Processing device for head and tail materials and sample piece of silicon rod

Abstract

The utility model relates to a processing device for a head material, a tail material and a sample piece of a silicon rod, which comprises an end part supporting mechanism, and the end part supporting mechanism comprises a head material and tail material supporting unit and a sample piece supporting unit. And the head and tail material supporting unit can support conical head and tail materials of the silicon rods. The sample supporting unit is arranged above the head and tail supporting unit and can move between a first position and a second position. When the sample sheet supporting unit is located at the first position, the sample sheet supporting unit can keep away from the cutting positions of the head material, the tail material and the sample sheet on the silicon rod. And when the sample supporting unit is located at the second position, the sample supporting unit can clamp the peripheral wall of the horizontally oriented sample formed by cutting. The device has the beneficial effects that the head and tail material supporting unit supports the conical head and tail materials in the silicon rod, so that deflection is avoided when the head and tail materials are cut. The sample sheet supporting unit can clamp the peripheral wall of the sample sheet formed by cutting, so that the sample sheet is prevented from inclining in the process of separating the head and tail materials and the whole sample sheet from the flat-end silicon rod.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon rod processing, in particular to a processing device for the head, tail and sample of a silicon rod. Background Art

[0002] Due to the limitations of the crystal pulling process, the head and tail ends of the silicon rod formed by pulling are both conical, and the middle part is cylindrical. Therefore, the head and tail of the silicon rod need to be cut off later to meet the requirements of the effective diameter, and a round piece needs to be cut off from the end of the silicon rod after the head and tail are cut off as a sample for CO content detection. At present, in the process of processing silicon rods, the staff generally use pads to support the head and tail materials before and after cutting and the samples after cutting to avoid the head and tail materials and samples from being skewed, but this process requires a lot of manual intervention. Therefore, there is an urgent need for a mechanism that can mechanically support the head and tail materials and samples. Utility Model Content

[0003] 1. Technical issues to be resolved

[0004] In view of the above-mentioned shortcomings and deficiencies of the prior art, the utility model provides a processing device for the head, tail and sample of a silicon rod, which solves the technical problem of lack of a mechanical mechanism to support the head, tail and sample during silicon rod processing.

[0005] (II) Technical solution

[0006] In order to achieve the above-mentioned purpose, the main technical solutions adopted by the utility model include:

[0007] In a first aspect, the utility model provides a processing device for silicon rod head and tail materials and sample pieces, the processing device comprises an end support mechanism, the end support mechanism comprises a head and tail material support unit and a sample piece support unit;

[0008] The head and tail material support unit can support the tapered head and tail materials of the silicon rod;

[0009] The sample piece support unit is movably disposed above the head and tail material support unit between a first position and a second position;

[0010] When the sample support unit is in the first position, the sample support unit can avoid the head and tail materials on the silicon rod and the cutting position of the sample; when the sample support unit is in the second position, the sample support unit can clamp the peripheral wall of the horizontally oriented sample formed by cutting.

[0011] According to the utility model, the sample support unit includes two clamping components that can move toward or away from each other;

[0012] Each of the clamping assemblies comprises a clamping arm and a clamping member, wherein the clamping member is horizontally oriented and arranged on the clamping arm;

[0013] The two clamping arms can drive the corresponding clamping members to move toward each other until the two clamping members are clamped on both sides of the peripheral wall of the sample.

[0014] According to the utility model, the clamping member includes a sleeve, a telescopic rod, an elastic member and a needle body;

[0015] The sleeve is fixed on the clamping arm in a horizontal orientation, and the sleeve has a cavity;

[0016] The telescopic rod is inserted into the sleeve so as to be horizontally movable relative to the sleeve and the two are coaxially arranged, a first limit block is arranged on the outer peripheral wall of the telescopic rod, and a second limit block is arranged on the inner peripheral wall of the sleeve;

[0017] The elastic member is sleeved on the outer circumference of the telescopic rod, the elastic member is located in the cavity, and two ends of the elastic member are pressed against the first limit block and the second limit block respectively;

[0018] The end of the telescopic rod extending out of the sleeve is coaxially provided with the needle body, and the needle body is used to press against the peripheral wall of the sample piece.

[0019] According to the utility model, the number of the clamping members of each clamping assembly is multiple, and the multiple clamping members are arranged on the clamping arm at intervals up and down.

