Moving mechanism and reaction device

Abstract

The utility model provides a moving mechanism and a reaction device, the reaction device further comprises a reaction cabin, the reaction cabin is used for realizing film coating of a sheet material, the moving mechanism is arranged in the reaction cabin, the moving mechanism comprises a moving assembly, the moving assembly is movably connected with the inner wall of the reaction cabin, and the moving assembly is used for receiving the sheet material; the first guide assembly is connected with the moving assembly and used for being connected with the inner wall of the reaction cabin, and the first guide assembly is used for enabling the moving assembly to be movably connected to the inner wall of the reaction cabin; the moving driving assembly is connected with the moving assembly, and the moving driving assembly is used for driving the moving assembly to move so as to drive the sheet-shaped material to pass through a first position in the reaction cabin and move out of the reaction cabin; driving the moving assembly to move so as to drive the sheet material to move to a second position in the reaction cabin; in the process that the moving assembly drives the flaky material to move, the flaky material receives a precursor sprayed by the air spraying mechanism on the reaction cabin.

Description

Technical Field

[0001] The present application relates to the technical field of automation, and in particular to a mobile mechanism and a reaction device. Background Art

[0002] In the process of photovoltaic and semiconductor product production, sheet materials need to be deposited by atomic layer deposition (ALD) in the reaction device to form a multi-layer atomic film on the sheet material. At present, sheet materials can be installed in a material box, and a robotic arm can grab the material box and move the material box to the reaction device for coating. However, the position of the sheet material in the reaction device cannot be adjusted. When the position of the sheet material in the reaction device is far away from the position where the precursor is sprayed in the reaction device, there is a situation that affects the coating effect of the sheet material. Utility Model Content

[0003] In view of the above, it is necessary to provide a moving mechanism and a reaction device to solve the above defects.

[0004] In the first aspect, an embodiment of the present application provides a moving mechanism of a reaction device, the reaction device also includes a reaction chamber, the reaction chamber is used to realize the coating of sheet materials, the moving mechanism is arranged in the reaction chamber, and the jet mechanism is arranged in the reaction chamber, the moving mechanism includes: a moving component, the moving component is movably connected to the inner wall of the reaction chamber, the moving component is used to receive the sheet material; a first guide component, the first guide component is connected to the moving component and is used to connect to the inner wall of the reaction chamber, the first guide component is used to make the moving component movably connected to the inner wall of the reaction chamber; a moving drive component, the moving drive component is connected to the moving component, the moving drive component is used to: drive the moving component to move, so as to drive the sheet material to pass through a first position in the reaction chamber and move out of the reaction chamber; drive the moving component to move, so as to drive the sheet material to move to a second position in the reaction chamber; wherein the first position and the second position are spaced apart in the moving direction of the moving component, and in the process of the moving component driving the sheet material to move, the sheet material receives the precursor sprayed by the jet mechanism on the reaction chamber, and the jet mechanism is located between the first position and the second position.

[0005] Optionally, the mobile drive assembly includes: a rotating member, which is used to be rotatably connected to the inner wall of the reaction chamber; a first auxiliary wheel, which is used to be rotatably connected to the inner wall of the reaction chamber; a first driving rope, one end of the first driving rope is connected to the rotating member, and the other end is connected to a first connecting position on the mobile assembly, and the portion of the first driving rope located between the two ends is wound around the first auxiliary wheel; a mobile driving member, which is connected to the rotating member and is used to drive the rotating member to rotate along a first circumferential direction, so that the first driving rope is wrapped around the rotating member to drive the mobile assembly to move in the direction from the first position to the second position.

[0006] Optionally, the mobile drive assembly also includes: a rotating member, which is used to be rotatably connected to the inner wall of the reaction chamber; a second auxiliary wheel, which is used to be rotatably connected to the inner wall of the reaction chamber; a second drive rope, one end of the second drive rope is connected to the rotating member, and the other end is connected to the second connection position on the mobile assembly, and the part of the second drive rope located between the two ends is wound around the second auxiliary wheel; a mobile drive member, which is connected to the rotating member and is used to drive the rotating member to rotate along the second circumferential direction, so that the second drive rope is wrapped around the rotating member to drive the mobile assembly to move in the direction from the second position to the first position.

[0007] Optionally, the first guide assembly includes: a first guide rail, which is installed on the movable assembly; a first guide wheel, which is used to be rotatably connected to the inner wall of the reaction chamber, the axial direction of the first guide wheel is perpendicular to the length direction of the reaction chamber, and the peripheral wall of the first guide wheel is used to slide with the first guide rail.

[0008] Optionally, the moving component includes: a moving frame, which is used to be movably connected to the inner wall of the reaction chamber, a moving driving component connected to the moving frame and used to drive the moving frame to move; and a supporting frame, which is movably connected to the moving frame and used to move synchronously with the moving frame.

[0009] Optionally, the moving mechanism also includes: a first linkage wheel, which is rotatably connected to the moving frame; a first fixed head, which is used to connect to the inner wall of the reaction chamber; a first linkage rope, one end of which is connected to the first fixed head, and the other end is connected to the third connection position on the supporting frame, and the part of the first linkage rope located between the two ends is wrapped around the first linkage wheel.

[0010] Optionally, the moving mechanism also includes: a second linkage wheel, which is rotatably connected to the supporting frame; a second fixed head, which is used to connect to the inner wall of the reaction chamber; a second linkage rope, one end of which is connected to the second fixed head and the other end is connected to the fourth connecting position on the supporting frame, and the part of the second linkage rope located between the two ends is wrapped around the second linkage wheel.

[0011] Optionally, the moving mechanism also includes: a second guide rail, which is installed on the supporting frame; a second guide wheel, which is rotatably connected to the moving frame, the axial direction of the second guide wheel is perpendicular to the length direction of the reaction chamber, and the surrounding wall of the second guide wheel is used to slide with the second guide rail.

[0012] Optionally, the moving mechanism also includes: a support frame, the support frame is used to be fixedly connected to the inner wall of the reaction chamber, and the moving component is movably connected to the support frame; the first guide component is connected to the support frame to connect with the inner wall of the reaction chamber through the support frame.

[0013] In a second aspect, an embodiment of the present application provides a reaction device, comprising: a reaction chamber, the reaction chamber being used for coating a sheet material; and a moving mechanism such as any of the above items, the moving mechanism being disposed in the reaction chamber.

[0014] Through the mobile mechanism and reaction device provided by the present application, the material box carried by the mobile component can be moved in the reaction chamber, so that the material box can be close to and pass through the position where the jet mechanism is set, so that the sheet material in the material box can absorb the precursor sprayed by the jet mechanism to complete the coating. In this way, it can be avoided that the sheet material is maintained at a position far away from the jet mechanism during coating, so that the sheet material can be close to the jet mechanism for coating, which can improve the coating effect of the sheet material. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the coating equipment in the embodiment of the present application.

[0016] Figure 2 Schematic diagram of the reaction device in the embodiment of the present application.

[0017] Figure 3 It is a side view of the reaction device in the embodiment of the present application.

[0018] Figure 4 It is a schematic diagram of the internal structure of the reaction device in the embodiment of the present application;

[0019] Figure 5 It is a cross-sectional view of the reaction device in the embodiment of the present application.

[0020] Figure 6 It is a schematic diagram of the partial structure of the reaction device and the material box in the embodiment of the present application.

[0021] Figure 7 It is a schematic diagram of the first partial structure of the reaction device in the embodiment of the present application.

[0022] Figure 8 It is a schematic diagram of the second partial structure of the reaction device in the embodiment of the present application.

[0023] Fig. 9A It is a first partial schematic diagram of the mobile drive assembly in an embodiment of the present application.

