Heat exchanger, tail gas exhaust system and boron diffusion equipment

Abstract

The embodiment of the utility model provides a heat exchanger, a tail exhaust system and boron diffusion equipment. The heat exchanger comprises a first flow guide pipe and a second flow guide pipe. The first flow guide pipe comprises an input end and an output end; a first medium flows from the input end to the output end; the second flow guide pipe comprises a first pipe wall, a first side wall and a second side wall; the first side wall and the second side wall are arranged at the two ends of the first pipe wall respectively and fixedly connected with the first pipe wall. Penetrating holes are formed in the first side wall and the second side wall; an inlet and an outlet are formed in the first pipe wall; a second medium enters from the inlet and flows out from the outlet; the first flow guide pipe penetrates through the penetrating hole of the first side wall and the penetrating hole of the second side wall in the axial direction of the second flow guide pipe. In the tail gas exhaust system, tail gas is cooled through a heat exchanger. And the cooled gas flows to the condensation tank in the tail gas exhaust system, so that the condensation effect on the tail gas is improved, solid particles flowing to the vacuum pump and the filter are reduced, blockage is reduced, and the service life of equipment is prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of solar cells and the field of semiconductor manufacturing equipment, and in particular to a water-cooled heat exchanger, a tail exhaust system and a boron diffusion device. Background Art

[0002] In the preparation process of crystalline silicon solar cells, the boron diffusion process of N-type crystalline silicon cells is the core process for forming PN junctions. Boron diffusion requires diffusion at a high temperature above 900°C. The boron diffusion reaction product is prone to cause blockage of the exhaust pipe, causing adhesion between the quartz furnace door and the furnace tube, and affecting the service life of the equipment. Therefore, it is necessary to treat the exhaust gas after boron diffusion to prevent blockage and adhesion. Summary of the invention

[0003] The embodiments of the present application provide a heat exchanger, a tail exhaust system and a boron diffusion device to solve or alleviate one or more technical problems in the prior art.

[0004] As one aspect of an embodiment of the present application, an embodiment of the present application provides a heat exchanger, including:

[0005] A first flow guide pipe, the first flow guide pipe comprises an input end and an output end; the first medium flows from the input end to the output end;

[0006] A second flow guide pipe, the second flow guide pipe comprises a first pipe wall, a first side wall and a second side wall; the first side wall and the second side wall are respectively arranged at both ends of the first pipe wall and are fixedly connected to the first pipe wall; the first side wall and the second side wall are both provided with perforations; the first pipe wall is provided with an inlet and an outlet; the second medium enters from the inlet and flows out from the outlet;

[0007] The first flow guide pipe passes through the through hole of the first side wall and the through hole of the second side wall along the axial direction of the second flow guide pipe.

[0008] As another aspect of the embodiments of the present application, the embodiments of the present application provide a tail gas system, including a tail gas treatment device and a heat exchanger of any implementation manner of the above embodiments;

[0009] The tail gas treatment device is used to treat the tail gas discharged from the equipment;

[0010] The tail gas flows from the input end of the first flow guide pipe in the heat exchanger to the output end of the first flow guide pipe; the output end is fixedly connected to the tail gas treatment device.

[0011] As another aspect of an embodiment of the present application, an embodiment of the present application provides a boron diffusion device, including a boron expansion furnace and a tail exhaust system of any implementation method in the above embodiments; the exhaust port of the boron expansion furnace is connected to the tail exhaust system.

[0012] The embodiment of the present application adopts the above technical solution and can use a heat exchanger to cool the tail gas discharged from the boron expansion furnace, so that the cooled gas flows to the condensation tank in the tail exhaust system, improves the condensation effect of the tail gas, reduces the solid particles flowing to the vacuum pump and filter, reduces blockage, and increases the service life of the equipment.

[0013] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0015] Figure 1 A schematic structural diagram of a heat exchanger according to an embodiment of the present application is shown.

