Punching and positioning tool for diffuser

Abstract

The utility model discloses a diffuser punching and positioning tool, which belongs to the technical field of diffuser punching tools, and comprises a base, the base is provided with a positioning hole penetrating through the base, the positioning hole is used for positioning a threaded hole of a diffuser through a positioning piece, and the positioning piece fixes the base and the diffuser; the base is provided with a limiting hole used for limiting the drilling path of the drill bit, the limiting hole penetrates through the base, and the included angle beta between the central axis of the limiting hole and the central axis of the positioning hole is an acute angle. According to the inclined hole drilling machine, the drilling stroke of the drill bit can be limited through the limiting hole, inclined hole drilling of the diffuser is achieved, expensive four-axis and five-axis machine tool equipment is not needed, cost is relatively low, and operation is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of diffuser punching tooling, in particular to a diffuser punching positioning tooling. Background Art

[0002] In the manufacturing process of liquid crystal display panels, a plasma enhanced chemical vapor deposition (PECVD) process is required. The PECVD process is a method for preparing semiconductor thin film materials and other material films by ionizing them in a deposition chamber using glow discharge and then chemically depositing them on a substrate. The process enhances the activity of chemical vapor reaction substances through plasma activation, increases the surface reaction rate, and significantly reduces the film deposition temperature through high-energy ions.

[0003] In the PECVD process, the diffuser is the most important component in the plasma enhanced chemical vapor deposition chamber. Its function is to ensure that the gas flows evenly into the chamber, and as an electrode to introduce RF (radio frequency) into the chamber, it plays the role of the upper plate of a parallel plate capacitor, so that the film layer of the glass substrate is evenly distributed during the coating process. It adjusts the uniformity of the plasma by controlling the depth and size of the hole. Figure 1-3 In the diffuser structure shown, when the diffuser is placed horizontally, the holes of the diffuser include vertical holes and inclined holes. For example, a Chinese patent document with a publication number of CN216337937U discloses a chemical vapor deposition device, wherein a gas diffusion box is arranged in the diffuser, a guide plate is arranged in the gas diffusion box, and the guide plate is provided with gas guiding inclined holes.

[0004] However, after long-term use, the diffuser is prone to dust particles and performance degradation, resulting in a decline in product quality. After multiple cleaning and repairs, it needs to be remade into a new product. In the prior art, the inclined hole processing of the diffuser usually requires the use of a four-axis or five-axis machine tool for inclined hole drilling, which has high equipment costs and inconvenience in processing, and the processing efficiency is not high. Utility Model Content

[0005] The utility model aims to provide a diffuser drilling positioning tool to solve the problem that the inclined hole processing of the diffuser in the prior art usually requires the use of a four-axis or five-axis machine tool for inclined hole drilling, which has high equipment costs and inconvenient processing.

[0006] In order to achieve the above-mentioned purpose, the utility model provides a diffuser punching and positioning tool, including a base, the base is provided with a positioning hole passing through the base, the positioning hole is used to position with the threaded hole of the diffuser through a positioning piece, and the positioning piece fixes the base and the diffuser; the base is provided with a limiting hole for limiting the drilling path of the drill bit, the limiting hole is set through the base, and the angle β between the central axis of the limiting hole and the central axis of the positioning hole is set at an acute angle.

[0007] Furthermore, the angle 35°≤β≤55°.

[0008] Furthermore, a plurality of the limiting holes are provided, and the plurality of the limiting holes are symmetrically arranged about the central axis of the positioning hole.

[0009] Furthermore, a chip removal groove is provided on the side of the base that contacts the diffuser, and the chip removal groove forms a chip removal space between the base and the diffuser, and the chip removal groove is communicated with the limiting hole.

[0010] Furthermore, at least one end of the chip removal groove is provided with a notch leading to the outside of the base.

[0011] Furthermore, one or more chip removal grooves are provided, and the number of the chip removal grooves corresponds to the number of the limiting holes.

[0012] Furthermore, a plurality of the chip removal grooves are arranged around the circumference of the positioning hole, and there is a distance between the edge of the chip removal groove and the edge of the positioning hole.

[0013] Furthermore, a positioning mark is provided on at least one side surface of the base, and the length direction of the positioning mark is parallel to the center axis direction of the positioning hole.

[0014] Furthermore, the positioning mark is a groove-shaped structure, and one end of the positioning mark extends to the contact surface between the base and the diffuser.

