Silicon wafer packaging equipment

Abstract

The utility model provides silicon wafer packaging equipment which comprises a second machine frame, a flower basket feeding mechanism is arranged on the second machine frame, the flower basket feeding mechanism comprises a flower basket feeding device and a flower basket lifting device, and the flower basket lifting device is arranged at the bottom of the second machine frame. A flower basket feeding device is arranged on the second rack at the top of the flower basket lifting device; a flower basket loading mechanism is arranged on the flower basket lifting device; the flower basket loading mechanism comprises more than one layer of silicon wafer loading discs which are stacked upwards, and a conveying interval capable of accommodating the flower basket feeding device is arranged in the center of each silicon wafer loading disc; by arranging the basket lifting device, after a silicon wafer packaging box is conveyed to the basket loading mechanism through the basket feeding device, the basket lifting device drives the basket loading mechanism to move upwards by the height of a silicon wafer loading disc, so that silicon wafers are quickly conveyed by moving the basket loading mechanism upwards layer by layer, and the conveying efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer flower baskets, in particular to silicon wafer packaging equipment. Background Art

[0002] As a silicon wafer loading device, the flower basket plays an important role in the transportation and packaging of silicon wafers. During the silicon wafer packaging process, the silicon wafers need to be placed in the flower basket for stacking to achieve packaging. However, the existing silicon wafers are transported to the flower basket by a conveyor belt, which makes it impossible to reliably introduce the silicon wafers into the flower basket.

[0003] For example, a patent document with Chinese patent application number 202022225009.6 and announcement date 2021.05.14 discloses a silicon wafer loading and unloading machine, which includes a frame, a silicon wafer basket, a basket feeding horizontal transmission mechanism, a basket discharging horizontal transmission mechanism, a silicon wafer horizontal transmission mechanism, a silicon wafer unloading mechanism, a basket lifting mechanism, a basket pressing mechanism, and a basket horizontal transmission mechanism. The frame is equipped with a basket feeding horizontal transmission mechanism, a basket discharging horizontal transmission mechanism, a silicon wafer horizontal transmission mechanism, a silicon wafer unloading mechanism, and a basket lifting mechanism. The sliding seat of the basket lifting mechanism is equipped with a basket pressing mechanism and a basket horizontal transmission mechanism for positioning the silicon wafer basket. The utility model moves the basket horizontally at different heights through the basket feeding horizontal transmission mechanism and the basket discharging horizontal transmission mechanism. The basket is lifted and lowered by the basket lifting mechanism. The silicon wafers are placed one by one on the silicon wafer horizontal transmission mechanism through the silicon wafer unloading mechanism for movement. The present application improves the efficiency of loading and moving the silicon wafers in the basket.

[0004] However, in the prior art of the above structure, the silicon wafers are first transported through a conveyor belt, and then the flower basket is aligned with the silicon wafers on the conveyor belt, and then the silicon wafers on the conveyor belt are made to fall into the flower basket through the thrust of the conveyor belt. During this process, the silicon wafers are prone to not falling into the flower basket accurately. Utility Model Content

[0005] The utility model provides a silicon wafer packaging device, which ensures high silicon wafer conveying efficiency and stable conveying.

[0006] To achieve the above-mentioned purpose, the technical scheme of the utility model is: a silicon wafer packaging equipment, comprising a second frame, on which a basket feeding mechanism is arranged, the basket feeding mechanism comprises a basket feeding device and a basket lifting device, the basket lifting device is arranged at the bottom of the second frame; a basket feeding device is arranged on the second frame on the top of the basket lifting device; a basket loading mechanism is arranged on the basket lifting device; the basket loading mechanism comprises more than one layer of silicon wafer loading trays stacked upward, the edge of the silicon wafer loading tray protrudes toward the center of the basket loading mechanism, a conveying section capable of accommodating the basket feeding device is formed at the outer edge of the silicon wafer loading tray, the discharge end of the basket feeding device extends into the conveying area, and the width of the discharge end of the basket feeding device is less than or equal to the width of the conveying section, the basket feeding device conveys the silicon wafer packaging box to the silicon wafer loading tray through the conveying section, and the bottom of the edge of the silicon wafer packaging box on the discharge end of the basket feeding device is in contact with the silicon wafer loading tray.