[0016] Figure 2 A schematic cross-sectional structure diagram of a heat exchanger according to an embodiment of the present application is shown.

[0017] Figure 3 A schematic structural diagram of a heat exchange surface of a heat exchanger according to an embodiment of the present application is shown.

[0018] Figure 4 Another schematic structural diagram of a heat exchange surface of a heat exchanger according to an embodiment of the present application is shown.

[0019] Figure 5 Another structural schematic diagram of the heat exchange surface of a heat exchanger according to an embodiment of the present application is shown.

[0020] Figure 6 A schematic structural diagram of another heat exchange surface of a heat exchanger according to an embodiment of the present application is shown.

[0021] Figure 7 Another structural schematic diagram of another heat exchange surface of a heat exchanger according to an embodiment of the present application is shown.

[0022] Figure 8 Another structural schematic diagram of another heat exchange surface of a heat exchanger according to an embodiment of the present application is shown.

[0023] Fig. 9 A partial structural schematic diagram of a tail exhaust system according to an embodiment of the present application is shown.

[0024] Fig.10A schematic structural diagram of a tail exhaust system according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0025] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present application. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0026] Figure 1 A schematic structural diagram of a heat exchanger 100 according to Embodiment 1 of the present application is shown. Figure 2 FIG. 1 is a schematic cross-sectional view of a heat exchanger 100 according to an embodiment of the present application. Figures 1 to 2 As shown, the heat exchanger 100 includes a first flow guide pipe 110 and a second flow guide pipe 120 .

[0027] The first flow guide tube 110 includes an input end 111 and an output end 112 ; the first medium flows from the input end 111 to the output end 112 .

[0028] The second flow guide tube 120 includes a first tube wall 125, a first side wall 123 and a second side wall 124; the first side wall 123 and the second side wall 124 are respectively arranged at two ends of the first tube wall 125 and fixedly connected to the first tube wall 125; the first side wall 123 and the second side wall 124 are both provided with perforations; the first tube wall 125 is provided with an inlet 121 and an outlet 122; the second medium enters from the inlet 121 and flows out from the outlet 122; the first flow guide tube 110 passes through the perforations of the first side wall 123 and the perforations of the second side wall 124 along the axial direction of the second flow guide tube 120.

[0029] The first flow guiding tube 110 and the second flow guiding tube 120 can be tubes of any shape, such as a circular tube, a square tube, or a hexagonal tube, which is not limited in the embodiment of the present application.

[0030] It can be understood that the diameter of the first flow guiding tube 110 is smaller than the diameter of the second flow guiding tube 120 , so that the first flow guiding tube 110 can pass through the through-holes of the first side wall 123 and the through-holes of the second side wall 124 .

[0031] It can be understood that the outer edge shape of the first side wall 123 and the second side wall 124 is adapted to the tube shape of the second flow guide tube 120; the perforations of the first side wall 123 and the perforations of the second side wall 124 are adapted to the tube shape of the first flow guide tube 110, that is, the perforation shape allows the first flow guide tube 110 to pass through.

[0032] In one example, the shapes and sizes of the through-holes of the first side wall 123 and the through-holes of the second side wall 124 are the same.

[0033] In one example, the first flow guide tube 110 can just pass through the perforations of the first side wall 123 and the perforations of the second side wall 124, that is, the first flow guide tube 110 is adapted to the perforations of the first side wall 123 and the perforations of the second side wall 124, respectively, so that there is no gap between the first flow guide tube 110 and the first side wall 123 through which the second medium can flow out, and there is no gap between the first flow guide tube 110 and the second side wall 124 through which the second medium can flow out.

[0034] In one example, the perforations of the first side wall 123 and the second side wall 124 are larger than the outer diameter of the first flow guide tube 110, so that the second medium can flow out from the perforations. In this scenario, the second medium enters from the inlet 121, flows out partially from the perforations, and flows out partially from the outlet 122, and heat exchange can also be achieved.

