Substrate clamping structure and drying equipment

Abstract

The utility model discloses a substrate clamping structure and drying equipment, the substrate clamping structure comprises a fixed support, a first driving mechanism and two clamping arms, a lifting back plate is arranged on the first driving mechanism, and the first driving mechanism drives the lifting back plate to ascend or descend along the Y-axis direction; one ends of the clamping arms extend towards the front face of the fixing support and are located on the two sides of the drying basket, the other ends of the clamping arms are slidably connected with the lifting back plate in the X-axis direction, and a plurality of clamping gaps are formed in the clamping arms. The clamping air cylinder is arranged on the back face of the fixing support and connected between the other ends of the two clamping arms, and the clamping air cylinder can drive the clamping arms to move in the X-axis direction to clamp or loosen the substrate. According to the utility model, the clamping arms are controlled by the first driving mechanism and the clamping cylinders to clamp the substrate in the drying basket and can move up and down along the Y-axis direction, so that the original substrate in the drying basket is moved, and the contact position of the substrate and the drying basket structure is dried again.

Description

Technical Field

[0001] The utility model relates to the field of substrate drying, in particular to a substrate clamping structure and drying equipment. Background Art

[0002] After the glass substrate is cleaned, it is necessary to dry the substrate to prevent residual moisture on the substrate surface from accelerating the oxidation of the substrate. The existing drying operation is usually performed by Marangoni drying.

[0003] The Marangoni drying method utilizes the principle of gradient change of substrate surface tension to achieve the purpose of drying the wafer. First, flowing deionized water is used to produce a very thin layer of water film on the outer surface of the wafer, and then a large amount of heated IPA gas is introduced to remove the water layer on the substrate, thereby drying the substrate.

[0004] In the process of drying square substrates, in order to prevent water marks from remaining on the surface of the substrate during the drying process, one corner of the substrate is usually pointed vertically downward so that the water on the surface of the substrate flows down through this corner. After the first IPA gas drying, most of the water layer on the surface of the substrate has been removed, and the substrate as a whole is basically dry. However, the contact position between the substrate and the supporting structure is not fully contacted with the IPA gas during the IPA gas drying, resulting in insufficient drying of the contact position between the substrate and the supporting structure, and a small amount of water layer still remains. In the semiconductor process, a slight problem will lead to the problem of scrapping the substrate. Utility Model Content

[0005] In order to solve the technical problem of insufficient drying of the contact position between the substrate and the bearing structure in the prior art, the utility model provides a substrate clamping structure and a drying device.

[0006] The technical solution adopted by the utility model is:

[0007] The utility model proposes a substrate clamping structure, which comprises:

[0008] A fixed bracket, wherein the fixed bracket is arranged vertically;

[0009] a first driving mechanism, the first driving mechanism being mounted on the fixed bracket, the first driving mechanism being provided with a lifting back plate, and the first driving mechanism being capable of driving the lifting back plate to rise or fall along the Y-axis direction;

[0010] Two clamping arms, one end of each of the two clamping arms extends toward the front of the fixed bracket to the two sides of the drying basket, and the other end is slidably connected to the lifting back plate along the X-axis direction, and a plurality of clamping gaps at two diagonal positions of the clamping substrate are arranged at intervals on the clamping arms;

[0011] A clamping cylinder is connected between the other ends of the two clamping arms and can drive the clamping arms to move in the X-axis direction to clamp or release the substrate.

[0012] Furthermore, the substrate clamping structure also includes a second driving mechanism installed on the front of the fixed bracket for driving the drying basket to rise and fall along the Y-axis direction, and the second driving mechanism is arranged on the front of the bracket, including:

[0013] A second fixing seat, the second fixing seat is installed on the front side of the fixing bracket, and the second fixing seat is provided with a second sliding groove in the Y-axis direction;

[0014] A second ball screw, the second ball screw is arranged in the second fixing seat along the Y-axis direction, and a second driver is provided at the end of the second ball screw;

[0015] a second sliding block, wherein the second sliding block is slidably fitted with the front surface of the second fixing seat, two ends of the second sliding block pass through the second sliding groove and are fixed to the nut seat of the second ball screw, the second sliding block is connected to a connecting arm, and the other end of the connecting arm is connected to the bottom of the drying basket;

[0016] The second driver drives the second ball screw to rotate, thereby driving the second sliding block and the drying basket to move along the Y-axis direction of the second sliding groove.