[0007] The beneficial effects of the above structure are as follows: by setting up a flower basket lifting device, a silicon wafer packaging box can be conveyed to the flower basket loading mechanism through the flower basket feeding device. Since each layer of the flower basket loading mechanism is provided with a silicon wafer loading tray, and the outer edge of the silicon wafer loading tray forms a conveying interval, the discharge end of the flower basket feeding device extends into the conveying interval, and at the same time, the bottom edge of the silicon wafer packaging box on the flower basket feeding device is in contact with the silicon wafer loading tray, so that the flower basket lifting device drives the flower basket loading mechanism to move upward by the height of the silicon wafer loading tray. Since the silicon wafer packaging box on the upper layer is supported by the silicon wafer loading tray, the flower basket feeding device The part extending into the conveying interval moves from the conveying interval to the corresponding silicon wafer loading tray of the silicon wafer packaging box of the next layer, thereby moving upward layer by layer, thereby enabling rapid conveying of the silicon wafers. This is because the discharge end of the flower basket feeding device extends into the conveying interval, so that the silicon wafer packaging box can reliably fit with the silicon wafer loading tray to realize conveying the silicon wafers to the flower basket loading mechanism, thereby improving the reliability of loading. At the same time, the discharge end of the flower basket feeding device is correspondingly arranged in the conveying interval, so that automatic loading can be realized without moving the flower basket loading mechanism when the flower basket loading mechanism is raised and lowered, thereby improving the loading efficiency.

[0008] Furthermore, the flower basket lifting device includes a flower basket lifting base, a flower basket lifting motor, a flower basket lifting guide rail, a flower basket lifting rack, a flower basket lifting gear and a first conveying assembly. A flower basket lifting guide rail is provided on the second frame, and a flower basket lifting rack is provided on the second frame between the flower basket lifting guide rails. The flower basket lifting base is slidably arranged on the flower basket lifting guide rail, a flower basket lifting motor is provided below the flower basket lifting base, a flower basket lifting gear is provided on the driving shaft of the flower basket lifting motor, the flower basket lifting gear is meshed with the flower basket lifting rack, and a first conveying assembly is provided on the flower basket lifting base; the feeding end of the first conveying assembly corresponds to the flower basket feeding device.

[0009] The above arrangement drives the lifting base to rise by the lifting motor, so that the basket loading mechanism can always position the empty silicon wafer loading tray to correspond to the first conveying assembly, thereby facilitating the conveyance of the silicon wafer packaging box, and the structure is simple and reliable.

[0010] Furthermore, the first conveying assembly includes a first conveying motor, a first conveying connecting shaft, a first conveying driving wheel, a first conveying driven wheel, a first conveying belt and a first conveying base, the first conveying base is arranged on a flower basket lifting base, the first conveying driving wheel is arranged on both sides of one end of the first conveying base, a first conveying connecting shaft is arranged between the first conveying driving wheels on both sides of the first conveying base, first conveying driven wheels are arranged on both sides of the other end of the first conveying base, a first conveying belt is wound between the first conveying driving wheel and the first conveying driven wheel, a first conveying motor is arranged on the flower basket lifting base on one side of the first conveying base, a driving shaft of the first conveying motor is connected to the first conveying driving wheel located on one side of the first conveying base, and a flower basket loading mechanism is placed on the first conveying belt.

[0011] In the above arrangement, the first conveying motor drives the first conveying driving wheel to rotate, thereby driving the first conveying belt to rotate, thereby driving the basket loading mechanism to move through the first conveying belt to facilitate the loading of silicon wafer packaging boxes.

