Arc grinding and polishing equipment

Abstract

The utility model discloses arc grinding and polishing equipment which comprises a mechanical arm, a clamping assembly and an arc surface grinding assembly, the mechanical arm and the clamping assembly are located on the same plane, a gap is formed between the mechanical arm and the clamping assembly, and the arc surface grinding assembly is arranged at the end of the mechanical arm so as to control the arc surface grinding assembly to move through the mechanical arm. According to the arc grinding and polishing equipment, the mechanical arm is used for grinding the cambered surface of the stand column of the wafer boat through the cambered surface grinding assembly, the mechanical arm can finely control the cambered surface grinding assembly, and therefore secondary grinding does not need to be conducted manually; the surface of the cambered surface of the stand column of the wafer boat can be wrapped by the polishing belt through the wrapping assembly, so that more attached polishing is achieved, the polishing effect is improved, the tension of the polishing belt during wrapping can be adjusted through a constant-force air cylinder, and the polishing effect is improved. And therefore, the polishing belt is in better contact with the cambered surface of the wafer boat stand column, the polishing force is ensured to be within a proper range, and the polishing precision is improved.

Description

Technical Field

[0001] The utility model relates to the field of automation, in particular to an arc grinding and polishing device. Background Art

[0002] The wafer boat is a device used to store, transport and process wafers. Because wafers are getting thinner and more fragile, the wafer boat is to protect the wafers from damage during transportation and transfer. Usually, the wafer boat is designed to be a structure that can accommodate at least one wafer. More specifically, the wafer boat mainly contains multiple wafer placement slots, and each wafer placement slot can be used to place one wafer. The wafer boat has high precision requirements during production and processing. Both ends of the wafer boat need to be processed flat. If there is an error in the produced wafer boat, the wafer cannot be inserted into the wafer boat, or after the wafer is inserted into the wafer boat, the wafer will be cracked and scrapped due to the error in the wafer boat. According to the design requirements, the columns of the wafer boat have curved surfaces. The curved surfaces on the columns are usually initially polished by machine tools and then finely polished by manual labor. However, the labor cost of manual polishing is high, and the labor intensity of workers is high, which is difficult to meet the needs of automated processing of the wafer boat. Utility Model Content

[0003] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide an arc grinding and polishing device.

[0004] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0005] The utility model discloses an arc grinding and polishing device, comprising a mechanical arm, a clamping assembly and an arc surface grinding assembly, wherein the mechanical arm and the clamping assembly are located on the same plane with a gap therebetween, and the arc surface grinding assembly is arranged at the end of the mechanical arm so as to control the movement of the arc surface grinding assembly through the mechanical arm;

[0006] The clamping assembly includes a supporting platform, an adjustable base is provided at the top of the supporting platform, a mounting frame is provided at the top of the base, the mounting frame is used to place the crystal boat, an opening is provided on the base, and two quick clamps are provided on both sides of one end of the mounting frame.

[0007] As a preferred technical solution of the utility model, the arc surface grinding assembly includes a rotating seat and a grinding belt. The rotating seat is connected to the end of the robotic arm through a flange transmission. One end of the vertical plate of the rotating seat is provided with a driving motor, and the other end is provided with a driving wheel coaxially connected to the output shaft of the driving motor and two first driven wheels located on both sides below the driving wheel. A covering unit is provided at the bottom end of the vertical plate of the rotating seat, and the grinding belt is sleeved on the driving wheel, the first driven wheel and the covering unit.

[0008] As a preferred technical solution of the utility model, the covering unit includes a constant force cylinder, which is vertically arranged at the bottom end of the rotating seat, and its piston rod is vertically arranged downward, and a movable seat is provided on its piston rod, and a pushing cylinder is provided on the side surface of the movable seat away from the constant force cylinder, the piston rod of the pushing cylinder is vertically arranged downward, and a scissors frame is provided at the end of its piston rod, and a second driven wheel is provided on both ends of the scissors frame.

[0009] As a preferred technical solution of the utility model, it also includes a warehouse body, and the mechanical arm and the clamping assembly are arranged on the bottom wall of the warehouse body.