[0035] In one example, the perforations of the first side wall 123 are matched with the first flow guide tube 110, and the perforations of the second side wall 124 are larger than the outer diameter of the first flow guide tube 110, so that the second medium can flow out from the perforations of the second side wall 124, and the second side wall 124 is a side wall away from the inlet 121, and correspondingly, the first side wall 123 is a side wall close to the inlet 121. In this scenario, the gap between the perforations of the first flow guide tube 110 and the second side wall 124 can be set on the side away from the inlet 121, and the outlet 122 may not be set separately, and the gap between the perforations of the first flow guide tube 110 and the second side wall 124 is used as the outlet 122 for the second medium to flow out.

[0036] In the above examples, the corresponding implementation method can be selected according to the actual application scenario.

[0037] In the embodiment of the present application, the first flow conduit 110 passes through the inside of the second flow conduit 120 , and the second medium flowing in from the second flow conduit 120 exchanges heat with the first medium in the first flow conduit 110 to achieve heat exchange.

[0038] The first medium and the second medium may be gas or liquid.

[0039] In one example, the first medium is gas, which flows through the first flow guide tube 110; the second medium is liquid, which may be water or alcohol, etc., to cool the gas.

[0040] In one embodiment, the first flow conduit 110 is fixedly connected to the perforation; the first flow conduit 110 includes a second tube wall 113; the first tube wall 125, the first side wall 123, the second side wall 124 and the second tube wall 113 form a heat exchange chamber.

[0041] When the first flow guide tube 110 is matched with the perforation of the first side wall 123 and / or the perforation of the second side wall 124, the first flow guide tube 110 can be fixedly connected to the perforation. The fixed connection method is not limited to welding, gluing, etc. Specifically, an appropriate fixed connection method can be selected according to the material of the first flow guide tube 110 and the first side wall 123 / the second side wall 124.

[0042] The heat exchange chamber formed by the first tube wall 125, the first side wall 123, the second side wall 124 and the second tube wall 113 can achieve heat exchange with the first medium flowing through the first flow guide tube 110. The first medium can be cooled or heated.

[0043] The first flow guide tube 110 is fixedly connected to the perforation; the first tube wall 125, the first side wall 123, the second side wall 124 and the second tube wall 113 form a heat exchange chamber, which can form a stable heat exchange chamber and the first medium for heat exchange, facilitating the controllable operation of the heat exchange process.

[0044] In one embodiment, the inlet 121 is disposed close to the first side wall 123, and the outlet 122 is disposed close to the second side wall 124. This allows a relatively long distance between the inlet 121 and the outlet 122, and the second medium flows from the inlet 121 to the outlet 122 over a long distance and a wide range, thereby increasing the chance of contact with the first medium and prolonging the exchange time between the second medium and the first medium.

[0045] In one example, the inlet 121 is disposed near the input end 111 , and the outlet 122 is disposed near the output end 112 .

[0046] The first medium flows from the input end 111 to the output end 112, and the second medium flows from the inlet 121 to the outlet 122. This arrangement enables the first medium and the second medium to flow in the same direction and exchange heat while flowing.

[0047] In one example, the inlet 121 is disposed close to the output end 112 , and the outlet 122 is disposed close to the input end 111 .

[0048] The first medium flows from the input end 111 to the output end 112, and the second medium flows from the inlet 121 to the outlet 122. This arrangement allows the first medium and the second medium to flow in the opposite direction. A certain part of the first medium exchanges heat with multiple different parts of the second medium during the heat exchange process in the entire heat exchange chamber, which can improve the heat exchange efficiency.

[0049] In one embodiment, the portion of the second tube wall 113 located in the heat exchange chamber forms a heat exchange surface 1131 ; the heat exchange surface 1131 is provided with a plurality of recesses 1132 extending toward the first tube wall 125 , and the plurality of recesses 1132 are evenly distributed on the heat exchange surface 1131 .