[0012] Furthermore, a basket adjustment assembly is provided on both sides of the basket lifting base, and the basket adjustment assembly includes a basket adjustment substrate, a basket adjustment cylinder and a basket adjustment plate. The basket adjustment substrate is provided on both sides of the basket lifting base, the basket adjustment cylinder is provided on the basket adjustment substrate, and the basket adjustment plate is provided on the piston rod of the basket adjustment cylinder, and the basket adjustment plate is in contact with and connected to the basket loading mechanism. The position of the basket loading mechanism can be adjusted by providing the basket adjustment assembly, so that the basket loading mechanism corresponds to the basket feeding device, which is convenient for loading the silicon wafer packaging box.

[0013] Furthermore, the basket loading mechanism further comprises a basket loading substrate and a basket loading rack, wherein the basket loading rack is arranged on the basket loading substrate, and the basket loading rack is provided with more than one layer of silicon wafer loading trays stacked upward, and the basket feeding device conveys silicon wafer packaging boxes to the silicon wafer loading trays. The stacked silicon wafer loading trays enable more silicon wafer packaging boxes to be loaded without taking up too much space.

[0014] Furthermore, the flower basket feeding device includes a flower basket feeding module and a second conveying assembly, the second conveying assembly includes a second conveying base, a second conveying motor, a second conveying connecting shaft, a second conveying driving belt, a second conveying driving wheel, a second conveying driven wheel, a second conveying driving pulley, a second conveying driven pulley and a second conveying belt, the flower basket feeding module is arranged above the second frame, a second conveying base is arranged on the second frame between the flower basket feeding module and the first conveying assembly, a second conveying motor is arranged on the second conveying base, and the second conveying driving pulley is arranged at one end of the second conveying base On both sides of the second conveying base, second conveying driven pulleys are provided on both sides of the other end, a second conveying belt is wound between the second conveying driving pulley and the second conveying driven pulley, a second conveying connecting shaft is provided between the second conveying driving pulleys on both sides of the second conveying base, a second conveying driven wheel is provided on the second conveying connecting shaft, a second conveying driving wheel is provided on the driving shaft of the second conveying motor, a second conveying driving belt is wound between the second conveying driving wheel and the second conveying driven wheel, the feeding end of the second conveying belt corresponds to the flower basket feeding module, and the discharging end of the second conveying belt corresponds to the first conveying component.

[0015] The above arrangement drives the second conveying connecting shaft to rotate through the second conveying motor, thereby driving the second conveying driving pulley to rotate and driving the second conveying belt to rotate, thereby driving the silicon wafer packaging box to be transported to the silicon wafer loading tray through the second conveying belt. The structure is simple and reliable.

[0016] Furthermore, a conveying limit assembly is provided on the second frame on both sides of the feeding end of the second conveyor belt, and the conveying limit assembly includes a conveying limit base, a conveying limit cylinder and a conveying limit plate, the conveying limit base is provided on the second frame, the conveying limit base is provided with a conveying limit cylinder, the conveying limit plate is provided on the piston rod of the conveying limit cylinder, and the conveying limit plate is extended along the length direction of the second conveyor belt. Through the provision of the conveying limit assembly, the position of the silicon wafer packaging box can be adjusted, so that the position of the silicon wafer packaging box corresponds to the position of the basket loading mechanism, thereby facilitating loading. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the flower basket loading device of the present utility model.

[0018] Figure 2 It is a structural schematic diagram of the flower basket loading mechanism of the utility model.

[0019] Figure 3 It is an exploded schematic diagram of the flower basket lifting device of the utility model.

[0020] Figure 4 It is a structural schematic diagram of the first conveying assembly of the utility model.

[0021] Figure 5 for Figure 3 Enlarged view of point A in the middle.

[0022] Figure 6 It is a structural schematic diagram of the second conveying assembly of the utility model.

