting position; 7. Surface printed silver layer inner electrode; 8. Cutting path; 9. Electrode cutting products. DETAILED DESCRIPTION
[0034] In one embodiment, Figure 1-Figure 13As shown, an electrode structure of a low-temperature co-fired laminated piezoelectric element includes a plurality of piezoelectric ceramic sheets, wherein the electrode structure is a laminated structure formed by the plurality of piezoelectric ceramic sheets, wherein the piezoelectric ceramic sheets include a first piezoelectric ceramic sheet-A, a second piezoelectric ceramic sheet-B, a third piezoelectric ceramic sheet-C and a fourth piezoelectric ceramic sheet-D; a group of positioning R angles 4 are provided on the first piezoelectric ceramic sheet-A, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D, and a surface-printed silver layer inner electrode 7 is provided on the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D; a plurality of groups of longitudinal positioning and cutting positions 5 and transverse positioning and cutting positions 6 are provided on the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D, and a cutting path 8 is formed along the longitudinal positioning and cutting position 5 and the transverse positioning and cutting position 6, and an electrode cutting product 9 (such as Figure 8-Figure 13 ), the surface of the electrode cutting product 9 is provided with a surface silver-printed layer electrode 1 and a side silver-printed layer flange electrode 2, and a low-temperature silver paste layer 3 is also provided on one side of the electrode cutting product 9;
[0035] In the utility model, low temperature co-fired piezoelectric ceramic material is adopted and a new inner electrode structure is designed to make the lamination process simpler.
[0036] The manufacturing process of an electrode structure of a low-temperature co-fired laminated piezoelectric element includes the following steps:
[0037] Step 1: tape casting; Step 2: cutting; Step 3: lamination; Step 4: primary slicing; Step 5: printing inner electrode; Step 6: lamination; Step 7: warm isostatic pressing; Step 8: printing longitudinal positioning and cutting position 5 and transverse positioning and cutting position 6; Step 9: secondary slicing; Step 10: applying isolation powder; Step 11: degumming; Step 12: firing; Step 13: edge grinding; Step 14: printing surface silver layer electrode 1; Step 15: printing side and end silver layer flange electrode 2; Step 16: firing silver; Step 17: polarization; Step 18: applying low-temperature silver paste; Step 19: testing.
[0038] In step 1, in the cast molding, the thickness of the film strip after molding is 0.035mm-0.038mm, and a layer of PET film is attached to the bottom of the film strip; in the step 2, in the cutting, the equipment used is a cutting machine, and the size of the cut piece is 220mm x 220mm; in the step 3, in the lamination, two film strips are laminated, and the working parameters are warm isostatic pressing at 60°C, 60MPa, and holding pressure for 300s;
[0039] In the first slicing of step 4, a laser cutting machine is used, and the slice size is 200mm x 200mm. After the diaphragm is cut, there is one R angle and three right angles; in the printing of the inner electrode in step 5, after tearing off one side of the PET film, the surface printed silver layer inner electrode 7 is printed on the film tape, and the electrode pattern has three types of the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D. The silver paste used is a silver paste with a temperature resistance of 900°C or a silver-palladium paste with a palladium content of 5%;
[0040] In step six lamination, the stacking order of the film strips from bottom to top is B, D, B, D, B, C, B, C, B, A, the front of the first piezoelectric ceramic sheet - A is marked, all the film strip electrodes face upward, and the electrode pattern direction is aligned according to the R angle; the PET film at the bottom of the film strip is torn off, and each layer of the film strip is hot pressed once, and the hot pressing parameters are 62°C, 5t, 1min; the above lamination and hot pressing operations are repeated; in step seven warm isostatic pressing, the laminated and hot-pressed film strips are bagged and sealed, and warm isostatic pressing is performed, and the warm isostatic pressing parameters are 60°C, 60MPa, 300s; in the step eight printing the longitudinal positioning and cutting position 5 and the transverse positioning and cutting position 6, the longitudinal positioning and cutting position 5 and the transverse positioning and cutting position 6 are printed on the front of the film block to form a cutting path 8;
[0041] In step nine, in the secondary slicing, the hot cutter is used to slice according to the cutting path 8; in the step ten, in the isolation powder application, the green sheet is coated with zirconium oxide powder with a brush, and the sheets and the pressure blocks are arranged side by side, and 5 membrane tapes are used as a stack in the sheet arrangement, and the size of the pressure block in the pressure block is larger than the size of the green sheet;
[0042] In step 11, the glue is removed in the workshop glue removal kiln; in step 12, the firing is performed according to the low-temperature material firing process; in step 13, the edge grinding is performed on the four sides of length and width, and the tolerance is ±0.05mm; in step 14, the surface silver layer electrode is printed on the front of the ceramic piece, and the surface silver layer electrode 1 is printed and dried; the silver paste uses a silver paste with a silver content of 60%, and the screen printing mesh is 230 mesh; in step 15, the side and end side silver layer flanged electrode 2 is printed, and the side silver layer flanged electrode 2 is dried after printing, and the silver The slurry uses a silver paste with a silver content of 60%, and the screen printing mesh is 230 meshes; in step 16, silver is fired in a workshop silver kiln; in step 17, polarization is performed twice, one end face polarization and one side face polarization, the end face polarization is ① negative ② positive, the side face polarization is ① positive ③ negative, and the polarization voltage is 80V; in the step 18, in the low-temperature silver paste coating, a low-temperature silver paste layer 3 is coated, the low-temperature silver paste is coated on the ② and ③ electrode corners, the ② and ③ electrodes are connected, and after the low-temperature silver paste is coated, it is dried in a 120°C oven for 30 minutes; Fig.13 The first piezoelectric ceramic piece-A is Figure 9-11 The processed top-level structure.
