Large-aperture light beam wavefront detection device

Abstract

The utility model relates to the field of wavefront detection, and provides a large-aperture light beam wavefront detection device which comprises a beam shrinking system which comprises a light beam receiving end lens group and a light beam transmitting end lens group, the light beam receiving end lens group comprises a plurality of receiving end lenses arranged in an array mode, and the light beam transmitting end lens group comprises a plurality of transmitting end lenses arranged in an array mode. The transmitting end lenses and the receiving end lenses are arranged in one-to-one correspondence; the micro-lens array comprises a plurality of micro-lenses which are arranged in an array mode, and the micro-lenses and the transmitting end lenses are arranged in a one-to-one correspondence mode; the detector array comprises a plurality of detectors arranged in an array mode, and the detectors and the micro lenses are arranged in a one-to-one correspondence mode. Therefore, the light beam receiving end lens, the light beam transmitting end lens, the micro lens and the detector are in one-to-one correspondence to form a wavefront detection unit, a wavefront detection unit array is further formed, and the problems that an existing wavefront detector for measuring large-aperture light beams is large in size and low in imaging resolution are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of wavefront detection, in particular to a large-aperture light beam wavefront detection device. Background Art

[0002] A wavefront detector is an instrument that measures the wavefront distortion of a light beam. The existing wavefront detector consists of a microlens array and an image detector. It divides a complete wavefront into several small areas through a microlens array, regards each independent microlens as a microelement and calculates the average slope of the wavefront in each microelement. Finally, all the calculation results are combined to obtain complete wavefront information.

[0003] When the wavefront detector is used for large-aperture light beam measurement, since the beam aperture is obviously larger than the receiving aperture of its own microlens array, a beam reduction optical system is generally required in front of the microlens array to reduce the large-aperture light beam to a microlens array with a smaller area, which is then received by the image detector for data detection, collection, calculation and wavefront analysis.

[0004] However, since a large-aperture light beam needs to be narrowed down to a microlens array with a smaller area, the length dimension of the narrowing optical system in the direction of the optical axis is relatively large, and the size of the lens at the receiving end is also relatively large, resulting in a very large overall volume of the wavefront detector containing the narrowing optical system, and poor stability, which is not conducive to the miniaturization and practical application of the device. In addition, the image resolution obtained by the overall spot after narrowing down on the image detector is also relatively low. Utility Model Content

[0005] The utility model aims to provide a large-aperture light beam wavefront detection device to solve the defects and shortcomings in the prior art.

[0006] In order to achieve the above object, the utility model provides a large-aperture light beam wavefront detection device, comprising:

[0007] A beam reduction system, used to reduce the diameter of a light beam, the beam reduction system comprises a beam receiving end lens group and a beam emitting end lens group, the beam receiving end lens group is used to receive a light beam emitted by a light source, the beam receiving end lens group comprises a plurality of receiving end lenses arranged in an array, so as to divide the light beam into a plurality of sub-beams, the beam emitting end lens group is arranged on the light emitting side of the beam receiving end lens group, the beam emitting end lens group comprises a plurality of emitting end lenses arranged in an array, and the emitting end lenses are arranged in a one-to-one correspondence with the receiving end lenses;

[0008] A microlens array, used for receiving each of the sub-beams after being condensed, wherein the microlens array is arranged on the light-emitting side of the lens group at the light-emitting end, and the microlens array comprises a plurality of microlenses arranged in an array, and the microlenses are arranged in a one-to-one correspondence with the lenses at the emitting end;

[0009] A detector array is used to receive each of the sub-beams focused by the microlens array to collect wavefront data. The detector array is arranged on the light-emitting side of the microlens array. The detector array includes a plurality of detectors arranged in an array. The detectors are arranged in a one-to-one correspondence with the microlenses.

[0010] According to the large-aperture light beam wavefront detection device provided by the utility model, the light beam receiving end lens, the light beam emitting end lens, the microlens and the detector correspond to each other to form a wavefront detection unit, and a plurality of the wavefront detection units are arranged in a compound eye bionic array. The large-aperture light beam wavefront detection device also includes:

[0011] The beam offset system is used to adjust the transmission path of the light beam so that the light beam is translated in a direction perpendicular to the optical axis. The beam offset system is arranged on the light incident side of the lens group at the light beam receiving end.