[0024] Fig. 9B It is a second partial schematic diagram of the mobile drive assembly in the embodiment of the present application.

[0025] Fig.10 It is a bottom view of the local structure of the reaction device in the embodiment of the present application.

[0026] Fig.11A It is a first partial schematic diagram of the linkage component in the embodiment of the present application.

[0027] Fig. 11B It is a second partial schematic diagram of the linkage component in the embodiment of the present application.

[0028] Description of main component symbols:

[0029] 100, reaction device; 101, reaction chamber; 1012, opening; 1013, reaction air inlet pipe; 1014, reaction air outlet pipe; 1015, reaction maintenance port; 1016, reaction maintenance door; 1017, diffuser; 10171, diffuser slot; 1018, reaction heating element; 1019, heat insulation board; 10110, first position; 10111, second position; 10112, reaction reflection plate; 102, moving mechanism; 103, jet mechanism; 104, material box; 105, sheet material; 201, preheating chamber; 2011, preheating element; 2012, material port; 10, support frame; 20, moving assembly; 21, moving frame; 211, first connection position; 212, second connection 1. a first connecting position; 22. a supporting frame; 221. a third connecting position; 222. a fourth connecting position; 30. a first guide assembly; 31. a first guide rail; 32. a first guide wheel; 33. a limiting groove; 40. a mobile drive assembly; 41. a mobile drive member; 42. a rotating member; 421. a rotating shaft; 422. a first drive wheel; 423. a second drive wheel; 43. a first auxiliary wheel; 44. a first drive rope; 45. a second auxiliary wheel; 46. a second drive rope; 50. a second guide assembly; 51. a second guide rail; 52. a second guide wheel; 60. a linkage assembly; 61. a first linkage wheel; 62. a first fixed head; 63. a first linkage rope; 64. a second linkage wheel; 65. a second fixed head; 66. a second linkage rope. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0031] In the present application, the term "plurality" refers to two or more. In addition, it should be understood that in the description of the present application, the terms "first", "second", etc. are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0032] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to indicate examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0033] See also Figure 1 and Figure 2 , Figure 1 A coating device provided by an embodiment of the present application is shown. Figure 2 A reaction device 100 provided in an embodiment of the present application is shown. The coating equipment may include the reaction device 100 and a preheating device 200 .

[0034] In an embodiment of the present application, the reaction device 100 may include a reaction chamber 101, a moving mechanism 102 and an injection mechanism 103. The moving mechanism 102 may be disposed in the reaction chamber 101. The moving mechanism 102 may carry a material box 104, and a plurality of sheet materials 105 may be contained in the material box 104. The moving mechanism 102 may drive the material box 104 to move back and forth in the reaction chamber 101. The injection mechanism 103 may be fixedly connected to the side wall of the reaction chamber 101, and the injection mechanism 103 may be connected to a gas source device (not shown), and may obtain a first precursor and a second precursor from the gas source device. The injection mechanism 103 may spray the first precursor and the second precursor onto the sheet material 105 located in the reaction chamber 101, so that an atomic film may be formed on the surface of the sheet material 105.

[0035] The preheating device may include a preheating chamber 201. The preheating chamber 201 may be in communication with the reaction chamber 101. The moving mechanism 102 may drive the material box 104 to move from the reaction chamber 101 to the preheating chamber 201, and may drive the material box 104 to move from the preheating chamber 201 to the reaction chamber 101.

[0036] In the embodiments of the present application, the length direction of the coating device can be defined as the first horizontal direction, the width direction as the second horizontal direction, and the height direction as the vertical direction. Figure 1 As shown, the first horizontal direction may be the X direction and its opposite direction, the second horizontal direction may be the Y direction and its opposite direction, and the vertical direction may be the Z direction and its opposite direction.

[0037] It can be understood that the preheating chamber 201 and the reaction chamber 101 can be arranged in a first horizontal direction. A transmission device (not shown) can grab the material box 104 equipped with the unheated sheet material 105, and move the material box 104 into the preheating chamber 201. The preheating chamber 201 can heat the sheet material 105 that can accommodate the material box 104 and the material box 104, so that the temperature of the sheet material 105 reaches the temperature required for performing the coating process. Then the moving mechanism 102 can enter the preheating chamber 201, obtain the material box from the preheating chamber 201, and move the material box 201 into the reaction chamber 101. The moving mechanism 102 can drive the material box 201 to move to a position close to the jet mechanism 103, so that the jet mechanism 103 can jet the sheet material 105 in the material box 104 to achieve coating on the sheet material 105.

[0038] After the sheet material 105 is coated, the moving mechanism 102 can move the material box 104 containing the sheet material 105 into the preheating chamber 201, and the transmission device can grab the material box 104 from the preheating chamber 201 and move the material box 104 out of the preheating chamber 201, and then the staff collects the sheet material 105 that has completed the coating.

[0039] It can be understood that the reaction device 100 can perform an atomic layer deposition (ALD) process on the sheet material 105, so that an atomic film is formed on the side of the sheet material 105 that contacts the first precursor and the second precursor. The surface of the sheet material 105 needs to first receive the first precursor and then the second precursor to form a layer of atomic film; then the formed atomic film can receive the first precursor and the second precursor in sequence to form another layer of atomic film. In this way, multiple layers of atomic films can be formed on the sheet material 105 repeatedly.

[0040] In the embodiments of the present application, the types of the first precursor and the second precursor are not specifically limited. For example, the first precursor may be water, and the second precursor may be trimethylaluminum (TMA).

[0041] In the embodiment of the present application, there is no specific limitation on the type of the sheet material 105. For example, the sheet material 105 may be, but is not limited to, a silicon sheet, a silicon carbide sheet, or the like.

[0042] In one embodiment, a preheating element 2011 may be provided on the preheating chamber 201, and the preheating element 2011 may be used to heat the sheet material 105. In the embodiment of the present application, there is no specific limitation on the type of the preheating element 2011. For example, the preheating element 2011 may include, but is not limited to, an infrared heater, a resistive heater, and the like.

[0043] In some embodiments, the preheating chamber 201 is provided with a material port 2012 on a side away from the reaction chamber 101 in the first horizontal direction. The material port 2012 is connected to the preheating chamber 201. The material box 104 can enter the preheating chamber 201 through the material port 2012. The coating device can also include a shielding mechanism 300. The shielding mechanism 300 can be located outside the preheating chamber 201. The shielding mechanism 300 is fixedly installed on the preheating chamber 201, and can realize the opening or closing of the material port 2012.

[0044] The shielding mechanism 300 may include a baffle 301 and a shielding driving member 302. The stator of the shielding driving member 302 may be fixedly mounted on the outer wall of the preheating chamber 201, and the baffle 301 may be fixedly mounted on the mover of the shielding driving member 302. The baffle 301 and the side wall of the preheating chamber 201 where the material opening 2012 is opened are slidably matched in the vertical direction. When the shielding driving member 302 is working, the baffle 301 may be driven to move in the vertical direction, so that the baffle 301 blocks or does not block the material opening 2012, thereby realizing the control of opening or closing the material opening 2012.

[0045] In the embodiments of the present application, there is no specific limitation on the fixing method during the fixed installation and fixed connection. For example, the fixing method may include, but is not limited to, screw fixing, welding fixing, buckle fixing, integral molding fixing, etc.

[0046] In the embodiment of the present application, there is no specific limitation on the type of the shielding driving member 302. For example, the shielding driving member 302 may be, but is not limited to, a linear motor, a rodless cylinder, and the like.

[0047] In some embodiments, the coating device may further include a connecting valve 400. The connecting valve 400 is located between the preheating chamber 201 and the reaction chamber 101, and may open or disconnect the connection between the preheating chamber 201 and the reaction chamber 101. The connecting valve 400 may be fixedly mounted on the preheating chamber 201 and / or the reaction chamber 101.

