Plane grinding and polishing equipment

Abstract

The utility model discloses plane grinding and polishing equipment which comprises a mechanical arm, a clamping assembly and a plane grinding assembly, the mechanical arm and the clamping assembly are located on the same plane, a gap is formed between the mechanical arm and the clamping assembly, and the plane grinding assembly is arranged at the end of the mechanical arm so that the plane grinding assembly can be controlled to move through the mechanical arm. According to the plane grinding and polishing equipment, the plane of the stand column of the wafer boat is ground through the plane grinding assembly by using the mechanical arm, and the plane grinding assembly can be finely controlled by the mechanical arm, so that manual secondary grinding is not needed, and the grinding efficiency is improved; the tension adjusting unit is arranged on the plane grinding assembly, so that the grinding tension of the grinding belt can be adjusted, the grinding belt can make better contact with the plane of the wafer boat stand column, it is guaranteed that the grinding force is within a proper range, and the grinding precision is improved.

Description

Technical Field

[0001] The utility model relates to the field of automation, in particular to a plane grinding and polishing device. Background Art

[0002] The wafer boat is a device used to store, transport and process wafers. Because wafers are getting thinner and more fragile, the wafer boat is to protect the wafers from damage during transportation and transfer. Usually, the wafer boat is designed to be a structure that can accommodate at least one wafer. More specifically, the wafer boat mainly contains multiple wafer placement slots, and each wafer placement slot can be used to place one wafer. The wafer boat has high precision requirements during production and processing. Both ends of the wafer boat need to be processed flat. If there is an error in the produced wafer boat, the wafer cannot be inserted into the wafer boat, or after the wafer is inserted into the wafer boat, the wafer will be cracked and scrapped due to the error in the wafer boat. According to the design requirements, the column of the wafer boat has a plane with a certain inclination angle. The plane on the column is usually initially polished by a machine tool and then finely polished by hand. However, the labor cost of manual polishing is high, and the labor intensity of workers is high, which is difficult to meet the needs of automated processing of the wafer boat. Utility Model Content

[0003] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide a plane grinding and polishing device.

[0004] In order to solve the above technical problems, the utility model provides the following technical solutions:

[0005] The utility model discloses a plane grinding and polishing device, comprising a mechanical arm, a clamping assembly and a plane grinding assembly, wherein the mechanical arm and the clamping assembly are located on the same plane with a gap therebetween, and the plane grinding assembly is arranged at the end of the mechanical arm so as to control the movement of the plane grinding assembly through the mechanical arm;

[0006] The clamping assembly includes a supporting platform, an adjustable base is provided at the top of the supporting platform, a mounting frame is provided at the top of the base, the mounting frame is used to place the crystal boat, two clamping cylinders and two first arc clamping rods are provided on both sides of the mounting frame, the piston rod of each clamping cylinder is horizontally arranged toward the inside of the mounting frame, and the end of the piston rod is provided with a horizontal second arc clamping rod.

[0007] As a preferred technical solution of the utility model, both ends of the base are provided with limit plates, and the top of each limit plate is provided with a threaded plunger, and the ball head of the threaded plunger faces inside the mounting frame.

[0008] As a preferred technical solution of the utility model, the plane grinding assembly includes a rotating seat and a grinding belt. The rotating seat is connected to the end of the robotic arm through a flange transmission. One end of the vertical plate of the rotating seat is provided with a driving motor, and the other end is provided with a driving wheel coaxially connected to the output shaft of the driving motor and two first driven wheels located on both sides below the driving wheel. The bottom end of the vertical plate of the rotating seat is provided with a tension adjustment unit, and the grinding belt is mounted on the driving wheel, the first driven wheel and the tension adjustment unit.

[0009] As a preferred technical solution of the utility model, the tension adjustment unit includes a guide rail and a Y-shaped fork, the guide rail is vertically arranged at the bottom end of the vertical plate of the rotating seat, the Y-shaped fork is arranged at the bottom end of the movable end of the guide rail, and its fork is arranged vertically downward, the Y-shaped fork is connected to the vertical plate of the rotating seat by two springs, and each fork leg of the Y-shaped fork is provided with a second driven wheel.

[0010] As a preferred technical solution of the utility model, a vertically slidable sliding block is arranged between the two fork legs of the Y-shaped fork, and the sliding block is connected to the Y-shaped fork through a spring.

[0011] As a preferred technical solution of the utility model, it also includes a warehouse body, and the mechanical arm and the clamping assembly are arranged on the bottom wall of the warehouse body.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0013] By using a robotic arm to grind the plane of the crystal boat's column through a plane grinding assembly, the robotic arm can finely control the plane grinding assembly, thereby eliminating the need for manual secondary grinding, thereby improving the grinding efficiency; by providing a tension adjustment unit on the plane grinding assembly, the tension of the grinding belt during grinding can be adjusted, so that the grinding belt can better contact the plane of the crystal boat's column and ensure that the grinding force is within an appropriate range, thereby improving the grinding accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 It is a side view of the utility model;

[0017] Figure 3 It is a top view of the utility model;

[0018] Figure 4 It is a partial structural schematic diagram of the utility model;