[0010] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0011] By using a robotic arm to grind the curved surface of the column of the crystal boat through a curved surface grinding component, the robotic arm can finely control the curved surface grinding component, thereby eliminating the need for manual secondary grinding, thereby improving the grinding efficiency; the coating component can enable the grinding belt to coat the surface of the curved surface of the column of the crystal boat, thereby achieving a closer grinding, thereby improving the grinding effect, and the constant force cylinder can adjust the tension of the grinding belt during coating, so that the grinding belt can better contact the curved surface of the crystal boat column and ensure that the grinding force is within an appropriate range, thereby improving the grinding accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0013] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0014] Figure 2 It is a schematic diagram of the warehouse structure of the utility model;

[0015] Figure 3 It is a partial structural schematic diagram of the utility model;

[0016] Figure 4 It is a state diagram of the coating unit during grinding of the utility model;

[0017] In the figure: 1. Robotic arm; 2. Clamping assembly; 21. Support platform; 22. Base; 23. Mounting frame; 24. Quick clamp; 27. Limiting plate; 28. Threaded plunger; 3. Plane grinding assembly; 31. Rotating seat; 32. Grinding belt; 33. Driving motor; 34. Driving wheel; 35. First driven wheel; 4. Coating unit; 41. Constant force cylinder; 42. Moving seat; 43. Pushing cylinder; 44. Scissor frame; 45. Second driven wheel; 5. Warehouse body; 6. Crystal boat. DETAILED DESCRIPTION

[0018] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0019] In the drawings, the same reference numerals all refer to the same components.

[0020] like Figure 1-4 As shown, the utility model provides an arc grinding and polishing device, comprising a mechanical arm 1, a clamping assembly 2 and an arc surface grinding assembly 3, the mechanical arm 1 and the clamping assembly 2 are located on the same plane, and there is a gap between them, and the arc surface grinding assembly 3 is arranged at the end of the mechanical arm 1, so that the movement of the arc surface grinding assembly 3 is controlled by the mechanical arm 1;

[0021] The clamping assembly 2 includes a supporting platform 21, the top of which is provided with an adjustable base 22, the top of which is provided with a mounting frame 23, the mounting frame 23 is used to place the crystal boat, the base 22 is provided with an opening, and two quick clamps 24 are provided on both sides of one end of the mounting frame 23.

[0022] In this embodiment, the wafer boat 6 to be polished is placed in the clamping assembly 2 for fixing, and the robot arm 1 (usually a five-axis robot arm) using the prior art is started to drive the arc surface polishing assembly 3 to polish the arc surface of the column of the fixed wafer boat 6;

[0023] The base 22 can slide on the support platform 21 for adjustment and is fixed to the support platform 21 by bolts. The mounting frame 23 is used to place the wafer boat 6 and to install other clamping tools;

[0024] The quick clamps 24 are located on both sides of one end of the mounting frame 23 . When the wafer boat 6 is placed in the mounting frame 23 , the end of the flat plate of the wafer boat 6 close to the robot arm 1 contacts the mounting frame 23 . The quick clamps 24 are pulled to fix the wafer boat 6 in the mounting frame 23 .

[0025] Furthermore, the arc surface grinding assembly 3 includes a rotating seat 31 and a grinding belt 32. The rotating seat 31 is connected to the end of the robot arm 1 through a flange transmission. One end of the vertical plate of the rotating seat 31 is provided with a driving motor 33, and the other end is provided with a driving wheel 34 coaxially connected to the output shaft of the driving motor 33 and two first driven wheels 35 located on both sides below the driving wheel 34. The bottom end of the vertical plate of the rotating seat 31 is provided with a covering unit 4, and the grinding belt 32 is sleeved on the driving wheel 34, the first driven wheel 35 and the covering unit 4.

[0026] In this embodiment, the robot arm 1 can drive the rotating seat 31 to rotate, thereby changing the angle of grinding the arc surface of the column of the crystal boat 6. The arc surface of the column of the crystal boat 6 is covered in the grinding belt 32 through the covering press 4. The driving motor 33 drives the driving wheel 34 to rotate, and cooperates with the first driven wheel 35 and the covering unit 4 to rotate the grinding belt 32 mounted thereon. The rotating grinding belt 32 grinds the arc surface of the column of the crystal boat 6.

[0027] Furthermore, the covering unit 4 includes a constant force cylinder 41, which is vertically arranged at the bottom end of a rotating seat 42, and its piston rod is arranged vertically downward, and a movable seat 42 is arranged on its piston rod, and a pushing cylinder 43 is arranged on the side surface of the movable seat 42 away from the constant force cylinder 41, and the piston rod of the pushing cylinder 43 is arranged vertically downward, and a scissor frame 44 is arranged at the end of its piston rod, and a second driven wheel 45 is arranged on both ends of the scissor frame 44.