[0012] According to the large-aperture light beam wavefront detection device provided by the utility model, the light beam deviation system includes:

[0013] A transparent light-guiding medium, used for adjusting the transmission path of the light beam, wherein the transparent light-guiding medium is arranged on the light-entering side of the lens group at the light beam receiving end;

[0014] The mounting seat body is used to support the transparent light-guiding medium, and the transparent light-guiding medium is rotatably connected to the mounting seat body.

[0015] According to the large-aperture light beam wavefront detection device provided by the utility model, the light beam deviation system also includes:

[0016] The driving device is used to drive the transparent light-guiding medium to rotate so as to adjust the tilt angle of the transparent light-guiding medium.

[0017] The large-aperture light beam wavefront detection device provided by the utility model also includes:

[0018] A control device is communicatively connected with each of the detectors and the driving device, and is used for performing data analysis on the collected wavefront data, and controlling the driving device to adjust the tilt angle of the transparent light-guiding medium based on data analysis requirements.

[0019] According to the large-aperture light beam wavefront detection device provided by the utility model, the cross-sectional area of ​​the transparent light-guiding medium is larger than the array surface area of ​​the lens group at the light beam receiving end.

[0020] According to the large-aperture light beam wavefront detection device provided by the utility model, the surface of the transparent light-guiding medium is plated with an anti-reflection film.

[0021] According to the large-aperture light beam wavefront detection device provided by the utility model, the material of the transparent light-guiding medium is glass or quartz, and / or the cross-sectional shape of the transparent light-guiding medium is wedge-shaped, rhombus-shaped, circular or rectangular.

[0022] According to the large-aperture light beam wavefront detection device provided by the utility model, the light beam receiving end lens group is arranged in a circular, square or hexagonal array.

[0023] According to the large-aperture light beam wavefront detection device provided by the utility model, the microlens array is arranged in a square or hexagonal array.

[0024] The utility model provides a large-aperture light beam wavefront detection device, comprising: a beam reduction system, which is used to reduce the diameter of the light beam. The beam reduction system comprises a light beam receiving end lens group and a light beam emitting end lens group. The light beam receiving end lens group is used to receive the light beam emitted by the light source. The light beam receiving end lens group comprises a plurality of receiving end lenses arranged in an array to divide the light beam into a plurality of sub-beams. The light beam emitting end lens group is arranged at the light-emitting side of the light beam receiving end lens group. The light beam emitting end lens group comprises a plurality of emitting end lenses arranged in an array. The emitting end lenses are arranged in a one-to-one correspondence with the receiving end lenses; a microlens array, which is used to receive each sub-beam after the beam reduction. The microlens array is arranged at the light-emitting side of the light beam emitting end lens group. The microlens array comprises a plurality of microlenses arranged in an array. The microlenses are arranged in a one-to-one correspondence with the emitting end lenses; and a detector array, which is used to receive each sub-beam focused by the microlens array to collect wavefront data. The detector array is arranged at the light-emitting side of the microlens array. The detector array comprises a plurality of detectors arranged in an array. The detectors are arranged in a one-to-one correspondence with the microlenses.

[0025] In this way, the beam receiving end lens, beam emitting end lens, microlens and detector arranged one by one form a wavefront detection unit, and multiple wavefront detection units are distributed in an array. When measuring the wavefront of a large-aperture beam, the wavefront of the large-aperture beam is received by the wavefront detection unit array, which is equivalent to dividing the large-aperture beam space into several small areas, each small area corresponds to a micro wavefront detection unit, thereby reducing the spot beam reduction optical path, reducing the longitudinal volume of the device, and the overall structure of the device is compact and stable. At the same time, the image data volume of the microlens and detector in each wavefront detection unit is reduced, which is equivalent to amplifying the processing spot and improving the imaging resolution of the overall wavefront data processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 This is one of the structural schematic diagrams of the large-aperture light beam wavefront detection device provided by the utility model.