[0015] Furthermore, the length of the positioning mark line is smaller than the length of the positioning hole.

[0016] Compared with the existing known technologies, the technical solution provided by the utility model has the following beneficial effects:

[0017] (1) The utility model provides a diffuser drilling positioning tool, in which the base is aligned with the threaded hole of the diffuser through the positioning hole, and the positioning piece fixes the base of the positioning tool to the diffuser, which is convenient for drilling. The limiting hole can limit the cutting path of the drill bit, and the angle between the center axis of the limiting hole and the center axis of the positioning hole is an acute angle. When the base is positioned and installed on the surface of the horizontally arranged diffuser, the limiting hole is inclined relative to the vertical direction, and the drill bit can drill an inclined hole in the diffuser through the inclined limiting hole. Compared with the four-axis and five-axis machine tools in the prior art, the positioning tool can complete the processing of the diffuser inclined hole in combination with a hand drill, which is relatively lower in cost and easier to operate.

[0018] (2) The utility model provides a diffuser drilling and positioning tool. The existence of the chip removal groove can form a chip removal space between the base and the diffuser. The chip removal groove is connected to the limit hole. The chip removal groove can discharge chips when the drill bit performs drilling processing. The notch of the chip removal groove leads to the outside of the base, and the chip discharge position can be specified to prevent the chips from splashing everywhere.

[0019] (3) The utility model provides a diffuser drilling positioning tool, wherein a plurality of chip grooves correspond to a plurality of limiting holes, and the chip grooves do not interfere with each other. The chips in each chip groove can be discharged independently, thereby avoiding the accumulation of chips in a single chip groove, and improving the chip removal efficiency. The plurality of chip grooves are arranged around the circumference of the positioning hole, and there is a spacing between the edge of the chip groove and the edge of the positioning hole, so that the edge of the positioning hole can directly contact the surface of the diffuser, which is beneficial to improving the stability of the positioning tool and the diffuser after installation, increasing the stability of the positioning tool during drilling, and reducing drilling errors.

[0020] (4) A diffuser punching positioning tool of the utility model has a positioning mark on the base, and the positioning mark can be aligned with the positioning mark on the diffuser to ensure accurate positioning of the positioning tool and the diffuser during installation. The positioning mark adopts a groove-shaped structure that is easy to perceive and not easy to wear. One end of the positioning mark extends to the contact surface between the base and the diffuser, and the end of the positioning mark can be as close to the positioning mark of the diffuser as possible, which can increase the alignment accuracy.

[0021] It will be apparent that elements or features described above in the context of a single embodiment may be used alone or in combination in other embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In the drawings, the sizes and proportions do not represent the sizes and proportions of actual products. The drawings are merely illustrative, and some non-essential elements or features are omitted for clarity.

[0023] Figure 1 It is a schematic diagram of the top view structure of a diffuser in the prior art;

[0024] Figure 2 yes Figure 1 The enlarged view of point B in the middle;

[0025] Figure 3 yes Figure 2 Sectional view at G-G';

[0026] Figure 4 It is a three-dimensional structural schematic diagram of the positioning tooling of the embodiment of the utility model;

[0027] Figure 5 It is a schematic diagram of the top view of the positioning tooling of an embodiment of the utility model;

[0028] Figure 6 yes Figure 5 Sectional view at A-A';

[0029] Figure 7 It is a side view of the positioning tool of the embodiment of the utility model;

[0030] Figure 8It is a bottom view of the positioning tool of the embodiment of the utility model;

[0031] Fig. 9 It is a schematic diagram of the position of the positioning marking line of an embodiment of the utility model;

[0032] Fig.10 It is a schematic diagram of the longitudinal section structure of the positioning marking line of an embodiment of the utility model.

[0033] Description of Reference Numerals

[0034] 100, base; 110, positioning hole; 120, limiting hole; 130, chip groove; 140, positioning mark. DETAILED DESCRIPTION

[0035] The present invention will be described in detail with reference to the accompanying drawings. What is described here is only a preferred embodiment of the present invention, and those skilled in the art can think of other ways to implement the present invention based on the preferred embodiment, and other ways also fall within the scope of the present invention.

[0036] Example

[0037] In existing diffusers, such as Figure 1-Figure 3 As shown, the holes of the diffuser include vertical holes and inclined holes, and the processing of the inclined holes usually requires the use of four-axis or even five-axis machine tools, which has high equipment costs and inconvenient processing.