[0048] In the embodiment of the present application, there is no specific limitation on the type of the connecting valve 400. For example, the connecting valve 400 may be, but is not limited to, a gate valve.

[0049] It can be understood that before the material port 2012 is opened, the connection valve 400 can disconnect the preheating chamber 201 from the reaction chamber 101, thereby reducing the impact of the pressure change in the preheating chamber 201 on the pressure in the reaction chamber 101, so that the pressure in the reaction chamber 101 is maintained at a preset pressure. The preset pressure can be the pressure that the sheet material 104 needs to reach when the sheet material 104 is subjected to the coating process.

[0050] It can be understood that when the material port 2012 is opened, the air pressure in the preheating chamber 201 changes; when the material port 2012 is closed, a vacuum device (not shown) connected to the preheating chamber 201 can evacuate the preheating chamber 201, so that the air pressure in the preheating chamber 201 reaches the same or similar pressure as the air pressure in the reaction chamber 101. Then, the connecting valve 400 can open the connection between the preheating chamber 201 and the reaction chamber 101, so that the sheet material 104 can be transferred between the preheating chamber 201 and the reaction chamber 101.

[0051] In some embodiments, an opening 1012 is provided on a side wall of the reaction chamber 101, and the opening 1012 is connected to the space in the reaction chamber 101. Part of the structure of the jet mechanism 103 can extend into the reaction chamber 101 from the opening 1012, and the remaining structure is located outside the reaction chamber 101 and fixedly connected to the side wall of the reaction chamber 101. At the same time, the position where the jet mechanism 103 is connected to the side wall of the reaction chamber 101 is sealed to reduce leakage of the first precursor and the second precursor in the reaction chamber 101.

[0052] In the embodiment of the present application, there is no specific limitation on the opening position of the opening 1012. For example, the opening 1012 can be opened at the top of the reaction chamber 101.

[0053] In some embodiments, the jet mechanism 103 may be disposed at the top of the reaction chamber 101, and the jet mechanism 103 may jet the first precursor and the second precursor toward the bottom of the reaction chamber 101, and jet an inert gas between each jet of the first precursor and the second precursor to block the first precursor and the second precursor by the inert gas. At the same time, a plurality of exhaust ports (not shown) may be provided on the jet mechanism 103 to extract the first precursor and the second precursor that are not attached to the sheet material 105, respectively. The jet mechanism 103 may be connected to an exhaust device (not shown), which may realize the extraction of the first precursor and the second precursor, respectively, through the jet mechanism 103.

[0054] It can be understood that while the first precursor and the second precursor are extracted through the gas extraction port, the inert gas located between each first point body and each second precursor can be extracted synchronously.

[0055] In the embodiments of the present application, the type of the inert gas is not specifically limited. For example, the inert gas may be, but is not limited to, nitrogen.

[0056] Please also read Figure 3In some embodiments, a reaction gas inlet pipe 1013 may be fixedly connected to the bottom of the reaction chamber 101. The reaction gas inlet pipe 1013 is in communication with the reaction chamber 101. The reaction gas inlet pipe 1013 may be connected to a gas source device (not shown) and obtain an inert gas from the gas source device. The reaction gas inlet pipe 1013 introduces an inert gas into the reaction chamber 101 to block the first precursor and the second precursor from flowing from the top of the reaction chamber 101 to the bottom of the reaction chamber 101.

[0057] It can be understood that the gas source device connected to the jet mechanism 103 and the reaction gas inlet pipe 1013 can be the same gas source device or different gas source devices, and the embodiments of the present application are not limited to this.

[0058] It can be understood that the flow direction of the inert gas entering the reaction chamber 101 through the reaction gas inlet pipe 1013 is opposite to the flow direction of the gas ejected from the gas injection mechanism 103. Therefore, the inert gas ejected from the reaction gas inlet pipe 1013 can block the first precursor and the second precursor from flowing toward the bottom of the reaction chamber 101, thereby preventing the first precursor and the second precursor from converging at the bottom of the reaction chamber 101.

[0059] Since the first precursor (e.g., water) and the second precursor (e.g., trimethylaluminum) may cause a reaction that affects safety (e.g., combustion, explosion, etc.) when they are in direct contact in the reaction chamber 101, by preventing the first precursor and the second precursor from gathering at the bottom of the reaction chamber 101, it is possible to avoid accidents caused by the first precursor and the second precursor contacting at a position far from the sheet material 105.

[0060] In other embodiments, the reaction air inlet pipe 1013 may be disposed at the top of the reaction chamber 101, and the jet mechanism 103 may be disposed at the bottom of the reaction chamber 101. The embodiments of the present application are not limited to this.

[0061] Please also read Figure 4 In some embodiments, a diffuser 1017 may be fixedly connected to the inner wall of the reaction chamber 101, and the diffuser 1017 is located at a position where the reaction air inlet pipe 1013 is connected to the reaction chamber 101. The diffuser 1017 is arranged corresponding to the jet mechanism 103, and a plurality of diffuser grooves 10171 are provided on the diffuser 1017, and the plurality of diffuser grooves 10171 may be arranged at intervals in the second horizontal direction. The plurality of diffuser grooves 10171 are all connected to the reaction air inlet pipe 1013, so as to realize the connection between the reaction air inlet pipe 1013 and the reaction chamber 101.

[0062] It can be understood that the diffuser 1017 can be a hollow box. After the reaction gas inlet pipe 1013 is introduced with inert gas, the inert gas can flow into the diffuser 1017 and flow along the second horizontal direction to fill the diffuser 1017, and then be sprayed into the reaction chamber 101 through the plurality of diffuser slots 10171, so that the pressure value in the reaction chamber 101 is maintained within a preset pressure range.

[0063] In some embodiments, a reaction gas outlet pipe 1014 may be fixedly connected to the reaction chamber 101. The reaction gas outlet pipe 1014 is in communication with the reaction chamber 101. The reaction gas outlet pipe 1014 may be connected to an exhaust device (not shown), which may exhaust gas from the reaction chamber 101 through the reaction gas outlet pipe 1014, thereby adjusting the air pressure in the reaction chamber 101 so that the air pressure in the reaction chamber 101 is maintained within a preset air pressure range.

[0064] It can be understood that the exhaust devices connected to the jet mechanism 103, the preheating chamber 201 and the reaction gas outlet pipe 1014 can be the same exhaust device or different exhaust devices, and the embodiments of the present application are not limited to this.

[0065] It can be understood that the preset air pressure range may correspond to the air pressure that the environment of the sheet material 105 needs to reach when the reaction device 100 coats the sheet material 105 .

[0066] In the embodiments of the present application, there is no specific limitation on the connection position of the reaction gas outlet pipe 1014 on the reaction chamber 101. Figure 3 As shown, the reaction gas outlet pipe 1014 can be located at the bottom of the reaction chamber 101 .

[0067] Please also read Figure 5 In some embodiments, a reaction heating element 1018 and a heat insulating plate 1019 may be further provided in the reaction chamber 101. The heat insulating plate 1019 may be fixedly mounted on the inner wall of the reaction chamber 101 and located on the side wall of the reaction chamber 101 where the jet mechanism 103 is installed. The heat insulating plate 1019 and the jet mechanism 103 are arranged in a first horizontal direction. The reaction heating element 1018 may be fixedly mounted on a side of the heat insulating plate 1019 facing the reaction chamber 101. The reaction heating element 1018 may heat the reaction chamber 101, thereby heating the sheet material 105 located in the reaction chamber 101.

[0068] In this way, the temperature of the sheet material 105 in the reaction chamber 101 can be maintained within the temperature range required by the coating process. The heat insulation board 1019 can block the heat generated by the reaction heating element 1018 from radiating out of the reaction chamber 101, reduce the heat loss in the reaction chamber 101, and thus improve the efficiency of heating the sheet material 105.