[0028] Figure 2 This is the second structural schematic diagram of the large-aperture light beam wavefront detection device provided by the utility model.

[0029] Figure 3 This is one of the array schematic diagrams of the light beam receiving end lens group provided by the utility model.

[0030] Figure 4 This is the second array schematic diagram of the light beam receiving end lens group provided by the utility model.

[0031] Figure 5 This is the third array schematic diagram of the light beam receiving end lens group provided by the utility model.

[0032] Reference numerals:

[0033] 1: beam deflection system; 11: transparent light-guiding medium; 12: mounting base; 2: beam reduction system; 21: beam receiving end lens group; 211: receiving end lens; 22: beam emitting end lens group; 221: emitting end lens; 3: microlens array; 31: microlens; 4: detector array; 41: detector; 5: wavefront detection unit; 6: light source. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "horizontal", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0036] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0037] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0038] Please refer to Figures 1 to 5 As shown, the embodiment of the utility model provides a large-aperture light beam wavefront detection device, including a beam reduction system 2, a microlens array 3, and a detector array 4. Specifically, as Figure 1 As shown, the beam reduction system 2 is used to reduce the diameter of the light beam. The light source 6 emits a light beam. After passing through the beam reduction system 2, the light beam can be reduced to a smaller diameter, thereby reducing the cross-sectional size of the light beam and entering the microlens array 3 behind. Specifically, the beam reduction system 2 includes a correspondingly arranged light beam receiving end lens group 21 and a light beam emitting end lens group 22. The light beam receiving end lens group 21 is used to receive the light beam emitted by the light source 6. The light beam receiving end lens group 21 includes a plurality of receiving end lenses 211 arranged in an array to divide the light beam into a plurality of sub-beams. The light beam emitting end lens group 22 is arranged on the light emitting side of the light beam receiving end lens group 21. The light beam emitting end lens group 22 includes a plurality of emitting end lenses 221 arranged in an array. The emitting end lenses 221 are arranged one by one with the receiving end lenses 211, thereby reducing each sub-beam to a smaller diameter.

[0039] The microlens array 3 is used to receive each sub-beam after the beam is reduced, and the microlens array 3 is arranged on the light-emitting side of the lens group 22 at the light beam emitting end. The microlens array 3 includes a plurality of microlenses 31 arranged in an array, and the microlenses 31 are arranged one-to-one with the emitting end lens 221, so as to focus and image each sub-beam. The detector array 4 is used to receive each sub-beam focused by the microlens array 3 to collect wavefront data. For example, a commonly used CCD (Charge-coupled Device) detector can be selected, and the detector array 4 is arranged on the light-emitting side of the microlens array 3. The detector array 4 includes a plurality of detectors 41 arranged in an array, and the detectors 41 are arranged one-to-one with the microlenses 31, so as to reliably capture the wavefront information of each sub-beam, so as to realize wavefront data collection and facilitate the subsequent wavefront analysis.

[0040] In this way, the beam receiving end lens 211, the beam emitting end lens 221, the microlens 31 and the detector 41, which are arranged one by one, constitute a wavefront detection unit 5, and multiple wavefront detection units 5 are distributed in an array. When measuring the wavefront of a large-aperture beam, the wavefront of the large-aperture beam is received by the wavefront detection unit 5 array, which is equivalent to dividing the large-aperture beam space into a number of small areas, each small area corresponds to a micro wavefront detection unit 5, thereby reducing the light path of the light spot beam reduction and reducing the longitudinal volume of the device. The overall structure of the device is compact and stable, which is conducive to the miniaturization design of the device and improves the practicality and applicability of the device. At the same time, since the entire beam is divided into multiple sub-beams, the image data volume of the microlens 31 and the detector 41 in each wavefront detection unit 5 is reduced, which is equivalent to amplifying the processing light spot and improving the imaging resolution of the overall wavefront data processing. This solves the problem of large size and low imaging resolution of the large-aperture beam wavefront measurement system in the prior art.