[0038] In order to solve the problem of high cost and inconvenient processing of the oblique hole processing equipment of the diffuser, refer to Figure 4-Figure 10 The present embodiment provides a diffuser punching and positioning tool, including a base 100, the base 100 is provided with a positioning hole 110 that passes through the base 100, the positioning hole 110 is used to be positioned with the threaded hole of the diffuser through a positioning piece, the positioning piece fixes the base 100 of the positioning tool to the diffuser, maintains stability when punching the diffuser, and facilitates the punching. It should be noted that the positioning piece here is a screw or a bolt that can cooperate with the threaded hole of the diffuser. The base 100 is provided with a limiting hole 120 for limiting the drilling path of the drill bit, the limiting hole 120 is set through the base 100, and the angle β between the central axis of the limiting hole 120 and the central axis of the positioning hole 110 is set at an acute angle. The diffuser is generally arranged horizontally. When the base 100 of the positioning tool is installed on the surface of the diffuser, the positioning hole 110 is arranged vertically, and the limit hole 120 is arranged obliquely relative to the vertical direction. Under the limiting effect of the limit hole 120, the travel path of the drill bit is also inclined, and the drill bit can drill an oblique hole in the diffuser through the obliquely arranged limit hole 120. Compared with the four-axis and five-axis machine tools in the prior art, the positioning tool can complete the processing of the diffuser oblique hole with a hand drill, which is relatively lower in cost and convenient to operate.

[0039] Further, such as Figure 6 As shown, in this embodiment, the angle between the central axis of the limiting hole 120 and the central axis of the positioning hole 110 is 35°≤β≤55°, and the value of β can be 35°, 40°, 45°, 50°, 55°, among which the most preferred value is 45°. The angle designed to be 45° is more suitable for the angle of the diffuser inclined hole.

[0040] Among them, the number of the limiting holes 120 can be set to one or more. In this embodiment, two limiting holes 120 are set, and the number is consistent with the number of inclined holes on the diffuser. The two limiting holes 120 are symmetrically arranged about the central axis of the positioning hole 110. The symmetrically designed limiting holes 120 can adapt to the symmetrical inclined holes on the diffuser, which is more convenient for processing and is also conducive to structural simplification. Of course, the number of limiting holes 120 can also be three, four or even more, and the position of the limiting holes 120 can also be asymmetrically arranged, which is specifically determined according to the position and number of the inclined holes on the diffuser.

[0041] When the drill bit drills the diffuser, debris will be generated, and the debris needs to be discharged in time to avoid affecting the drilling work. Figure 4 , Figure 6 and Figure 7 A chip groove 130 is provided on the side of the base 100 that contacts the diffuser, that is, the chip groove 130 is provided on the bottom side of the base 100, and the chip groove 130 forms a chip removal space between the base 100 and the diffuser, and the chip groove 130 is connected to the limiting hole 120. When drilling an inclined hole, the drill bit extends to the surface of the diffuser through the limiting hole 120, and the chips generated by the drilling of the drill bit will be temporarily stored in the chip removal space of the chip groove 130. One end of the chip groove 130 is provided with a notch leading to the outside of the base 100, and the chips are discharged from the notch. The notch can specify the chip discharge position to prevent the chips from splashing everywhere. It should be noted that the structure of the chip groove 130 can be set in various forms. In this embodiment, please refer to Figure 4 , Figure 6 and Figure 8 The chip groove 130 is arranged on the bottom side of the base 100 , and both ends of the chip groove 130 have notches. The chip groove 130 is arranged in the front and rear directions of the base 100 , and the notches at both ends can improve the chip discharge efficiency.

[0042] Furthermore, the chip groove 130 can be provided as one, and one chip groove 130 can correspond to one limiting hole 120, or can correspond to multiple limiting holes 120. When one chip groove 130 corresponds to multiple limiting holes 120, the chip groove 130 can be designed as an annular structure surrounding the positioning hole 110, and the openings of all the limiting holes 120 are connected to the chip groove 130 of the annular structure.