[0050] like Figures 3 to 8 As shown, the bottom edge of the recess 1132 is close to the first tube wall 125. By providing the recess 1132, the area of ​​the side wall of the recess 1132 is increased, which can be used for heat exchange between the first medium and the second medium.

[0051] In the embodiment of the present application, a plurality of recesses 1132 are provided to increase the area of ​​the heat exchange surface 1131 and improve the heat exchange efficiency.

[0052] Furthermore, by providing a plurality of recesses 1132 on the second tube wall 113 , the first medium generates friction in the recesses 1132 , and both the first medium and the second medium are decelerated in the recesses 1132 , thereby increasing the heat exchange time.

[0053] In one embodiment, the ratio of the depth to the length of the recess 1132 is 1 / 1-1 / 10; the length of the recess 1132 is the distance along the axial direction of the first flow guide tube 110 .

[0054] The embodiment of the present application limits the ratio between the depth and the length of the recess 1132 to ensure that the recess 1132 cannot be set too deep, otherwise the gas flow direction will be affected.

[0055] If the ratio of the depth to the length of the recess 1132 is too large, the depth of the recess 1132 is too deep, which is not conducive to the flow of gas; if the ratio of the depth to the length of the recess 1132 is too small, the desired effect cannot be achieved.

[0056] Based on the limitation of the ratio of the depth to the length of the recess 1132 , in some necessary application scenarios, the depth of the recess 1132 can be adjusted by increasing or decreasing the number of recesses 1132 .

[0057] See also Figures 3 to 8 ,in, Figures 3 to 5 Schematic diagram of multiple directions of design of a recess 1132 of a heat exchange surface 1131; Figure 6 To Figure Figure 8 Schematic diagram of multiple directions of another design of the recess 1132 of the heat exchange surface 1131.

[0058] In the embodiment of the present application, the shape and distribution of the recess 1132 may also be designed as other structures, which is not limited to this.

[0059] The cross-sectional shape of the concave portion 1132 may be any shape such as square, circular, elliptical, etc. The bottom of the concave portion 1132 may be dot-shaped, flat-bottomed, or arc-shaped; that is, the concave portion 1132 may be barrel-shaped or cone-shaped.

[0060] In one embodiment, the axis of the first flow guiding tube 110 is on a side of the axis of the second flow guiding tube 120 that is close to the outlet 122 .

[0061] In the embodiment of the present application, the axis of the first flow conduit 110 is on the side of the axis of the second flow conduit 120 close to the outlet 122, that is, the first flow conduit 110 and the second flow conduit 120 are not coaxial. It can be understood that the axis of the first flow conduit 110 is on the side of the axis of the second flow conduit 120 close to the outlet 122, that is, the volume of the inlet 121 side of the heat exchange chamber is larger than the volume of the outlet 122 side. It can make the second medium that enters the heat exchange chamber more exchange with the first medium. Since the temperature of the second medium that enters the inlet 121 during the heat exchange process, that is, the initial temperature of the second medium is the target temperature of the first medium exchange, the heat exchange efficiency can be further improved by exchanging more second media that enter the heat exchange chamber with the first medium.

[0062] In one embodiment, when the distance between the first tube wall 125 and the second tube wall 113 is smaller than the first threshold, or the ratio of the distance between the first tube wall 125 and the second tube wall 113 to the length of the first tube wall 125 is smaller than the second threshold, the recess 1132 abuts against the first tube wall 125 .

[0063] The first threshold value may be 3-8 cm; the second threshold value may be 1 / 15-1 / 20.

[0064] Since the depth of the recess 1132 cannot be set too deep, the recess 1132 is set to abut against the first tube wall 125 only when the distance between the first tube wall 125 and the second tube wall 113 is less than a first threshold value; or the recess 1132 is set to abut against the first tube wall 125 only when the ratio of the distance between the first tube wall 125 and the second tube wall 113 to the length of the first tube wall 125 is less than a second threshold value.