[0020] According to the utility model, at least one of the clamping assemblies further comprises a separation member disposed on the clamping arm;

[0021] The separation member is provided with an air blowing port for blowing air;

[0022] When the sample piece supporting unit is clamped on the peripheral wall of the cut sample piece, the separating piece is used to blow air toward the connecting gaps at both ends of the sample piece.

[0023] According to the utility model, the end support mechanism also includes a base and a sliding frame;

[0024] The head and tail material support unit is fixed on the base, and the sliding frame can be slidably mounted on the base along the length direction of the base;

[0025] The two clamping assemblies are arranged on both sides of the sliding frame in the width direction so as to be movable toward or away from each other along the width direction of the sliding frame, and the sliding frame can drive the two clamping assemblies to move to the first position and the second position along the length direction of the base.

[0026] According to the utility model, the sample support unit also includes a first drive motor, a first lead screw and two nuts;

[0027] The main body of the first driving motor is fixed on the sliding frame, and the driving end of the first driving motor is fixedly connected to the first lead screw;

[0028] The first lead screw is parallel to the width direction of the sliding frame and is rotatably connected to the sliding frame, and both ends of the first lead screw are provided with reverse threads;

[0029] The two nuts are respectively threadedly connected to the two ends of the first lead screw, and the two nuts are fixedly connected to the corresponding clamping arms.

[0030] According to the utility model, the end support mechanism further includes a transverse movement mechanism, and the transverse movement mechanism includes a plurality of synchronous pulleys, a synchronous belt, two second lead screws and a second drive motor;

[0031] The plurality of synchronous pulleys are arranged at intervals along the width direction of the base and are rotatably connected to the base; the synchronous belt is sleeved on the plurality of synchronous pulleys, and the two synchronous pulleys located at the two ends of the base in the width direction are fixedly connected to the corresponding second lead screw;

[0032] The two second lead screws are parallel to the length direction of the base and are rotatably connected to the two sides of the base in the width direction; the two second lead screws are respectively threadedly connected to the two sides of the sliding frame in the width direction;

[0033] The main body of the second driving motor is fixed on the base, and the driving end of the second driving motor is drivingly connected to one of the synchronous pulleys.

[0034] According to the utility model, the head and tail material support unit includes a vertical support member and a plurality of lateral support units;

[0035] The vertical support member is vertically oriented and can be raised and lowered relative to the base.

[0036] A plurality of lateral support units are arranged at intervals along the length direction of the base, and each of the lateral support units includes two lateral support members located on both sides of the vertical support member, and the upper ends of the two lateral support members are inclined toward a direction approaching each other and can be lifted and lowered along their own axes;

[0037] The end surface of the vertical support member is provided with an inclined surface, and the inclined surface is used to support the conical surface of the horizontally oriented head and tail materials; the lateral support member is used to support the conical surface of the horizontally oriented head and tail materials and the conical surface of the head and tail materials that are vertically oriented after being separated from the sample piece.

[0038] According to the utility model, it also includes a support table, a sample material unloading mechanism and a head and tail material unloading mechanism;

[0039] The end support mechanism is arranged on the support platform and can be horizontally moved along the length direction of the support platform;

[0040] The sample unloading mechanism is arranged on the support platform through a first manipulator, and the sample unloading mechanism is provided with a suction cup capable of being adsorbed on the end surface of the sample under negative pressure to drive the sample unloading;

[0041] The head and tail material unloading mechanism is arranged on the support table by a second manipulator, and the head and tail material unloading mechanism includes two plates that can move toward or away from each other; the plates are vertically oriented, and the lower part of each of the plates is provided with a plurality of sockets spaced along the length direction so that the plate can be inserted between adjacent lateral support members, and the two plates can move toward each other and be clamped on both sides of the circumference of the vertically oriented head and tail materials to drive the head and tail materials to be unloaded.