[0023] Figure 7 It is a structural schematic diagram of the conveying limit assembly of the utility model. DETAILED DESCRIPTION

[0024] The utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0025] like Figures 1 to 7 As shown, a silicon wafer packaging device comprises a second frame 2, on which a flower basket feeding mechanism is provided, the flower basket feeding mechanism comprises a flower basket feeding device 5 and a flower basket lifting device 6, the flower basket lifting device 6 is arranged at the bottom of the second frame 2; a flower basket feeding device 5 is provided on the second frame 2 at the top of the flower basket lifting device 6; and a flower basket loading mechanism is provided on the flower basket lifting device.

[0026] like Figure 2 As shown, the flower basket loading mechanism 01 includes more than one layer of silicon wafer loading trays 011 stacked upward, and a conveying section 012 capable of accommodating a flower basket feeding device 5 is provided in the center of the silicon wafer loading tray 011. The flower basket feeding device 5 conveys the silicon wafer packaging box to the silicon wafer loading tray 011 through the conveying section 012; the discharge end of the flower basket feeding device 5 extends into the conveying area 012, and the width of the discharge end of the flower basket feeding device 5 is less than or equal to the width of the conveying section 012. The flower basket feeding device 5 conveys the silicon wafer packaging box 02 to the silicon wafer loading tray 011 through the conveying section 012, and the bottom of the edge of the silicon wafer packaging box 02 on the discharge end of the flower basket feeding device 5 is in contact with the silicon wafer loading tray 011.

[0027] like Figure 2 As shown, the flower basket loading mechanism 01 also includes a flower basket loading substrate 013 and a flower basket loading rack 014, the flower basket loading rack 014 is arranged on the flower basket loading substrate 013, and more than one layer of silicon wafer loading trays 011 stacked upward are arranged on the flower basket loading rack 014, the flower basket feeding device 5 conveys the silicon wafer packaging box to the silicon wafer loading tray 011, the silicon wafer loading tray 011 includes a silicon wafer loading plate 0111, the silicon wafer loading plate 0111 is a U-shaped plate, the U-shaped plate surrounds a conveying section 012, and a step portion 0112 is arranged on the silicon wafer loading plate 0111 corresponding to the edge of the silicon wafer packaging box 02.

[0028] The stacked silicon wafer loading trays 011 enable more silicon wafer packaging boxes to be loaded without taking up too much space.

[0029] like Figure 3 As shown, the flower basket lifting device 6 includes a flower basket lifting base 61, a flower basket lifting motor 62, a flower basket lifting guide rail 63, a flower basket lifting rack 64, a flower basket lifting gear 65 and a first conveying assembly 66. The flower basket lifting guide rail 63 is provided on the second frame 2, and the flower basket lifting rack 64 is provided on the second frame 2 between the flower basket lifting guide rails 63. The flower basket lifting base 61 is slidably arranged on the flower basket lifting guide rail 63, and a flower basket lifting motor 62 is provided below the flower basket lifting base 61. A flower basket lifting gear 65 is provided on the driving shaft of the flower basket lifting motor 62. The flower basket lifting gear 65 is meshed with the flower basket lifting rack 64, and a first conveying assembly 66 is provided on the flower basket lifting base 61; the feeding end of the first conveying assembly 66 corresponds to the flower basket feeding device 5.

[0030] The above arrangement drives the lifting base to rise by the lifting motor, so that the basket loading mechanism can always correspond the position of the silicon wafer loading plate of the hole to the first conveying component, thereby facilitating the conveyance of the silicon wafer packaging box, and the structure is simple and reliable.