[0065] The ratio of the distance between the first tube wall 125 and the second tube wall 113 to the length of the first tube wall 125 is less than the second threshold because in some cases where the length of the first tube wall 125 is longer, the length or depth of the corresponding recess 1132 can be set larger.

[0066] In the embodiment of the present application, the recess 1132 can be in contact with the first tube wall 125, so that the depth of the recess 1132 is increased as much as possible, the area of ​​the heat exchange surface 1131 is increased, and the heat exchange efficiency is improved.

[0067] In one embodiment, the distance between the recess 1132 and the first tube wall 125 is 2-5 cm.

[0068] A certain distance is maintained between the recess 1132 and the first tube wall 125 to ensure the flow of the second medium. By maintaining a certain distance between the recess 1132 and the first tube wall 125, the bottom of the recess 1132 can also be a heat exchange position, ensuring a larger heat exchange surface 1131.

[0069] Based on the definition of the recess 1132, by defining the distance between the recess 1132 and the first tube wall 125 to be 2-5 cm, the distance between the first tube wall 125 and the second tube wall 113 can be defined. In turn, the diameter of the first flow guide tube 110 can be defined. This can facilitate the staff to set the diameter and length of the first flow guide tube 110 based on the heat exchange target.

[0070] In one embodiment, the second flow guide tube 120 is made of quartz or glass; the first flow guide tube 110 is made of quartz or glass.

[0071] The first flow conduit 110 and the second flow conduit 120 are made of quartz or glass, so that the heat exchanger 100 can be used for heat exchange in high-temperature media, for example, when the temperature of the first medium exceeds 900°C.

[0072] Other structures of the heat exchanger in the above embodiment may adopt various technical solutions known to ordinary technicians in this field now and in the future, and will not be described in detail here.

[0073] The embodiment of the present application also provides a tail exhaust system, Fig. 9 A partial structural schematic diagram of a tail exhaust system according to an embodiment of the present application is shown. Fig.10 FIG. 2 shows a schematic diagram of the structure of a tail exhaust system according to an embodiment of the present application. Fig. 9 and Fig.10 As shown, the tail exhaust system of the embodiment of the present application includes an exhaust gas treatment device and a heat exchanger 100 of any implementation aspect of the above embodiments.

[0074] The tail gas treatment device is used to treat the tail gas discharged from the equipment; the equipment can be a diffusion furnace equipment, etc. The tail gas discharged from the equipment flows from the input end 111 of the first flow guide pipe 110 in the heat exchanger 100 to the output end 112 of the first flow guide pipe 110; the output end 112 is fixedly connected to the tail gas treatment device. That is, the tail gas is used as the first medium; the second medium used for heat exchange can be water or alcohol.

[0075] In the embodiment of the present application, the exhaust gas is used as the first medium, flows from the input end 111 of the first flow conduit 110 to the output end 112 of the first flow conduit 110, and performs heat exchange with the second medium in the second flow conduit 120, so as to achieve the effect of cooling the exhaust gas.

[0076] In one embodiment, the exhaust gas treatment device includes a condensation tank 200 and a filter 300; the condensation tank 200 is connected to the filter 300 to treat the exhaust gas; the output end 112 of the first guide tube 110 is fixedly connected to the condensation tank 200; the length of the second guide tube 120 in the heat exchanger 100 is adapted to the condensation temperature of the exhaust gas.

[0077] In the exhaust gas treatment device, the exhaust gas is condensed before entering the filter 300, and the gas that can be condensed into solid particles is condensed, and then the uncondensed gas is filtered through the filter 300. In the case where the gas temperature is too high, it reaches the condensation temperature, and even if it passes through the condensation tank 200, it is not condensed. If it enters the filter 300, it will cause the gas to condense into particulate matter in the filter 300, causing the filter 300 to be blocked, affecting the service life of the filter 300.