[0042] (III) Beneficial effects

[0043] The beneficial effects of the utility model are as follows: when the processing device for the head and tail materials and samples provided by the utility model is used, the conical head and tail materials in the silicon rod are first supported by the head and tail material support unit to avoid skew when cutting the head and tail materials and affecting the cutting accuracy. At the same time, the sample support unit is in a first position that can avoid the cutting position of the head and tail materials and the sample on the silicon rod to avoid affecting the cutting. When the head and tail materials and the sample are cut, the sample support unit is in a second position, which can clamp the surrounding wall of the sample formed by the cutting to avoid the sample from being skewed in the subsequent process of separating the head and tail materials and the sample as a whole from the flat-end silicon rod, which affects the cutting accuracy of the sample. Therefore, the processing device for the head and tail materials and the sample can mechanically support the head and tail materials and the sample, replace manual labor, and save labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a three-dimensional schematic diagram of the processing device of the head and tail materials and the sample pieces of the utility model;

[0045] Figure 2 for Figure 1 Schematic diagram from another perspective;

[0046] Figure 3 for Figure 1 Side view of

[0047] Figure 4 It is a perspective view when the head and tail material supporting unit supports the head and tail materials and the sample piece supporting unit clamps the sample piece;

[0048] Figure 5 A perspective view of the sample blanking mechanism being adsorbed on the end face of the sample;

[0049] Figure 6 A perspective view of the head and tail material unloading mechanism clamping the head and tail materials;

[0050] Figure 7 It is a schematic diagram of the clamping piece clamping the sample;

[0051] Figure 8 Schematic diagram of the structure of silicon rod.

[0052] [Description of Reference Numerals]

[0053] 1: end support mechanism; 11: head and tail material support unit; 111: vertical support member; 1111: inclined plane; 112: lateral support unit; 1121: lateral support member; 12: sample support unit; 121: clamping assembly; 1211: clamping arm; 1212: clamping member; 12121: sleeve; 121211: second limit block; 12122: telescopic rod; 121221: first limit block; 12123: elastic member; 12124: needle body; 1213: separation member; 122: first drive motor; 13: base; 14: sliding frame; 15: transverse movement mechanism; 151: synchronous pulley; 152: synchronous belt; 153: second lead screw; 154: second drive motor;

[0054] 2: Sample unloading mechanism;

[0055] 3: head and tail material unloading mechanism; 31: plate body; 311: socket;

[0056] 4: silicon rod; 41: flat-end silicon rod; 42: head and tail materials and samples; 421: head and tail materials; 422: samples. DETAILED DESCRIPTION

[0057] In order to better explain the present invention and facilitate understanding, the present invention is described in detail below in conjunction with the accompanying drawings through specific implementation methods. Figure 1 The orientation is used as a reference.

[0058] Example 1

[0059] See also Figure 1-7 The head and tail ends of the silicon rod 4 formed by crystal pulling are tapered, which does not meet the diameter requirement. Therefore, the tapered head and tail material 421 needs to be cut off, and then a sample 422 with a thickness of about 2 mm is cut from the end of the silicon rod 4 after the head and tail material 421 is removed for CO content detection. After the head and tail material 421 and the sample 422 are removed from the silicon rod 4, a flat-end silicon rod 41 is formed.

[0060] In the above-mentioned processing scenario of the silicon rod 4, an embodiment of the utility model proposes a processing device for the head and tail materials and samples of the silicon rod, including an end support mechanism 1 for supporting the head and tail materials 421 and the sample 531, so as to prevent the head and tail materials 421 and the sample 531 from being skewed and affecting the cutting accuracy of the head and tail materials 421 and the cutting accuracy of the sample 531.

[0061] The head and tail material support unit 11 can support the tapered head and tail material 421. The sample support unit 12 can be movably arranged above the head and tail material support unit 11 between a first position and a second position. When the sample support unit 12 is at the first position, the sample support unit 12 can avoid the cutting position of the head and tail material and the sample 42 on the silicon rod 4. When the sample support unit 12 is at the second position, the sample support unit 12 can clamp the peripheral wall of the horizontally oriented sample 422 formed by cutting.

[0062] When in use, the conical head and tail material 421 of the silicon rod 4 is first supported by the head and tail material support unit 11 to avoid skewing when cutting the head and tail material 421 and affecting the cutting accuracy. At the same time, the sample support unit 12 is in the first position that can avoid the cutting position of the head and tail material and the sample 42 on the silicon rod 4 to avoid affecting the cutting. When the head and tail material 421 and the sample 422 are cut, the sample support unit 12 is in the second position, which can clamp the surrounding wall of the sample 422 formed by the cutting to avoid the sample 422 from being skewed during the subsequent separation of the head and tail material and the sample 42 as a whole from the flat-end silicon rod 41, affecting the cutting accuracy of the sample 422. Therefore, the processing device for the head and tail material and the sample can mechanically support the head and tail material and the sample 42, replacing manual labor, reducing labor intensity and support accuracy.