[0041] Further, in the embodiment of the present utility model, if Figure 2As shown, the beam receiving end lens 211, the beam emitting end lens 221, the microlens 31 and the detector 41 correspond to each other to form a wavefront detection unit 5, and a plurality of wavefront detection units 5 are arranged in a compound eye bionic array. The large-aperture beam wavefront detection device also includes a beam offset system 1, which is used to adjust the transmission path of the beam so that the beam is translated in a direction perpendicular to the optical axis. The beam offset system 1 is arranged on the light incident side of the lens group 21 at the beam receiving end. With such an arrangement, the beam offset system 1 can fine-tune the beam transmission path, eliminate the omission of the beam wavefront information caused by the deviation of the beam received at the array splicing, and realize the dynamic translation of the beam. In conjunction with a plurality of wavefront detection units 5, a compound eye bionic array is used to divide a large-aperture light spot into a plurality of independent sub-units for separate processing, thereby realizing seamless splicing of the light spot and complete reception of the wavefront data according to the compound eye dynamic optical imaging principle, and reducing damage to the image detector. It should be noted that, as shown in the figure, Figure 1 and Figure 2 As for the placement position of the large-aperture beam wavefront detection device shown in the figure, the left and right directions in the figure are the directions of the optical axes of the beams.

[0042] In a specific embodiment of the present invention, the beam deviation system 1 includes a transparent light-guiding medium 11 and a mounting base 12. Figure 1 As shown, the transparent light-guiding medium 11 is used to adjust the transmission path of the light beam, and the transparent light-guiding medium 11 is arranged on the light-incoming side of the lens group 21 at the light beam receiving end. The mounting seat 12 is used to support the transparent light-guiding medium 11, and the transparent light-guiding medium 11 is rotatably connected to the mounting seat 12, for example, by a hinged connection via a rotating shaft. Figure 2 As shown, by rotating the transparent light-guiding medium 11 at a certain angle, according to the principle of light refraction, the transmission path of the light beam will be offset after passing through the transparent light-guiding medium 11, and will be translated up and down in a direction perpendicular to the optical axis, so that the light spot information missed in the array splicing gap and the light spot information at the array splicing can be moved, and the seamless splicing of the light spot and the integrity of the wavefront data can be achieved through post-data processing, thereby eliminating splicing omissions. It should be noted that, as shown in FIG. Figure 1 and Figure 2 For the placement of the large-aperture beam wavefront detection device shown in the figure, the up and down directions in the figure are the upper and lower directions.

[0043] Furthermore, in the embodiment of the utility model, the beam deflection system 1 further comprises a driving device, which is used to drive the transparent light-guiding medium 11 to rotate so as to adjust the tilt angle of the transparent light-guiding medium 11. Specifically, Figure 2As shown, the mounting seat body 12 includes a base 121 and a support frame 122 arranged on the base 121, and the transparent light-guiding medium 11 is rotatably connected to the support frame 122 through a rotating shaft. The driving device includes a connected driving member and a transmission mechanism, and the transmission mechanism is connected to the rotating shaft. Specifically, the driving member can be a motor, and the transmission mechanism can adopt gear transmission, for example, including a meshing driving wheel and a driven wheel, the driving wheel is installed on the output shaft of the motor, and the driven wheel is installed on the rotating shaft. Thus, under the drive of the motor, the rotating shaft is driven to rotate, and then the transparent light-guiding medium 11 is driven to rotate a certain angle to change the transmission path of the light beam. Of course, in other embodiments, the transmission mechanism includes but is not limited to gear transmission, and can also be belt transmission, chain transmission, etc.; the motor can also be directly connected to the rotating shaft through a coupling. In addition, the driving member includes but is not limited to a motor, and can also be a motor, etc. With such a configuration, the transparent light-guiding medium 11 can be rotated to different angle positions through the driving device, thereby realizing the controllable adjustment of the light beam translation to meet the detection requirements of the wavefront data.

[0044] As an optional embodiment of the utility model, the large-aperture light beam wavefront detection device also includes a control device, which is communicatively connected to each detector 41 and the drive device, for example, it can be electrically connected. The control device is used to perform data analysis on the collected wavefront data, and control the drive device to adjust the tilt angle of the transparent light-guiding medium 11 based on the data analysis requirements. In other words, the control device is capable of performing data processing and analysis on the wavefront data collected by each detector 41. At the same time, the control device can also control the drive device to rotate the transparent light-guiding medium 11 to different tilt angle positions, so as to offset the light beam according to the wavefront data analysis requirements and move it to the receivable area, thereby realizing synchronous control of the detector array 4 and the light beam offset system 1, and cooperating with the subsequent data processing to obtain complete wavefront information and realize complete wavefront detection.