[0019] Figure 5 It is a partial structural schematic diagram of the utility model;

[0020] Figure 6 It is a schematic diagram of the warehouse structure of the utility model;

[0021] In the figure: 1. Robotic arm; 2. Clamping assembly; 21. Support platform; 22. Base; 23. Mounting frame; 24. Clamping cylinder; 25. First arc clamping rod; 26. Second arc clamping rod; 27. Limiting plate; 28. Threaded plunger; 3. Plane grinding assembly; 31. Rotating seat; 32. Grinding belt; 33. Driving motor; 34. Driving wheel; 35. First driven wheel; 4. Tension adjusting unit; 41. Guide rail; 42. Y-shaped fork; 43. Second driven wheel; 44. Sliding block; 5. Warehouse; 6. Crystal boat. DETAILED DESCRIPTION

[0022] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0023] In the drawings, the same reference numerals all refer to the same components.

[0024] like Figure 1-6 As shown, the utility model provides a plane grinding and polishing equipment, including a robot arm 1, a clamping assembly 2 and a plane grinding assembly 3, the robot arm 1 and the clamping assembly 2 are located on the same plane, and there is a gap between them, and the plane grinding assembly 3 is arranged at the end of the robot arm 1 so that the movement of the plane grinding assembly 3 is controlled by the robot arm 1.

[0025] In this embodiment, the wafer boat 6 to be polished is placed in the clamping assembly 2 for fixation, and a robot arm 1 (usually a five-axis robot arm) using the prior art is started to drive the plane polishing assembly 3 to polish the plane of the column of the fixed wafer boat 6 .

[0026] Furthermore, the clamping assembly 2 includes a supporting platform 21 , an adjustable base 22 is disposed at the top of the supporting platform 21 , a mounting frame 23 is disposed at the top of the base 22 , and the mounting frame 23 is used to place the wafer boat.

[0027] In this embodiment, the base 22 can slide on the support platform 21 for adjustment and is fixed to the support platform 21 by bolts. The mounting frame 23 is used to place the wafer boat 6 and to install other clamping tools.

[0028] Furthermore, two clamping cylinders 24 and two first arc clamping rods 25 are provided on both sides of the mounting frame 23. The piston rod of each clamping cylinder 24 is horizontally arranged toward the inside of the mounting frame 23, and the end of the piston rod is provided with a horizontal second arc clamping rod 26.

[0029] In this embodiment, the clamping cylinder 24 pushes the second arc surface clamping rod 26 to cooperate with the first arc surface clamping rod 25 on the opposite side to clamp and fix the arc surface of the column of the wafer boat 6;

[0030] When in use, the two clamping cylinders 24 on one side drive the corresponding second arc clamping rod 26 to move downward toward the first arc clamping rod 25 on the other side until the second arc clamping rod 26 and the first arc clamping rod 25 clamp and fix the arc surfaces of the columns on both sides of the crystal boat 6 to fix the crystal boat 6.

[0031] Furthermore, both ends of the base 22 are provided with limit plates 27 , and the top of each limit plate 27 is provided with a threaded plunger 28 , with the ball head of the threaded plunger 28 facing the inside of the mounting frame 23 .

[0032] In this embodiment, the limiting plate 27 on the adjusting base 22 uses a threaded plunger 28 of the prior art to limit the flat plate of the wafer boat 6 in the mounting frame 23 so as to fix the wafer boat 6 .

[0033] Furthermore, the surface grinding assembly 3 includes a rotating seat 31 and a grinding belt 32. The rotating seat 31 is connected to the end of the robot arm 1 through a flange transmission. One end of the vertical plate of the rotating seat 31 is provided with a driving motor 33, and the other end is provided with a driving wheel 34 coaxially connected to the output shaft of the driving motor 33 and two first driven wheels 35 located on both sides below the driving wheel 34. The bottom end of the vertical plate of the rotating seat 31 is provided with a tension adjustment unit 4, and the grinding belt 32 is sleeved on the driving wheel 34, the first driven wheel 35 and the tension adjustment unit 4.

[0034] In this embodiment, the robot arm 1 can drive the rotating seat 31 to rotate, thereby changing the angle of grinding the plane of the column of the crystal boat 6. The driving motor 33 drives the driving wheel 34 to rotate, and cooperates with the first driven wheel 35 and the tension adjustment unit 4 to rotate the grinding belt 32 mounted thereon. The rotating grinding belt 32 grinds the plane of the column of the crystal boat 6.

[0035] Furthermore, the tension adjustment unit 4 includes a guide rail 41 and a Y-shaped fork 42. The guide rail 41 is vertically arranged at the bottom end of the vertical plate of the rotating seat 31. The Y-shaped fork 42 is arranged at the bottom end of the movable end of the guide rail 41, and its fork is arranged vertically downward. The Y-shaped fork 42 is connected to the vertical plate of the rotating seat 31 through two springs, and each fork leg of the Y-shaped fork 42 is provided with a second driven wheel 43.