[0063] Furthermore, the sample support unit 12 includes two clamping assemblies 121 that can move toward or away from each other.

[0064] Each clamping assembly 121 includes a clamping arm 1211 and a clamping member 1212, and the clamping member 1212 is horizontally disposed on the clamping arm 1211. The two clamping arms 1211 can drive the corresponding clamping members 1212 to move toward each other until the two clamping members 1212 clamp on both sides of the peripheral wall of the horizontally oriented sample 422.

[0065] Specifically, the clamping member 1212 is elastically connected to the clamping arm 1211 horizontally to elastically clamp the samples 422 of different diameters. The clamping member 1212 is specifically arranged as follows: the clamping member 1212 includes a sleeve 12121, a telescopic rod 12122, an elastic member 12123 and a needle body 12124.

[0066] The sleeve 12121 is fixed on the clamping arm 1211 in a horizontal orientation, and the sleeve 12121 has a cavity. The telescopic rod 12122 is inserted into the sleeve 12121 so as to be horizontally movable relative to the sleeve 12121, and the two are coaxially arranged. A first limit block 121221 is arranged on the outer peripheral wall of the telescopic rod 12122, and a second limit block 121211 is arranged on the inner peripheral wall of the sleeve 12121. An elastic member 12123 is sleeved on the outer periphery of the telescopic rod 12122, and the elastic member 12123 is located in the cavity, and the two ends of the elastic member 12123 are respectively pressed against the first limit block 121221 and the second limit block 121211. A needle body 12124 is coaxially arranged at the end of the telescopic rod 12122 extending out of the sleeve 12121, and the needle body 12124 is used to press against the peripheral wall of the sample 422.

[0067] When in use, the two clamping arms 1211 can drive the corresponding clamping parts 1212 to move toward each other until the needle body 12124 on the two clamping parts 1212 is pressed against the peripheral wall of the sample 422, and the needle body 12124 drives the telescopic rod 12122 to move horizontally relative to the sleeve 12121, and the telescopic rod 12122 drives the elastic part 12123 to contract, so that the elastic part 12123 elastically supports the needle body 12124 to stably clamp the peripheral wall of the sample 422 with different diameters.

[0068] Preferably, each clamping assembly 121 has multiple clamping members 1212, which are arranged on the clamping arm 1211 at intervals up and down, so that the multiple clamping members 1212 can be clamped on the upper and lower sides of the peripheral wall of the sample 422 to improve the clamping stability.

[0069] Furthermore, at least one clamping assembly 121 further includes a separating piece 1213 disposed on the clamping arm 1211. The separating piece 1213 is provided with a blowing port for blowing air, and is used to blow air toward the connecting gaps at both ends of the sample piece 422.

[0070] When in use, when the sample support unit 12 is clamped on the peripheral wall of the horizontally oriented sample 422, the separator 1213 can blow air into the connecting gaps at both ends of the sample 422 to remove the coolant or cutting fluid adhered to the connecting gaps between the two ends of the sample 422 and the head and tail materials 421 and the flat-end silicon rod 41, thereby facilitating the subsequent separation of the flat-end silicon rod 41, the sample 422 and the head and tail materials 421.

[0071] Specifically, the separation element 1213 is connected to the air pump through an air pipe, and the air pump supplies air to the blowing port of the separation element 1213.

[0072] Preferably, there are two separating members 1213 , and the two separating members 1213 are respectively arranged on opposite surfaces of the two clamping arms 1211 .

[0073] Furthermore, the end support mechanism 1 also includes a base 13 and a sliding frame 14 .

[0074] The head and tail material support unit 11 is fixed on the base 13, and the sliding frame 14 can be slidably mounted above the base 13 along the length direction of the base 13. The two clamping assemblies 121 can be movably arranged on both sides of the width direction of the sliding frame 14 toward or away from each other along the width direction of the sliding frame 14, and the sliding frame 14 can drive the two clamping assemblies 121 to move to the first position and the second position along the length direction of the base 13.