[0069] In the embodiment of the present application, there is no specific limitation on the type of the reaction heating element 1018. For example, the reaction heating element 1018 may include, but is not limited to, an infrared heater, a resistive heater, and the like.

[0070] It is understood that the number of the reaction heating element 1018 and the heat insulation board 1019 can be one or more, and the embodiments of the present application are not limited to this. Figure 5 As shown, the number of the reaction heating element 1018 and the heat insulation plate 1019 can be two, the two reaction heating elements 1018 are respectively located on both sides of the jet mechanism 103 in the first horizontal direction, and the two heat insulation plates 1019 are respectively located on both sides of the jet mechanism 103 in the first horizontal direction.

[0071] In the embodiment of the present application, there is no specific limitation on the material of the heat insulation board 1019. For example, the material of the heat insulation board 1019 may be aluminum silicate, but is not limited to aluminum silicate, and may also be a mica heat insulation board, a ceramic heat insulation board, etc.

[0072] In some embodiments, a reaction maintenance port 1015 is provided on one side of the reaction chamber 101 in the second horizontal direction, and a reaction maintenance door 1016 is detachably connected to the reaction chamber 101. The reaction maintenance door 1016 can shield the reaction maintenance port 1015.

[0073] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the detachable connection method may include, but is not limited to, screw connection, bolt connection, snap connection, etc.

[0074] It can be understood that when the reaction maintenance door 1016 is installed on the reaction chamber 101, the side of the reaction maintenance door 1016 facing the inside of the reaction chamber 101 can form part of the inner wall of the reaction chamber 101. Part of the mechanism of the moving mechanism 102 can be installed on the reaction maintenance door 1016 to achieve connection with the reaction chamber 101.

[0075] In the embodiment of the present application, a first position 10110 and a second position 10111 are set in the reaction chamber 101. The first position 10110 and the second position 10111 are arranged at intervals in the first horizontal direction, and are respectively located at two ends of the reaction chamber 101 in the first horizontal direction. The first position 10110 is located at one end of the reaction chamber 101 close to the preheating chamber 201, and the second position 10111 is located at one end of the reaction chamber 101 away from the preheating chamber 201.

[0076] It can be understood that in the first horizontal direction, the jet mechanism 103 is located between the first position 10110 and the second position 10111 .

[0077] It can be understood that the length direction of the reaction chamber 101 can coincide with the length direction of the coating device, that is, the length direction of the reaction chamber 101 coincides with the first horizontal direction. Similarly, the width direction of the reaction chamber 101 coincides with the second horizontal direction, and the height direction of the reaction chamber 101 coincides with the vertical direction.

[0078] Please also read Figure 6 and Figure 7 In some embodiments, the moving mechanism 102 may include a support frame 10, a moving assembly 20, a first guide assembly 30, and a moving drive assembly 40. The support frame 10 may be fixedly connected to the inner wall of the reaction chamber 101. The moving assembly 20 may be movably connected to the support frame 10 in a first horizontal direction, thereby being movably connected to the inner wall of the reaction chamber 101 in the first horizontal direction. The moving assembly 20 may receive the material box 104. The first guide assembly 30 may be connected to the support frame 10 and the moving assembly 20, and the moving assembly 20 may be movably connected to the support frame 10. The moving drive assembly 40 may be connected to the reaction chamber 101 and / or the reaction maintenance door 1016, and connected to the moving assembly 20. The mobile driving component 40 can drive the mobile component 20 to move in the first horizontal direction, so that the sheet material 105 held by the mobile component 20 can move back and forth in the reaction chamber 101, can move from the second position 10111 in the reaction chamber 101 to the first position 10110, and enter the preheating chamber 201 after passing the first position 10110; and can move from the preheating chamber 201 to the first position 10110 in the reaction chamber 101, and move to the second position 10111 after passing the first position 10110.

[0079] It can be understood that the moving assembly 20 and the jet mechanism 103 are spaced apart in the vertical direction, and the space between the moving assembly 20 and the jet mechanism 103 in the vertical direction is greater than the height of the material box 104 equipped with the sheet material 105. In this way, the movement of the moving assembly 20 can make the material box 104 approach the jet mechanism 103 in the first horizontal direction, and pass through the projection position of the jet mechanism 103 in the vertical direction, so that the first precursor and the second precursor sprayed by the jet mechanism 103 can be attached to the sheet material 105 in sequence.

[0080] In some embodiments, the moving assembly 20 may include a moving frame 21 and a carrying frame 22. The moving frame 21 is movably connected to the support frame 10 in the first horizontal direction. The carrying frame 22 is movably connected to the moving frame 21 in the first horizontal direction. The carrying frame 22 can carry the material box 104. The first guide assembly 30 can be connected to the moving frame 21 to achieve movably connecting the moving frame 21 to the support frame 10 in the first horizontal direction.

[0081] The first guide assembly 30 may include a plurality of first guide rails 31 and a plurality of groups of first guide wheels 32. The plurality of first guide rails 31 are fixedly mounted on the mobile frame 21 and extend in the first horizontal direction. The plurality of first guide rails 31 may be spaced apart in the second horizontal direction. In the plurality of groups of first guide wheels 32, each first guide wheel 32 may be rotatably connected to the support frame 10. The plurality of groups of first guide wheels 32 are spaced apart in the second horizontal direction. The axial direction of each first guide wheel 32 coincides with the vertical direction. The peripheral wall of each group of first guide wheels 32 abuts against at least one first guide rail 31, and each first guide rail 31 abuts against the peripheral wall of at least one group of first guide wheels 32.

[0082] In the embodiment of the present application, a plurality of through slots may be provided on the mobile rack 21, the carrier rack 22 and the support rack 10, and the through slots may vertically penetrate the mobile rack 21, the carrier rack 22 and the support rack 10. The through slots may allow the inert gas introduced into the reaction chamber 101 from the reaction gas inlet pipe 1013 to pass through, that is, the inert gas ejected from the diffuser slot 10171 may pass through.

[0083] It can be understood that the number of first guide wheels 32 in each group of first guide wheels 32 can be one or more, and the embodiments of the present application do not limit this. When the number of first guide wheels 32 in each group of first guide wheels 32 is multiple, the multiple first guide wheels 32 are arranged in the first horizontal direction.

[0084] For example, Figure 7 As shown, the first guide assembly 30 may include two first guide rails 31 and two groups of first guide wheels 32 . The two first guide rails 31 are located between the two groups of first guide rails 31 . The two first guide rails 31 and the two groups of first guide wheels 32 correspond one to one, and each group of first guide wheels 32 abuts against the corresponding first guide rail 31 .

[0085] For example, the first guide assembly 30 may include two first guide rails 31 and two groups of first guide wheels 32 , the two groups of first guide wheels 32 are located between the two first guide rails 31 , the two first guide rails 31 and the two groups of first guide wheels 32 correspond one to one, and each group of first guide wheels 32 abuts against the corresponding first guide rail 31 .

[0086] In some embodiments, a limiting groove 33 may be provided on the peripheral wall of each first guide wheel 32. The width of the limiting groove 33 gradually decreases in the direction from the peripheral wall of the first guide wheel 32 toward the center of the first guide wheel 32. One side of each first guide rail 31 used to abut against the first guide wheel 32 may be adapted to the limiting groove 33 and accommodated in the corresponding limiting groove 33. The inner wall of the limiting groove 33 may abut against the first guide rail 31, thereby limiting the movement of the first guide wheel 32 and the first guide rail 31 in the axial direction (i.e., vertical direction) of the first guide wheel 32.