[0043] On the other hand, the chip groove 130 can be provided in plurality, each chip groove 130 corresponds to the limiting hole 120 individually, and each chip groove 130 is connected to the corresponding limiting hole 120. Multiple chip grooves 130 correspond to multiple limiting holes 120, and the chip grooves 130 do not interfere with each other. The debris in each chip groove 130 can be discharged independently, avoiding the accumulation of debris in a single chip groove 130, which can improve the chip removal efficiency. Furthermore, multiple chip grooves 130 are arranged around the peripheral side of the positioning hole 110, and there is a gap between the edge of the chip groove 130 and the edge of the positioning hole 110, so that the edge of the positioning hole 110 can directly contact the surface of the diffuser, which is conducive to improving the stability of the positioning tooling and the diffuser after installation, increasing the stability of the positioning tooling during drilling, and reducing drilling errors.

[0044] In order to improve the accuracy of drilling, it is necessary to align the base 100 of the positioning tool with the diffuser. For this purpose, in this embodiment, please refer to Fig. 9 and Fig.10 , positioning markings 140 are provided on the left and right sides of the base 100, and the length direction of the positioning markings 140 is parallel to the central axis direction of the positioning hole 110. The positioning markings 140 can be aligned with the positioning marks on the diffuser to ensure accurate positioning of the positioning tooling and the diffuser during installation. At least one positioning marking 140 needs to be provided. The positioning marking 140 is a groove-shaped structure, which is easy to perceive and not easy to wear. One end of the positioning marking 140 extends to the contact surface between the base 100 and the diffuser, and the end of the positioning marking 140 can be as close to the positioning mark of the diffuser as possible, which can increase the alignment accuracy. The length of the positioning marking 140 is less than the length of the positioning hole 110, and the positioning marking 140 is arranged as a whole on the left and right sides of the base 100 close to the bottom surface of the base 100.

[0045] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "front", "rear", "left", "right", "up", "down", "top", "bottom", "inside", "outside", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0046] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0047] The protection scope of the present invention is limited only by the claims. Thanks to the teachings of the present invention, those skilled in the art will easily recognize that alternative structures to the structures disclosed in the present invention can be used as feasible alternative embodiments, and the embodiments disclosed in the present invention can be combined to generate new embodiments, which also fall within the scope of the appended claims.

Claims

1. A diffuser punching and positioning tool, comprising a base (100), characterized in that: The base (100) is provided with a positioning hole (110) that passes through the base (100), and the positioning hole (110) is used to be positioned with the threaded hole of the diffuser through a positioning piece, and the positioning piece fixes the base (100) and the diffuser; the base (100) is provided with a limiting hole (120) that is used to limit the drilling path of the drill bit, and the limiting hole (120) passes through the base (100), and the included angle β between the central axis of the limiting hole (120) and the central axis of the positioning hole (110) is set to be an acute angle.

2. A diffuser punching and positioning tool according to claim 1, characterized in that: The angle is 35°≤β≤55°.

3. The diffuser punching and positioning tool according to claim 1, characterized in that: A plurality of the limiting holes (120) are provided, and the plurality of limiting holes (120) are symmetrically arranged about the central axis of the positioning hole (110).

4. The diffuser punching and positioning tool according to claim 1, characterized in that: A chip removal groove (130) is provided on the side of the base (100) that contacts the diffuser. The chip removal groove (130) forms a chip removal space between the base (100) and the diffuser. The chip removal groove (130) is connected to the limiting hole (120).

5. A diffuser punching and positioning tool according to claim 4, characterized in that: At least one end of the chip removal groove (130) is provided with a notch leading to the outside of the base (100).

6. A diffuser punching and positioning tool according to claim 5, characterized in that: One or more chip removal grooves (130) are provided, and the number of the chip removal grooves (130) corresponds to the number of the limiting holes (120).

7. A diffuser punching and positioning tool according to claim 6, characterized in that: A plurality of the chip removal grooves (130) are arranged around the circumference of the positioning hole (110), and a distance exists between the edge of the chip removal groove (130) and the edge of the positioning hole (110).

8. The diffuser punching and positioning tool according to claim 1, characterized in that: At least one side surface of the base (100) is provided with a positioning mark line (140), and the length direction of the positioning mark line (140) is parallel to the center axis direction of the positioning hole (110).

9. A diffuser punching and positioning tool according to claim 8, characterized in that: The positioning mark (140) is a groove-shaped structure, and one end of the positioning mark (140) extends to the contact surface between the base (100) and the diffuser.

10. A diffuser punching and positioning tool according to claim 9, characterized in that: The length of the positioning mark line (140) is smaller than the length of the positioning hole (110).

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