[0075] Specifically, the sample support unit 12 further includes a clamping drive mechanism for driving the two clamping assemblies 121 to move toward or away from each other. The clamping drive mechanism includes a first drive motor 122, a first lead screw and two nuts.

[0076] The main body of the first drive motor 122 is fixed on the sliding frame 14, and the driving end of the first drive motor 122 is fixedly connected to the first lead screw. The first lead screw is parallel to the width direction of the sliding frame 14 and is rotatably connected to the sliding frame 14. The two ends of the first lead screw are provided with reverse threads. Two nuts are respectively threadedly connected to the two ends of the first lead screw, and the two nuts are fixedly connected to the corresponding clamping arms 1211.

[0077] When in use, the first drive motor drives the first screw to rotate, and the first screw drives the two clamping arms 1211 to move toward or away from each other along the width direction of the sliding frame 14 through two nuts, so as to drive the clamping members 1212 on the two clamping arms 1211 to clamp or loosen the peripheral wall of the sample 422.

[0078] More specifically, the first lead screw is rotatably connected to the sliding frame 14 via a bearing.

[0079] More specifically, a slide rail parallel to the width direction of the slide rail 14 is disposed on the top of the slide frame 14 , and the clamping arm 1211 is slidably disposed on the slide rail through a slider to improve the movement accuracy of the clamping arm 1211 .

[0080] Furthermore, the end support mechanism 1 further comprises a transverse movement mechanism 15 for driving the sliding frame 14 to move along the length direction of the base 13. The transverse movement mechanism 15 comprises a plurality of synchronous pulleys 151, a synchronous belt 152, two second lead screws 153 and a second drive motor 154.

[0081] A plurality of synchronous pulleys 151 are arranged at intervals along the width direction of the base 13 and are rotatably connected to the base 13. A synchronous belt 152 is sleeved on the plurality of synchronous pulleys 151, and two synchronous pulleys 151 located at both ends of the width direction of the base 13 are fixedly connected to the corresponding second lead screws 153. The two second lead screws 153 are parallel to the length direction of the base 13 and are rotatably connected to both sides of the width direction of the base 13. The two second lead screws 153 are respectively threadedly connected to both sides of the width direction of the sliding frame 14. The main body of the second drive motor 154 is fixed to the base 13, and the driving end of the second drive motor 154 is drivingly connected to one of the synchronous pulleys 151.

[0082] When in use, the second drive motor 154 drives one of the synchronous pulleys 151 to rotate, and the synchronous pulley 151 drives the other synchronous pulleys 151 to rotate synchronously through the synchronous belt 152, and the two synchronous pulleys 151 drive the corresponding second lead screws 153 to rotate, and the two second lead screws 153 synchronously drive the sliding frame 14 to move along the length direction of the base 13, so that the sliding frame 14 drives the two clamping assemblies 121 to move between the first position and the second position. When the two clamping assemblies 121 move to the second position, the clamping drive mechanism drives the two clamping assemblies 121 to move toward each other to clamp the two sides of the peripheral wall of the horizontally oriented sample 422.

[0083] Furthermore, the head and tail material supporting unit 11 includes a vertical supporting member 111 and a plurality of lateral supporting units 112 .

[0084] The vertical support member 111 is oriented vertically and can be raised and lowered relative to the base 13. A plurality of lateral support units 112 are arranged at intervals along the length direction of the base 13, and each lateral support unit 112 includes two lateral support members 1121 located on both sides of the vertical support member 111, and the upper ends of the two lateral support members 1121 are inclined toward a direction approaching each other and can be raised and lowered along their own axes.

[0085] The end surface of the vertical support member 111 is provided with an inclined surface 1111, which is used to support the conical surface of the horizontally oriented head and tail material 421. The lateral support unit 112 is used to support the conical surface of the horizontally oriented head and tail material 421 and the conical surface of the vertically oriented head and tail material 421 after separation from the sample piece 422.

[0086] The vertical support member 111 and the lateral support members 1121 located on both sides of the vertical support member 111 can stably support the lower conical surface of the horizontally oriented head and tail material 421. At the same time, through the telescopic adjustment of the vertical support member 111 and the lateral support unit 112, it can be suitable for supporting the conical surface of the head and tail material 421 with different diameters. Furthermore, the lateral support members 1121 with two rows and multiple columns formed by the multiple lateral support units 112 can stably support the two sides of the conical surface of the head and tail material 421 that has fallen due to gravity after being separated from the sample piece 422.