[0087] It is understandable that Figure 7 As shown, two groups of first guide wheels 32 clamp two first guide rails 31, which can limit the relative movement of the first guide rails 31 and the first guide wheels 32 in the second horizontal direction, thereby limiting the relative movement of the mobile frame 21 and the support frame 10 in the second horizontal direction. The limiting groove 33 can limit the movement of the first guide wheel 32 and the first guide rail 31 in the vertical direction, thereby limiting the relative movement of the mobile frame 21 and the support frame 10 in the vertical direction. In this way, the mobile frame 21 and the support frame 10 can be movably connected in the first horizontal direction. At the same time, the rolling friction between the first guide wheel 32 and the first guide rail 31 can improve the smoothness of the movement of the mobile frame 21.

[0088] In some embodiments, the moving mechanism 102 may further include a second guide assembly 50. The second guide assembly 50 may be connected to the support frame 22 and the moving frame 21. The second guide assembly 50 may enable the support frame 22 to be movably connected to the moving frame 21 in the first horizontal direction.

[0089] The second guide assembly 50 may include a plurality of second guide rails 51 and a plurality of groups of second guide wheels 52. The plurality of second guide rails 51 are fixedly mounted on the carrier frame 22 and extend along the first horizontal direction. The plurality of second guide rails 51 may be spaced apart in the second horizontal direction. In the plurality of groups of second guide wheels 52, each second guide wheel 52 is rotatably connected to the carrier frame 22. The plurality of groups of second guide wheels 52 are spaced apart in the second horizontal direction. The axial direction of each second guide wheel 52 coincides with the vertical direction. The peripheral wall of each group of second guide wheels 52 abuts against at least one second guide rail 51, and each second guide rail 51 abuts against the peripheral wall of at least one group of second guide wheels 52.

[0090] It is understood that the number of the second guide wheels 52 in each group of second guide wheels 52 can be one or more, and the embodiments of the present application do not limit this. When the number of the second guide wheels 52 in each group of second guide wheels 52 is multiple, the multiple second guide wheels 52 are arranged in the first horizontal direction.

[0091] For example, Figure 7 As shown, the second guide assembly 50 may include two second guide rails 51 and two groups of second guide wheels 52 , the two second guide rails 51 are located between the two groups of second guide rails 51 , the two second guide rails 51 and the two groups of second guide wheels 52 correspond one to one, and each group of second guide wheels 52 abuts against the corresponding second guide rail 51 .

[0092] For example, the second guide assembly 50 may include two second guide rails 51 and two groups of second guide wheels 52, the two groups of second guide wheels 52 are located between the two second guide rails 51, the two second guide rails 51 and the two groups of second guide wheels 52 correspond one to one, and each group of second guide wheels 52 abuts against the corresponding second guide rail 51.

[0093] It can be understood that the second guide wheel 52 can be provided with a limiting groove 33, and a part of the structure of the second guide rail 51 can be adapted to the limiting groove 33. The shape of the upper limit groove 33 of the second guide wheel 52 can be the same or similar to the shape of the upper limit groove 33 of the first guide wheel 32, and the way in which the second guide rail 51 cooperates with the limiting groove 33 can be the same or similar to the way in which the first guide rail 31 cooperates with the limiting groove 33, which will not be described in detail here.

[0094] In some embodiments, the mobile mechanism 102 may further include a linkage assembly 60. The linkage assembly 60 is connected to the mobile frame 21 and to the carrier frame 22. When the mobile drive assembly 40 is working, the mobile frame 21 can be driven to move in the first horizontal direction; the movement of the mobile frame 21 can drive the linkage assembly 60 to move, and the carrier frame 22 can be synchronously moved along the direction of movement of the mobile frame 21. In this way, the mobile assembly 20 can be extended and retracted in the first horizontal direction through the movement of the mobile frame 21 and the carrier frame 22, and when the mobile assembly 20 is extended, the carrier frame 22 can enter the preheating chamber 201.

[0095] Please also read Figure 8 In some embodiments, the mobile driving assembly 40 may include a mobile driving member 41 , a rotating member 42 , a first auxiliary wheel 43 , a first driving rope 44 , a second auxiliary wheel 45 , and a second driving rope 46 .

[0096] The stator of the mobile driving member 41 is fixedly connected to the reaction chamber 101 or the reaction maintenance door 1016. The rotating member 42 is rotatably connected to the inner wall of the reaction chamber 101, and the axial direction of the central axis of rotation of the rotating member 42 coincides with the second horizontal direction. The first auxiliary wheel 43 and the second auxiliary wheel 45 are both rotatably connected to the support frame 10, so as to be rotatably connected to the inner wall of the reaction chamber 101. The first auxiliary wheel 43 and the second auxiliary wheel 45 are spaced apart in the first horizontal direction and the second horizontal direction, and the first auxiliary wheel 43 is located on the side of the rotating member 42 away from the second auxiliary wheel 45 in the first horizontal direction.

[0097] Please also read Fig. 9A, one end of the first driving rope 44 is fixedly connected to the rotating member 42, and the other end is fixedly connected to the first connecting position 211 on the mobile frame 21. The portion between the two ends of the first driving rope 44 can be wound around the first auxiliary wheel 43. The first connecting position 211 is located on the mobile frame 21. Among them, the first auxiliary wheel 43 can divide the first driving rope 44 into two parts, and the first part and the second part of the first driving rope 44 are arranged at intervals in the vertical direction. The first part of the first driving rope 44 is wound around the rotating member 42 and fixedly connected to the rotating member 42, and extends from the rotating member 42 to the first auxiliary wheel 43 along the first horizontal direction; the second part of the first driving rope 44 can extend from the first auxiliary wheel 43 along the first horizontal direction to the first connecting position 211.

[0098] Please also read Fig. 9B , one end of the second drive rope 46 is fixedly connected to the rotating member 42, and the other end is fixedly connected to the second connection position 212 on the mobile frame 21. The portion between the two ends of the second drive rope 46 can be wound around the second auxiliary wheel 45. The second connection position 212 is located on the mobile frame 21. The second connection position 212 and the first connection position 211 are spaced apart in the first horizontal direction, and are spaced apart in the second horizontal direction. Among them, the second auxiliary wheel 45 can divide the second drive rope 46 into two parts, the first part and the second part of the second drive rope 46 are spaced apart in the vertical direction, the first part of the second drive rope 46 is wound around the rotating member 42 and fixedly connected to the rotating member 42, and extends from the rotating member 42 along the first horizontal direction to the second auxiliary wheel 45; the second part of the second drive rope 46 can extend from the second auxiliary wheel 45 along the first horizontal direction to the second connection position 212.

[0099] It is understood that the rotatable connection is achieved by a rotating connector, which can enable the two components to rotate relative to each other. In the embodiments of the present application, the type of the rotating connector is not specifically limited. For example, the rotating connector can be, but is not limited to, a pin, a bearing, a coupling, etc.

[0100] In the embodiment of the present application, the positions of the first auxiliary wheel 43 and the second auxiliary wheel 45 on the support frame 10 are not specifically limited. For example, the first auxiliary wheel 43 is located on the side of the support frame 10 away from the preheating chamber 201 in the first horizontal direction, and is located on the side of the support frame 10 close to the reaction maintenance door 1016 in the second horizontal direction. The second auxiliary wheel 45 is located on the side of the support frame 10 close to the preheating chamber 201 in the first horizontal direction, and is located on the side of the support frame 10 away from the reaction maintenance door 1016 in the second horizontal direction. Exemplarily, both the first auxiliary wheel 43 and the second auxiliary wheel 45 can be located on the projection of the support frame 10 in the vertical direction, and are respectively located at the two ends of a diagonal connecting line of the projection.