[0017] Furthermore, a cylinder connecting plate is provided between the clamping cylinder and the clamping arm, one end of the cylinder connecting plate is fixed to the movable end of the clamping cylinder, and the other end of the cylinder connecting plate is fixed to the clamping arm.

[0018] Furthermore, openings are provided at both ends of the lifting back plate, and slide rails are provided on the upper and lower sides of the openings along the X-axis direction. A slider is provided on the slide rails, and both ends of the slider are respectively slidably connected to the two slide rails, one side of the slider is fixed to the cylinder connecting plate, and the other side of the slider is fixed to the clamping arm.

[0019] Further, the first driving mechanism is arranged at the rear side of the second driving mechanism, and comprises:

[0020] A first fixing seat, wherein the first fixing seat is fixed on the fixing bracket, and a first sliding groove in the Y-axis direction is provided on the first fixing seat;

[0021] A first ball screw, the first ball screw is arranged in the first fixing seat along the Y-axis direction, and a first driver is provided at the end of the first ball screw;

[0022] A first sliding block, wherein the first sliding block is in contact with the front surface of the first fixing seat, two ends of the first sliding block pass through the first sliding groove and are fixed to the nut seat of the first ball screw, and the lifting back plate is fixed on the first sliding block;

[0023] The first driver drives the first ball screw to rotate, thereby driving the first sliding block and the lifting back plate to move along the Y-axis direction of the first sliding groove.

[0024] Furthermore, positioning rods are provided on opposite sides of the drying basket, and a plurality of limiting grooves are provided at intervals along the length direction on opposite sides of the two positioning rods. The spacing between the positioning rods is smaller than the spacing between the diagonal corners of the substrate. One corner of the substrate is placed vertically downward in the drying basket, and the two positioning rods are clamped at the two diagonal corners of the substrate.

[0025] Furthermore, the substrate is a glass substrate.

[0026] Furthermore, the clamping arm comprises a clamping portion for clamping the substrate and a connecting portion connecting the clamping portion and the lifting back plate, and the connecting portion is bent downward.

[0027] Furthermore, the fixing bracket includes: a base and a bracket arranged perpendicular to the base.

[0028] The utility model provides a drying device, comprising the substrate clamping structure.

[0029] Compared with the prior art, the utility model controls the clamping arm to clamp the substrate in the drying basket through the first driving mechanism and the clamping cylinder and can move up and down along the Y-axis direction, so as to move the substrate originally in the drying basket and dry the contact position between the substrate and the drying basket structure again, thereby solving the technical problem of insufficient drying of the contact position between the substrate and the supporting structure in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0031] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of the utility model;

[0032] Figure 2 A side view of an embodiment of the utility model;

[0033] Figure 3 This is a bottom view of an embodiment of the utility model;

[0034] Figure 4 This is a rear view of an embodiment of the utility model;

[0035] Figure 5 It is a left perspective view of an embodiment of the utility model;

[0036] 1. Drying basket; 11. Fixed bracket; 12. Connecting arm; 13. Positioning rod;

[0037] 2. Clamping arm; 21. Cylinder connecting plate; 22. Lifting back plate; 23. Slider;

[0038] 31. First fixed seat; 32. First sliding block; 33. First driver; 34. First ball screw;

[0039] 4. Clamping cylinder;

[0040] 51. Second fixed seat; 52. Second sliding block; 53. Second driver; 54. Second ball screw. DETAILED DESCRIPTION

[0041] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0042] The principle and structure of the present utility model are described in detail below with reference to the accompanying drawings and embodiments.

[0043] After the glass substrate is cleaned, it is necessary to dry the substrate to prevent residual moisture on the substrate surface from accelerating the oxidation of the substrate. The existing drying operation is usually performed by Marangoni drying.

[0044] The Marangoni drying method utilizes the principle of gradient change of substrate surface tension to achieve the purpose of drying the wafer. First, flowing deionized water is used to produce a very thin layer of water film on the outer surface of the wafer, and then a large amount of heated IPA gas is introduced to remove the water layer on the substrate, thereby drying the substrate.

[0045] In the process of drying square substrates, in order to prevent water marks from remaining on the surface of the substrate during the drying process, one corner of the substrate is usually pointed vertically downward so that the water on the surface of the substrate flows down through this corner. After the first IPA gas drying, most of the water layer on the surface of the substrate has been removed, and the substrate as a whole is basically dry. However, the contact position between the substrate and the supporting structure is not fully contacted with the IPA gas during the IPA gas drying, resulting in insufficient drying of the contact position between the substrate and the supporting structure, and a small amount of water layer still remains. In the semiconductor process, a slight problem will lead to the problem of scrapping the substrate.