[0087] Specifically, the vertical support member 111 and the lateral support member 1121 are both cylinders, the cylinder body of the cylinder is fixed on the base 13, and the piston end surface of the cylinder is used to support the head and tail material 421.

[0088] Example 2

[0089] This embodiment is a further arrangement based on the embodiment 1. The processing device for processing the head and tail materials and samples of silicon rods further includes a support table, a sample unloading mechanism 2 and a head and tail material unloading mechanism 3.

[0090] The end support mechanism 1 is disposed on the support platform and can be horizontally moved along the length direction of the support platform to support the head and tail materials 421 and the sample pieces 422 of the silicon rods 4 of different lengths.

[0091] The sample unloading mechanism 2 is arranged on the support platform through the first manipulator, and the sample unloading mechanism 2 is provided with a suction cup which can be adsorbed on the end surface of the sample 422 under negative pressure to drive the sample 422 to be unloaded.

[0092] The head and tail material unloading mechanism 3 is arranged on the support platform by the second manipulator, and the head and tail material unloading mechanism 3 comprises two plates 31 that can move toward or away from each other. The plates 31 are oriented vertically, and a plurality of sockets 311 are arranged at intervals along the length direction at the lower part of each plate 31, so that the plate 31 can be inserted between adjacent lateral support members 1121, and the two plates 31 can move toward each other and clamp on both sides of the circumference of the vertically oriented head and tail materials 421 to drive the head and tail materials 421 to unload.

[0093] Specifically, the operating principle of the processing device for the head and tail materials of silicon rods and samples is as follows:

[0094] S1: After the end support mechanism 1 moves along the length direction of the support platform to the position of the head and tail material support unit (11) corresponding to the head and tail material 421 on the silicon rod 4, the vertical support member 111 and the lateral support unit 112 rise along their respective axes and support the lower conical surface of the horizontally oriented head and tail material 421 to support the head and tail material 421 to avoid tilting during cutting. At the same time, the sample support unit 12 is in the first position that can avoid the cutting position of the head and tail material and the sample 42 on the silicon rod 4.

[0095] S2: After the cutting of the head and tail materials 421 and the sample pieces 422 is completed, the sample piece support unit 12 moves along the length direction of the base to the second position, and the two clamping assemblies 121 move toward each other and clamp on both sides of the peripheral wall of the cut sample piece 422.

[0096] S3: The separator 1213 blows air toward the connection gaps at both ends of the sample 422 to remove the coolant or cutting fluid adhering to the connection gaps between the two ends of the sample 422 and the head and tail materials 421 and the flat-end silicon rod 41.

[0097] S4: The end support mechanism 1 drives the head and tail material 421 and the sample 422 to move as a whole along the length direction of the support platform and separate from the flat-end silicon rod 41. In this process, the head and tail material support unit (11) supports the lower conical surface of the head and tail material 421 and the sample support unit 12 clamps the two sides of the peripheral wall of the sample 422 to prevent the head and tail material 421 and the sample 422 from being skewed.

[0098] S5: After the suction cup of the sample unloading mechanism 2 is negatively pressured to the end surface of the sample 422 , the two clamping assemblies 121 move away from each other to release the sample 422 , and the first manipulator drives the sample unloading mechanism 2 to unload the sample 422 .

[0099] S6: After the head and tail materials 421 and the sample pieces 422 are separated, the vertical support member 111 and the lateral support unit 112 descend along their respective axes, and the head and tail materials 421 lose support and fall down, becoming vertically oriented with the bottom arc surface supported on the lateral support unit 112.

[0100] S7: The sample support unit 12 moves along the length direction of the base 13 to the first position to avoid the head and tail material unloading mechanism 3. The head and tail material unloading mechanism 3 is inserted into the gap between the plurality of lateral support members 1121 and clamped on both sides of the head and tail material 421 oriented vertically, and the head and tail material unloading mechanism 3 is driven by the second manipulator to unload the head and tail material 421.

[0101] Specifically, the sample unloading mechanism 2 also includes a negative pressure device, which is connected to the suction cup through an air pipe. The negative pressure device can absorb gas and form a vacuum chamber between the suction cup and the end face of the sample 422, so that the suction cup is adsorbed on the end face of the sample 422.