[0101] In the embodiment of the present application, the positions of the first connection position 211 and the second connection position 212 are not specifically limited. For example, the first connection position 211 can be located on the side of the mobile frame 21 close to the preheating chamber 201 in the first horizontal direction, and on the side of the mobile frame 21 close to the reaction maintenance door 1016 in the second horizontal direction; the first connection position 211 can be located on the side of the rotating member 42 away from the first auxiliary wheel 43 in the first horizontal direction. The second connection position 212 can be located on the side of the mobile frame 21 away from the preheating chamber 201 in the first horizontal direction, and on the side of the mobile frame 21 away from the reaction maintenance door 1016 in the second horizontal direction; the second connection position 211 can be located between the rotating member 42 and the first auxiliary wheel 43 in the first horizontal direction.

[0102] It can be understood that a rope clamping member can be fixedly installed on the first connection position 211 and the second connection position 212, and the rope clamping member can clamp and fix the first drive rope 44 or the second drive rope 46, so that the first drive rope 44 is fixedly installed on the first connection position 211, and the second drive rope 46 is fixedly installed on the second connection position 212.

[0103] like Fig. 9A and Fig. 9B As shown, in the embodiment of the present application, the rotatable member 42 can rotate along a first circumferential direction a and a second circumferential direction b. The first circumferential direction is opposite to the second circumferential direction.

[0104] When the rotating member 42 rotates along the first circumferential direction, since the rotating member 42 and the first auxiliary wheel 43 are relatively fixed, the length of the first driving rope 44 between the rotating member 42 and the first auxiliary wheel 43 remains unchanged; as the first driving rope 44 is wound around the rotating member 42 due to the rotation of the rotating member 42, the length of the first driving rope 44 between the first auxiliary wheel 43 and the first connecting position 211 is shortened, so that the moving frame 21 moves from the first position 10110 to the second position 10111. The moving frame 21 can move until its projection in the vertical direction coincides with the projection of the support frame 10 in the vertical direction, and then the moving frame 21 extends out from the side of the support frame 10 away from the preheating chamber 201 in the direction away from the preheating chamber 201. The moving frame 131 can continue to move to move the material box 104 to the second position 10111.

[0105] When the rotating member 42 rotates along the second circumferential direction, since the rotating member 42 and the second auxiliary wheel 45 are relatively fixed, the length of the second driving rope 46 between the rotating member 42 and the second auxiliary wheel 45 remains unchanged; as the second driving rope 46 is wound around the rotating member 42 due to the rotation of the rotating member 42, the length of the second driving rope 46 between the second auxiliary wheel 45 and the second connecting position 212 is shortened, so that the moving frame 21 moves from the second position 10111 to the first position 10110. The moving frame 21 can move until its projection in the vertical direction coincides with the projection of the support frame 10 in the vertical direction, and then the moving frame 21 extends out of the side of the support frame 10 close to the preheating chamber 201 in a direction away from the preheating chamber 201. The moving frame 21 can continue to move, so that the material box 104 passes the first position 10110 and then enters the preheating chamber 201.

[0106] In some embodiments, the rotating member 42 may include a rotating shaft 421, a first driving wheel 422, and a second driving wheel 423. The rotating shaft 421 is rotatably connected to the inner wall of the reaction chamber 101 and is fixedly connected to the mover of the mobile driving member 41. The rotating shaft 421 extends along the second horizontal direction. The first driving wheel 422 and the second driving wheel 423 are fixedly mounted on the rotating shaft 421 and are coaxially arranged with the rotating shaft 421. The first driving wheel 422 and the second driving wheel 423 are spaced apart in the second horizontal direction. The first driving rope 44 can be fixedly connected to the first driving wheel 422 and partially wound on the first driving wheel 422. The second driving rope 46 can be fixedly connected to the second driving wheel 423 and partially wound on the second driving wheel 423.

[0107] It can be understood that the mobile driving member 41 can drive the rotating shaft 421 to rotate, so that the first driving wheel 422 and the second driving wheel 423 rotate synchronously. When the rotating shaft 421 rotates along the first circumferential direction, the first driving wheel 422 reels the first driving rope 44 to make the mobile frame 21 away from the preheating chamber 201, and at this time, the second driving wheel 423 rotates synchronously, and the movement of the mobile frame 21 pulls the second driving rope 46 to move synchronously, so that the second driving rope 46 at least partially wound around the second driving wheel 423 is separated from the second driving wheel 423.

[0108] When the rotating shaft 421 rotates along the second circumferential direction, the second driving wheel 423 reels the second driving rope 46 to make the moving frame 21 approach the preheating chamber 201. At this time, the first driving wheel 422 rotates synchronously, and the movement of the moving frame 21 pulls the first driving rope 44 to move synchronously, so that the first driving rope 44 at least partially wound around the first driving wheel 422 is separated from the first driving wheel 422.

[0109] In the embodiment of the present application, there is no specific limitation on the type of the moving driving member 41. For example, the moving driving member 41 may be, but is not limited to, a reduction motor.

[0110] For example, one end of the rotating shaft 421 is rotatably connected to the reaction maintenance door 1016, and the other end is rotatably connected to the support frame 10, so as to realize the rotatable connection between the rotating shaft 421 and the inner wall of the reaction chamber 101. The mobile driving member 41 can be fixedly installed on the reaction maintenance door 1016 and connected to one end of the rotating shaft 421 close to the reaction maintenance door 1016. The mobile driving member 41 is located outside the reaction chamber 101.

[0111] In other embodiments, the number of the rotating member 42 and the moving driving member 41 can be multiple, and the first driving rope 44 and the second driving rope 46 can be connected to different rotating members 42 respectively. The multiple rotating members 42 and the multiple moving driving members 41 can correspond to each other one by one, and each moving driving member 41 can drive the corresponding rotating member 42 to rotate. In this way, the moving frame 21 can be driven to move in the direction close to the preheating chamber 201 and the direction away from the preheating chamber 201 respectively through different moving driving members 41 and rotating members 42.

[0112] Please also read Fig.10 In some embodiments, the linkage assembly 60 may include a first linkage wheel 61, a first fixed head 62, a first linkage rope 63, a second linkage wheel 64, a second fixed head 65, and a second linkage rope 66. The first linkage wheel 61 and the second linkage wheel 64 are both rotatably connected to the moving frame 21, and are spaced apart in the first horizontal direction and in the second horizontal direction. The axial directions of the first linkage wheel 61 and the second linkage wheel 64 both coincide with the second horizontal direction.

[0113] Please also read Fig.11A , the first fixed head 62 is fixedly connected to the support frame 10, so that the first fixed head 62 is fixedly connected to the inner wall of the reaction chamber 101. One end of the first linkage rope 63 is fixedly connected to the first fixed head 62, and the other end is fixedly connected to the third connection position 221 on the carrier 22. The part between the two ends of the first linkage rope 63 can be wound around the first linkage wheel 61. Among them, the first linkage wheel 61 can divide the first linkage rope 63 into two parts. The first part and the second part of the first linkage rope 63 are spaced apart in the vertical direction. The first part of the first linkage rope 63 can be fixedly connected to the first fixed head 62 and extend to the first linkage wheel 61 along the first horizontal direction. The second part of the first linkage rope 63 can extend from the first linkage wheel 61 to the third connection position 221.

[0114] Please also read Fig. 11B, the second fixed head 65 is fixedly connected to the support frame 10, so that the second fixed head 65 is fixedly connected to the inner wall of the reaction chamber 101. The second fixed head 65 and the first fixed head 62 are spaced apart in the first horizontal direction and the second horizontal direction. One end of the second linkage rope 66 is fixedly connected to the second fixed head 65, and the other end is fixedly connected to the fourth connection position 222 on the carrier 22. The portion between the two ends of the second linkage rope 66 can be wound around the second linkage wheel 64. Among them, the second linkage wheel 64 can divide the second linkage rope 66 into two parts. The first part and the second part of the second linkage rope 66 are spaced apart in the vertical direction. The first part of the second linkage rope 66 can be fixedly connected to the second fixed head 65 and extend to the second linkage wheel 64 along the first horizontal direction. The second part of the second linkage rope 66 can extend from the second linkage wheel 64 to the fourth connection position 222.