[0031] like Figure 3 and Figure 4 As shown, the first conveying assembly 66 includes a first conveying motor 661, a first conveying connecting shaft 662, a first conveying driving wheel 663, a first conveying driven wheel 664, a first conveying belt 665 and a first conveying base 666. The first conveying base 666 is arranged on the flower basket lifting base 61. The first conveying driving wheels 663 are arranged on both sides of one end of the first conveying base 666. A first conveying connecting shaft 662 is arranged between the first conveying driving wheels 663 on both sides of the first conveying base 666. First conveying driven wheels 664 are arranged on both sides of the other end of the first conveying base 666. A first conveying belt 665 is wound between the first conveying driving wheel 663 and the first conveying driven wheel 664. A first conveying motor 661 is arranged on the flower basket lifting base 61 on one side of the first conveying base 666. The driving shaft of the first conveying motor 661 is connected to the first conveying driving wheel 663 located on one side of the first conveying base 666. A flower basket loading mechanism 01 is placed on the first conveying belt 665.

[0032] In the above arrangement, the first conveying motor drives the first conveying driving wheel to rotate, thereby driving the first conveying belt to rotate, thereby driving the basket loading mechanism to move through the first conveying belt to facilitate the loading of silicon wafer packaging boxes.

[0033] like Figure 3 and Figure 5As shown, a basket adjustment assembly 67 is also provided on both sides of the basket lifting base 61, and the basket adjustment assembly 67 includes a basket adjustment substrate 671, a basket adjustment cylinder 672 and a basket adjustment plate 673. The basket adjustment substrate 671 is provided on both sides of the basket lifting base 61, a basket adjustment cylinder 672 is provided on the basket adjustment substrate 671, and a basket adjustment plate 673 is provided on the piston rod of the basket adjustment cylinder 672, and the basket adjustment plate 673 is in contact with and connected to the basket loading mechanism 01. The position of the basket loading mechanism 01 can be adjusted by providing the basket adjustment assembly 67, so that the basket loading mechanism 01 corresponds to the basket feeding device 5, which is convenient for loading the silicon wafer packaging box.

[0034] like Figure 1 and Figure 6 As shown, the flower basket feeding device 5 includes a flower basket feeding module 51 and a second conveying assembly 52, the second conveying assembly 52 includes a second conveying base 521, a second conveying motor 522, a second conveying connecting shaft 523, a second conveying driving belt 524, a second conveying driving wheel 525, a second conveying driven wheel 526, a second conveying driving pulley 527, a second conveying driven pulley 528 and a second conveying belt 529, the flower basket feeding module 51 is arranged above the second frame 2, the second conveying base 521 is arranged on the second frame 2 between the flower basket feeding module 51 and the first conveying assembly 66, the second conveying motor 522 is arranged on the second conveying base 521, and the second conveying driving pulley 527 is arranged at one end of the second conveying base 521 On both sides of the second conveying base 521, second conveying driven pulleys 528 are provided on both sides of the other end, a second conveying belt 529 is wound between the second conveying driving pulley 527 and the second conveying driven pulley 528, a second conveying connecting shaft 523 is provided between the second conveying driving pulleys 527 on both sides of the second conveying base 521, a second conveying driven wheel 526 is provided on the second conveying connecting shaft 523, a second conveying driving wheel 525 is provided on the driving shaft of the second conveying motor 522, a second conveying driving belt 524 is wound between the second conveying driving wheel 525 and the second conveying driven wheel 526, the feeding end of the second conveying belt 529 corresponds to the flower basket feeding module 51, and the discharging end of the second conveying belt 529 corresponds to the first conveying assembly 66. In this embodiment, the flower basket feeding module is a device that drives the conveyor belt to rotate by a motor to drive the goods to move, which is a prior art and will not be described here.

[0035] The above arrangement drives the second conveying connecting shaft to rotate through the second conveying motor, thereby driving the second conveying driving pulley to rotate and driving the second conveying belt to rotate, thereby driving the silicon wafer packaging box to be transported to the silicon wafer loading tray through the second conveying belt. The structure is simple and reliable.