[0046] like Figure 1-5 As shown, the utility model proposes a substrate clamping structure, comprising: a fixed bracket 11, a first driving mechanism, a lifting back plate 22, two clamping arms 2 and a clamping cylinder 4. The main structure of the fixed bracket 11 is in a vertically arranged state, and the front of the fixed bracket faces the placement position of the drying basket 1; the first driving mechanism is installed on the fixed bracket 11, and the lifting back plate 22 is installed on the first driving mechanism. The lifting back plate 22 can move along the y-axis direction through the first driving mechanism, that is, it moves upward or downward in the vertical direction of the fixed bracket. One end of the two clamping arms 2 extends to both sides of the drying basket 1, and is used to clamp the substrate in the drying basket 1. The other end of the clamping arm 2 is close to the end and is slidably connected with the lifting back plate 22 along the x-axis direction. The clamping cylinder 4 is arranged between the other ends of the two clamping arms 2. The movable arm of the clamping cylinder 4 is fixedly connected to the clamping arm 2, and can drive the clamping arm 2 to move along the x-axis direction to clamp or release the substrate placed in the drying basket 1.

[0047] Specifically, the fixed bracket 11 is vertically arranged, the front of the fixed bracket 11 faces the drying basket 1, the first driving mechanism is fixed on the fixed bracket 11, the lifting back plate 22 on the first driving mechanism is a rectangular panel, and the lifting back plate 22 is driven by the first driving mechanism to rise or fall along the Y-axis direction. One end of the two clamping arms 2 extends to the front of the fixed bracket 11, that is, extends to both sides of the drying basket 1, and the other end passes through the lifting back plate 22 and is slidably connected with the lifting back plate 22 along the X-axis direction. A plurality of clamping gaps for clamping the two diagonal positions of the substrate are provided along the length direction on the clamping arm 2. A clamping cylinder 4 is provided on the back of the fixed bracket 11, and the movable arms at both ends of the clamping cylinder 4 are connected to the other end of the clamping arm 2, which can drive the clamping arm 2 to move along the X-axis direction to tighten or loosen the substrate. By controlling the first driving mechanism, the two clamping arms 2 can be controlled to rise or fall, and by controlling the clamping cylinder 4, the two clamping arms 2 can be controlled to move relative to each other along the X-axis to clamp or move in opposite directions to loosen.

[0048] Specifically, the clamping cylinder 4 is a double-arm clamping cylinder, which can drive the two clamping arms 2 to move at the same time. Other alternative embodiments such as two clamping cylinders can also be used to drive the clamping arms to move.

[0049] In further implementation, the substrate clamping structure further includes a second driving mechanism, which is arranged on the front of the bracket and includes: a second fixed seat 51, a second ball screw 54, the second ball screw 54 and a second sliding block 52. The second fixed seat 51 is installed on the front of the fixed bracket 11, and a second sliding groove in the Y-axis direction is provided on the second fixed seat 51; the second ball screw 54 is arranged in the second fixed seat 51 along the Y-axis direction, and a second driver 53 is provided at the end of the second ball screw 54; the second sliding block 52 is slidably fitted with the front of the second fixed seat 51, and the two ends of the second sliding block 52 pass through the second sliding groove and are fixed to the nut seat of the second ball screw 54, and the second sliding block 52 is connected to the connecting arm 12, and the other end of the connecting arm 12 is connected to the bottom of the drying basket 1; the second driver 53 drives the second ball screw 54 to rotate, driving the second sliding block 52 and the drying basket 1 to move along the Y-axis direction of the second sliding groove.

[0050] Specifically, when the second driving mechanism is in operation, the drying basket 1 can be raised or lowered along the Y-axis direction. The second fixed seat 51 is hollow inside, and openings in the Y-axis direction are provided on both sides as the second sliding groove. A second ball screw 54 is vertically provided in the second fixed seat 51, and a second driver 53 is provided at the end of the second ball screw 54 to drive its screw to rotate. The second sliding block 52 is fitted with the front of the second fixed seat 51 and can slide. The two ends of the second sliding block 52 pass through the second sliding groove and are fixed to the second ball screw 54. The screw of the second ball screw 54 is driven to rotate by the second driver 53, so that the nut seat on the second ball screw 54 drives the second sliding block 52 to slide up and down along the Y-axis direction of the second sliding seat. One end of the connecting arm 12 is connected to the second sliding block 52, and the other end is connected to the drying basket 1. When the second sliding block 52 moves, it drives the connecting arm 12 and the drying basket 1 to move along the Y-axis direction of the second sliding groove.