[0115] It can be understood that the first fixed head 62 and the second fixed head 65 can be fixedly mounted on the extension frame, respectively, and the extension frame can be fixedly mounted on the support frame 10. In this way, the first fixed head 62 and the second fixed head 65 can be fixedly connected on the support frame 10. The first fixed head 62 can fix the first linkage rope 63 by clamping, and the second fixed head 65 can fix the second linkage rope 66 by clamping.

[0116] In the embodiment of the present application, the positions of the first linkage wheel 61 and the second linkage wheel 64 on the mobile frame 21 are not specifically limited. For example, the first linkage wheel 61 can be located on the side of the mobile frame 21 away from the preheating chamber 201 in the first horizontal direction, and the second linkage wheel 64 can be located on the side of the mobile frame 21 close to the preheating chamber 201 in the first horizontal direction. The first linkage wheel 61 can be located on the side of the mobile frame 21 close to the reaction maintenance door 1016 in the second horizontal direction, and the second linkage wheel 64 can be located on the side of the mobile frame 21 away from the reaction maintenance door 1016 in the second horizontal direction.

[0117] In the embodiment of the present application, there is no specific limitation on the positions of the first fixing head 62 and the second fixing head 65. For example, the first fixing head 62 may be located on the side of the support frame 10 close to the preheating chamber 201 in the first horizontal direction, and the second fixing head 65 may be located on the side of the support frame 10 far from the preheating chamber 201 in the first horizontal direction. The first fixing head 62 may be located on the side of the support frame 10 close to the reaction maintenance door 1016 in the second horizontal direction, and the second fixing head 65 may be located on the side of the support frame 10 far from the reaction maintenance door 1016 in the second horizontal direction.

[0118] In the embodiment of the present application, the positions of the third connection position 221 and the fourth connection position 222 are not specifically limited. For example, the third connection position 221 can be located on the side of the carrier 22 close to the preheating chamber 201 in the first horizontal direction, and can be located on the side of the carrier 22 close to the reaction maintenance door 1016 in the second horizontal direction; the third connection position 221 is located on the side of the first fixed head 62 away from the first linkage wheel 61 in the first horizontal direction. The fourth connection position 222 can be located on the side of the carrier 22 away from the preheating chamber 201 in the first horizontal direction, and can be located on the side of the carrier 22 away from the reaction maintenance door 1016 in the second horizontal direction; the fourth connection position 222 is located between the second fixed head 65 and the second linkage wheel 64 in the first horizontal direction.

[0119] It can be understood that rope clamping parts can be fixedly installed on the third connection position 221 and the fourth connection position 222, and the rope clamping parts can clamp and fix the first linkage rope 63 or the second linkage rope 66, so that the first linkage rope 63 is fixedly installed on the third connection position 221, and the second linkage rope 66 is fixedly installed on the fourth connection position 222.

[0120] It can be understood that the mobile driving member 41 can drive the rotating shaft 421 to rotate, so as to drive the mobile frame 21 to move in the first horizontal direction. When the mobile frame 21 moves in the direction away from the preheating chamber 201, since the position of the first fixed head 62 remains unchanged, the length of the first linkage rope 63 between the first fixed head 62 and the first linkage wheel 61 increases, so that the length of the first linkage rope 63 between the first linkage wheel 61 and the third connection position 221 decreases, so that the carrier 22 moves from the first position 10110 to the second position 10111. The carrier 22 can be moved out of the preheating chamber 201 and enter the first position 110110; the carrier 22 continues to move until the projection in the vertical direction coincides with the projection in the vertical direction of the mobile frame 21, and then the carrier 22 extends out of the side of the mobile frame 131 away from the preheating chamber 201 in the direction away from the preheating chamber 201. The carrier 132 can continue to move to the second position 10111.

[0121] When the mobile rack 21 moves toward the preheating chamber 201, since the position of the second fixed head 65 remains unchanged, the length of the second linkage rope 66 between the second fixed head 65 and the second linkage wheel 64 increases, so that the length of the first linkage rope 63 between the second linkage wheel 64 and the fourth connection position 222 decreases, so that the carrier 22 moves from the second position 10111 toward the preheating chamber 201. The carrier 22 can move until its projection in the vertical direction coincides with the projection of the mobile rack 21 in the vertical direction, and then the carrier 22 extends out of the side of the mobile rack 131 close to the preheating chamber 201 in the direction close to the preheating chamber 201. The carrier 132 can continue to move to move into the preheating chamber 201, so as to receive the material box 104 from the preheating chamber 201 or move the material box 104 from the reaction chamber 101 into the preheating chamber 201.

[0122] In the embodiment of the present application, there is no specific limitation on the moving speed of the carrier 22 and the sheet material 105 carried thereon. For example, the moving speed of the carrier 22 and the sheet material 105 carried thereon in the first horizontal direction can be any speed between 50 mm / s and 1000 mm / s, which has a good passivation effect. Preferably, when the moving speed of the sheet material 105 is 150 mm / s, it can ensure the rapid coating of the sheet material, improve production efficiency, and reduce the occurrence of the circumferential coating phenomenon.

[0123] It can be understood that the jet mechanism 103 can be located in the middle of the reaction chamber 101 in the first horizontal direction. When the carrier 22 moves in the reaction chamber 101 along the first horizontal direction, the sheet material 105 on the carrier 22 can pass through the position of the projection of the jet mechanism 103 in the vertical direction. In this way, the carrier 22 moves back and forth in the reaction chamber 101, so that the sheet material 105 can pass through the position of the projection of the jet mechanism 103 multiple times, so that the jet mechanism 103 sequentially receives the first precursor and the second precursor multiple times, so that a multi-layer atomic film can be formed on the sheet material 105.

[0124] When the atomic film coating is completed, the carrier 22 can be moved into the preheating chamber 201, so as to move the plated sheet material 105 into the preheating chamber 201, and the material box 104 equipped with the plated sheet material 105 can be moved out of the preheating chamber 201 through the preheating chamber 201 and the transmission device. Then the carrier 22 can receive the material box 104 equipped with the uncoated sheet material 105 from the preheating chamber 201 and move it into the reaction chamber 101. The carrier 22 can reciprocate along the first horizontal direction in the reaction chamber 101 again to coat the sheet material 105 again.

[0125] In some embodiments, a reaction reflector 10112 is further provided in the reaction chamber 101, and the reaction reflector 10112 is fixedly mounted on the inner wall of the reaction chamber 101. The reaction reflector 10112 is located between the moving mechanism 102 and the reaction heating element 1018 in the vertical direction, and the reaction reflector 10112 can at least partially shield the moving mechanism 102 and reflect the heat generated by the reaction heating element 1018 in the direction toward the reaction heating element 1018.

[0126] It is understood that the number of the reaction reflector 10112 can be one or more, and the embodiments of the present application are not limited to this. Figure 4 As shown, there are two reaction reflective plates 10112, and the two reaction reflective plates 10112 are spaced apart in the second horizontal direction.

[0127] It can be understood that the reaction reflector 10112 can reflect the heat flowing from the reaction heating element 1018 to the moving mechanism 102 toward the location where the reaction heating element 1018 is set, reducing the heat loss in the area between the reaction heating element 1018 and the reaction reflector 10112, and improving the heating efficiency of the sheet material 105 in the area. At the same time, the reflection of heat by the reaction reflector 10112 can block the flow of heat to the moving mechanism 102, reduce the probability of the moving mechanism 102 being damaged due to high temperature, and improve the service life of the moving mechanism 102.