[0078] Based on this, the embodiment of the present application cools the exhaust gas by using a heat exchanger 100 of any implementation mode in the above embodiments before the condensation tank 200, thereby ensuring that the exhaust gas is condensed more thoroughly after entering the condensation tank 200, reducing the blockage of the filter 300 and extending the service life of the filter 300.

[0079] In one example, if Fig.10 As shown, the exhaust gas treatment device also includes a control valve 400, a vacuum pump 500, a main exhaust device 600 and other devices. By adding a heat exchanger 100 before the condensation tank 200, the particulate matter in the control valve 400, the vacuum pump 500 and other devices can be further reduced to avoid blockage, thereby extending the service life of the control valve 400, the vacuum pump 500 and other devices.

[0080] The tail exhaust system in the above embodiment can be used for tail gas treatment of various high-temperature environment equipment 700, such as a boron diffusion furnace, an oxidation furnace, etc.

[0081] The other components of the tail exhaust system of the above embodiment can adopt various technical solutions known to ordinary technicians in this field now and in the future, and will not be described in detail here.

[0082] The embodiment of the present application also provides a boron diffusion device, which includes: a boron expansion furnace 700 and a tail exhaust system of any implementation aspect of the above embodiments; the exhaust port of the boron expansion furnace 700 is connected to the tail exhaust system.

[0083] In one embodiment, the inlet 121 of the heat exchanger 100 in the tail gas system is disposed close to the tail gas treatment device, and the outlet 122 is disposed close to the exhaust port.

[0084] Since the temperature around the boron expansion furnace 700 is relatively high, if the inlet 121 is disposed close to the boron expansion furnace 700, the second medium that is about to enter the inlet 121 will easily be heated up quickly, thereby reducing the heat exchange efficiency.

[0085] Based on this, in the embodiment of the present application, the inlet 121 of the heat exchanger 100 in the tail gas system is arranged close to the tail gas treatment device, and the outlet 122 is arranged close to the exhaust port of the boron diffusion equipment, which can avoid the above situation and improve the heat exchange efficiency.

[0086] In order to increase the hourly output of a single machine, the photovoltaic industry has changed the original high-temperature diffusion furnace / boron diffusion furnace / oxidation furnace insert method from vertical to horizontal, and the single-tube insert capacity has increased from 660 to 2,400. The increase in the insert capacity has increased the consumption of reaction gas in the process, increased exhaust, and increased the vacuum pump's exhaust workload, speeding up the filter element's filtering frequency.

[0087] The basic reactions of the boron diffusion process are shown in equations (1) and (2). The tail gas mainly includes five gases: BCl3 (residue), O2 (residue), N2 (leakage / purge / carryover), B2O3 (intermediate product), and Cl2 (intermediate product). According to the analysis of dust in the pipeline, the substance that is easy to cause blockage is mainly B2O3.

[0088] 4BCl3+3O2→2B2O3+6Cl2 (1)

[0089] 2B2O3+3Si→4B+3SiO2 (2)

[0090] In the existing process, the pipe blockage in the boron expansion tail exhaust system is very serious - a large amount of dust is deposited in the tail exhaust pipe, and even dust appears in the pipe from the filter to the vacuum pump. This will increase the maintenance frequency of the vacuum pump, and in severe cases, the vacuum pump will become a consumable.

[0091] After the exhaust gas passes through the filter, a large amount of white particulate matter is attached to the filter element. As the amount of particulate matter adsorbed increases, the life of the filter element is also reduced.

[0092] In the embodiment of the present application, a heat exchanger 100 is added to the front end of the intake pipe of the condensing tank 200 in the tail exhaust system, so that the tail gas entering the condensing tank 200 is first partially cooled down, so that the temperature of the tail gas is slightly higher than the condensation temperature of B2O3, thereby ensuring the condensation rate of B2O3 in the condensing tank 200. More B2O3 is condensed in the condensing tank 200, and less B2O3 is discharged to the filter 300 and the vacuum pump 500, thereby reducing the generation of particulate matter. For the filter element, the number of adsorbed particulate matter is reduced, the service life is extended, and the maintenance cost is reduced.