[0051] In a further embodiment, a cylinder connecting plate 21 is provided between the clamping cylinder 4 and the clamping arm 2 , and one end of the cylinder connecting plate 21 is fixed to the movable end of the clamping cylinder 4 , and the other end is fixed to the clamping arm 2 .

[0052] In a further embodiment, openings are provided at both ends of the lifting back plate 22, and slide rails are provided on the upper and lower sides of the opening along the X-axis direction. A slider 23 is provided on the slide rails, and both ends of the slider 23 are respectively slidably connected to the two slide rails. One side of the slider 23 is fixed to the cylinder connecting plate 21, and the other side of the slider 23 is fixed to the clamping arm 2.

[0053] In a further embodiment, the first driving mechanism is arranged at the rear side of the second driving mechanism, and includes: a first fixed seat 31, a first ball screw 34 and a first sliding block 32. The first fixed seat 31 is fixed on the fixed bracket 11, and a first sliding groove in the Y-axis direction is provided on the first fixed seat 31; the first ball screw 34 is arranged in the first fixed seat 31 along the Y-axis direction, and a first driver 33 is provided at the end of the first ball screw 34; the first sliding block 32 is fitted with the front of the first fixed seat 31, and the two ends of the first sliding block 32 are fixed to the nut seat of the first ball screw 34 through the first sliding groove, and the lifting back plate 22 is fixed on the first sliding block 32; the first driver 33 drives the first ball screw 34 to rotate, driving the first sliding block 23 and the lifting back plate 22 to move along the Y-axis direction of the first sliding groove.

[0054] Specifically, when the first driving mechanism is in operation, the lifting back plate 22 can be raised or lowered along the Y-axis direction. The first driving mechanism is arranged at the rear side of the second driving mechanism, and the first fixed seat 31 is hollow inside, and openings in the Y-axis direction are arranged on both sides as the first sliding groove. A first ball screw 34 is vertically arranged in the first fixed seat 31, and a first driver 33 is arranged at the end of the first ball screw 34 to drive its screw to rotate. The first sliding block 32 is fitted with the front of the first fixed seat 31 and can slide. The two ends of the first sliding block 32 pass through the first sliding groove and are fixed to the nut seat of the first ball screw 34. The screw of the first ball screw 34 is driven to rotate by the first driver 33, so that the nut seat on the first ball screw 34 drives the first sliding block 32 to slide up and down along the Y-axis direction of the first sliding seat, and the lifting back plate 22 is fixed to the first sliding block 32. When the first sliding block 32 moves, it drives the lifting back plate 22 and the clamping arm 2 to move along the Y-axis direction of the first sliding groove.

[0055] In a further embodiment, positioning rods 13 are provided on opposite sides of the drying basket 1, and a plurality of limiting grooves are provided at intervals along the length direction on opposite sides of the two positioning rods 13, and the spacing between the positioning rods 13 is smaller than the spacing between the diagonal corners of the substrate. One corner of the substrate is placed vertically downward in the drying basket 1, and the two positioning rods 13 are clamped at the two diagonal corners of the substrate.

[0056] In a further embodiment, the substrate is a glass substrate 111 .

[0057] In a further embodiment, the clamping arm 2 comprises a clamping portion for clamping the substrate and a connecting portion connecting the clamping portion and the lifting back plate 22, and the connecting portion is bent downward.

[0058] In a further embodiment, the fixing bracket 11 includes: a base and a bracket vertically arranged on the base.

[0059] The utility model also provides a drying device, including the substrate clamping structure provided by the utility model. Other drying structures of the drying device are not the focus of protection of this application, and therefore will not be described in detail.

[0060] In order to prevent water marks from remaining on the surface of the substrate during the drying process, after the first IPA gas drying, the substrate as a whole is basically dry, but the contact position between the substrate and the drying basket is not completely in contact with the IPA gas, resulting in insufficient drying of the contact position between the substrate and the supporting structure, and a small amount of water layer still remains. The substrate is clamped and moved by the substrate clamping structure, and the contact position between the substrate and the drying basket is dried again.