[0036] like Figure 7As shown, a conveying limit assembly 53 is provided on the second frame 2 on both sides of the feeding end of the second conveying belt 529, and the conveying limit assembly 53 includes a conveying limit base 531, a conveying limit cylinder 532 and a conveying limit plate 533. The conveying limit base 531 is provided on the second frame 2, and a conveying limit cylinder 532 is provided on the conveying limit base 531. The conveying limit plate 533 is provided on the piston rod of the conveying limit cylinder 532, and the conveying limit plate 533 is extended along the length direction of the second conveying belt 529. Through the provision of the conveying limit assembly 53, the position of the silicon wafer packaging box can be adjusted, so that the position of the silicon wafer packaging box corresponds to the position of the basket loading mechanism, thereby facilitating loading.

[0037] The beneficial effects of the utility model are as follows: by setting up a flower basket lifting device, a silicon wafer packaging box can be conveyed to the flower basket loading mechanism through the flower basket feeding device. Since each layer of the flower basket loading mechanism is provided with a silicon wafer loading tray, and the outer edge of the silicon wafer loading tray forms a conveying interval, the discharge end of the flower basket feeding device extends into the conveying interval, and at the same time, the bottom edge of the silicon wafer packaging box on the flower basket feeding device fits with the silicon wafer loading tray, so that the flower basket lifting device drives the flower basket loading mechanism to move upward by the height of the silicon wafer loading tray. Since the silicon wafer packaging box on the upper layer is supported by the silicon wafer loading tray, the flower basket feeding device can be lifted up to the height of the silicon wafer loading tray. The part of the device extending into the conveying interval moves from the conveying interval to the corresponding silicon wafer loading tray corresponding to the silicon wafer packaging box of the next layer, thereby moving upward layer by layer, thereby enabling rapid conveying of the silicon wafers. This is because the discharge end of the flower basket feeding device extends into the conveying interval, so that the silicon wafer packaging box can reliably fit with the silicon wafer loading tray to realize conveying the silicon wafers into the flower basket loading mechanism, thereby improving the reliability of loading. At the same time, the discharge end of the flower basket feeding device is correspondingly arranged in the conveying interval, so that automatic loading can be achieved without moving the flower basket loading mechanism when the flower basket loading mechanism is raised and lowered, thereby improving the loading efficiency.

Claims

1. A silicon wafer packaging device, comprising a second frame, characterized in that: A basket feeding mechanism is provided on the second frame, the basket feeding mechanism includes a basket feeding device and a basket lifting device, the basket lifting device is arranged at the bottom of the second frame; a basket feeding device is provided on the second frame on the top of the basket lifting device; a basket loading mechanism is provided on the basket lifting device; the basket loading mechanism includes more than one layer of silicon wafer loading trays stacked upward, the edges of the silicon wafer loading trays protrude toward the center of the basket loading mechanism, a conveying section capable of accommodating the basket feeding device is formed at the outer edge of the silicon wafer loading tray, the discharging end of the basket feeding device extends into the conveying area, and the width of the discharging end of the basket feeding device is less than or equal to the width of the conveying section, the basket feeding device conveys the silicon wafer packaging box to the silicon wafer loading tray through the conveying section, and the bottom of the edge of the silicon wafer packaging box on the discharging end of the basket feeding device is in contact with the silicon wafer loading tray.

2. The silicon wafer packaging equipment according to claim 1, characterized in that: The flower basket lifting device includes a flower basket lifting base, a flower basket lifting motor, a flower basket lifting guide rail, a flower basket lifting rack, a flower basket lifting gear and a first conveying assembly. The flower basket lifting guide rail is provided on the second frame, and a flower basket lifting rack is provided on the second frame between the flower basket lifting guide rails. The flower basket lifting base is slidably arranged on the flower basket lifting guide rail, a flower basket lifting motor is provided below the flower basket lifting base, a flower basket lifting gear is provided on the driving shaft of the flower basket lifting motor, the flower basket lifting gear is meshed with the flower basket lifting rack, and a first conveying assembly is provided on the flower basket lifting base; the feeding end of the first conveying assembly corresponds to the flower basket feeding device.