[0045] In a specific embodiment of the present invention, Figure 1 As shown in FIG. 1 , the cross-sectional area of ​​the transparent light-guiding medium 11 is larger than the array surface area of ​​the lens group 21 at the light beam receiving end, that is, the light-passing surface area of ​​the transparent light-guiding medium 11 is larger than the array surface area of ​​the lens group 21 at the light beam receiving end. With such an arrangement, the transparent light-guiding medium 11 can ensure the reliable transmission of the light beam during the rotation process, and will not lose the light beam information when entering the lens array at the receiving end behind, thereby ensuring the accuracy of wavefront detection. It should be noted that, with the above arrangement, the light beam can be transmitted reliably and the light beam can be transmitted to the lens array at the receiving end behind. Figure 1 For the placement of the large-aperture light beam wavefront detection device shown in the figure, the cross section obtained by the intersection of the plane perpendicular to the optical axis direction and the paper surface and the transparent light-guiding medium 11 is the cross section referred to.

[0046] In an optional embodiment of the utility model, the surface of the transparent light-guiding medium 11 is coated with an anti-reflection film. Such a setting can reduce the reflection loss on the surface of the medium and improve the transmission efficiency, thereby improving the light transmission energy and imaging quality of the transparent light-guiding medium 11, which is beneficial to subsequent calculations and wavefront analysis. It can be understood that the anti-reflection film can realize the anti-reflection function of the light within the wavelength range required for detection to meet the actual detection needs.

[0047] As an optional embodiment of the utility model, the material of the transparent light-guiding medium 11 is glass or quartz. Glass and quartz have good light transmittance, so that light can propagate well in them and can well maintain the transmission direction of light. Among them, the light transmittance of glass is better than that of quartz. In situations where high light transmittance and good optical properties are required, glass is usually a better choice. In addition, the surface of glass is usually smooth, which helps to reduce light scattering and increase transparency. With such a setting, the light beam can pass without changing the wavefront, and only the light beam can be translated.

[0048] In addition, the cross-sectional shape of the transparent light-guiding medium 11 is wedge-shaped, rhombus-shaped, circular or rectangular. Such a configuration can achieve the offset of the light beam, ensure that the light beam information is effectively and reliably received and transmitted, thereby obtaining complete wavefront information. It is understandable that the material and shape of the transparent light-guiding medium 11 can be adaptively adjusted according to actual design requirements.

[0049] In a specific embodiment of the present invention, the beam receiving end lens group 21 is arranged in a circular, square or hexagonal array. Figure 3 As shown, each receiving end lens 211 is circular, and multiple circular receiving end lenses 211 are distributed in an array, thereby providing a relatively uniform light beam receiving area, helping to reduce the loss of light energy and improve the light receiving efficiency of the system. Figure 4 As shown, each receiving end lens 211 is square, and multiple square receiving end lenses 211 are arranged in an array. Compared with a circular array, the square array is arranged more tightly, which can reduce the gap between two adjacent circular lenses and reduce the omission of light beam information. Figure 5 As shown, each receiving end lens 211 is in a regular hexagon, and a plurality of regular hexagonal receiving end lenses 211 are distributed in an array, so that the lenses can be arranged more closely, thereby improving the density and efficiency of light beam reception.

[0050] Such a configuration, by using a closely arranged circular, square or hexagonal lens array, can ensure that a large-aperture light spot is received as completely as possible, and the diameter of the light beam can be reduced proportionally according to the aperture of the received light beam and the aperture of the rear detection, while maintaining the uniformity and quality of the light beam.