[0061] Compared with the prior art, the utility model controls the clamping arm 2 to clamp the substrate in the drying basket 1 through the first driving mechanism and the clamping cylinder 4 and can move up and down along the Y-axis direction, so as to move the substrate originally in the drying basket and dry the contact position between the substrate and the drying basket structure again, thereby solving the technical problem of insufficient drying of the contact position between the substrate and the supporting structure in the prior art.

[0062] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0063] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the utility model.

[0064] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A substrate clamping structure, characterized in that: The substrate clamping structure comprises: A fixed bracket, wherein the fixed bracket is arranged vertically; a first driving mechanism, the first driving mechanism being mounted on the fixed bracket, the first driving mechanism being provided with a lifting back plate, and the first driving mechanism being capable of driving the lifting back plate to rise or fall along the Y-axis direction; Two clamping arms, one end of each of the two clamping arms extends toward the front of the fixed bracket to the two sides of the drying basket, and the other end is slidably connected to the lifting back plate along the X-axis direction, and a plurality of clamping gaps at two diagonal positions of the clamping substrate are arranged at intervals on the clamping arms; A clamping cylinder is connected between the other ends of the two clamping arms and can drive the clamping arms to move in the X-axis direction to clamp or release the substrate.

2. The substrate clamping structure according to claim 1, characterized in that: The substrate clamping structure also includes a second driving mechanism installed on the front side of the fixed bracket for driving the drying basket to move up and down along the Y-axis direction.

3. The substrate clamping structure according to claim 2, characterized in that: The second driving mechanism comprises: A second fixing seat, the second fixing seat is installed on the front side of the fixing bracket, and the second fixing seat is provided with a second sliding groove located in the Y-axis direction; A second ball screw, the second ball screw is arranged in the second fixing seat along the Y-axis direction, and a second driver is provided at the end of the second ball screw; A second sliding block, the second sliding block is slidably fitted with the front face of the second fixed seat, both ends of the second sliding block pass through the second sliding groove and are fixed to the nut seat of the second ball screw, the second sliding block is connected to a connecting arm, the other end of the connecting arm extends to the bottom of the drying basket to support the drying basket, the second driver drives the second ball screw to rotate, and drives the second sliding block and the drying basket to move along the Y-axis direction of the second sliding groove.

4. The substrate clamping structure according to claim 1, characterized in that: A cylinder connecting plate is provided between the clamping cylinder and the clamping arm, one end of the cylinder connecting plate is fixed to the movable end of the clamping cylinder, and the other end of the cylinder connecting plate is fixed to the clamping arm.

5. The substrate clamping structure according to claim 4, characterized in that: Openings are provided at both ends of the lifting back plate, and sliding rails are provided on the upper and lower sides of the openings along the X-axis direction. Slide blocks are provided on the sliding rails, and both ends of the slide blocks are slidably connected to the two slide rails respectively. One side of the slide block is fixedly connected to the cylinder connecting plate, and the other side of the slide block is fixedly connected to the clamping arm.

6. The substrate clamping structure according to claim 2, characterized in that: The first driving mechanism is arranged at the rear side of the second driving mechanism, and specifically comprises: A first fixing seat, the first fixing seat is installed on the fixing bracket, and the first fixing seat is provided with a first sliding groove in the Y-axis direction; A first ball screw, the first ball screw is arranged in the first fixing seat along the Y-axis direction, and a first driver is provided at the end of the first ball screw; A first sliding block, wherein the first sliding block is in contact with the front surface of the first fixing seat, two ends of the first sliding block pass through the first sliding groove and are fixed to the nut seat of the first ball screw, and the lifting back plate is fixed on the first sliding block; The first driver drives the first ball screw to rotate, thereby driving the first sliding block and the lifting back plate to move along the Y-axis direction of the first sliding groove.

7. The substrate clamping structure according to claim 1, characterized in that: Positioning rods are provided on opposite sides of the drying basket, and a plurality of limiting grooves are provided at intervals along the length direction on opposite sides of the two positioning rods. The spacing between the positioning rods is smaller than the spacing between the diagonal corners of the substrate. One corner of the substrate is placed vertically downward in the drying basket, and the two positioning rods are clamped at the two diagonal corners of the substrate.

8. The substrate clamping structure according to claim 1, characterized in that: The substrate is a glass substrate.

9. The substrate clamping structure according to claim 1, characterized in that: The clamping arm comprises a clamping portion for clamping the substrate and a connecting portion connecting the clamping portion and the lifting back plate, and the connecting portion is bent downward.

10. A drying device, characterized in that: It comprises a substrate clamping structure as claimed in any one of claims 1 to 9.

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