Polysilicon polishing equipment

Abstract

The utility model provides a polysilicon grinding device, which belongs to the technical field of polysilicon processing, and comprises: a functional component, wherein the functional component comprises a movable base, a water storage tank is installed on the surface of the movable base, a mounting frame is installed on the top of the movable base, a folding plate is installed on the surface of the mounting frame, and a grinding hole frame is arranged on the inner side of the folding plate. In this scheme, a first movable block on the surface of a first electric guide rail moves, a second movable block on the surface of a second electric guide rail moves to drive a second electric telescopic rod to move, and the extended end of the second electric telescopic rod moves to drive the mounting plate and a driving motor to move. At this time, the driving motor starts and drives the grinding head to rotate, thereby grinding the polysilicon. At the same time, the booster water pump sucks out the water resources inside the water storage tank and delivers it to the water supply valve through a water pipe. At this time, the water supply valve sprays the polysilicon through a nozzle, thereby absorbing dust.

Description

Technical Field

[0001] The utility model belongs to the technical field of polysilicon processing, and in particular relates to polysilicon grinding equipment. Background Art

[0002] Polycrystalline silicon can be used as the raw material for pulling single crystal silicon. The difference between polycrystalline silicon and single crystal silicon is mainly reflected in physical properties. For example, the anisotropy of mechanical properties, optical properties and thermal properties is far less obvious than that of single crystal silicon; in terms of electrical properties, the conductivity of polycrystalline silicon crystals is also far less significant than that of single crystal silicon, and even has almost no conductivity. In terms of chemical activity, the difference between the two is very small. Polycrystalline silicon and single crystal silicon can be distinguished from each other in appearance, but the real identification must be determined by analyzing and measuring the crystal plane direction, conductivity type and resistivity of the crystal. In the polycrystalline silicon processing industry, the surface of the silicon material is usually polished.

[0003] After searching the existing public patent number: CN205915127U, the public patent name is: a polysilicon grinding device, including a clamping device for clamping polysilicon and a grinding device for grinding polysilicon, the clamping device includes a clamping part for clamping both sides of the polysilicon and an abutting part against the back of the polysilicon, the grinding device includes a grinding head and a driving device for driving the grinding head to do forward and backward and left and right feeding movements, and the grinding head and the abutting part are located on the opposite sides of the polysilicon. The polysilicon is clamped by a clamping device, and the driving device is driven by a motor to drive the grinding head to move forward and backward and left and right to grind the surface of the polysilicon, which reduces the labor intensity of the workers and increases the grinding efficiency. However, the above scheme is not convenient for dust reduction when grinding polysilicon, which causes the dust generated by grinding to be raised, which is easy to cause harm to the workers. Utility Model Content

[0004] The utility model aims to provide a polysilicon polishing device, aiming to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A polysilicon polishing device, comprising:

[0007] A functional component, the functional component comprising a mobile base, a water storage tank is installed on the surface of the mobile base, a mounting frame is installed on the top of the mobile base, a folding plate is installed on the surface of the mounting frame, a polishing hole frame is arranged on the inner side of the folding plate, a moving mechanism for moving the polishing hole frame is installed on the surface of the folding plate, a control panel is installed on the top of the mobile base, a booster water pump is installed on the surface of the mobile base, and the water inlet end of the booster water pump extends to the inner side of the water storage tank, a water pipe is installed on the surface of the water outlet end of the booster water pump, a drainage bucket is installed on the bottom of the folding plate, and the drainage bucket is connected to the water storage tank; and

[0008] A grinding assembly, the grinding assembly includes a support frame installed on the top of a movable base, a first electric guide rail is installed on the top of the support frame, a first moving block is slidably connected to the surface of the first electric guide rail, a second electric guide rail is installed on the surface of the first moving block, a second moving block is slidably connected to the surface of the second electric guide rail, a second electric telescopic rod is installed on the surface of the second moving block, a mounting plate is fixedly connected to the surface of the extended end of the second electric telescopic rod, a driving motor is installed on the bottom of the mounting plate, a grinding head is fixedly connected to the surface of the output shaft of the driving motor, a water supply valve is installed on the surface of the mounting plate, and a water pipe is connected to the water supply valve, and a nozzle is installed on the surface of the water supply valve.