[0102] Specifically, the head and tail material unloading mechanism 3 also includes a clamping drive mechanism for driving the two plates 31 to move toward or away from each other.

[0103] Optionally, the clamping drive mechanism includes a driving motor, a lead screw and two nuts. The main body of the driving motor is fixed on the second manipulator, the driving end of the driving motor is fixedly connected to the lead screw, the lead screw is rotatably connected to the second manipulator through a bearing, and the two nuts are respectively sleeved on the reverse threads at both ends of the lead screw. The two nuts are fixedly connected to the corresponding plate body 31.

[0104] The driving motor drives the lead screw to rotate, and the lead screw drives the two plates 31 to move toward or away from each other through two nuts.

[0105] Specifically, the first manipulator and the second manipulator are both arranged on the support platform and are movable along the length direction of the support platform through a slide rail and slider mechanism.

[0106] In the present utility model, unless otherwise clearly specified and limited, when a first feature is “on” or “below” a second feature, it may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above”, “above” or “above” a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it may simply mean that the first feature is higher in level than the second feature. When a first feature is “below”, “below” or “below” a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it may simply mean that the first feature is lower in level than the second feature.

[0107] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0108] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are illustrative and cannot be understood as limitations of the present invention. Ordinary technicians in the field can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A processing device for silicon rod head, tail and sample, characterized in that: The processing device comprises an end support mechanism (1), and the end support mechanism (1) comprises a head and tail material support unit (11) and a sample piece support unit (12); The head and tail material support unit (11) is capable of supporting the tapered head and tail materials (421) of the silicon rod (4); The sample piece support unit (12) is arranged above the head and tail material support unit (11) so as to be movable between a first position and a second position; When the sample support unit (12) is in a first position, the sample support unit (12) can avoid the head and tail materials on the silicon rod (4) and the cutting position of the sample (42); when the sample support unit (12) is in a second position, the sample support unit (12) can clamp the peripheral wall of the horizontally oriented sample (422) formed by cutting.

2. The processing device for silicon rod head, tail and sample according to claim 1, characterized in that: The sample support unit (12) comprises two clamping components (121) that can move toward or away from each other; Each of the clamping assemblies (121) comprises a clamping arm (1211) and a clamping member (1212), wherein the clamping member (1212) is horizontally oriented and arranged on the clamping arm (1211); The two clamping arms (1211) can drive the corresponding clamping members (1212) to move towards each other until the two clamping members (1212) are clamped on both sides of the peripheral wall of the sample (422).

3. The processing device for silicon rod head, tail and sample according to claim 2, characterized in that: The clamping member (1212) comprises a sleeve (12121), a telescopic rod (12122), an elastic member (12123) and a needle body (12124); The sleeve (12121) is fixed on the clamping arm (1211) in a horizontal orientation, and the sleeve (12121) is provided with a cavity; The telescopic rod (12122) is inserted into the sleeve (12121) so as to be horizontally movable relative to the sleeve (12121) and the two are coaxially arranged; a first limit block (121221) is arranged on the outer peripheral wall of the telescopic rod (12122), and a second limit block (121211) is arranged on the inner peripheral wall of the sleeve (12121); The elastic member (12123) is sleeved on the outer circumference of the telescopic rod (12122), the elastic member (12123) is located in the cavity, and two ends of the elastic member (12123) are respectively pressed against the first limit block (121221) and the second limit block (121211); The end of the telescopic rod (12122) extending out of the sleeve (12121) is coaxially provided with the needle body (12124), and the needle body (12124) is used to press against the peripheral wall of the sample piece (422).

4. The processing device for silicon rod head, tail and sample according to claim 2, characterized in that: The number of the clamping members (1212) of each clamping assembly (121) is multiple, and the multiple clamping members (1212) are arranged on the clamping arm (1211) at intervals in the upper and lower directions.

5. The processing device for silicon rod head, tail and sample pieces according to claim 2, characterized in that: At least one of the clamping assemblies (121) further comprises a separation piece (1213) disposed on the clamping arm (1211); The separating piece (1213) is provided with an air blowing port for blowing air; When the sample support unit (12) is clamped on the peripheral wall of the cut sample (422), the separation piece (1213) is used to blow air into the connecting gaps at both ends of the sample (422).