[0036] In this embodiment, the tension adjustment unit 4 is used to adjust the tension when the grinding belt 32 contacts the plane of the column of the wafer boat 6, so as to avoid excessive or insufficient contact force leading to unqualified grinding;

[0037] One end of the Y-shaped fork 42 is connected to the movable end of the guide rail 41, and the grinding belt 32 is sleeved on the driven wheels 43 on the two fork legs of the Y-shaped fork 42 to facilitate the rotation of the grinding belt 32. When the tension of the grinding belt 32 changes during grinding, the extended length of the guide rail 41 will change accordingly to balance the tension of the grinding belt 32 during grinding, and the Y-shaped fork 42 and the guide rail 41 are reset by the spring between the Y-shaped fork 42 and the guide rail 41;

[0038] The guide rail 41 is a cross roller guide rail.

[0039] Furthermore, a vertically slidable sliding block 44 is provided between the two fork legs of the Y-shaped fork 42 , and the sliding block 44 is connected to the Y-shaped fork 42 via a spring.

[0040] In this embodiment, the sliding block 44 has protrusions on both sides, which are adapted to the sliding groove between the two fork legs of the Y-shaped fork 42. The sliding block 44 can slide between the two fork legs of the Y-shaped fork 42 and is connected to the Y-shaped fork 42 through a spring to play a role in tension adjustment.

[0041] Furthermore, it also includes a warehouse body 5, and the robot arm 1 and the clamping assembly 2 are arranged on the bottom wall of the warehouse body 5.

[0042] In this embodiment, the warehouse body 5 serves to protect the robot arm 1, the clamping assembly 2 and the surface grinding assembly 3 therein. The warehouse body 5 is provided with multiple doors and a fan for heat dissipation is provided on the top. There is also an electrical control box in the warehouse body 5 for controlling the robot arm 1 and the surface grinding assembly 3.

[0043] The utility model discloses a plane grinding and polishing device. By using a mechanical arm to grind the plane of the column of the crystal boat through a plane grinding component, the mechanical arm can finely control the plane grinding component, thereby eliminating the need for manual secondary grinding, thereby improving the grinding efficiency; by arranging a tension adjustment unit on the plane grinding component, the tension of the grinding belt during grinding can be adjusted, thereby making the grinding belt better contact with the plane of the column of the crystal boat and ensuring that the grinding force is within an appropriate range, thereby improving the grinding accuracy.

[0044] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions described in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A surface grinding and polishing device, characterized in that: The invention comprises a mechanical arm (1), a clamping assembly (2) and a plane grinding assembly (3), wherein the mechanical arm (1) and the clamping assembly (2) are located on the same plane with a gap between them, and the plane grinding assembly (3) is arranged at the end of the mechanical arm (1) so that the movement of the plane grinding assembly (3) can be controlled by the mechanical arm (1); The clamping assembly (2) comprises a support platform (21), the top of the support platform (21) is provided with an adjustable base (22), the top of the base (22) is provided with a mounting frame (23), the mounting frame (23) is used to place the wafer boat, two clamping cylinders (24) and two first arc clamping rods (25) are provided on both sides of the mounting frame (23), the piston rod of each clamping cylinder (24) is horizontally arranged toward the inside of the mounting frame (23), and the end of the piston rod is provided with a horizontal second arc clamping rod (26).

2. A surface grinding and polishing equipment according to claim 1, characterized in that: Limiting plates (27) are provided at both ends of the base (22), and a threaded plunger (28) is provided on the top of each of the limiting plates (27), with the ball head of the threaded plunger (28) facing the inside of the mounting frame (23).

3. A surface grinding and polishing equipment according to claim 1, characterized in that: The plane grinding assembly (3) comprises a rotating seat (31) and a grinding belt (32); the rotating seat (31) is connected to the end of the mechanical arm (1) by a flange transmission; one end of the vertical plate of the rotating seat (31) is provided with a driving motor (33); the other end is provided with a driving wheel (34) coaxially connected to the output shaft of the driving motor (33) and two first driven wheels (35) located on both sides below the driving wheel (34); the bottom end of the vertical plate of the rotating seat (31) is provided with a tension adjustment unit (4); the grinding belt (32) is sleeved on the driving wheel (34), the first driven wheel (35) and the tension adjustment unit (4).

4. A surface grinding and polishing equipment according to claim 3, characterized in that: The tension adjustment unit (4) comprises a guide rail (41) and a Y-shaped fork (42); the guide rail (41) is vertically arranged at the bottom end of the vertical plate of the rotating seat (31); the Y-shaped fork (42) is arranged at the bottom end of the movable end of the guide rail (41), and its fork is arranged vertically downward; the Y-shaped fork (42) is connected to the vertical plate of the rotating seat (31) via two springs; and each fork leg of the Y-shaped fork (42) is provided with a second driven wheel (43).

5. A surface grinding and polishing device according to claim 4, characterized in that: A vertically slidable sliding block (44) is provided between the two fork legs of the Y-shaped fork (42); the sliding block (44) is connected to the Y-shaped fork (42) via a spring.

6. A surface grinding and polishing device according to any one of claims 1 to 5, characterized in that: It also comprises a warehouse body (5), wherein the mechanical arm (1) and the clamping assembly (2) are arranged on a bottom wall inside the warehouse body (5).

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