3. The silicon wafer packaging equipment according to claim 2, characterized in that: The first conveying assembly includes a first conveying motor, a first conveying connecting shaft, a first conveying driving wheel, a first conveying driven wheel, a first conveying belt and a first conveying base. The first conveying base is arranged on a flower basket lifting base. The first conveying driving wheel is arranged on both sides of one end of the first conveying base. A first conveying connecting shaft is arranged between the first conveying driving wheels on both sides of the first conveying base. First conveying driven wheels are arranged on both sides of the other end of the first conveying base. A first conveying belt is wound between the first conveying driving wheel and the first conveying driven wheel. A first conveying motor is arranged on the flower basket lifting base on one side of the first conveying base. The driving shaft of the first conveying motor is connected to the first conveying driving wheel located on one side of the first conveying base. A flower basket loading mechanism is placed on the first conveying belt.

4. The silicon wafer packaging equipment according to claim 2, characterized in that: A flower basket adjustment assembly is also provided on both sides of the flower basket lifting base, and the flower basket adjustment assembly includes a flower basket adjustment substrate, a flower basket adjustment cylinder and a flower basket adjustment plate. The flower basket adjustment substrate is arranged on both sides of the flower basket lifting base, a flower basket adjustment cylinder is arranged on the flower basket adjustment substrate, and a flower basket adjustment plate is arranged on the piston rod of the flower basket adjustment cylinder, and the flower basket adjustment plate is in contact with and connected to the flower basket loading mechanism.

5. The silicon wafer packaging equipment according to claim 4, characterized in that: The flower basket loading mechanism also includes a flower basket loading substrate and a flower basket loading frame. The flower basket loading frame is arranged on the flower basket loading substrate. More than one layer of silicon wafer loading trays are stacked upward on the flower basket loading frame. The flower basket feeding device transports the silicon wafer packaging box to the silicon wafer loading tray.

6. The silicon wafer packaging equipment according to claim 5, characterized in that: The flower basket feeding device comprises a flower basket feeding module and a second conveying assembly, wherein the second conveying assembly comprises a second conveying base, a second conveying motor, a second conveying connecting shaft, a second conveying driving belt, a second conveying driving wheel, a second conveying driven wheel, a second conveying driving pulley, a second conveying driven pulley and a second conveying belt, wherein the flower basket feeding module is arranged above the second frame, a second conveying base is arranged on the second frame between the flower basket feeding module and the first conveying assembly, a second conveying motor is arranged on the second conveying base, the second conveying driving pulley is arranged on both sides of one end of the second conveying base, a second conveying driven pulley is arranged on both sides of the other end of the second conveying base, a second conveying belt is wound between the second conveying driving pulley and the second conveying driven pulley, a second conveying connecting shaft is arranged between the second conveying driving pulleys on both sides of the second conveying base, a second conveying driven wheel is arranged on the second conveying connecting shaft, a second conveying driving wheel is arranged on the driving shaft of the second conveying motor, a second conveying driving belt is wound between the second conveying driving wheel and the second conveying driven wheel, a feeding end of the second conveying belt corresponds to the flower basket feeding module, and a discharging end of the second conveying belt corresponds to the first conveying assembly.

7. The silicon wafer packaging equipment according to claim 6, characterized in that: A conveying limit assembly is provided on the second frame on both sides of the feeding end of the second conveying belt, and the conveying limit assembly includes a conveying limit base, a conveying limit cylinder and a conveying limit plate. The conveying limit base is arranged on the second frame, and a conveying limit cylinder is arranged on the conveying limit base. The conveying limit plate is arranged on the piston rod of the conveying limit cylinder, and the conveying limit plate is extended along the length direction of the second conveying belt.

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