[0028] In this embodiment, the constant force cylinder 41 is used to enable the grinding belt 32 to be maintained on the outer periphery of the driving wheel 34, the first driven wheel 35 and the second driven wheel 45. When not grinding, the grinding belt 32 is not subjected to force. At this time, the constant force cylinder 41 is not subjected to force, so the length of its piston rod is not convenient. When grinding, the robot arm 1 drives the arc surface grinding assembly 3 to move to the arc surface of the column of the crystal boat 6, and pushes the cylinder 43 to push the scissor frame 44 to open. At this time, the constant force cylinder 41 is subjected to force and its piston rod length is changed, so that the grinding belt 3 As the scissor frame 44 opens, the robot arm 1 drives the opened scissor frame 44 to move downward until the grinding belt 32 contacts the arc surface of the column of the wafer boat 6, and the arc surface of the column of the wafer boat 6 is located between the scissor frames 44, and the cylinder 43 is pushed to adjust the length of the piston rod, so that the grinding belt 32 fits the arc surface of the column of the wafer boat 6. At the same time, the constant force cylinder 41 is subjected to a force change and its piston rod length is changed, so that the grinding belt 32 can fit the arc surface of the column of the wafer boat 6, so as to perform grinding and improve the grinding accuracy.

[0029] Furthermore, it also includes a warehouse body 5, and the robot arm 1 and the clamping assembly 2 are arranged on the bottom wall of the warehouse body 5.

[0030] In this embodiment, the warehouse body 5 serves to protect the robot arm 1, the clamping assembly 2 and the surface grinding assembly 3 therein. The warehouse body 5 is provided with multiple doors and a fan for heat dissipation is provided on the top. There is also an electrical control box in the warehouse body 5 for controlling the robot arm 1 and the surface grinding assembly 3.

[0031] The utility model discloses an arc grinding and polishing device. By using a mechanical arm to grind the arc surface of the column of the crystal boat through an arc surface grinding component, the mechanical arm can finely control the arc surface grinding component, thereby eliminating the need for manual secondary grinding, thereby improving the grinding efficiency; the coating component can enable the grinding belt to coat the surface of the arc surface of the column of the crystal boat, thereby achieving a closer grinding, thereby improving the grinding effect; the constant force cylinder can adjust the tension of the grinding belt during coating, thereby making the grinding belt better contact with the arc surface of the column of the crystal boat and ensuring that the grinding force is within a suitable range, thereby improving the grinding accuracy.

[0032] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions described in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A circular arc grinding and polishing device, characterized in that: The invention comprises a mechanical arm (1), a clamping assembly (2) and a curved surface grinding assembly (3), wherein the mechanical arm (1) and the clamping assembly (2) are located on the same plane and there is a gap between them, and the curved surface grinding assembly (3) is arranged at the end of the mechanical arm (1) so that the movement of the curved surface grinding assembly (3) can be controlled by the mechanical arm (1); The clamping assembly (2) comprises a supporting platform (21), an adjustable base (22) is provided at the top of the supporting platform (21), a mounting frame (23) is provided at the top of the base (22), the mounting frame (23) is used to place a wafer boat, an opening is provided on the base (22), and two quick clamps (24) are provided on both sides of one end of the mounting frame (23).

2. The arc grinding and polishing equipment according to claim 1, characterized in that: The arc surface grinding assembly (3) comprises a rotating seat (31) and a grinding belt (32); the rotating seat (31) is connected to the end of the robot arm (1) by a flange transmission; one end of the vertical plate of the rotating seat (31) is provided with a driving motor (33); the other end is provided with a driving wheel (34) coaxially connected to the output shaft of the driving motor (33) and two first driven wheels (35) located on both sides below the driving wheel (34); the bottom end of the vertical plate of the rotating seat (31) is provided with a covering unit (4); the grinding belt (32) is sleeved on the driving wheel (34), the first driven wheel (35) and the covering unit (4).

3. The arc grinding and polishing equipment according to claim 2, characterized in that: The covering unit (4) comprises a constant force cylinder (41), the constant force cylinder (41) being vertically arranged at the bottom end of the rotating seat (31), and the piston rod of the constant force cylinder (41) being arranged vertically downward, and a movable seat (42) being arranged on the piston rod, a pushing cylinder (43) being arranged on a side surface of the movable seat (42) away from the constant force cylinder (41), the piston rod of the pushing cylinder (43) being arranged vertically downward, and a scissor frame (44) being arranged at the end of the piston rod, and second driven wheels (45) being arranged at both ends of the scissor frame (44).

4. The arc grinding and polishing equipment according to claim 1, characterized in that: It also comprises a warehouse body (5), wherein the mechanical arm (1) and the clamping assembly (2) are arranged on a bottom wall inside the warehouse body (5).

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