[0051] As an optional embodiment of the utility model, the microlens array 3 is arranged in a square or hexagonal array. Specifically, the square arrangement is simple and regular, which is conducive to the design and manufacture of the optical system, and can provide uniform field of view coverage, so that each microlens 31 can effectively receive and transmit light. Compared with the square array arrangement, the hexagonal array arrangement can arrange the microlenses 31 more closely, thereby improving the density and efficiency of light reception. In addition, in the hexagonal array arrangement, each microlens 31 is adjacent to the six microlenses 31 around it, which is conducive to reducing the overlap between the light spots and improving the imaging quality. In addition, the aperture of each microlens 31 ranges from 32 microns to 1500 microns. Thus, it can adapt to different application scenarios. Microlenses 31 with smaller apertures such as 32 microns can be used for application scenarios requiring high resolution and high integration, while microlenses 31 with larger apertures such as 1500 microns are suitable for application scenarios requiring a larger field of view or a larger luminous flux. It should be noted that, in practical applications, the arrangement of the microlens array 3 and the aperture size of the microlens 31 need to be determined based on comprehensive consideration of factors such as specific application requirements, system performance requirements, and manufacturing costs.

[0052] In an optional embodiment of the utility model, the focal length range of the microlens 31 is 0.8 mm to 50 mm. Such a setting can be applied to a variety of different application scenarios, not only for short-focus situations, such as 0.8 mm to several millimeters, but also for long-focus situations, such as tens of millimeters to 50 mm. It should be noted that, in general, the focal length of each microlens 31 remains consistent. It is understandable that the focal length selection of the microlens 31 should be comprehensively considered based on specific application requirements, system performance requirements, and manufacturing costs to ensure that the performance of the entire optical system is optimized.

[0053] In practical applications, each sub-beam will form a light spot on the CCD detector after passing through the microlens 31. In addition, a holographic lens array can be added to the optical path of the wavefront detection device to work together with the microlens array 3 to form special shapes representing the light passing through each sub-aperture on different focal planes, thereby expanding the dynamic range and improving the accuracy of wavefront detection.

[0054] In addition, in the detector array 4, each CCD detector can capture the spot pattern generated by each microlens 31, and each pixel on the CCD corresponds to an area on the microlens array 3, so that the spot position of each microlens 31 can be recorded, so that the device can adapt to different sizes of beam apertures while maintaining high-resolution data acquisition. Furthermore, a coherent modulation imaging (CMI) technology module can be added to work with the CCD detector array to measure the wavefront of a large-aperture laser beam online, so that the intensity and phase of the beam far field and near field can be measured simultaneously, providing more comprehensive wavefront information and improving the overall performance of the wavefront detection system.

[0055] In summary, the embodiment of the utility model provides a new large-aperture light beam wavefront detection device based on the compound eye bionic principle, including a beam offset system 1, a beam reduction system 2, a microlens array 3, a detector array 4, a control device, etc. During assembly, each unit is arranged according to a predetermined two-dimensional plane array to cover the entire large-aperture light beam. During operation, after adjusting the position of the light beam, the large-aperture light beam passes through the beam offset system 1 and is then received by the CCD detector of the wavefront detection unit 5 array. Since the lens array has missing information at the intersection of the lenses, at this time, by adjusting the inclination angle of the transparent light-guiding medium 11, the light spot displacement of the large-aperture light beam projected on the light receiving surface of the detector 41 can be controlled, so that the light spot data of the splicing gap of the micro wavefront detection unit 5 array is not missed. At the same time, based on the controllable light spot displacement, the light spot at the array splicing can be moved to the receivable area, and the seamless splicing of the light spot and the integrity of the wavefront data can be achieved through post-data processing, thereby eliminating splicing omissions.

[0056] In addition, in order to improve the accuracy and adaptability of wavefront detection, the device also has a beam quality evaluation unit, a cloud data processing platform, and a user-customized interface. The beam quality evaluation unit uses advanced beam quality evaluation algorithms, such as M 2 The factor calculation analyzes the wavefront data, evaluates the beam quality, and provides optimization suggestions. The cloud data processing platform uploads the wavefront data to the cloud server through the wireless communication module for big data analysis and storage. Users can remotely access the wavefront data and analysis results. The user customization interface allows users to customize the wavefront detection parameters such as beam size, detection frequency and data processing flow through the software interface to adapt to specific application scenarios.