[0128] In the reaction device 100 provided in the embodiment of the present application, the mobile driving member 41 can drive the rotating member 42 to rotate in the first circumferential direction, so that the mobile frame 21 moves from the first position 10110 to the second position 10111, so that the mobile frame 21 is away from the preheating chamber 201; while the mobile frame 21 is away from the preheating chamber 201, the linkage assembly 60 can drive the carrier frame 22 to move out of the preheating chamber 201 and move away from the preheating chamber 201 simultaneously. In the process of the carrier frame 22 moving away from the preheating chamber 201, the sheet material 105 can pass through the position corresponding to the jet mechanism 103 and receive the first precursor and the second precursor sprayed by the jet mechanism 103 to form an atomic film on the sheet material 105. When the sheet material 105 carried by the carrier frame 22 is located at the second position 10111, the mobile driving member 41 can stop working.

[0129] Then the moving driving member 41 can drive the rotating member 42 to rotate in the second circumferential direction, so that the moving frame 21 moves in the direction from the second position 10111 to the first position 10110, so that the moving frame 21 approaches the preheating chamber 201; while the moving frame 21 approaches the preheating chamber 201, the linkage assembly 60 can drive the carrier 22 to synchronously approach the preheating chamber 201 and enter the preheating chamber 201. In the process of the carrier 22 approaching the preheating chamber 201, the sheet material 105 can pass through the position corresponding to the jet mechanism 103 again, and receive the first precursor and the second precursor sprayed by the jet mechanism 103, so as to form an atomic film on the sheet material 105. After the carrier 22 enters the preheating chamber 201, the moving driving member 41 can stop working.

[0130] Through the moving mechanism 102 and the reaction device 100 provided in the embodiment of the present application, the material box 104 carried by the moving component 20 can be moved in the reaction chamber 101 along the length direction of the reaction chamber 101, so that the material box 104 can be close to and pass through the position where the jet mechanism 103 is set, so that the sheet material 105 in the material box 104 can receive the precursor sprayed by the jet mechanism 103 to complete the coating. In this way, it can be avoided that the sheet material 105 is maintained at a position away from the jet mechanism 103 during coating, so that the sheet material 105 can be close to the jet mechanism 103 for coating, and the coating effect of the sheet material 105 can be improved.

[0131] It is obvious to those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and that the present application can be implemented in other specific forms without departing from the spirit or basic features of the present application. Therefore, no matter from which point of view, the above embodiments of the present application should be regarded as exemplary and non-restrictive, and the scope of the present application is defined by the attached claims rather than the above description, and therefore it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present application.

Claims

1. A moving mechanism of a reaction device, characterized in that: The reaction device further comprises a reaction chamber, the reaction chamber is used to realize the coating of the sheet material, the moving mechanism is arranged in the reaction chamber, the jet mechanism is arranged in the reaction chamber, and the moving mechanism comprises: A moving component, the moving component is movably connected to the inner wall of the reaction chamber, and the moving component is used to receive the sheet material; a first guide assembly, the first guide assembly being connected to the moving assembly and being used to be connected to the inner wall of the reaction chamber, the first guide assembly being used to enable the moving assembly to be movably connected to the inner wall of the reaction chamber; A mobile drive assembly, the mobile drive assembly is connected to the mobile assembly, and the mobile drive assembly is used to: driving the moving assembly to move so as to drive the sheet material to pass through the first position in the reaction chamber and move out of the reaction chamber; Driving the moving assembly to move, so as to drive the sheet material to move to a second position in the reaction chamber; The first position and the second position are spaced apart in the moving direction of the moving component. When the moving component drives the sheet material to move, the sheet material receives the precursor sprayed by the jet mechanism on the reaction chamber. The jet mechanism is located between the first position and the second position.

2. The moving mechanism according to claim 1, characterized in that: The mobile driving component comprises: A rotating member, the rotating member is used to be rotatably connected to the inner wall of the reaction chamber; a first auxiliary wheel, the first auxiliary wheel being used to be rotatably connected to the inner wall of the reaction chamber; a first driving rope, one end of which is connected to the rotating member, and the other end of which is connected to a first connecting position on the moving component, and a portion of the first driving rope between the two ends is wound around the first auxiliary wheel; A mobile driving member is connected to the rotating member and is used to drive the rotating member to rotate along a first circumferential direction, so that the first driving rope is wrapped around the rotating member to drive the mobile component to move in the direction from the first position to the second position.

3. The moving mechanism according to claim 1, characterized in that: The mobile drive assembly also includes: A rotating member, the rotating member is used to be rotatably connected to the inner wall of the reaction chamber; a second auxiliary wheel, the second auxiliary wheel being used to be rotatably connected to the inner wall of the reaction chamber; a second driving rope, one end of which is connected to the rotating member, and the other end of which is connected to the second connecting position on the moving component, and a portion of the second driving rope between the two ends is wound around the second auxiliary wheel; A mobile driving member is connected to the rotating member and is used to drive the rotating member to rotate along a second circumferential direction, so that the second driving rope is wrapped around the rotating member to drive the mobile component to move in the direction of the second position toward the first position.

4. The moving mechanism according to claim 1, characterized in that: The first guide assembly comprises: a first guide rail, the first guide rail being mounted on the moving assembly; The first guide wheel is used to be rotatably connected to the inner wall of the reaction chamber, the axial direction of the first guide wheel is perpendicular to the length direction of the reaction chamber, and the peripheral wall of the first guide wheel is used to slide with the first guide rail.

5. The moving mechanism according to claim 1, characterized in that: The mobile assembly comprises: A mobile frame, the mobile frame is used to be movably connected to the inner wall of the reaction chamber, and the mobile driving assembly is connected to the mobile frame and is used to drive the mobile frame to move; The carrier frame is movably connected to the moving frame, and the carrier frame is used to move synchronously with the moving frame.

6. The moving mechanism according to claim 5, characterized in that: The moving mechanism also includes: A first linkage wheel, the first linkage wheel being rotatably connected to the moving frame; A first fixing head, wherein the first fixing head is used to connect to the inner wall of the reaction chamber; A first linkage rope, one end of which is connected to the first fixed head, and the other end of which is connected to a third connection position on the support frame, and a portion of the first linkage rope between the two ends is wound around the first linkage wheel.

7. The moving mechanism according to claim 5, characterized in that: The moving mechanism also includes: A second linkage wheel, the second linkage wheel is rotatably connected to the carrier frame; A second fixing head, the second fixing head being used to connect to the inner wall of the reaction chamber; A second linkage rope, one end of the second linkage rope is connected to the second fixed head, and the other end is connected to the fourth connection position on the supporting frame, and the portion of the second linkage rope located between the two ends is wound around the second linkage wheel.

8. The moving mechanism according to claim 5, characterized in that: The moving mechanism also includes: a second guide rail, the second guide rail being mounted on the carrier frame; The second guide wheel is rotatably connected to the movable frame, the axial direction of the second guide wheel is perpendicular to the length direction of the reaction chamber, and the peripheral wall of the second guide wheel is used for sliding cooperation with the second guide rail.

9. The moving mechanism according to claim 1, characterized in that: The moving mechanism also includes: A support frame, the support frame is used to be fixedly connected to the inner wall of the reaction chamber, and the movable component is movably connected to the support frame; the first guide component is connected to the support frame to be connected to the inner wall of the reaction chamber through the support frame.

10. A reaction device, characterized in that: include: A reaction chamber, wherein the reaction chamber is used to realize film coating of sheet materials; The moving mechanism according to any one of claims 1 to 9, wherein the moving mechanism is disposed in the reaction chamber.

Images