6. The processing device for silicon rod head, tail and sample pieces according to claim 2, characterized in that: The end support mechanism (1) further comprises a base (13) and a sliding frame (14); The head and tail material support unit (11) is fixed on the base (13), and the sliding frame (14) is slidably mounted on the base (13) along the length direction of the base (13); The two clamping assemblies (121) are arranged on both sides of the width direction of the sliding frame (14) so ​​as to be movable toward or away from each other along the width direction of the sliding frame (14), and the sliding frame (14) can drive the two clamping assemblies (121) to move along the length direction of the base (13) to the first position and the second position.

7. The processing device for silicon rod head, tail and sample pieces according to claim 6, characterized in that: The sample support unit (12) also includes a first drive motor (122), a first lead screw and two nuts; The main body of the first drive motor (122) is fixed on the sliding frame (14), and the driving end of the first drive motor (122) is fixedly connected to the first lead screw; The first lead screw is parallel to the width direction of the sliding frame (14) and is rotatably connected to the sliding frame (14), and both ends of the first lead screw are provided with reverse threads; The two nuts are respectively threadedly connected to the two ends of the first lead screw, and the two nuts are fixedly connected to the corresponding clamping arms (1211).

8. The processing device for silicon rod head, tail and sample pieces according to claim 6, characterized in that: The end support mechanism (1) further comprises a transverse movement mechanism (15), wherein the transverse movement mechanism (15) comprises a plurality of synchronous pulleys (151), a synchronous belt (152), two second lead screws (153) and a second drive motor (154); A plurality of synchronous pulleys (151) are arranged at intervals along the width direction of the base (13) and are rotatably connected to the base (13); the synchronous belt (152) is sleeved on the plurality of synchronous pulleys (151), and two of the synchronous pulleys (151) located at both ends of the base (13) in the width direction are fixedly connected to the corresponding second lead screw (153); The two second lead screws (153) are parallel to the length direction of the base (13) and are rotatably connected to two sides of the base (13) in the width direction; the two second lead screws (153) are respectively threadedly connected to two sides of the sliding frame (14) in the width direction; The main body of the second drive motor (154) is fixed on the base (13), and the driving end of the second drive motor (154) is drivingly connected to one of the synchronous pulleys (151).

9. The processing device for silicon rod head, tail and sample pieces according to claim 6, characterized in that: The head and tail material support unit (11) comprises a vertical support member (111) and a plurality of lateral support units (112); The vertical support member (111) is oriented vertically and is arranged on the base (13) so as to be able to be raised and lowered relative to the base (13); A plurality of the lateral support units (112) are arranged at intervals along the length direction of the base (13); each of the lateral support units (112) comprises two lateral support members (1121) located on both sides of the vertical support member (111); the upper ends of the two lateral support members (1121) are inclined in a direction approaching each other and can be lifted and lowered along their own axes; The end surface of the vertical support member (111) is provided with an inclined surface (1111), and the inclined surface (1111) is used to support the conical surface of the horizontally oriented head and tail materials (421); the lateral support member (1121) is used to support the conical surface of the horizontally oriented head and tail materials (421) and the conical surface of the vertically oriented head and tail materials (421) after being separated from the sample piece (422).

10. The processing device for silicon rod head, tail and sample pieces according to claim 9, characterized in that: It also includes a support platform, a sample unloading mechanism (2) and a head and tail material unloading mechanism (3); The end support mechanism (1) is arranged on the support platform and can be horizontally moved along the length direction of the support platform; The sample unloading mechanism (2) is arranged on the support platform through a first manipulator, and the sample unloading mechanism (2) is provided with a suction cup capable of being negatively pressured and adsorbed on the end surface of the sample (422) to drive the sample (422) to be unloaded; The head and tail material unloading mechanism (3) is arranged on the support platform by a second manipulator, and the head and tail material unloading mechanism (3) comprises two plates (31) that can move toward or away from each other; the plates (31) are vertically oriented, and the lower part of each of the plates (31) is provided with a plurality of sockets (411) at intervals along the length direction so that the plate (31) can be inserted between adjacent lateral support members (1121), and the two plates (31) can move toward each other and be clamped on both sides of the circumference of the vertically oriented head and tail materials (421) to drive the head and tail materials (421) to be unloaded.

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