[0009] As a preferred solution of the utility model, a water inlet valve is installed on the surface of the water storage tank, and a water level observation plate is installed on the surface of the water storage tank.

[0010] As a preferred solution of the utility model, a drain valve is installed on the surface of the water storage tank, an overflow pipe is installed on the surface of the water storage tank, and the overflow pipe is connected to the drain valve.

[0011] As a preferred solution of the utility model, two filter plates are slidably connected to the surface of the drainage bucket, and pull plates are installed on the surfaces of the two filter plates.

[0012] As a preferred solution of the utility model, the moving mechanism includes a mounting block mounted on the top of the mounting frame, a first connecting block is rotatably connected to the surface of the mounting block, and the first connecting block is fixedly connected to the grinding hole frame; and

[0013] A first electric telescopic rod is installed at the bottom of the mounting frame, and the extended end of the first electric telescopic rod extends above the mounting frame. A second connecting block is installed on the surface of the extended end of the first electric telescopic rod, and the first connecting block is rotatably connected to the surface of the second connecting block.

[0014] As a preferred solution of the utility model, the control panel is electrically connected to the booster water pump, the first electric telescopic rod, the first electric guide rail, the second electric guide rail, the second electric telescopic rod and the drive motor respectively.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] In this solution, the first moving block on the surface of the first electric guide rail moves, and the second moving block on the surface of the second electric guide rail moves to drive the second electric telescopic rod to move. The extended end of the second electric telescopic rod moves to drive the mounting plate and the drive motor to move. At this time, the drive motor starts and drives the grinding head to rotate, thereby grinding the polysilicon. At the same time, the booster water pump sucks out the water resources inside the water tank and delivers it to the water supply valve through the water pipe. At this time, the water supply valve sprays the polysilicon through the nozzle, thereby absorbing dust. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0018] In the attached picture:

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 It is a first-view schematic diagram of the functional components in the structure of the utility model;

[0021] Figure 3 A cross-sectional view of a functional component in the structure of the utility model from a second perspective;

[0022] Figure 4 It is a schematic diagram of the grinding component in the structure of the utility model.

[0023] In the figure: 1. Functional components; 101. Mobile base; 102. Water storage tank; 103. Mounting frame; 104. Folding plate; 105. Polishing hole frame; 106. Control panel; 107. Booster pump; 108. Water pipe; 109. Water inlet valve; 110. Water level observation plate; 111. Drain valve; 112. Overflow pipe; 113. Drain bucket; 114. Filter plate; 115. Pull plate; 116. Mounting block ; 117, first connecting block; 118, first electric telescopic rod; 119, second connecting block; 2, grinding assembly; 201, support frame; 202, first electric guide rail; 203, first moving block; 204, second electric guide rail; 205, second moving block; 206, second electric telescopic rod; 207, mounting plate; 208, drive motor; 209, grinding head; 210, water supply valve; 211, nozzle. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Example

[0026] See also Figure 1-4 , the technical solution provided by this embodiment is as follows:

[0027] A polysilicon polishing device, comprising: a functional component 1, the functional component 1 comprises a mobile base 101, a water storage tank 102 is installed on the surface of the mobile base 101, a mounting frame 103 is installed on the top of the mobile base 101, a folding plate 104 is installed on the surface of the mounting frame 103, a polishing hole frame 105 is arranged on the inner side of the folding plate 104, a moving mechanism for moving the polishing hole frame 105 is installed on the surface of the folding plate 104, a control panel 106 is installed on the top of the mobile base 101, a booster water pump 107 is installed on the surface of the mobile base 101, and the booster water pump 107 is installed on the surface of the mobile base 101. The water inlet end of the booster pump 107 extends to the inner side of the water storage tank 102, the surface of the water outlet end of the booster pump 107 is installed with a water pipe 108, the bottom of the folding plate 104 is installed with a drainage bucket 113, and the drainage bucket 113 is connected to the water storage tank 102, and the grinding assembly 2, the grinding assembly 2 includes a support frame 201 installed on the top of the mobile base 101, the top of the support frame 201 is installed with a first electric guide rail 202, the surface of the first electric guide rail 202 is slidably connected with a first moving block 203, the surface of the first moving block 203 is installed with a second electric guide rail 204, the second electric guide rail 20 The surface of the second moving block 205 is slidably connected to the second moving block 205, the surface of the second moving block 205 is installed with a second electric telescopic rod 206, the surface of the extended end of the second electric telescopic rod 206 is fixedly connected with a mounting plate 207, the bottom of the mounting plate 207 is installed with a driving motor 208, the surface of the output shaft of the driving motor 208 is fixedly connected with a grinding head 209, the surface of the mounting plate 207 is installed with a water supply valve 210, and the water pipe 108 is connected to the water supply valve 210, and the surface of the water supply valve 210 is installed with a nozzle 211, which is moved by the first moving block 203 on the surface of the first electric guide rail 202. The second moving block 205 on the surface of the second electric guide rail 204 moves, driving the second electric telescopic rod 206 to move. The extended end of the second electric telescopic rod 206 moves, driving the mounting plate 207 and the driving motor 208 to move. At this time, the driving motor 208 starts and drives the grinding head 209 to rotate, so as to grind the polysilicon. At the same time, the booster pump 107 sucks out the water resources inside the water tank 102 and delivers it to the water supply valve 210 through the water pipe 108. At this time, the water supply valve 210 sprays the polysilicon through the nozzle 211, so as to absorb the dust.

[0028] Specifically, a water inlet valve 109 is installed on the surface of the water storage tank 102 , and a water level observation plate 110 is installed on the surface of the water storage tank 102 .

[0029] In a specific embodiment of the present utility model, the water inlet valve 109 is provided to facilitate water replenishment inside the water tank 102, and the water level height of the water tank 102 can be observed through the water level observation plate 110, thereby facilitating timely water replenishment by the staff.

[0030] Specifically, a drain valve 111 is installed on the surface of the water storage tank 102 , an overflow pipe 112 is installed on the surface of the water storage tank 102 , and the overflow pipe 112 is connected to the drain valve 111 .

[0031] In a specific embodiment of the present invention, the water in the water storage tank 102 can be easily discharged through the setting of the drain valve 111, and the water overflowing from the water storage tank 102 can be discharged through the setting of the overflow pipe 112.

[0032] Specifically, two filter plates 114 are slidably connected to the surface of the drainage bucket 113 , and pull plates 115 are installed on the surfaces of the two filter plates 114 .

[0033] In a specific embodiment of the utility model, by setting the filter plate 114, the liquid passing through the drainage bucket 113 can be filtered, thereby reducing the probability of dust clogging the booster water pump 107. By setting the pull plate 115, the filter plate 114 can be easily moved.

[0034] Specifically, the moving mechanism includes a mounting block 116 installed on the top of the mounting frame 103, the surface of the mounting block 116 is rotatably connected to the first connecting block 117, and the first connecting block 117 is fixedly connected to the grinding hole frame 105, and a first electric telescopic rod 118 is installed on the bottom of the mounting frame 103, and the extended end of the first electric telescopic rod 118 extends to the top of the mounting frame 103, the surface of the extended end of the first electric telescopic rod 118 is installed with a second connecting block 119, and the first connecting block 117 is rotatably connected to the surface of the second connecting block 119.

[0035] In a specific embodiment of the utility model, when the grinding hole frame 105 needs to be moved, the first electric telescopic rod 118 is started, the extended end of the first electric telescopic rod 118 moves to drive the second connecting block 119 to move, and the second connecting block 119 drives the first connecting block 117 to adjust the angle on the surface of the mounting block 116, thereby driving the grinding hole frame 105 to adjust the angle.

[0036] Specifically, the control panel 106 is electrically connected to the booster pump 107 , the first electric telescopic rod 118 , the first electric guide rail 202 , the second electric guide rail 204 , the second electric telescopic rod 206 and the drive motor 208 , respectively.

[0037] In a specific embodiment of the present invention, the control panel 106 is provided to facilitate control of the booster pump 107 , the first electric telescopic rod 118 , the first electric guide rail 202 , the second electric guide rail 204 , the second electric telescopic rod 206 and the drive motor 208 .