[0057] With such an arrangement, the wavefront detection device achieves the purpose of compact and stable device volume and high-resolution wavefront data acquisition, and has extremely high technical advantages and huge economic potential.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A large-aperture beam wavefront detection device, characterized in that: include: A beam reduction system (2) for reducing the diameter of a light beam, the beam reduction system (2) comprising a light beam receiving end lens group (21) and a light beam emitting end lens group (22), the light beam receiving end lens group (21) for receiving a light beam emitted by a light source (6), the light beam receiving end lens group (21) comprising a plurality of receiving end lenses (211) arranged in an array so as to divide the light beam into a plurality of sub-beams, the light beam emitting end lens group (22) being arranged on a light emitting side of the light beam receiving end lens group (21), the light beam emitting end lens group (22) comprising a plurality of emitting end lenses (221) arranged in an array, the emitting end lenses (221) being arranged in a one-to-one correspondence with the receiving end lenses (211); A microlens array (3) for receiving each of the sub-beams after being beam-contracted, the microlens array (3) being arranged on the light-emitting side of the lens group (22) at the light-emitting end, the microlens array (3) comprising a plurality of microlenses (31) arranged in an array, the microlenses (31) being arranged in a one-to-one correspondence with the emission-end lenses (221); A detector array (4) is used to receive each of the sub-beams focused by the microlens array (3) to collect wavefront data. The detector array (4) is arranged on the light-emitting side of the microlens array (3). The detector array (4) comprises a plurality of detectors (41) arranged in an array. The detectors (41) are arranged in a one-to-one correspondence with the microlenses (31).

2. The large-aperture beam wavefront detection device according to claim 1, characterized in that: The light beam receiving end lens (211), the light beam emitting end lens (221), the microlens (31) and the detector (41) correspond to each other to form a wavefront detection unit (5), and a plurality of the wavefront detection units (5) are arranged in a compound eye bionic array. The large-aperture light beam wavefront detection device further comprises: The beam deflection system (1) is used to adjust the transmission path of the beam so that the beam is translated in a direction perpendicular to the optical axis. The beam deflection system (1) is arranged on the light incident side of the lens group (21) at the beam receiving end.

3. The large-aperture beam wavefront detection device according to claim 2, characterized in that: The beam deflection system (1) comprises: A transparent light-guiding medium (11) is used to adjust the transmission path of the light beam, and the transparent light-guiding medium (11) is arranged on the light-entering side of the lens group (21) at the light beam receiving end; The mounting seat body (12) is used to support the transparent light-guiding medium (11); the transparent light-guiding medium (11) is rotatably connected to the mounting seat body (12).

4. The large-aperture light beam wavefront detection device according to claim 3, characterized in that: The beam deviation system (1) further comprises: A driving device is used to drive the transparent light-guiding medium (11) to rotate so as to adjust the tilt angle of the transparent light-guiding medium (11).

5. The large-aperture light beam wavefront detection device according to claim 4, characterized in that: Also includes: A control device is communicatively connected with each of the detectors (41) and the drive device, and is used to perform data analysis on the collected wavefront data and control the drive device based on data analysis requirements to adjust the tilt angle of the transparent light-guiding medium (11).

6. The large-aperture light beam wavefront detection device according to claim 3, characterized in that: The cross-sectional area of ​​the transparent light-guiding medium (11) is larger than the array surface area of ​​the light beam receiving end lens group (21).

7. The large-aperture beam wavefront detection device according to claim 3, characterized in that: The surface of the transparent light-guiding medium (11) is coated with an anti-reflection film.

8. The large-aperture beam wavefront detection device according to claim 3, characterized in that: The material of the transparent light-guiding medium (11) is glass or quartz, and / or the cross-sectional shape of the transparent light-guiding medium (11) is wedge-shaped, rhombus-shaped, circular or rectangular.

9. The large-aperture light beam wavefront detection device according to claim 1, characterized in that: The light beam receiving end lens group (21) is arranged in a circular, square or hexagonal array.

10. The large-aperture light beam wavefront detection device according to claim 1, characterized in that: The microlens array (3) is arranged in a square or hexagonal array.

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