[0043] In the utility model, the process is easy to implement and the qualified rate is improved.
[0044] The above are only preferred specific implementation methods of the utility model, but the protection scope of the utility model is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the utility model, who makes equivalent replacements or changes based on the technical scheme and utility model concept of the utility model, should be covered by the protection scope of the utility model.
Claims
1. An electrode structure of a low-temperature co-fired laminated piezoelectric element, characterized in that: The piezoelectric ceramic sheets include a plurality of piezoelectric ceramic sheets, wherein the electrode structure is a stacked structure formed by the plurality of piezoelectric ceramic sheets, and the piezoelectric ceramic sheets include a first piezoelectric ceramic sheet-A, a second piezoelectric ceramic sheet-B, a third piezoelectric ceramic sheet-C and a fourth piezoelectric ceramic sheet-D; The second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D are provided with surface-printed silver layer inner electrodes (7); the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D are provided with a plurality of groups of longitudinal positioning and cutting positions (5) and transverse positioning and cutting positions (6), a cutting path (8) is formed along the longitudinal positioning and cutting positions (5) and the transverse positioning and cutting positions (6), and an electrode cut product (9) is formed by cutting along the cutting path (8) by a hot cutting machine, the surface of the electrode cut product (9) is provided with a surface-printed silver layer electrode (1) and a side-printed silver layer flange electrode (2), and a low-temperature silver paste layer (3) is also provided on one side of the electrode cut product (9).
2. The electrode structure of a low-temperature co-fired laminated piezoelectric element according to claim 1, characterized in that: A group of positioning R angles (4) are arranged on the first piezoelectric ceramic sheet-A, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D.
3. The electrode structure of a low-temperature co-fired laminated piezoelectric element according to claim 2, characterized in that: The electrode patterns of the surface-printed silver layer inner electrode (7) are divided into three types, namely the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C and the fourth piezoelectric ceramic sheet-D, and the positioning R angle (4) corresponds to the direction of the electrode pattern.
4. The electrode structure of a low-temperature co-fired laminated piezoelectric element according to claim 1, characterized in that: The stacking order from bottom to top is the second piezoelectric ceramic sheet-B, the fourth piezoelectric ceramic sheet-D, the second piezoelectric ceramic sheet-B, the fourth piezoelectric ceramic sheet-D, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C, the second piezoelectric ceramic sheet-B, the third piezoelectric ceramic sheet-C, the second piezoelectric ceramic sheet-B, and the first piezoelectric ceramic sheet-A. The front of the first piezoelectric ceramic sheet-A is marked, all electrodes face upward, and the direction of the electrode pattern is aligned according to the positioning R angle (4).
5. The electrode structure of a low-temperature co-fired laminated piezoelectric element according to claim 1, characterized in that: The end surface polarization of the electrode cutting product (9) is ① negative and ② positive, and the side surface polarization is ① positive and ③ negative, and the polarization voltage is 80V.
6. The electrode structure of a low-temperature co-fired laminated piezoelectric element according to claim 1, characterized in that: The piezoelectric ceramic sheet is made of low-temperature co-fired piezoelectric ceramic material.