[0038] Working principle: polysilicon is placed on the surface of the grinding hole frame 105, and then the first moving block 203 on the surface of the first electric guide rail 202 moves, and the second moving block 205 on the surface of the second electric guide rail 204 moves to drive the second electric telescopic rod 206 to move, so as to adjust the grinding position of the grinding head 209, and the extended end of the second electric telescopic rod 206 moves to drive the mounting plate 207 and the drive motor 208 to move, and at this time the drive motor 208 starts and drives the grinding head 209 to move. The polysilicon is rotated to grind the polysilicon. At the same time, the booster pump 107 sucks out the water resources inside the water tank 102 and delivers it to the water supply valve 210 through the water pipe 108. At this time, the water supply valve 210 sprays the polysilicon through the nozzle 211 to absorb the dust. The water will fall into the drainage bucket 113 through the grinding hole frame 105. At this time, the dust is filtered under the action of the filter plate 114. The water after filtration will re-enter the water tank 102 to achieve water circulation.

[0039] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A polysilicon polishing device, characterized in that: include: A functional component (1), the functional component (1) comprising a mobile base (101), a water storage tank (102) being mounted on the surface of the mobile base (101), a mounting frame (103) being mounted on the top of the mobile base (101), a folding plate (104) being mounted on the surface of the mounting frame (103), a polishing hole frame (105) being arranged on the inner side of the folding plate (104), and a tool for moving the polishing hole frame (105) being mounted on the surface of the folding plate (104). A mobile mechanism, wherein a control panel (106) is installed on the top of the mobile base (101), a booster water pump (107) is installed on the surface of the mobile base (101), and a water inlet end of the booster water pump (107) extends to the inner side of the water storage tank (102), a water delivery pipe (108) is installed on the surface of the water outlet end of the booster water pump (107), and a drainage bucket (113) is installed on the bottom of the folding plate (104), and the drainage bucket (113) is connected to the water storage tank (102); and A grinding assembly (2), the grinding assembly (2) comprising a support frame (201) mounted on the top of a movable base (101), a first electric guide rail (202) mounted on the top of the support frame (201), a first moving block (203) slidably connected to the surface of the first electric guide rail (202), a second electric guide rail (204) mounted on the surface of the first moving block (203), a second moving block (205) slidably connected to the surface of the second electric guide rail (204), and a second moving block (205) A second electric telescopic rod (206) is mounted on the surface; a mounting plate (207) is fixedly connected to the surface of the extended end of the second electric telescopic rod (206); a driving motor (208) is mounted on the bottom of the mounting plate (207); a grinding head (209) is fixedly connected to the surface of the output shaft of the driving motor (208); a water supply valve (210) is mounted on the surface of the mounting plate (207); a water pipe (108) is connected to the water supply valve (210); and a nozzle (211) is mounted on the surface of the water supply valve (210).

2. A polysilicon polishing device according to claim 1, characterized in that: A water inlet valve (109) is installed on the surface of the water storage tank (102), and a water level observation plate (110) is installed on the surface of the water storage tank (102).

3. A polysilicon polishing device according to claim 2, characterized in that: A drainage valve (111) is installed on the surface of the water storage tank (102), and an overflow pipe (112) is installed on the surface of the water storage tank (102), and the overflow pipe (112) is connected to the drainage valve (111).

4. The polysilicon polishing equipment according to claim 3, characterized in that: Two filter plates (114) are slidably connected to the surface of the drainage bucket (113), and pull plates (115) are installed on the surfaces of the two filter plates (114).

5. The polysilicon polishing equipment according to claim 4, characterized in that: The moving mechanism comprises a mounting block (116) mounted on the top of the mounting frame (103), a surface of the mounting block (116) being rotatably connected to a first connecting block (117), and the first connecting block (117) being fixedly connected to the grinding hole frame (105); and A first electric telescopic rod (118) is installed at the bottom of the mounting frame (103), and the extended end of the first electric telescopic rod (118) extends above the mounting frame (103); a second connecting block (119) is installed on the surface of the extended end of the first electric telescopic rod (118), and the first connecting block (117) is rotatably connected to the surface of the second connecting block (119).

6. The polysilicon polishing equipment according to claim 5, characterized in that: The control panel (106) is electrically connected to the booster water pump (107), the first electric telescopic rod (118), the first electric guide rail (202), the second electric guide rail (204), the second electric telescopic rod (206) and the drive motor (208) respectively.

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