[0093] The other components of the boron diffusion equipment in the above embodiment may be adopted by various technical solutions known to ordinary technicians in this field now and in the future, and will not be described in detail here.

[0094] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0095] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0096] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0097] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0098] The disclosure above provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numerals and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed.

[0099] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A heat exchanger, characterized in that: include: A first flow-conducting tube, the first flow-conducting tube comprising an input end and an output end; The first medium flows from the input end to the output end; A second flow guide pipe, the second flow guide pipe comprises a first pipe wall, a first side wall and a second side wall; the first side wall and the second side wall are respectively arranged at two ends of the first pipe wall and fixedly connected to the first pipe wall; the first side wall and the second side wall are both provided with perforations; the first pipe wall is provided with an inlet and an outlet; the second medium enters from the inlet and flows out from the outlet; The first flow guide pipe passes through the through hole of the first side wall and the through hole of the second side wall along the axial direction of the second flow guide pipe.

2. The heat exchanger according to claim 1, characterized in that: The first flow guide tube is fixedly connected to the perforation; the first flow guide tube includes a second tube wall; the first tube wall, the first side wall, the second side wall and the second tube wall form a heat exchange chamber.

3. The heat exchanger according to claim 1 or 2, characterized in that: The inlet is disposed close to the first side wall, and the outlet is disposed close to the second side wall.

4. The heat exchanger according to claim 2, characterized in that: The portion of the second tube wall located in the heat exchange chamber forms a heat exchange surface; the heat exchange surface is provided with a plurality of recesses extending toward the first tube wall, and the plurality of recesses are evenly distributed on the heat exchange surface.

5. The heat exchanger according to claim 4, characterized in that: The ratio of the depth to the length of the recess is 1 / 1-1 / 10; the length of the recess is the distance along the axial direction of the first flow guide tube.

6. The heat exchanger according to claim 4, characterized in that The axis of the first flow guiding pipe is on a side of the axis of the second flow guiding pipe close to the outlet.

7. The heat exchanger according to any one of claims 4 to 6, characterized in that: When the distance between the first tube wall and the second tube wall is smaller than a first threshold, or the ratio of the distance between the first tube wall and the second tube wall to the length of the first tube wall is smaller than a second threshold, the recess abuts against the first tube wall.

8. The heat exchanger according to any one of claims 4 to 6, characterized in that: The distance between the recess and the first tube wall is 2-5 cm.

9. The heat exchanger according to claim 1, characterized in that: The second flow guide tube is made of quartz or glass; the first flow guide tube is made of quartz or glass.

10. A tail exhaust system, characterized in that: include: An exhaust gas treatment device and a heat exchanger according to any one of claims 1 to 9; The tail gas treatment device is used to treat the tail gas discharged by the equipment; The tail gas flows from the input end of the first flow guide pipe in the heat exchanger to the output end of the first flow guide pipe; the output end is fixedly connected to the tail gas treatment device.

11. The tail exhaust system according to claim 10, characterized in that: The exhaust gas treatment device includes a condensation tank and a filter; the condensation tank is connected to the filter to treat the exhaust gas; the output end of the first guide pipe is fixedly connected to the condensation tank; The length of the second flow guide pipe in the heat exchanger is adapted to the condensation temperature of the tail gas.

12. A boron diffusion device, characterized in that: include: A boron expansion furnace and a tail exhaust system according to any one of claims 10 to 11; The exhaust port of the boron expansion furnace is connected to the tail exhaust system.

13. The boron diffusion equipment according to claim 12, characterized in that The inlet of the heat exchanger in the tail exhaust system is arranged close to the tail gas treatment device, and the outlet is arranged close to the exhaust port.

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